Semiconductor device press head machining fixing tool

Abstract

The utility model discloses a kind of semiconductor equipment press head processing fixed tooling. Including base, press head head part fixed mechanism, press head tail part fixed mechanism;The base is provided with press head head part fixed mechanism, press head tail part fixed mechanism;The press head head part fixed mechanism includes head part fixed groove, head part extrusion fixed part, head part fixed groove is set on base, head part extrusion fixed part is set in head part fixed groove middle part, the gap between head part extrusion fixed part and the inner wall of both ends of head part fixed groove forms symmetrical head part fixed station, and both ends of head part extrusion fixed part can move towards corresponding head part fixed station;The press head tail part fixed mechanism includes tail part fixed groove, tail part extrusion fixed part, tail part fixed groove is set on base, tail part extrusion fixed part is set in tail part fixed groove middle part, the gap between tail part extrusion fixed part and the inner wall of both ends of tail part fixed groove forms symmetrical tail part fixed station, and both ends of tail part extrusion fixed part can move towards corresponding tail part fixed station;By press head head part fixed mechanism, press head tail part fixed mechanism, press head two parts are fixed on same fixed tooling. The utility model ensures that unified processing flatness is guaranteed, and production cost is reduced.

Description

Technical fields:

[0001] This utility model belongs to the field of semiconductor equipment indenter processing technology, and specifically relates to a fixing fixture for semiconductor equipment indenter processing. Background technology:

[0002] The semiconductor equipment indenter consists of two symmetrically structured parts, each composed of two combinable components. During machining of the upper surface of these parts, each component needs to be fixed to a corresponding fixture. Slight errors in the fixtures result in differences in flatness between the machined parts, affecting product quality. Furthermore, multiple fixtures increase production costs.

[0003] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility model content:

[0004] The purpose of this utility model is to provide a fixing fixture for processing semiconductor equipment pressure heads, thereby overcoming the defects in the prior art.

[0005] To achieve the above objectives, this utility model provides a fixing fixture for semiconductor equipment pressing head processing, including a base, a pressing head fixing mechanism, and a pressing head tail fixing mechanism. The base is provided with the pressing head fixing mechanism and the pressing head tail fixing mechanism. The pressing head fixing mechanism includes a head fixing groove and a head pressing fixing member. The head fixing groove is disposed on the base, and the head pressing fixing member is disposed in the middle of the head fixing groove. The gap between the head pressing fixing member and the inner walls at both ends of the head fixing groove forms a symmetrical head fixing position, and both ends of the head pressing fixing member can move towards the corresponding head fixing position. The pressing head tail fixing mechanism includes a tail fixing groove and a tail pressing fixing member. The tail fixing groove is disposed on the base, and the tail pressing fixing member is disposed in the middle of the tail fixing groove. The gap between the tail pressing fixing member and the inner walls at both ends of the tail fixing groove forms a symmetrical tail fixing position, and both ends of the tail pressing fixing member can move towards the corresponding tail fixing position. The pressing head and pressing head tail fixing mechanisms fix the two parts of the pressing head onto the same fixing fixture.

[0006] Preferably, in the technical solution, the pressure head fixing mechanism includes a head fixing groove, a head fixing block, a head extrusion adjusting block, and a head extrusion adjusting groove. The head fixing groove is a racetrack-shaped groove with triangular structures at both ends, which are adapted to the outer surface structure of the pressure head. A head extrusion adjusting groove is provided at the center of the head fixing groove, and a head extrusion adjusting block is provided inside the head extrusion adjusting groove. The head extrusion adjusting block is fixed in the head extrusion adjusting groove by screws. Head fixing blocks are symmetrically arranged on both sides of the head extrusion adjusting block. The two sides of the head extrusion adjusting block are wedge-shaped surfaces, and the inner surface structure of the head fixing block matches the wedge-shaped surface. The height of the head extrusion adjusting block is higher than that of the head fixing block. The gap between the head fixing block and the corresponding triangular structure forms a head fixing position. The head fixing block, the head extrusion adjusting block, and the head extrusion adjusting groove form a head extrusion fixing component. The height of the head extrusion adjusting block is adjusted by screws, the head extrusion adjusting block presses against the head fixing block, and the head fixing block moves along the head extrusion adjusting groove to fix the pressure head in the head fixing position.

[0007] Preferably, in the technical solution, the tail fixing mechanism of the press head includes a tail fixing groove, a tail fixing block, a tail extrusion adjusting block, and a tail extrusion adjusting groove. The tail fixing groove has a rectangular structure, and a tail extrusion adjusting groove is provided at the center of the tail fixing groove. A tail extrusion adjusting block is provided inside the tail extrusion adjusting groove. The tail extrusion adjusting block is fixed in the tail extrusion adjusting groove by screws. Tail fixing blocks are symmetrically arranged on both sides of the tail extrusion adjusting block. The two sides of the tail extrusion adjusting block are wedge-shaped surfaces. The inner side structure of the tail fixing block matches the wedge-shaped surface. The height of the tail extrusion adjusting block is higher than that of the tail fixing block. The gap between the tail fixing block and the inner wall of the corresponding tail fixing groove forms a tail fixing station. The tail fixing block, tail extrusion adjusting block, and tail extrusion adjusting groove form a tail extrusion fixing component. The height of the tail extrusion adjusting block is adjusted by screws. The tail extrusion adjusting block presses against the tail fixing block. The tail fixing block moves along the tail extrusion adjusting groove, fixing the tail of the press head in the tail fixing station.

[0008] Preferably, in the technical solution, positioning holes are provided at the four corners of the tail fixing groove, and the center of the positioning hole coincides with the corresponding corner. When the tail of the press head is fixed in the tail fixing position, the corner of the outer side of the tail of the press head coincides with the center of the positioning hole.

[0009] Compared with the prior art, the present invention has the following beneficial effects:

[0010] Using this patented fixture, two symmetrical pressure heads can be fixed simultaneously. The pressure head fixing mechanism fixes the pressure head, and the pressure head tail fixing mechanism fixes the pressure head tail. Since the upper surface of the part is machined on the same fixture, uniform machining flatness is ensured. It eliminates the need for a separate fixture for each machining section, reducing the number of fixtures and lowering production costs. Attached image description:

[0011] Figure 1 This is a schematic diagram of the fixture structure for fixing the pressure head of the semiconductor equipment according to this utility model;

[0012] Figure 2 This is a top view of the fixture for fixing the semiconductor equipment pressure head of this utility model;

[0013] Figure 3 This is a diagram showing the usage state of the semiconductor equipment pressure head processing fixture of this utility model. Detailed implementation method:

[0014] The specific embodiments of this utility model are described in detail below, but it should be understood that the protection scope of this utility model is not limited to the specific embodiments.

[0015] Unless otherwise expressly stated, throughout the specification and claims, the term "comprising" or its variations such as "including" or "comprises" shall be understood to include the stated elements or components without excluding other elements or other components.

[0016] like Figure 1-2 As shown, a semiconductor equipment pressure head processing fixture includes a base 1, a pressure head fixing mechanism 2, and a pressure head tail fixing mechanism 3; the base 1 is provided with the pressure head fixing mechanism 2 and the pressure head tail fixing mechanism 3, and the two parts of the pressure head are fixed on the same fixture through the pressure head fixing mechanism 2 and the pressure head tail fixing mechanism 3.

[0017] The pressure head fixing mechanism 2 includes a head fixing groove 20, a head fixing block 21, a head compression adjusting block 22, and a head compression adjusting groove 23. The head fixing groove 20 is a racetrack-shaped groove with triangular structures 24 at both ends, which are adapted to the outer surface structure of the pressure head 4. A head compression adjusting groove 23 is provided at the center of the head fixing groove 20, and a head compression adjusting block 22 is provided inside the head compression adjusting groove 23. The head compression adjusting block 22 is fixed in the head compression adjusting groove 23 by screws. Head fixing blocks 21 are symmetrically arranged on both sides of the head compression adjusting block 22. The two sides of the pressure adjusting block 22 are wedge-shaped surfaces, and the inner side structure of the head fixing block 21 matches the wedge-shaped surfaces. The height of the head pressing adjusting block 22 is higher than that of the head fixing block 21. The gap between the head fixing block 21 and the corresponding triangular structure 24 forms the head fixing station. The head fixing block 21, the head pressing adjusting block 22, and the head pressing adjusting groove 23 form the head pressing fixing component. The height of the head pressing adjusting block 22 is adjusted by screws. The head pressing adjusting block 22 presses the head fixing block 21. The head fixing block 21 moves along the head pressing adjusting groove 23, fixing the pressing head 4 in the head fixing station.

[0018] The pressure head tail fixing mechanism 3 includes a tail fixing groove 30, a tail fixing block 31, a tail compression adjusting block 32, and a tail compression adjusting groove 33. The tail fixing groove 30 has a rectangular structure, and positioning holes 34 are provided at the four corners of the tail fixing groove 30. The center of the positioning holes 34 coincides with the corresponding corner. A tail compression adjusting groove 33 is provided at the center of the tail fixing groove 30. A tail compression adjusting block 32 is provided in the tail compression adjusting groove 33 and is fixed in the tail compression adjusting groove 33 by screws. Tail fixing blocks 31 are symmetrically arranged on both sides of the tail compression adjusting block 32. The two sides of the tail compression adjusting block 32 are wedge-shaped surfaces. The inner side structure matches the wedge-shaped surface. The height of the tail extrusion adjustment block 32 is higher than that of the tail fixing block 31. The gap between the tail fixing block 31 and the inner wall of the corresponding tail fixing groove 30 forms the tail fixing station. The tail fixing block 31, the tail extrusion adjustment block 32, and the tail extrusion adjustment groove 33 form the tail extrusion fixing component. The height of the tail extrusion adjustment block 32 is adjusted by screws. The tail extrusion adjustment block 32 extrudes the tail fixing block 31. The tail fixing block 31 moves along the tail extrusion adjustment groove 33 to fix the tail of the press head 5 in the tail fixing station. When the tail of the press head 5 is fixed in the tail fixing station, the corner of the outer side of the tail of the press head 5 coincides with the center of the positioning hole 34.

[0019] When using, such as Figure 3 As shown, the symmetrical pressure head 4 is placed in its corresponding head fixing position. Rotating the screw depresses the head pressing adjustment block 22, which in turn presses against the head fixing block 21, thus fixing the pressure head 4 in its head fixing position. Similarly, the symmetrical pressure head tail 5 is placed in its corresponding tail fixing position. Rotating the screw depresses the tail pressing adjustment block 32, which in turn presses against the tail fixing block 31, thus fixing the pressure head tail 5 in its tail fixing position. This patented fixing fixture can simultaneously fix two symmetrically structured pressure heads. Because the upper surface of the part is processed on the same fixture, uniform processing flatness is ensured. It eliminates the need for a separate fixing fixture for each processing part, reducing the number of fixing fixtures and lowering production costs.

[0020] The foregoing description of specific exemplary embodiments of the present invention is for illustrative and explanatory purposes. These descriptions are not intended to limit the present invention to the precise forms disclosed, and it will be apparent that many changes and variations can be made in accordance with the foregoing teachings. The exemplary embodiments were chosen and described in order to explain the specific principles of the present invention and its practical application, thereby enabling those skilled in the art to implement and utilize various different exemplary embodiments of the present invention, as well as various different choices and variations. The scope of the present invention is intended to be defined by the claims and their equivalents.

Claims

1. A fixture for fixing the pressure head of a semiconductor device, characterized in that: The device includes a base, a head fixing mechanism, and a tail fixing mechanism. The head fixing mechanism and tail fixing mechanism are mounted on the base. The head fixing mechanism includes a head fixing groove and a head pressing fixing component. The head fixing groove is located on the base, and the head pressing fixing component is located in the middle of the head fixing groove. The gap between the head pressing fixing component and the inner walls at both ends of the head fixing groove forms symmetrical head fixing positions, and both ends of the head pressing fixing component can move towards their respective head fixing positions. The tail fixing mechanism includes a tail fixing groove and a tail pressing fixing component. The tail fixing groove is located on the base, and the tail pressing fixing component is located in the middle of the tail fixing groove. The gap between the tail pressing fixing component and the inner walls at both ends of the tail fixing groove forms symmetrical tail fixing positions, and both ends of the tail pressing fixing component can move towards their respective tail fixing positions. The head fixing mechanism and tail fixing mechanism fix the two parts of the press head onto the same fixture.

2. The semiconductor equipment pressure head processing fixture according to claim 1, characterized in that: The pressure head fixing mechanism includes a head fixing groove, a head fixing block, a head extrusion adjusting block, and a head extrusion adjusting groove. The head fixing groove is a racetrack-shaped groove with triangular structures at both ends, which are adapted to the outer surface structure of the pressure head. A head extrusion adjusting groove is set at the center of the head fixing groove, and a head extrusion adjusting block is set inside the head extrusion adjusting groove. The head extrusion adjusting block is fixed in the head extrusion adjusting groove by screws. Head fixing blocks are symmetrically arranged on both sides of the head extrusion adjusting block. The two sides of the head extrusion adjusting block are wedge-shaped surfaces, and the inner surface structure of the head fixing block matches the wedge-shaped surface. The height of the head extrusion adjusting block is higher than that of the head fixing block. The gap between the head fixing block and the corresponding triangular structure forms the head fixing station. The head fixing block, the head extrusion adjusting block, and the head extrusion adjusting groove form the head extrusion fixing component.

3. The semiconductor equipment pressure head processing fixture according to claim 1, characterized in that: The tail-end fixing mechanism of the pressure head includes a tail-end fixing groove, a tail-end fixing block, a tail-end extrusion adjusting block, and a tail-end extrusion adjusting groove. The tail-end fixing groove has a rectangular structure, and a tail-end extrusion adjusting groove is set at the center of the tail-end fixing groove. A tail-end extrusion adjusting block is set inside the tail-end extrusion adjusting groove. The tail-end extrusion adjusting block is fixed in the tail-end extrusion adjusting groove by screws. Tail-end fixing blocks are symmetrically arranged on both sides of the tail-end extrusion adjusting block. The two sides of the tail-end extrusion adjusting block are wedge-shaped surfaces. The inner side structure of the tail-end fixing block matches the wedge-shaped surface. The height of the tail-end extrusion adjusting block is higher than that of the tail-end fixing block. The gap between the tail-end fixing block and the inner wall of the corresponding tail-end fixing groove forms the tail-end fixing station. The tail-end fixing block, the tail-end extrusion adjusting block, and the tail-end extrusion adjusting groove form the tail-end extrusion fixing component.

4. The semiconductor equipment pressure head processing fixture according to claim 3, characterized in that: Positioning holes are provided at the four corners of the tail fixing groove, and the center of the positioning hole coincides with the corresponding corner.

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