Clean type sample injection cabinet for semiconductor ultra-pure analysis laboratory

Abstract

The utility model discloses a kind of clean sample introduction cabinet for semiconductor ultra-pure analysis laboratory, comprising: rack, its inside is formed with operating space;Air supply and exhaust fan, all cooperate and install in the rack, and with the operating space corresponding, the air supply can form the positive pressure environment in the operating space, the exhaust fan can form the negative pressure environment in the operating space;And filter, cooperate and install with air supply, for input clean gas to operating space to form positive pressure environment.When air supply forms positive pressure to operating space, then replace original gas by clean gas, reach the use requirement of clean workbench;When exhaust fan forms negative pressure to operating space, can effectively remove internal pollution gas, realize the function of fume hood. Therefore, the sample introduction cabinet has two functions of fume hood and clean workbench, and can meet different experimental needs.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, specifically relating to a clean sample cabinet for semiconductor ultrapure analysis laboratories. Background Technology

[0002] In the field of semiconductor chemical analysis, experiments often involve the use of various chemical reagents. Some of these materials (such as organic solvents and acidic gases) are highly volatile and may release harmful or odorous gases or particles, thereby contaminating the laboratory air and affecting the accuracy of the analytical results. To ensure experimental safety and maintain the cleanliness of the laboratory environment, such operations must be performed in a fume hood equipped with an exhaust system to promptly remove volatile pollutants.

[0003] However, traditional fume hoods mainly focus on basic ventilation functions, and their structural design and working environment often cannot meet the special requirements of semiconductor analysis experiments for a high-cleanliness operating platform, which to some extent limits experimental efficiency.

[0004] Therefore, in order to address the above-mentioned technical problems, it is necessary to provide a clean sample cabinet for semiconductor ultrapure analysis laboratories. Utility Model Content

[0005] The purpose of this invention is to provide a clean sample loading cabinet for semiconductor ultrapure analysis laboratories, which can solve the problem that the above-mentioned fume hoods have limited functionality and cannot meet the requirements of high-cleanliness workbenches in laboratories.

[0006] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows: A cleanroom sample introduction cabinet for semiconductor ultrapure analysis laboratories includes: The frame has an internal operating space; Both the supply fan and the exhaust fan are mounted on the frame and correspond to the operating space. The supply fan creates a positive pressure environment within the operating space, and the exhaust fan creates a negative pressure environment within the operating space; and... A filter, installed in conjunction with the blower, is used to introduce clean gas into the operating space to create the positive pressure environment.

[0007] In one or more embodiments of this utility model, the clean sample loading cabinet further includes an air valve disposed in the operating space. Multiple air valves are provided and connected to an air gun, and the connecting pipe diameter between each air valve and the air gun is different.

[0008] In one or more embodiments of this utility model, the clean sample loading cabinet further includes a water valve disposed in the operating space. The water valve is provided in multiple ways and connected to a water gun. The connecting pipe diameter between each water valve and the water gun is different.

[0009] In one or more embodiments of this utility model, the clean sample loading cabinet further includes a switch door that is installed in conjunction with the operating space, and a sensor is installed at the switch door; The clean sample cabinet also includes a control center, which is electrically connected to the blower and the sensor respectively. The control center can obtain the degree of opening and closing of the door detected by the sensor and control the wind speed of the blower.

[0010] In one or more embodiments of this utility model, the degree of opening and closing of the switch door is directly proportional to the wind speed of the blower.

[0011] In one or more embodiments of this utility model, the frame is fitted with a differential pressure gauge for detecting the internal air pressure of the operating space.

[0012] In one or more embodiments of this utility model, a workbench is provided inside the frame, and the operating space is formed between the workbench and the top of the frame.

[0013] In one or more embodiments of this utility model, the frame and the workbench are made of corrosion-resistant material.

[0014] In one or more embodiments of this utility model, the frame is provided with an air inlet and an air outlet communicating with the operating space.

[0015] In one or more embodiments of this utility model, the frame is provided with a liquid inlet and a liquid outlet communicating with the operating space.

[0016] Compared with existing technologies, this novel cleanroom sample loading cabinet for semiconductor ultrapure analysis laboratories can create a positive or negative pressure environment within the operating space through the synergistic action of a blower, an exhaust fan, and a filter. When the blower creates positive pressure in the operating space, clean gas replaces the existing gas, meeting the requirements for a clean bench. When the exhaust fan creates negative pressure in the operating space, it effectively removes internal contaminated gas, fulfilling the function of a fume hood. Therefore, this sample loading cabinet combines the functions of a fume hood and a clean bench, meeting the diverse experimental needs of semiconductor ultrapure analysis laboratories. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a front view of a clean sample loading cabinet for semiconductor ultrapure analysis laboratory according to one embodiment of the present invention; Figure 2 This is a structural schematic diagram from another perspective of a clean sample loading cabinet for semiconductor ultrapure analysis laboratory, according to one embodiment of the present invention.

[0019] Explanation of key figure labels: 1. Frame; 2. Blower; 3. Door opening / closing. Detailed Implementation

[0020] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0021] Reference Figure 1 and Figure 2 In one embodiment of this utility model, a clean sample loading cabinet for semiconductor ultrapure analysis laboratory includes a frame 1, a blower 2, an exhaust fan, and a filter.

[0022] Reference Figure 1 and Figure 2 The frame 1 contains an operating space. Both the supply fan 2 and the exhaust fan are installed on the frame 1, corresponding to the operating space. The supply fan 2 creates a positive pressure environment within the operating space, while the exhaust fan creates a negative pressure environment. A filter is installed in conjunction with the supply fan 2 to introduce clean gas into the operating space to create a positive pressure environment.

[0023] This invention relates to a cleanroom sample loading cabinet for semiconductor ultrapure analysis laboratories. Through the coordinated action of a blower 2, an exhaust fan, and a filter, it can create a positive or negative pressure environment within the operating space. When the blower creates positive pressure, clean gas replaces the existing gas, meeting the requirements for a clean bench. When the exhaust fan 2 creates negative pressure, it effectively removes odorous and contaminating gases, fulfilling the function of a fume hood. Therefore, this sample loading cabinet combines the functions of a fume hood and a clean bench, meeting the diverse experimental needs of semiconductor ultrapure analysis laboratories.

[0024] When the airflow of the blower 2 is greater than that of the exhaust fan, a slightly positive pressure environment can be formed in the operating space; when the airflow of the blower 2 is less than that of the exhaust fan, a slightly negative pressure environment can be formed in the operating space to match more scenario requirements.

[0025] Reference Figure 1 In one embodiment, the clean sample loading cabinet also includes multiple air valves located within the operating space and connected to air guns. Each air valve has a different connecting pipe diameter to the air gun. Therefore, different air valves can be opened as needed to clean items within the operating space using either a large or small flow rate of gas.

[0026] Reference Figure 1 In one embodiment, the clean sample loading cabinet also includes multiple water valves located within the operating space and connected to water guns. Each water valve has a different connecting pipe diameter to the water gun. Therefore, different water valves can be opened as needed to clean items within the operating space using either a large or small flow rate of liquid.

[0027] Reference Figure 1 Furthermore, the cleanroom sample loading cabinet also includes a switch door 3 installed in conjunction with the operating space, and a sensor is installed at the switch door 3. Simultaneously, the cleanroom sample loading cabinet also includes a control center, which is electrically connected to both the blower 2 and the sensor. The control center can acquire the degree of opening and closing of the switch door 3 detected by the sensor and control the airflow speed of the blower 2.

[0028] In this embodiment, the opening degree of the switch door 3 is directly proportional to the wind speed of the blower 2. When the sample loading cabinet is used as a fume hood, the operating space is under negative pressure, and the blower 2 can remove odorous pollutants from the operating space, reducing their diffusion in the laboratory. When the switch door 3 is opened more fully, the sensor can detect the opening data, and then the control center can control the blower 2 to run at a higher wind speed to ensure that the odorous pollutants are effectively removed. The sensor can be a distance sensor, used to detect the distance to the switch door 3 to determine the degree of opening.

[0029] Reference Figure 1The frame 1 is equipped with a differential pressure gauge for detecting the internal air pressure of the operating space, which can be used to obtain the air pressure inside the operating space and provide feedback to the relevant operators.

[0030] Reference Figure 1 A workbench is installed inside the frame 1, and an operating space is formed between the workbench and the top of the frame 1. When the blower 2 creates positive pressure in the operating space, the original gas can be replaced by clean gas to meet the requirements for using the clean workbench.

[0031] Reference Figure 1 In one optional embodiment, the rack 1 and the workbench are made of corrosion-resistant material. Since semiconductor ultrapure analysis laboratories involve a variety of chemical reagents, corrosion-resistant materials effectively extend the overall lifespan of the sample loading cabinet.

[0032] Reference Figure 1 In one optional embodiment, the rack 1 is provided with an air inlet and an air outlet communicating with the operating space. For example, nitrogen gas can be introduced through the air inlet and discharged through the air outlet to meet the needs of different experimental environments. Therefore, providing an air inlet and an air outlet can further expand the functionality of the clean sample cabinet of this application to meet the different experimental needs of semiconductor ultrapure analysis laboratories.

[0033] Reference Figure 1 In one optional embodiment, the rack 1 is provided with an inlet and an outlet communicating with the operating space. For example, ultrapure water can be introduced through the inlet and discharged through the outlet. Therefore, providing an inlet and an outlet can further expand the functionality of the clean sample cabinet of this application to meet the different experimental needs of semiconductor ultrapure analysis laboratories.

[0034] It is understood that, in a specific embodiment, the above-mentioned air inlet, air outlet, liquid inlet and liquid outlet may be provided simultaneously to expand its functions, and this application does not impose specific restrictions on this.

[0035] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0036] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A cleanroom sample dispenser for semiconductor ultrapure analysis laboratories, characterized in that, include: The frame (1) has an operating space inside it; The blower (2) and the exhaust fan are both installed on the frame (1) and correspond to the operating space. The blower (2) can create a positive pressure environment in the operating space, and the exhaust fan can create a negative pressure environment in the operating space. as well as, A filter, installed in conjunction with the blower (2), is used to introduce clean gas into the operating space to create the positive pressure environment.

2. The cleanroom sample dispenser for semiconductor ultrapure analysis laboratories according to claim 1, characterized in that, The clean sample loading cabinet also includes multiple air valves installed in the operating space and connected to air guns, with each air valve having a different connecting pipe diameter to the air gun.

3. The cleanroom sample dispenser for semiconductor ultrapure analysis laboratories according to claim 1, characterized in that, The clean sample loading cabinet also includes water valves installed in the operating space. Multiple water valves are provided and connected to water guns. The connecting pipe diameter between each water valve and the water gun is different.

4. The cleanroom sample dispenser for semiconductor ultrapure analysis laboratories according to claim 1, characterized in that, The clean sample cabinet also includes a switch door (3) installed in conjunction with the operating space, and a sensor is installed at the switch door (3); The clean sample cabinet also includes a control center, which is electrically connected to the blower (2) and the sensor respectively. The control center can obtain the degree of opening and closing of the switch door (3) detected by the sensor and control the wind speed of the blower (2).

5. The cleanroom sample dispenser for semiconductor ultrapure analysis laboratories according to claim 4, characterized in that, The degree of opening and closing of the switch door (3) is directly proportional to the wind speed of the blower (2).

6. The cleanroom sample dispenser for semiconductor ultrapure analysis laboratories according to claim 1, characterized in that, The frame (1) is equipped with a differential pressure gauge for detecting the internal air pressure of the operating space.

7. The cleanroom sample dispenser for semiconductor ultrapure analysis laboratories according to claim 1, characterized in that, A workbench is provided inside the frame (1), and the operating space is formed between the workbench and the top of the frame (1).

8. The cleanroom sample dispenser for semiconductor ultrapure analysis laboratories according to claim 7, characterized in that, The frame (1) and the workbench are made of corrosion-resistant materials.

9. The cleanroom sample dispenser for semiconductor ultrapure analysis laboratories according to claim 1, characterized in that, The frame (1) is provided with an air inlet and an air outlet that are connected to the operating space.

10. The cleanroom sample dispenser for semiconductor ultrapure analysis laboratories according to claim 1, characterized in that, The frame (1) is provided with an inlet and an outlet that are connected to the operating space.

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