Probe station and fluorinert spray device therefor

Abstract

This utility model relates to a probe station and its fluorinated oil spraying device. The fluorinated oil spraying device includes a fluorinated oil storage tank, an ejector, and a switching valve. The ejector has a fluid inlet, an ejection port, and a fluid outlet. The ejection port communicates with the interior of the fluorinated oil storage tank. The fluid inlet is connected to a gas supply device, and the fluid outlet is connected to a nozzle. The ejector is used to inject the fluorinated oil from the storage tank into the gas supply device for mixing when the gas supply device supplies gas, and then discharges the mixed fluid from the fluid outlet. The nozzle sprays the fluid from the fluid outlet onto the wafer on the probe station. The switching valve is located on the fluid inlet pipeline. According to the technical solution of this utility model, the opening and closing of the switching valve can be controlled to achieve timed and quantitative addition of fluorinated oil according to the testing needs of the wafer. This avoids human contact during testing, reduces fluorinated oil loss, and thus reduces the amount of fluorinated oil used.

Description

Technical Field

[0001] This utility model relates to the field of fluorinated oil spraying technology on probe stations, and in particular to a probe station and its fluorinated oil spraying device. Background Technology

[0002] During ultra-high voltage (3kV and above) testing, the discharge points of the wafers on the probe station are prone to arcing when they come into contact with air. To avoid arcing during testing, the entire wafer on the probe station is currently immersed in fluorinated oil to shield the discharge points. This results in a large amount of fluorinated oil being used, so this problem needs to be addressed. Utility Model Content

[0003] In view of this, the present invention provides a probe station and its fluorinated oil spraying device, which mainly solves the technical problem in the prior art that the entire wafer is immersed in fluorinated oil in order to avoid arcing during the testing process, resulting in a large amount of fluorinated oil being used.

[0004] To achieve the above objectives, this utility model mainly provides the following technical solutions:

[0005] An embodiment of this utility model provides a fluorinated oil spraying device for a probe station, which includes: a fluorinated oil storage tank, an ejector, and a switching valve;

[0006] The ejector has a fluid inlet, an ejector port, and a fluid outlet. The ejector port is connected to the interior of the fluorinated oil storage tank. The fluid inlet is used to connect to the gas supply device. The fluid outlet is connected to a nozzle.

[0007] The ejector is used to inject the fluorinated oil in the fluorinated oil storage tank into the interior for mixing when the gas supply device supplies gas, and to export the mixed fluid from the fluid outlet.

[0008] The nozzle is used to spray the fluid from the fluid outlet onto the wafer on the probe station;

[0009] The switching valve is installed on the pipeline at the fluid inlet.

[0010] In some embodiments, the switching valve is a solenoid valve, and the fluorinated oil spraying device of the probe station further includes a controller, which is electrically connected to the solenoid valve.

[0011] In some embodiments, the fluorinated oil spraying device of the probe station also includes a control button connected to the controller.

[0012] In some embodiments, the fluorinated oil spraying device for the probe station further includes a one-way valve; the one-way valve is disposed on the pipeline of the ejector port to prevent fluid backflow in the pipeline of the ejector port.

[0013] In some embodiments, the fluid outlet is connected to the nozzle via a universal joint.

[0014] This utility model also provides a probe station, which may include the fluorinated oil spraying device for the probe station described in any one of the above-mentioned methods.

[0015] In some embodiments, the probe station further includes a pin holder with an optical positioning through-hole, through which the probe station optically positions the wafer.

[0016] The nozzle is opposite to one end of the optical positioning through-hole, and the other end of the optical positioning through-hole is used to be opposite to the wafer; wherein, the nozzle sprays the fluid from the fluid outlet onto the wafer through the optical positioning through-hole.

[0017] By employing the above technical solution, the probe station and its fluorinated oil spraying device of this utility model have at least the following beneficial effects:

[0018] 1. Compared with the existing technology of immersing the entire wafer in fluorinated oil, this utility model can control the opening and closing of the switch valve to achieve timed and quantitative addition of fluorinated oil according to the testing needs of the wafer. This can avoid human contact during the testing process, reduce the loss of fluorinated oil, and thus reduce the amount of fluorinated oil used.

[0019] 2. The optical positioning through-hole of this invention has a dual function. On the one hand, the probe station can use the optical positioning through-hole to optically position the wafer; on the other hand, the nozzle can use the optical positioning through-hole to spray fluorinated oil onto the wafer. The optical positioning through-hole serves two purposes, making the overall structure of the probe station more compact.

[0020] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of a fluorinated oil spraying device for a probe station provided in one embodiment of the present invention.

[0023] Reference numerals: 1. Fluorine oil storage tank; 2. Ejector; 3. Switch valve; 4. Check valve; 5. Nozzle; 6. Needle clamp; 7. Universal joint; 21. Fluid inlet; 22. Ejector port; 23. Fluid outlet; 61. Optical positioning through hole. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0026] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0027] like Figure 1 As shown in the figure, one embodiment of this utility model discloses a fluorinated oil spraying device for a probe station, which includes a fluorinated oil storage tank 1, an ejector 2, and a switching valve 3. The ejector 2 has a fluid inlet 21, an ejection port 22, and a fluid outlet 23. The ejection port 22 communicates with the interior of the fluorinated oil storage tank 1, the fluid inlet 21 is used to communicate with a gas supply device, and the fluid outlet 23 is connected to a nozzle 5. The ejector 2 is used to use the gas supplied by the gas supply device to eject the fluorinated oil in the fluorinated oil storage tank 1 into the interior for mixing, and then export the mixed fluid from the fluid outlet 23. The nozzle 5 is used to spray the fluid from the fluid outlet 23 onto the wafer on the probe station. The switching valve 3 is installed on the pipeline of the fluid inlet 21.

[0028] Compared to existing technologies that immerse the entire wafer in fluorinated oil, this invention can control the opening and closing of the switch valve 3 to add fluorinated oil in a timed and quantitative manner according to the testing needs of the wafer. This avoids human contact during the testing process, reduces fluorinated oil loss, and thus reduces the amount of fluorinated oil used.

[0029] In addition, the above-mentioned technical solutions require fewer modifications to the probe station, reducing the cost of adding functions.

[0030] In some embodiments, the aforementioned switching valve 3 can be a solenoid valve, and the fluorinated oil spraying device of the probe station also includes a controller, which is electrically connected to the solenoid valve. In this example, the switching of the solenoid valve can be automatically controlled by the controller, which can save manpower, improve the opening and closing efficiency of the switching valve 3, and improve the testing efficiency of the wafer.

[0031] The controller can adjust the solenoid valve closure to suit the operating conditions, controlling the spray rate and duration as needed.

[0032] The aforementioned controller can be a host computer, etc.

[0033] In some embodiments, the aforementioned probe station fluorinated oil spraying device also includes a control button connected to the controller.

[0034] The controller stores a program, and operators can select and execute the corresponding program through control buttons to control the opening and closing ratio and duration of the solenoid valve.

[0035] In some implementations, such as Figure 1 As shown, the aforementioned fluorinated oil spraying device for the probe station may also include a one-way valve 4. The one-way valve 4 is installed on the pipeline of the ejector port 22 to prevent fluid backflow in the pipeline of the ejector port 22, thus ensuring smoother flow of the ejector 2.

[0036] In some embodiments, the aforementioned fluid outlet 23 can be connected to the nozzle 5 via a universal joint 7, so that the nozzle 5 can be angled according to actual needs.

[0037] In some embodiments, the present invention also provides a probe station, which may include the fluorinated oil spraying device for any of the probe stations described above. Because the probe station uses the aforementioned fluorinated oil spraying device, the amount of fluorinated oil used can be reduced.

[0038] In some implementations, such as Figure 1As shown, the aforementioned probe station also includes a probe holder 6, which is equipped with probes for testing the wafer. The probe holder 6 also has an optical positioning through-hole 61. The probe station uses this optical positioning through-hole 61 to optically position the wafer. The nozzle 5 is positioned opposite one end of the optical positioning through-hole 61, and the other end of the optical positioning through-hole 61 is positioned opposite the wafer. The nozzle 5 sprays fluid from the fluid outlet 23 onto the wafer through the optical positioning through-hole 61.

[0039] In the above example, the optical positioning via 61 has a dual function. On the one hand, the probe station can use the optical positioning via 61 to optically position the wafer; on the other hand, the nozzle 5 can use the optical positioning via 61 to spray fluorinated oil onto the wafer. The optical positioning via 61 serves two purposes, allowing for a more compact overall structure of the probe station.

[0040] In some embodiments, the aforementioned ejector 2 can be fixed to the top plate of the probe station.

[0041] The probe station requires high-voltage testing when inspecting wafers. In this invention, a fluorinated oil spraying device is added to the probe station to enable it to perform high-voltage testing. The gas supply device is used to supply compressed gas to the fluid inlet 21 of the ejector 2. The rate and duration of fluorinated oil addition are controlled by adjusting the opening and closing ratio and duration of the solenoid valve.

[0042] Compressed gas flows into the ejector 2, drawing fluorinated oil from the fluorinated oil storage tank 1 into the ejector 2. Finally, the fluorinated oil and compressed gas are guided to the nozzle 5 and blown out, thus adding fluorinated oil to the wafer piercing area.

[0043] The fluorinated oil in the fluorinated oil storage tank 1 can be manually replenished when the level falls below the warning line. Adding fluorinated oil to the storage tank 1 does not affect the spraying process during the pin puncture test. This invention solves the fluorinated oil replenishment problem at a low cost and automates the addition of fluorinated oil to the wafer surface. It uses a host computer to control the solenoid valve and programs the application of fluorinated oil to the wafer surface during the pin puncture test. The program control process is stable, improving testing efficiency.

[0044] Among them, the opening and closing of the solenoid valve is controlled by the host computer, and the automatic addition of fluorinated oil in a timed and quantitative manner is realized according to the test requirements. This can avoid human contact during the test, reduce the cost of fluorinated oil consumption, and improve test efficiency. The probe station modification project is small, reducing the cost of adding functions.

[0045] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A fluorinated oil spraying device for a probe station, characterized in that, Includes a fluorinated oil storage tank (1), an ejector (2), and a switching valve (3); The ejector (2) has a fluid inlet (21), an ejector port (22) and a fluid outlet (23). The ejector port (22) is connected to the interior of the fluorinated oil storage tank (1). The fluid inlet (21) is used to connect to the gas supply device. The fluid outlet (23) is connected to a nozzle (5). The ejector (2) is used to inject the fluorinated oil in the fluorinated oil storage tank (1) into the interior for mixing when the gas supply device supplies gas, and to discharge the mixed fluid from the fluid outlet (23). The nozzle (5) is used to spray the fluid from the fluid outlet (23) onto the wafer on the probe station; The switching valve (3) is installed on the pipeline of the fluid inlet (21).

2. The fluorinated oil spraying device for the probe station as described in claim 1, characterized in that, The switching valve (3) is a solenoid valve, and the fluorinated oil spraying device of the probe station also includes a controller, which is electrically connected to the solenoid valve.

3. The fluorinated oil spraying device for the probe station as described in claim 2, characterized in that, It also includes control buttons connected to the controller.

4. The fluorinated oil spraying apparatus for the probe station as described in claim 1, characterized in that, It also includes a one-way valve (4); the one-way valve (4) is disposed on the pipeline of the ejector port (22) to prevent fluid backflow in the pipeline of the ejector port (22).

5. The fluorinated oil spraying device for the probe station as described in claim 1, characterized in that, The fluid outlet (23) is connected to the nozzle (5) via a universal joint (7).

6. A probe station, characterized in that, A fluorinated oil spraying apparatus including the probe station according to any one of claims 1-5.

7. The probe station as described in claim 6, characterized in that, It also includes a probe card (6), which has an optical positioning through hole (61), through which the probe station performs optical positioning of the wafer; The nozzle (5) is opposite to one end of the optical positioning through-hole (61), and the other end of the optical positioning through-hole (61) is used to be opposite to the wafer; wherein, the nozzle (5) sprays the fluid from the fluid outlet (23) onto the wafer through the optical positioning through-hole (61).

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