A disassembly and assembly tool

Abstract

This application provides a disassembly and assembly fixture, comprising: a support frame; an actuator disposed on the support frame; a sliding member, one end of which is provided with a pressure plate, the actuator being configured to drive the sliding member and the pressure plate to move along a first direction; a first coupling rod, at least partially passing through the sliding member and the pressure plate along the first direction, one end of which is provided with a bearing member, the first coupling rod and the bearing member being configured to move along the first direction, the pressure plate and the bearing member being spaced apart in the first direction and located on the same side of the sliding member, the bearing member including a telescopic member, the pressure plate and the telescopic member forming a receiving space, the telescopic member being configured to perform telescopic movement to switch the disassembly and assembly fixture between a first state and a second state, when the disassembly and assembly fixture is in the first state, a sealing ring can move in and out of the receiving space along the first direction, when the disassembly and assembly fixture is in the second state, the telescopic member can carry the sealing ring located in the receiving space. This disassembly and assembly fixture can realize the disassembly and assembly of the sealing ring.

Description

Technical Field

[0001] This application relates to the field of disassembly and assembly tooling technology, and more specifically to a disassembly and assembly tooling. Background Technology

[0002] The pump outlet at the bottom of the HfO2 chamber and the gas line to the foreline tube inside the chamber need to be sealed with a sealing ring. When installing or removing the sealing ring, it is necessary to ensure that the sealing ring is inserted vertically with the center horizontally. However, because the size of the sealing ring shell is very close to the pipe diameter, it is difficult to install or remove.

[0003] In related technologies, there is a lack of dedicated disassembly and assembly tools, and manual disassembly and assembly can easily lead to problems such as disassembly and assembly failure, personnel injury, and damage to sealing rings.

[0004] Therefore, improvements are needed to at least partially address the aforementioned problems. Utility Model Content

[0005] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0006] To address the existing problems, this application provides a disassembly and assembly tool for disassembling and assembling a sealing ring, comprising:

[0007] Support frame;

[0008] An actuator is mounted on the support frame;

[0009] A slider, wherein a pressure plate is provided at one end of the slider along the first direction, and the actuator is configured to drive the slider and the pressure plate to move along the first direction;

[0010] A first coupling rod, at least partially passing through the sliding member and the pressure plate along the first direction, has a bearing member at one end along the first direction. The first coupling rod and the bearing member are configured to move along the first direction. The pressure plate and the bearing member are spaced apart along the first direction and located on the same side of the sliding member. The bearing member includes a telescopic member. The pressure plate and the telescopic member form a receiving space. The telescopic member is configured to perform telescopic movement to switch the disassembly / assembly fixture between a first state and a second state. When the disassembly / assembly fixture is in the first state, the sealing ring can move in and out of the receiving space along the first direction. When the disassembly / assembly fixture is in the second state, the telescopic member can carry the sealing ring located in the receiving space.

[0011] For example, the carrier further includes a sleeve, which is fitted around the outer periphery of the sleeve when the sealing ring is located in the receiving space;

[0012] The telescopic member is inserted into the sleeve, and the telescopic member is configured to telescopically move relative to the sleeve so that the disassembly and assembly tool can switch between the first state and the second state. When the disassembly and assembly tool is in the first state, at least a portion of the telescopic member is retracted into the sleeve, and when the disassembly and assembly tool is in the second state, at least a portion of the telescopic member extends out of the sleeve.

[0013] For example, the sleeve includes a bottom part and a side wall part, wherein a groove is provided in the bottom part and a hole is provided in the side wall part, the hole and the groove are correspondingly provided and communicate with each other, and the telescopic member passes through the hole and is at least partially located in the groove;

[0014] The disassembly and assembly fixture also includes a transmission component disposed on the bottom surface. The two ends of the transmission component are respectively connected to the first coupling rod and the telescopic member. The first coupling rod is configured to rotate to drive the transmission component to rotate, thereby driving the telescopic member to move along the extension direction of the groove, so that the telescopic member performs telescopic movement relative to the sleeve.

[0015] For example, the transmission assembly includes a substrate and a rotating plate. The substrate is sleeved on the outer periphery of the first coupling rod. The two ends of the rotating plate are respectively connected to the substrate and the telescopic member. The first coupling rod is configured to rotate to drive the substrate to rotate, thereby driving the telescopic member to move along the extension direction of the groove.

[0016] For example, the transmission assembly includes a plurality of the said vanes, a plurality of the said grooves are provided in the bottom part, a plurality of the said holes are provided in the side wall part, and the bearing member includes a plurality of the said telescopic members. Each of the said vanes, each of the said grooves, each of the said holes and each of the said telescopic members are arranged in a one-to-one correspondence, wherein the plurality of said vanes, the plurality of said grooves, the plurality of said holes and the plurality of said telescopic members are all evenly arranged along the circumference of the sleeve.

[0017] For example, the pressure plate and the carrier are configured to be fixedly connected, wherein when the disassembly and assembly tooling is in the second state, the pressure plate and the carrier are fixedly connected so that the pressure plate and the telescopic member clamp the sealing ring located in the receiving space.

[0018] For example, it also includes:

[0019] A sliding shaft is disposed on the support frame and extends along the first direction;

[0020] The second coupling is disposed on the side of the sliding member away from the bearing member and sleeved on the outer periphery of the sliding shaft. The first coupling is connected to the second coupling, and the second coupling is configured to move along the first direction. The first coupling is connected to the second coupling through a fixed bearing.

[0021] For example, the sliding shaft includes a first sliding shaft and a second sliding shaft, the actuator includes a lead screw, the lead screw extends along the first direction, the lead screw is configured to rotate to drive the slider to move along the first direction, and the first sliding shaft, the second sliding shaft and the lead screw are arranged at equal intervals along a second direction perpendicular to the first direction;

[0022] The sliding member is sleeved on the outer periphery of the first sliding shaft, the second sliding shaft, and the lead screw, and the second coupling is sleeved on the outer periphery of the second sliding shaft.

[0023] For example, a knob is provided at the end of the first coupling rod opposite to the bearing member, and the knob is configured to rotate to drive the first coupling rod to rotate.

[0024] For example, the actuator includes a lead screw extending along the first direction, and a slider sleeved around the outer periphery of the lead screw, the lead screw being configured to rotate to drive the slider to move along the first direction;

[0025] The lead screw is further provided with a torque sleeve at one end along the first direction, and the torque sleeve is configured to rotate to drive the lead screw to rotate.

[0026] The disassembly and assembly tooling of this application embodiment can realize the installation and removal of the sealing ring, avoiding problems such as disassembly and assembly failure, personnel injury and sealing ring damage caused by manual disassembly and assembly. Attached Figure Description

[0027] The following drawings, which are incorporated herein by reference and are used to understand this application, illustrate embodiments of the invention and their descriptions, thereby explaining the apparatus and principles of the invention.

[0028] In the attached image:

[0029] Figure 1 This is a first-view structural schematic diagram of the disassembly and assembly fixture according to a specific embodiment of this application;

[0030] Figure 2 This is a second-view structural schematic diagram of the disassembly and assembly fixture according to a specific embodiment of this application;

[0031] Figure 3 A front view of a disassembly and assembly fixture according to a specific embodiment of this application is shown;

[0032] Figure 4 A partial structural schematic diagram of the disassembly and assembly fixture according to a specific embodiment of this application is shown;

[0033] Figure 5 This application illustrates a specific embodiment of the present invention. Figure 4 A partial structural diagram of the structure shown;

[0034] Figure 6 This illustration shows a partial structural diagram of the disassembly and assembly tool in a first state according to a specific embodiment of this application;

[0035] Figure 7 This illustration shows a partial structural diagram of the disassembly and assembly tool in the second state according to a specific embodiment of this application;

[0036] Figures 8A-8F This illustration shows a first-view schematic diagram of a specific embodiment of the present application, illustrating the installation of a sealing ring using a disassembly and assembly tooling.

[0037] Figures 9A-9G A front view is shown illustrating the installation of a sealing ring using a disassembly and assembly tooling according to a specific embodiment of this application;

[0038] Figures 10A-10F This diagram illustrates a first-view schematic of a specific embodiment of the present application, showing the removal of a sealing ring using a disassembly and assembly tool;

[0039] Figures 11A-11F The diagram shows a front view of a specific embodiment of this application, illustrating the removal of a sealing ring using a disassembly and assembly tool.

[0040] Explanation of reference numerals in the attached figures:

[0041] 101-Support frame, 102-Lead screw, 103-Sliding component, 104-Pressure plate, 105-First coupling rod, 106-Sleeve, 1061-Bottom part, 1062-Side wall part, 107-Telescopic component, 108-Fasting screw, 109-Screw hole, 110-First sliding shaft rod, 111-Second sliding shaft rod, 112-Second coupling rod, 113-Fixed bearing, 114-Knob, 115-Transmission assembly, 1151-Base plate, 1152-Rotating plate, 116-Torque sleeve, 117-Groove, 118-Hole, 119-Positioning screw, 200-Sealing ring. Detailed Implementation

[0042] In the following description, numerous specific details are set forth to provide a more thorough understanding of this application. However, it will be apparent to those skilled in the art that this application can be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described to avoid confusion with this application. It should be understood that this application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of this application to those skilled in the art. In the accompanying drawings, for clarity, the dimensions and relative dimensions of layers and regions may be exaggerated. The same reference numerals denote the same elements throughout.

[0043] It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or parts, these elements, components, areas, layers, and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or part from another element, component, area, layer, or part. Therefore, without departing from the teachings of this application, the first element, component, area, layer, or part discussed below may be referred to as the second element, component, area, layer, or part.

[0044] Spatial relation terms such as "below," "under," "below," "under," "above," and "above" are used here for convenience to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of devices in use and operation.

[0045] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of this application. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0046] Embodiments of the utility model are described herein with reference to cross-sectional views that serve as schematic diagrams of preferred embodiments (and intermediate structures) of this application. Thus, variations in the shown shape can be anticipated due to, for example, manufacturing techniques and / or tolerances. Therefore, embodiments of this application should not be limited to the specific shapes shown herein, but include shape deviations due to, for example, manufacturing processes. Consequently, the figures are substantially schematic, and their shapes are not intended to show the actual shape of the device and are not intended to limit the scope of this application.

[0047] In related technologies, when manually installing the sealing ring, it is often done by striking the ring with a rubber mallet. However, it is difficult to control the force when striking symmetrically with a rubber mallet, often causing one side of the sealing ring to get stuck at the edge of the pump inlet, resulting in deformation of the sealing ring shell and damage to the rubber ring. At the same time, the manual installation of the sealing ring takes a long time, making the installation time-consuming, labor-intensive, and material-intensive. When manually removing the sealing ring, because the sealing ring is deep inside the pump inlet and the edge of the sealing ring is narrow, it is difficult to apply force over a large area, making it extremely difficult to pull out the sealing ring. In addition, when removing the sealing ring, factors such as angular deviation and excessive force can easily cause personnel's hands to be cut by surrounding pipes and reflectors.

[0048] Therefore, in view of the aforementioned technical problems, this application proposes a disassembly and assembly fixture for disassembling and assembling a sealing ring, including a support frame, an actuator, a sliding member, and a first coupling rod, wherein: the actuator is disposed on the support frame; a pressure plate is disposed at one end of the sliding member along a first direction, and the actuator is configured to drive the sliding member and the pressure plate to move along the first direction; the first coupling rod passes through at least partially within the sliding member and the pressure plate along the first direction, and a bearing member is disposed at one end of the first coupling rod along the first direction, the first coupling rod and the bearing member are configured to move along the first direction, the pressure plate and the bearing member are spaced apart in the first direction and located on the same side of the sliding member, the bearing member includes a telescopic member, the pressure plate and the telescopic member are used to form a receiving space, the telescopic member is configured to move to switch the disassembly and assembly fixture between a first state and a second state, wherein when the disassembly and assembly fixture is in the first state, the sealing ring can move in and out of the receiving space along the first direction, and when the disassembly and assembly fixture is in the second state, the telescopic member can carry the sealing ring located in the receiving space.

[0049] The disassembly and assembly tooling of this application embodiment can realize the installation and removal of the sealing ring, avoiding problems such as disassembly and assembly failure, personnel injury and sealing ring damage caused by manual disassembly and assembly.

[0050] Below, for reference Figures 1 to 11F The disassembly and assembly tooling of this application is described in detail. The disassembly and assembly tooling of this application can be used for, but is not limited to, the disassembly and assembly of the sealing ring at the bottom of the HfO2 chamber. The following description uses the disassembly and assembly of the sealing ring at the bottom of the HfO2 chamber as an example.

[0051] In one example, such as Figure 1 As shown, the assembly / disassembly fixture includes a support frame 101, an actuator, a sliding member 103, and a first coupling rod 105.

[0052] The actuator is mounted on the support frame 101, and the sliding member 103 is connected to the actuator. A pressure plate 104 is mounted on one end of the sliding member 103 along a first direction. The actuator is configured to drive the sliding member 103 and the pressure plate 104 to move along the first direction. When the sealing ring is being installed or removed, the side containing the pressure plate 104 should face the bottom of the HfO2 chamber. Exemplarily, the pressure plate 104 is circular, annular, or any other suitable shape. When the pressure plate 104 is circular, its radius should be greater than or equal to the outer diameter of the sealing ring 200. When the pressure plate 104 is annular, its inner diameter should be less than or equal to the inner diameter of the sealing ring 200, and its outer diameter should be greater than or equal to the outer diameter of the sealing ring 200. Exemplarily, the sliding member 103 and the pressure plate 104 are fixedly connected to have synchronous movement along the first direction, where the other moves along the first direction as the other moves along the first direction.

[0053] A first coupling 105 passes at least partially through the sliding member 103 and the pressure plate 104 along a first direction. A support member is provided at one end of the first coupling 105 along the first direction. The pressure plate 104 and the support member are spaced apart along the first direction and located on the same side of the sliding member 103. The support member includes a telescopic member 107. The pressure plate 104 and the telescopic member 107 form a receiving space. The telescopic member 107 is configured to perform telescopic movement to switch the disassembly / assembly fixture between a first state and a second state. When the disassembly / assembly fixture is in the first state, the sealing ring can move in and out of the receiving space along the first direction. When the disassembly / assembly fixture is in the second state, the telescopic member 107 can carry the sealing ring located in the receiving space. Exemplarily, the first coupling 105 and the support member have synchronous movement along the first direction, whereby when one moves along the first direction, the other moves accordingly.

[0054] In this way, by controlling the telescopic component 107 to perform telescopic movement to switch the disassembly and assembly tool between the first state and the second state, it is possible to realize the sealing ring moving in and out of the receiving space along the first direction and to carry the sealing ring located in the receiving space. At the same time, in conjunction with the movement of the pressure plate 104 and the carrying component in the first direction, the disassembly and assembly of the sealing ring can be realized.

[0055] In one example, such as Figures 1 to 3 As shown, the support frame 101 has multiple screw holes at one end along the first direction. These screw holes correspond one-to-one with the existing screw holes at the bottom of the HfO2 chamber, allowing the support frame 101 to be fixed to the bottom of the HfO2 chamber by connecting the positioning screws 119 to the screw holes at the bottom of the HfO2 chamber. This does not damage the existing structure of the HfO2 chamber, thus facilitating the disassembly and assembly of the sealing ring. For example, the screw holes on the support frame 101 are located on the same side of the sliding member 103 as the pressure plate 104 and the carrier.

[0056] In one example, such as Figures 1 to 7 As shown, the carrier also includes a sleeve 106, which is fitted around the outer periphery of the sleeve 106 when the sealing ring is located in the receiving space. A telescopic member 107 passes through the sleeve 106 and is configured to telescopically extend relative to the sleeve 106, allowing the disassembly / assembly fixture to switch between a first state and a second state. When the disassembly / assembly fixture is in the first state, at least a portion of the telescopic member 107 retracts into the sleeve 106; when the disassembly / assembly fixture is in the second state, at least a portion of the telescopic member 107 extends out of the sleeve 106. It is worth noting that when the disassembly / assembly fixture is in the second state, the length of the telescopic member 107 extending out of the sleeve 106 is greater than the length when the disassembly / assembly fixture is in the first state. For example, when the disassembly / assembly fixture is in the first state, the entire length of the telescopic member 107 is retracted into the sleeve 106. For example, the telescopic member 107 can be elongated or any other suitable shape. For example, the first direction is the vertical direction, the pressure plate 104 is disposed at the bottom end of the sliding member 103, the bearing member is disposed at the bottom end of the first coupling rod 105, the pressure plate 104 and the sleeve 106 are both placed horizontally, the telescopic member 107 moves horizontally relative to the sleeve 106, and when the sealing ring is located in the receiving space, the sealing ring is placed horizontally.

[0057] In one example, such as Figure 6 and Figure 7As shown, the sleeve 106 includes a bottom portion 1061 and a sidewall portion 1062. The bottom portion 1061 has a groove 117, and the sidewall portion 1062 has a hole 118. The hole 118 corresponds to and communicates with the groove 117. The telescopic member 107 passes through the hole 118 and is at least partially located in the groove 117. The disassembly / assembly fixture of this application also includes a transmission assembly 115 disposed on the bottom portion 1061. Both ends of the transmission assembly 115 are respectively connected to a first coupling rod 105 and the telescopic member 107. The first coupling rod 105 is configured to rotate, thereby driving the transmission assembly 115 to rotate, which in turn drives the telescopic member 107 to move along the extension direction of the groove 117. This causes the telescopic member 107 to perform telescopic movement relative to the sleeve 106, allowing the disassembly / assembly fixture to switch between a first state and a second state. That is, when the transmission assembly 115 rotates, it can drive the telescopic member 107 to perform telescopic movement relative to the sleeve 106. For example, the sleeve is circular, and the groove 117 extends in the radial direction of the sleeve 106.

[0058] In one example, the bottom portion 1061 is circular, annular, or any other suitable shape, and the sidewall portion 1062 is annular or any other suitable shape. When the sidewall portion 1062 is annular, its outer diameter should be smaller than the inner diameter of the sealing ring so that the sealing ring can be fitted onto the sidewall portion 1062 when it is located in the receiving space. For example, taking the first direction as vertical, the bottom portion 1061 is horizontally arranged and the sidewall portion 1062 is vertically arranged.

[0059] In one example, such as Figure 6 and Figure 7 As shown, the transmission assembly 115 includes a base plate 1151 and a rotating plate 1152. The base plate 1151 is sleeved on the outer periphery of the first coupling rod 105. The two ends of the rotating plate 1152 are respectively connected to the base plate 1151 and the telescopic member 107. The first coupling rod 105 is configured to rotate, thereby driving the base plate 1151 to rotate, which in turn drives the telescopic member 107 to move along the extension direction of the groove 117. This allows the disassembly and assembly tool to switch between a first state and a second state. That is, when the base plate 1151 rotates, the rotating plate 1152 can drive the telescopic member 107 to move along the extension direction of the groove 117. Exemplarily, the base plate 1151 is fixedly connected to the first coupling rod 105. One end of the rotating plate 1152 connected to the base plate 1151 can rotate relative to the base plate 1151, and the other end of the rotating plate 1152 connected to the telescopic member 107 can rotate relative to the telescopic member 107. Exemplarily, the base plate 1151 is annular, and the rotating plate 1152 is arc-shaped. In other embodiments, the transmission assembly 115 may also be any other suitable structure that can perform a transmission function, so that when the first coupling rod 105 rotates, it can drive the telescopic member 107 to move along the extension direction of the groove 117 through the transmission assembly 115.

[0060] In one example, such as Figure 6 and Figure 7 As shown, the transmission assembly 115 includes multiple vanes 1152, multiple grooves 117 are provided in the bottom part 1061, multiple holes 118 are provided in the side wall part 1062, and the bearing member includes multiple telescopic members 107. Each vane 1152, each groove 117, each hole 118 and each telescopic member 107 are arranged in a one-to-one correspondence. The multiple vanes 1152, multiple grooves 117, multiple holes 118 and multiple telescopic members 107 are all evenly arranged along the circumference of the sleeve 106 so that when the telescopic member 107 carries the sealing ring located in the receiving space, the sealing ring is subjected to more uniform force. The number of vanes 1152, grooves 117, holes 118 and telescopic members 107 are equal. Each vane 1152 is used to drive one telescopic member 107 to move along the extension direction of the groove 117. One groove 117 is connected to one hole 118 and a telescopic member 107 is arranged therein. In other embodiments, the rotary blade 1152, groove 117, hole 118 and telescopic member 107 may be any other suitable quantity and arrangement, which is not limited in this application.

[0061] In one example, the pressure plate 104 and the carrier are configured to move relative to each other in a first direction. Specifically, the first coupling 105 is configured to drive the carrier to move relative to the pressure plate 104 in the first direction to adjust the distance between the pressure plate 104 and the carrier in the first direction; similarly, the slider 103 can also drive the pressure plate 104 to move relative to the carrier in the first direction to adjust the distance between the pressure plate 104 and the carrier in the first direction to ensure that the sealing ring 200 can be fully inserted into the receiving space.

[0062] In one example, such as Figures 1 to 5 As shown, the pressure plate 104 and the sleeve 106 are coaxially arranged. More specifically, the pressure plate 104, the sleeve 106 and the first coupling rod 105 are coaxially arranged to facilitate the adjustment of the distance between the pressure plate 104 and the carrier, and to facilitate the entry and exit of the sealing ring into and out of the receiving space.

[0063] In one example, the pressure plate 104 and the carrier are configured to be fixedly connected, wherein when the disassembly and assembly fixture is in the second state, the pressure plate 104 and the carrier are fixedly connected so that the pressure plate 104 and the telescopic member 107 clamp the sealing ring located in the receiving space. In this way, the pressure plate 104 and the carrier can move synchronously in the first direction after being fixedly connected, which facilitates the disassembly and assembly of the sealing ring and improves the fixing effect of the sealing ring.

[0064] In one example, the pressure plate 104 and the carrier can switch between a relatively movable state and a fixed connection state along a first direction. The switching between the two states can be achieved by the pressure plate 104 and the carrier. For example, the pressure plate 104 and the carrier have magnetic adsorption properties, and the switching between the relatively movable state and the fixed connection state along the first direction can be achieved by controlling whether the magnetic force is formed or not; or, the pressure plate 104 and the carrier can be engaged with each other, so the switching between the relatively movable state and the fixed connection state along the first direction can be achieved by controlling whether the engagement between the pressure plate 104 and the carrier is engaged or not. Other implementation methods are also possible, which will not be elaborated here.

[0065] In one example, the pressure plate 104 and the carrier can also be switched between a relatively movable state and a fixed connection state along the first direction via additional connecting members, such as... Figure 4 and Figure 5 As shown, as one possible embodiment of the connector, the connector can be a fastening screw. The pressure plate 104 and the sleeve 106 are provided with corresponding screw holes 109 (specifically, the pressure plate 104 and the side wall portion 1062 are provided with corresponding screw holes 109). The fastening screw 108 is configured to connect with the screw hole 109 to fix the pressure plate 104 and the carrier. When the fastening screw 108 is not connected with the screw hole 109, the pressure plate 104 and the carrier can move relative to each other along a first direction. Exemplarily, the fastening screw 108 passes through the area enclosed by the inner ring of the seal and connects with the screw hole 109. In other embodiments, the connector can also be any suitable other component capable of fixing the pressure plate 104 and the carrier, such as a clamp, a magnetic suction device, etc., and this application does not limit this.

[0066] In one example, such as Figure 3 and Figure 4As shown, the system also includes a sliding shaft and a second coupling 112. The sliding shaft is mounted on the support frame 101 and extends along a first direction. The second coupling 112 is located on the side of the sliding member 103 away from the load-bearing member and is sleeved on the outer periphery of the sliding shaft. The first coupling 105 is connected to the second coupling 112, and the second coupling 112 is configured to move along the first direction. By providing the second coupling 112, the stability of the first coupling 103 and the load-bearing member during movement can be improved. For example, the second coupling 112 can extend in a direction perpendicular to the first direction (e.g., a horizontal direction). Taking the second coupling 112 extending in a horizontal direction as an example, one end of the second coupling 112 in the horizontal direction is sleeved on the outer periphery of the sliding shaft, and the other end is connected to the first coupling 105. For example, the first coupling 103, the carrier, and the second coupling 112 move synchronously along a first direction. When one of the first coupling 103, the carrier, and the second coupling 112 moves along the first direction, the other two move accordingly.

[0067] In one example, taking the first direction as the vertical direction and the second coupling rod 112 as being located above the slider 103, when the slider 103 moves in the vertical direction, the second coupling rod 112 will also move in the vertical direction.

[0068] In one example, such as Figures 1 to 7 As shown, the first coupling 103 is connected to the second coupling 112 through a fixed bearing 113. The fixed bearing 113 can achieve synchronicity when the first coupling 103 and the second coupling 112 move in the first direction. At the same time, the fixed bearing 113 does not restrict the rotation of the first coupling 103.

[0069] In one example, such as Figures 1 to 7 As shown, a knob 114 is also provided at the end of the first coupling rod 103 opposite to the carrier member. The knob 114 is configured to rotate to drive the first coupling rod 103 to rotate. Exemplarily, the knob 114 can be manually rotated to drive the first coupling rod 103 to rotate. Exemplarily, the knob 114 and the first coupling rod 103 are fixedly connected, and the knob 114 and the first coupling rod 103 have synchronous movement along a first direction.

[0070] In one example, such as Figures 1 to 4 As shown, the actuator includes a lead screw 102 extending along a first direction, and a slider 103 sleeved on the outer periphery of the lead screw 102. The lead screw 102 is configured to rotate to drive the slider 103 to move along the first direction. In other embodiments, the actuator may also be any other suitable component capable of driving the slider 103 to move along the first direction, such as a motor, etc., and this application does not limit this.

[0071] In one example, such as Figure 3 and Figure 4 As shown, the sliding shaft includes a first sliding shaft 110 and a second sliding shaft 111. The first sliding shaft 110, the second sliding shaft 111, and the lead screw 102 are arranged at equal intervals along a second direction perpendicular to the first direction. The second sliding shaft 111 is disposed between the first sliding shaft 110 and the lead screw 102. A sliding member 103 is sleeved on the outer periphery of the first sliding shaft 110, the second sliding shaft 111, and the lead screw 102. A second coupling 112 is sleeved on the outer periphery of the second sliding shaft 111. This arrangement allows the pressure plate 104 and the bearing member to be positioned centrally along the second direction within the entire assembly / disassembly fixture, facilitating the assembly and disassembly of the sealing ring. For example, the first direction and the second direction are the vertical direction and the horizontal direction, respectively.

[0072] In one example, such as Figures 1 to 3 As shown, a torque sleeve 116 is also provided at one end of the lead screw 102 along the first direction. The torque sleeve 116 is configured to rotate to drive the lead screw 102 to rotate. The torque sleeve can be rotated by applying a torque wrench, or by other driving components such as a motor. Exemplarily, the torque sleeve 116 is located at the end of the lead screw 102 away from the screw hole on the support frame 101; in other words, when the disassembly / assembly fixture is located at the bottom of the HfO2 chamber, the torque sleeve 116 is located at the end of the lead screw 102 away from the bottom of the HfO2 chamber.

[0073] The above examples illustrate various embodiments of the disassembly and assembly tooling of this application, which can be freely combined.

[0074] Below, taking the first direction as the vertical direction as an example, refer to... Figures 8A-8F as well as Figures 9A-9G To describe a specific embodiment of installing a sealing ring using disassembly and assembly tools:

[0075] First, such as Figure 8A and Figures 9A to 9B As shown, the support frame 101 is fixed above the bottom of the HfO2 chamber, the pressure plate 104 is raised, the disassembly and assembly fixture is in the first state, the sealing ring 200 is placed in the receiving space and sleeved on the outer periphery of the sleeve 106; then, as... Figure 8B and Figure 9C As shown, rotating knob 114 (for example, rotating knob 114 90° clockwise) causes the first coupling rod 103 to rotate, thereby causing the telescopic member 107 to extend from the sleeve 106, and the disassembly and assembly fixture switches from the first state to the second state, so that the carrier member carries the sealing ring 200; then, as Figure 8C and Figure 9DAs shown, the carrier is moved upward (e.g., manually moving the knob 114, the first coupling 105, or the second coupling 112 upward to move the carrier upward) so that the top of the sealing ring 200 contacts the bottom of the pressure plate 104, and the pressure plate 104 and the carrier are fixedly connected by fastening screws. At this time, the pressure plate 104 and the carrier tightly clamp the sealing ring 200. Exemplarily, in this step, the pressure plate 104 can also be moved downward to make the top of the sealing ring 200 contact the bottom of the pressure plate 104 (keeping the carrier fixed during this process); then, as Figure 8D and Figure 9E As shown, a torque wrench is applied to the torque sleeve 116 (e.g., rotating the torque sleeve 116 clockwise) to rotate the lead screw 102, causing the first coupling 105, sliding member 103, pressure plate 104, and bearing member to move downwards until the sealing ring 200 enters the pump inlet at the bottom of the HfO2 chamber and can no longer move downwards. A fixed torque can be applied with the torque wrench to ensure a constant compressive force when the sealing ring 200 enters the pump inlet, ensuring that the sealing ring 200 effectively enters the pump inlet without being damaged by excessive compressive force. Then, as... Figure 8E and Figure 9F As shown, rotating knob 114 (e.g., rotating knob 114 counterclockwise 90°) causes the first coupling rod 103 to rotate, thereby causing the telescopic member 107 to retract into sleeve 106. The disassembly and assembly fixture switches from the second state to the first state, thereby releasing the sealing ring 200 from the receiving space; then, as... Figure 8F and Figure 9G As shown, a torque wrench is applied to the torque sleeve 116 (e.g., the torque sleeve 116 is rotated counterclockwise) to drive the lead screw 102 to rotate, which drives the first coupling rod 105, the sliding member 103, the pressure plate 104 and the bearing member to move upward and disengage from the pump inlet, thereby removing the support frame 101 from the bottom of the HfO2 chamber and completing the installation process of the sealing ring 200.

[0076] Below, taking the first direction as the vertical direction as an example, refer to... Figures 10A-10F as well as Figures 11A-11F To describe a specific embodiment of removing the sealing ring using disassembly and assembly tools:

[0077] First, such as Figure 10A and Figure 11A As shown, the support frame 101 is fixed above the bottom of the HfO2 chamber, and the disassembly and assembly fixture is in the first state; then, as... Figure 10B and Figure 11BAs shown, a torque wrench is applied to the torque sleeve 116 to rotate the lead screw 102, causing the sliding member 103 and the pressure plate 104 to move downwards into the pump inlet. At this time, the first coupling rod 105 and the bearing member also move downwards into the pump inlet, allowing the sealing ring 200 to enter the receiving space and be fitted onto the outer circumference of the sleeve 106; then, as... Figure 10C and Figure 11C As shown, rotating knob 114 (for example, rotating knob 114 90° clockwise) causes the first coupling rod 103 to rotate, thereby causing the telescopic member 107 to extend from the sleeve 106, and the disassembly and assembly fixture switches from the first state to the second state, so that the carrier member carries the sealing ring 200; then, as Figure 10D and Figure 11D As shown, a torque wrench is applied to the torque sleeve 116 (e.g., rotating the torque sleeve 116 clockwise) to rotate the lead screw 102, causing the sliding member 103 and the pressure plate 104 to move downwards, so that the bottom of the pressure plate 104 contacts the top of the sealing ring 200. The pressure plate 104 and the carrier are then fixedly connected by fastening screws. At this time, the pressure plate 104 and the carrier tightly clamp the sealing ring 200. During this process, the carrier remains stationary (e.g., manually kept stationary). In this step, the carrier can also be moved upwards to make the bottom of the pressure plate 104 contact the top of the sealing ring 200; then, as... Figure 10E and Figure 11E As shown, a torque wrench is applied to the torque sleeve 116 (e.g., rotating the torque sleeve 116 counterclockwise) to rotate the lead screw 102, causing the first coupling 105, sliding member 103, pressure plate 104, and bearing member to move upwards until the sealing ring 200 disengages from the pump inlet; then, as... Figure 10F and Figure 11F As shown, rotating the knob (for example, rotating the knob 114 counterclockwise by 90°) causes the first coupling rod 103 to rotate, which in turn causes the telescopic member 107 to retract into the sleeve 106. The disassembly and assembly tool switches from the second state to the first state, thereby releasing the sealing ring 200 from the receiving space and completing the disassembly process of the sealing ring 200.

[0078] This concludes the introduction to the structure of the disassembly and assembly fixture of this application. A complete disassembly and assembly fixture may also include other components, which will not be described in detail here.

[0079] In summary, the disassembly and assembly tooling of this application embodiment can realize the installation and removal of the sealing ring, avoiding problems such as disassembly and assembly failure, personnel injury and sealing ring damage caused by manual disassembly and assembly.

[0080] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of this application. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of this application. All such changes and modifications are intended to be included within the scope of this application as claimed in the appended claims.

[0081] Numerous specific details are set forth in the specification provided herein. However, it will be understood that embodiments of this application may be practiced without these specific details. In some instances, well-known methods, structures, and techniques have not been shown in detail so as not to obscure the understanding of this specification.

[0082] Similarly, it should be understood that, in order to streamline this application and aid in understanding one or more of the various aspects of the invention, features of this application may sometimes be grouped together in a single embodiment, figure, or description thereof in the description of exemplary embodiments of this application. However, this approach should not be construed as reflecting an intention that the claimed application requires more features than are expressly recited in each claim. Rather, as reflected in the corresponding claims, the inventive point lies in solving the corresponding technical problem with fewer features than all of those in a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of this application.

[0083] Those skilled in the art will understand that, apart from the mutual exclusion of features, all features disclosed in this specification (including the accompanying claims, abstract, and drawings) and all processes or elements of any method or apparatus so disclosed can be combined in any combination. Unless otherwise expressly stated, each feature disclosed in this specification (including the accompanying claims, abstract, and drawings) may be replaced by an alternative feature serving the same, equivalent, or similar purpose.

[0084] Furthermore, those skilled in the art will understand that although some embodiments described herein include certain features but not others included in other embodiments, combinations of features from different embodiments are intended to be within the scope of this application and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0085] It should be noted that the above embodiments are illustrative of this application and not restrictive of this application, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims.

Claims

1. A dismounting tool, characterized in that, For disassembling and assembling the sealing ring, including: Support frame; An actuator is mounted on the support frame; A slider, wherein a pressure plate is provided at one end of the slider along a first direction, and the actuator is configured to drive the slider and the pressure plate to move along the first direction; A first coupling rod, at least partially passing through the sliding member and the pressure plate along the first direction, has a bearing member at one end along the first direction. The first coupling rod and the bearing member are configured to move along the first direction. The pressure plate and the bearing member are spaced apart along the first direction and located on the same side of the sliding member. The bearing member includes a telescopic member. The pressure plate and the telescopic member form a receiving space. The telescopic member is configured to perform telescopic movement to switch the disassembly / assembly fixture between a first state and a second state. When the disassembly / assembly fixture is in the first state, the sealing ring can move in and out of the receiving space along the first direction. When the disassembly / assembly fixture is in the second state, the telescopic member can carry the sealing ring located in the receiving space.

2. The disassembly and assembly fixture according to claim 1, characterized in that, The carrier also includes a sleeve, and when the sealing ring is located in the receiving space, the sealing ring is sleeved on the outer periphery of the sleeve; The telescopic member is inserted into the sleeve, and the telescopic member is configured to telescopically move relative to the sleeve so that the disassembly and assembly tool can switch between the first state and the second state. When the disassembly and assembly tool is in the first state, at least a portion of the telescopic member is retracted into the sleeve, and when the disassembly and assembly tool is in the second state, at least a portion of the telescopic member extends out of the sleeve.

3. The disassembly and assembly fixture according to claim 2, characterized in that, The sleeve includes a bottom part and a side wall part, wherein a groove is provided in the bottom part and a hole is provided in the side wall part, the hole and the groove are correspondingly provided and communicate with each other, and the telescopic member passes through the hole and is at least partially located in the groove; The disassembly and assembly fixture also includes a transmission component disposed on the bottom surface. The two ends of the transmission component are respectively connected to the first coupling rod and the telescopic member. The first coupling rod is configured to rotate to drive the transmission component to rotate, thereby driving the telescopic member to move along the extension direction of the groove, so that the telescopic member performs telescopic movement relative to the sleeve.

4. The disassembly and assembly fixture according to claim 3, characterized in that, The transmission assembly includes a base plate and a rotating plate. The base plate is sleeved on the outer periphery of the first coupling rod. The two ends of the rotating plate are respectively connected to the base plate and the telescopic member. The first coupling rod is configured to rotate to drive the base plate to rotate, thereby driving the telescopic member to move along the extension direction of the groove.

5. The disassembly and assembly fixture according to claim 4, characterized in that, The transmission assembly includes multiple rotating blades, multiple grooves are provided in the bottom part, multiple holes are provided in the side wall part, and the bearing member includes multiple telescopic members. Each rotating blade, each groove, each hole and each telescopic member is arranged in a one-to-one correspondence. The multiple rotating blades, multiple grooves, multiple holes and multiple telescopic members are all evenly arranged along the circumference of the sleeve.

6. The disassembly and assembly tooling according to any one of claims 1-5, characterized in that, The pressure plate and the carrier are configured to be fixedly connected, wherein when the disassembly and assembly tool is in the second state, the pressure plate and the carrier are fixedly connected so that the pressure plate and the telescopic member clamp the sealing ring located in the receiving space.

7. The disassembly and assembly tooling according to any one of claims 1-5, characterized in that, Also includes: A sliding shaft is disposed on the support frame and extends along the first direction; The second coupling is disposed on the side of the sliding member away from the bearing member and sleeved on the outer periphery of the sliding shaft. The first coupling is connected to the second coupling, and the second coupling is configured to move along the first direction. The first coupling is connected to the second coupling through a fixed bearing.

8. The disassembly and assembly fixture according to claim 7, characterized in that, The sliding shaft includes a first sliding shaft and a second sliding shaft, and the actuator includes a lead screw that extends along the first direction. The lead screw is configured to rotate to drive the sliding member to move along the first direction. The first sliding shaft, the second sliding shaft, and the lead screw are arranged at equal intervals along a second direction perpendicular to the first direction. The sliding member is sleeved on the outer periphery of the first sliding shaft, the second sliding shaft, and the lead screw, and the second coupling is sleeved on the outer periphery of the second sliding shaft.

9. The disassembly and assembly tooling according to any one of claims 3-5, characterized in that, A knob is provided at the end of the first coupling rod opposite to the bearing member. The knob is configured to rotate to drive the first coupling rod to rotate.

10. The disassembly and assembly tooling according to any one of claims 1-5, characterized in that, The actuator includes a lead screw extending along the first direction, and a sliding member sleeved on the outer periphery of the lead screw. The lead screw is configured to rotate to drive the sliding member to move along the first direction. The lead screw is further provided with a torque sleeve at one end along the first direction, and the torque sleeve is configured to rotate to drive the lead screw to rotate.

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