An auxiliary support device for an electrostatic adsorption plate

Abstract

This utility model discloses an auxiliary support device for an electrostatic adsorption tray, including an electrostatic adsorption tray. Limiting plates are fixedly installed on both sides of the surface of the electrostatic adsorption tray, and diameter adjustment mechanisms are fixedly installed on both sides of the top surface of the electrostatic adsorption tray. A clamping frame is fixedly installed at the bottom of the diameter adjustment mechanism, and an auxiliary support assembly is fixedly installed on the bottom surface of the clamping frame. This auxiliary support device for an electrostatic adsorption tray, through the diameter adjustment mechanism and auxiliary support assembly, allows the cylinder to be opened according to the diameter of the material tray, causing the adjusting block to slide inside the limiting plates. This clamping frame and latex protective pad clamp the two sides of the material tray, thereby opening the electric push rod, causing the support plate and latex protective sheet to press against the two sides of the bottom surface of the material tray. This achieves the effect of auxiliary support for material trays of different diameters and thicknesses, with high adaptability. When the electrostatic adsorption tray experiences an unexpected power outage or malfunction, the material tray will not fall, avoiding losses.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic adsorption tray technology, and specifically to an auxiliary support device for electrostatic adsorption trays. Background Technology

[0002] Electrostatic chucks are a general term for ultra-clean sheet carriers and gripping and handling devices suitable for atmospheric or vacuum environments. The electrostatic adsorption technology used in electrostatic chucks is an advantageous technology that replaces traditional mechanical clamping and vacuum adsorption methods, and it has wide applications in semiconductors, panel displays, optics and other fields.

[0003] However, traditional electrostatic adsorption trays are not convenient for supporting material boards. When the electrostatic adsorption tray loses power or malfunctions, the material board may fall, resulting in losses.

[0004] Therefore, an auxiliary support device for electrostatic adsorption disks is proposed. Utility Model Content

[0005] The technical problem to be solved by this utility model is as follows: it is not convenient to provide auxiliary support for the material plate. When the electrostatic adsorption plate is accidentally de-energized or malfunctions, the material plate will fall off, causing losses.

[0006] The objective of this utility model can be achieved through the following technical solutions: An auxiliary support device for an electrostatic adsorption tray includes an electrostatic adsorption tray. Limiting plates are fixedly installed on both sides of the surface of the electrostatic adsorption tray. Diameter adjustment mechanisms are fixedly installed on both sides of the top surface of the electrostatic adsorption tray. A clamping frame is fixedly installed at the bottom of the diameter adjustment mechanism. An auxiliary support component is fixedly installed on the bottom surface of the clamping frame. Limiting grooves are formed around the top surface of the auxiliary support component. Limiting posts are fixedly installed inside the limiting grooves. A shock-absorbing component is slidably installed on the surface of the limiting posts. A connecting frame is rotatably installed on the top of the shock-absorbing component. A clamping plate is fixedly installed on the top of the connecting frame.

[0007] As a further embodiment of this utility model: the diameter adjustment mechanism includes a cylinder and an adjustment block. The cylinder is fixedly installed on the top surface of the electrostatic adsorption plate, and the adjustment block is fixedly installed at the output end of the cylinder. The diameter adjustment mechanism is used to adjust the overall diameter to adapt to different material plates.

[0008] As a further embodiment of this utility model: the auxiliary support assembly includes an electric push rod and a support plate. The electric push rod is fixedly installed on the bottom surface of the clamping frame, and the support plate is fixedly disposed on the output end of the electric push rod. Dampers are fixedly disposed on both sides of the top surface of the support plate. The auxiliary support assembly is used to support and fix the material plate.

[0009] As a further embodiment of this utility model: the shock-absorbing assembly includes a sliding block, a shock-absorbing spring, and a shock-absorbing rod. The sliding block is slidably disposed on the surface of the limiting post. One end of the shock-absorbing spring is fixedly connected to the sliding block. The bottom of the shock-absorbing rod is rotatably disposed on the top of the sliding block. The shock-absorbing assembly is used to buffer and reduce the shock of the material plate.

[0010] As a further embodiment of this utility model: a latex protective pad is fixedly provided on the inner wall of the clamping frame, and a latex protective sheet is fixedly provided on the top surface of the abutment plate. The latex protective pad and the latex protective sheet are used to protect the material plate.

[0011] As a further embodiment of this utility model: the sliding block is slidably disposed inside the limiting groove, and the end of the damping spring away from the sliding block is fixedly connected to the limiting groove, and the limiting groove facilitates the sliding of the sliding block.

[0012] As a further embodiment of this utility model: a sliding groove is provided on the top surface of the limiting plate, and the adjusting block is slidably disposed inside the sliding groove, which facilitates the sliding of the adjusting block.

[0013] The beneficial effects of this utility model are: 1. By setting up a diameter adjustment mechanism and auxiliary support components, the cylinder is opened according to the diameter of the material plate, which drives the adjustment block to slide inside the limit plate, so that the clamping frame and the latex protective pad clamp the two sides of the material plate. Then, the electric push rod is opened, which drives the support plate and the latex protective sheet to press against the two sides of the bottom surface of the material plate. This achieves the effect of auxiliary support for material plates of different diameters and thicknesses, with high adaptability. When the electrostatic adsorption plate is accidentally powered off or malfunctions, the material plate will not fall, avoiding losses.

[0014] 2. By setting up the shock-absorbing components, when the material is vibrated during the electrostatic adsorption and transportation process, the pressing plate presses down, causing the shock-absorbing rod to rotate, which drives the shock-absorbing spring to contract and store energy. The damper plays a damping role, achieving the effect of buffering and shock absorption of the material plate, ensuring the stability of transportation, and avoiding detachment or damage to the material plate. Attached Figure Description

[0015] The present invention will be further described below with reference to the accompanying drawings.

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the diameter adjustment mechanism of this utility model; Figure 3 This is a schematic diagram of the latex protective pad structure of this utility model; Figure 4 This is a schematic diagram of the auxiliary support component structure of this utility model; Figure 5This is a schematic diagram of the shock-absorbing component structure of this utility model.

[0017] In the diagram: 1. Electrostatic adsorption plate; 2. Limiting plate; 3. Diameter adjustment mechanism; 301. Cylinder; 302. Adjusting block; 4. Clamping frame; 5. Auxiliary support assembly; 501. Electric push rod; 502. Support plate; 6. Limiting post; 7. Shock absorption assembly; 701. Sliding block; 702. Shock absorption spring; 703. Shock absorption rod; 8. Connecting frame; 9. Clamping plate; 10. Latex protective pad; 11. Latex protective sheet; 12. Damper. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0019] like Figure 1-5 As shown, an auxiliary support device for an electrostatic adsorption tray includes an electrostatic adsorption tray 1. Limiting plates 2 are fixedly installed on both sides of the surface of the electrostatic adsorption tray 1. Diameter adjustment mechanisms 3 are fixedly installed on both sides of the top surface of the electrostatic adsorption tray 1. A clamping frame 4 is fixedly installed at the bottom of the diameter adjustment mechanism 3. An auxiliary support component 5 is fixedly installed on the bottom surface of the clamping frame 4. By setting the diameter adjustment mechanism 3 and the auxiliary support component 5, according to the diameter of the material plate, the cylinder 301 is opened, which drives the adjustment block 302 to slide inside the limiting plate 2, so that the clamping frame 4 and the latex protective pad 10 clamp the two sides of the material plate. Then, the electric push rod 501 is opened, which drives the support plate 502 and the latex protective sheet 11 to press against the two sides of the bottom surface of the material plate. This achieves the effect of auxiliary support for material plates of different diameters and thicknesses, with high adaptability. When the electrostatic adsorption tray 1 is accidentally powered off or malfunctions, the material plate will not fall, avoiding losses. The auxiliary support component 5 has limit grooves on all four sides of its top surface. Limiting posts 6 are fixedly installed inside the limit grooves. Shock-absorbing components 7 are slidably installed on the surface of the limiting posts 6. With the setting of shock-absorbing components 7, when the material is vibrated during the adsorption and transportation process of the electrostatic adsorption tray 1, the pressing plate 9 presses down, causing the shock-absorbing rod 703 to rotate, which drives the shock-absorbing spring 702 to contract and store energy. The damper 12 plays a damping role, achieving the effect of buffering and shock-absorbing the material plate, ensuring the stability of transportation, and avoiding falling off or damage to the material plate. The top of the shock-absorbing component 7 is rotatably provided with a connecting frame 8, and the top of the connecting frame 8 is fixedly installed with the pressing plate 9. like Figure 2As shown, the diameter adjustment mechanism 3 includes a cylinder 301 and an adjustment block 302. The cylinder 301 is fixedly installed on the top surface of the electrostatic adsorption disk 1, and the adjustment block 302 is fixedly installed at the output end of the cylinder 301. By setting the diameter adjustment mechanism 3, the cylinder 301 is opened, which drives the adjustment block 302 to slide inside the limit plate 2, so that the clamping frame 4 and the latex protective pad 10 clamp the two sides of the material plate, thus adapting to material plates of different diameters.

[0020] like Figure 4 As shown, the auxiliary support assembly 5 includes an electric push rod 501 and a support plate 502. The electric push rod 501 is fixedly installed on the bottom surface of the clamping frame 4, and the support plate 502 is fixedly installed on the output end of the electric push rod 501. Dampers 12 are fixedly installed on both sides of the top surface of the support plate 502. By setting the auxiliary support component 5, the electric push rod 501 is opened, which drives the support plate 502 and the latex protective sheet 11 to press against both sides of the bottom surface of the material plate, thereby supporting material plates of different thicknesses.

[0021] like Figure 5 As shown, the shock absorption assembly 7 includes a sliding block 701, a shock absorption spring 702, and a shock absorption rod 703. The sliding block 701 is slidably disposed on the surface of the limiting post 6. One end of the shock absorption spring 702 is fixedly connected to the sliding block 701. The bottom of the shock absorption rod 703 is rotatably disposed on the top of the sliding block 701. With the installation of the damping component 7, when subjected to vibration, the pressing plate 9 presses down, causing the damping rod 703 to rotate, which drives the damping spring 702 to contract and store energy. The damper 12 plays a damping role, thus buffering and reducing the shock of the material plate.

[0022] like Figure 3 and Figure 4 As shown, a latex protective pad 10 is fixedly installed on the inner wall of the clamping frame 4, and a latex protective sheet 11 is fixedly installed on the top surface of the abutment plate 9. The latex protective pad 10 and latex protective sheet 11 serve to protect the material plate.

[0023] like Figure 4 As shown, the sliding block 701 is slidably disposed inside the limiting groove, and the end of the damping spring 702 away from the sliding block 701 is fixedly connected to the limiting groove; The limiting groove serves to limit the movement of the sliding block 701.

[0024] like Figure 1 As shown, the top surface of the limiting plate 2 is provided with a sliding groove, and the adjusting block 302 is slidably disposed inside the sliding groove.

[0025] The sliding groove facilitates the sliding of the adjusting block 302.

[0026] The working principle of this utility model is as follows: According to the diameter of the material plate, the cylinder 301 is opened, which drives the adjusting block 302 to slide inside the limiting plate 2, so that the clamping frame 4 and the latex protective pad 10 clamp the two sides of the material plate. Then, the electric push rod 501 is opened, which drives the support plate 502 and the latex protective sheet 11 to press against the two sides of the bottom surface of the material plate, providing auxiliary support for material plates of different diameters and thicknesses. It has a high adaptability. When the electrostatic adsorption plate 1 is accidentally de-energized or malfunctions, the material plate will not fall off, avoiding losses. During the adsorption and transportation process of the electrostatic adsorption plate 1, when subjected to vibration, the pressing plate 9 presses down, causing the damping rod 703 to rotate, which drives the damping spring 702 to contract and store energy. The damper 12 plays a damping role, achieving the effect of buffering and shock absorption of the material plate, ensuring the stability of transportation, and avoiding detachment or damage to the material plate.

[0027] It should be noted that the device structure and accompanying drawings of this utility model mainly describe the principle of this utility model. In terms of the technical aspects of this design principle, the setting of the power mechanism, power supply system and control system of the device is not fully described. However, under the premise that those skilled in the art understand the principle of the above utility model, the specific details of its power mechanism, power supply system and control system can be clearly understood. The control method in the application document is automatic control through a controller. The control circuit of the controller can be implemented by those skilled in the art through simple programming. All standard parts used can be purchased from the market, and can be customized according to the instructions and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the existing technology. The machinery, parts and equipment adopt conventional models in the existing technology, and the structure and principle of the components known to those skilled in the art can be known by those skilled in the art through technical manuals or conventional experimental methods.

[0028] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An auxiliary support device for an electrostatic chucking disc, comprising an electrostatic chucking disc (1), characterized in that: Limiting plates (2) are fixedly installed on both sides of the surface of the electrostatic adsorption plate (1). Diameter adjustment mechanisms (3) are fixedly installed on both sides of the top surface of the electrostatic adsorption plate (1). A clamping frame (4) is fixedly installed at the bottom of the diameter adjustment mechanism (3). An auxiliary support component (5) is fixedly installed on the bottom surface of the clamping frame (4). Limiting grooves are opened around the top surface of the auxiliary support component (5). A limiting column (6) is fixedly installed inside the limiting groove. A shock-absorbing component (7) is slidably installed on the surface of the limiting column (6). A connecting frame (8) is rotatably installed on the top of the shock-absorbing component (7). A pressing plate (9) is fixedly installed on the top of the connecting frame (8).

2. The auxiliary support device for an electrostatic chucking table according to claim 1, characterized in that, The diameter adjustment mechanism (3) includes a cylinder (301) and an adjustment block (302). The cylinder (301) is fixedly installed on the top surface of the electrostatic adsorption disk (1), and the adjustment block (302) is fixedly installed at the output end of the cylinder (301).

3. The auxiliary support device for an electrostatic chucking table according to claim 1, characterized in that, The auxiliary support assembly (5) includes an electric push rod (501) and a support plate (502). The electric push rod (501) is fixedly installed on the bottom surface of the clamping frame (4), and the support plate (502) is fixedly installed at the output end of the electric push rod (501). Dampers (12) are fixedly installed on both sides of the top surface of the support plate (502).

4. The auxiliary support device for an electrostatic chucking table according to claim 1, wherein The damping component (7) includes a sliding block (701), a damping spring (702), and a damping rod (703). The sliding block (701) is slidably disposed on the surface of the limiting post (6). One end of the damping spring (702) is fixedly connected to the sliding block (701). The bottom of the damping rod (703) is rotatably disposed on the top of the sliding block (701).

5. The auxiliary support device for an electrostatic chucking table according to claim 1, wherein The inner wall of the clamping frame (4) is fixedly provided with a latex protective pad (10), and the top surface of the abutment plate (9) is fixedly provided with a latex protective sheet (11).

6. The auxiliary support device for an electrostatic chucking table according to claim 4, wherein The sliding block (701) is slidably disposed inside the limiting groove, and the end of the damping spring (702) away from the sliding block (701) is fixedly connected to the limiting groove.

7. The auxiliary support device for an electrostatic chucking table according to claim 2, wherein The top surface of the limiting plate (2) is provided with a sliding groove, and the adjusting block (302) is slidably disposed inside the sliding groove.

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