An in-situ electrochemical monitoring fixture for metal etching processes

Abstract

This utility model relates to the field of in-situ electrochemical monitoring fixture technology for metal etching processes, specifically an in-situ electrochemical monitoring fixture for metal etching processes, including a fixed frame, a fixed rod at the top of the fixed frame, and a clamping mechanism at the bottom of the fixed frame. This utility model utilizes a rotating double-threaded rod, which drives two movable frames to slide relative to each other on the fixed frame. This allows the two sets of clamps to slide relative to each other, adjusting the distance between them to accommodate different lengths of metal sheets. When a metal sheet is inserted between the two sets of clamps, a limiting rod and a spring work together to hold the metal sheet securely. The metal sheet can extend into a through groove. By utilizing the clamps and the through groove to accommodate different widths of metal sheets, the two sets of clamps can accommodate metal sheets of different shapes, solving the problem of insufficient adaptability of existing metal clamps for clamping metal sheets of different shapes.

Description

Technical Field

[0001] This utility model relates to the field of in-situ electrochemical monitoring fixtures for metal etching processes, specifically an in-situ electrochemical monitoring fixture for metal etching processes. Background Technology

[0002] In-situ electrochemical monitoring fixtures in metal etching processes are mainly used to monitor the etching process in real time through electrochemical monitoring technology, ensuring processing accuracy and stability. This fixture detects parameters such as etching current and voltage in real time through electrochemical monitoring technology, and combined with micron-level precision control, it can significantly improve processing accuracy and efficiency.

[0003] Currently, in existing technologies, corrosion-resistant spring metal clips are typically used to stably clamp the workpiece, and wires are used to connect the metal clips to the monitoring device. The metal clips serve as the working electrode, and the workpiece is then immersed in an etching solution. The reference electrode at the other end of the monitoring device is inserted into the etching solution, thereby forming a stable monitoring circuit. However, metal workpieces are usually metal sheets with a thickness of 0.15-2.0 mm and have various shapes, making the adaptability of the metal clips insufficient. Therefore, there is a need to propose an in-situ electrochemical monitoring fixture using metal etching technology. Utility Model Content

[0004] To address the shortcomings of existing technologies, such as the insufficient adaptability of existing metal clamps to clamp metal sheets of different shapes, this invention proposes an in-situ electrochemical monitoring clamp for metal etching processes.

[0005] The technical solution adopted by this utility model to solve its technical problem is: an in-situ electrochemical monitoring fixture for metal etching process, including a fixing frame, a fixing rod provided at the top of the fixing frame, a clamping mechanism provided at the bottom of the fixing frame, and a through groove provided in the middle of the inner cavity of the fixing frame; The clamping mechanism includes a movable frame that is slidably connected to the outer wall of the fixed frame. A double-threaded rod is provided on the top of the movable frame. Both ends of the movable frame penetrate the bottom of the fixed frame and are fixedly connected to positioning plates. A gripper is rotatably connected to one end of the bottom of the positioning plate, and a limit rod is rotatably connected to the other end of the bottom of the positioning plate. The limit rod penetrates the side wall of the gripper and is slidably connected to the gripper. A spring is provided at one end of the limit rod, and a terminal block is provided on one side of the gripper.

[0006] Preferably, a connecting frame is fixedly connected to the top side wall of the fixing frame, and the fixing rod is fixedly connected to the top of the connecting frame.

[0007] Preferably, a guide rod is fixedly connected to the top side wall of the fixed frame, and the guide rod passes through the side wall of the movable frame and is slidably connected to the movable frame.

[0008] Preferably, a fixed sleeve is fixedly connected to the top of the fixed frame, the double-threaded rod is rotatably connected to the inner cavity of the fixed sleeve, and the movable frame is threadedly connected to the outer wall of the double-threaded rod.

[0009] Preferably, the fixed frame has guide grooves on both sides, and the movable frame has guide grooves at both ends and is slidably connected to the guide grooves.

[0010] Preferably, the gripper sidewall has a limiting groove, and the limiting rod passes through the limiting groove and is slidably connected to the limiting groove.

[0011] Preferably, one end of the spring is fixedly connected to a positioning block, the other end of the spring is fixedly connected to the end of the limiting rod, the positioning block is slidably connected to the outer wall of the limiting rod, and a roller is rotatably connected to the bottom of the positioning block, the roller contacting the side wall of the gripper.

[0012] The advantages of this utility model are: This invention utilizes a rotating double-threaded rod, which drives two movable frames to slide relative to each other on a fixed frame. This allows the two sets of grippers to slide relative to each other and adjust their spacing, thus adapting the distance between the two sets of grippers to accommodate different lengths of metal sheets. When a metal sheet is inserted between the two sets of grippers, a limiting rod and a spring work together to hold the metal sheet securely in place. The metal sheet can extend into a through slot, and the grippers and through slots work together to accommodate different widths of metal sheets. This achieves the effect that the two sets of grippers can accommodate metal sheets of different shapes, solving the problem of insufficient adaptability of existing metal clamps for clamping metal sheets of different shapes. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a top view of the structure of this utility model; Figure 2 This is a structural schematic diagram of the present invention viewed from below; Figure 3 This is a schematic diagram of the gripper structure of this utility model; Figure 4 This utility model Figure 2 Enlarged structural diagram of section A in the middle; Figure 5 This utility model Figure 3 Enlarged structural diagram of section B.

[0015] In the diagram: 1. Fixed frame; 11. Through groove; 2. Fixed rod; 21. Connecting frame; 3. Clamping mechanism; 31. Movable frame; 32. Double threaded rod; 33. Fixed sleeve; 34. Guide groove; 35. Positioning plate; 36. Gripper; 37. Terminal block; 38. Limiting rod; 39. Limiting groove; 310. Spring; 311. Guide rod; 312. Positioning block; 313. Roller. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0017] The following is in conjunction with the appendix Figure 1-5 This application will be described in further detail. This application discloses an in-situ electrochemical monitoring fixture for metal etching processes. (Refer to...) Figures 1-5 An in-situ electrochemical monitoring fixture for metal etching process includes a fixed frame 1, a fixed rod 2 at the top of the fixed frame 1, a clamping mechanism 3 at the bottom of the fixed frame 1, and a through groove 11 in the middle of the inner cavity of the fixed frame 1. The metal sheet is stably clamped by inserting it into the clamping mechanism 3 at the bottom of the fixed frame 1. In specific implementation, one end of the clamping mechanism 3 is connected to an electrochemical monitoring device, and the reference electrode of the electrochemical monitoring device is also inserted into the etching solution. The clamping mechanism 3 and the metal sheet are inserted into the etching solution by using a lifting tool in conjunction with the fixed rod 2. The clamping mechanism 3 can adjust the clamping distance to adapt to the length of different metal sheets. The through groove 11 in the inner cavity of the fixed frame 1 and the clamping mechanism 3 can adapt to the width of different metal sheets, thereby achieving the purpose of the clamping mechanism 3 being able to adapt to metal sheets of different shapes for electrochemical etching monitoring. The clamping mechanism 3 includes a movable frame 31, which is slidably connected to the outer wall of the fixed frame 1. A double-threaded rod 32 is provided at the top of the movable frame 31. Both ends of the movable frame 31 penetrate the bottom of the fixed frame 1 and are fixedly connected to positioning plates 35. A gripper 36 is rotatably connected to one end of the bottom of the positioning plate 35, and a limit rod 38 is rotatably connected to the other end of the bottom of the positioning plate 35. The limit rod 38 penetrates the side wall of the gripper 36 and is slidably connected to the gripper 36. A spring 310 is provided at one end of the limit rod 38, and a terminal block 37 is provided on one side of the gripper 36. By rotating the double-threaded rod 32, the double-threaded rod 32 drives the two movable frames 31 to be positioned within the fixed frame 1. The outer walls slide relative to each other, and the movable frame 31 drives the two sets of positioning plates 35 and the grippers 36 to slide relative to each other, so that the two sets of grippers 36 can adapt to the length of different hardware sheets. The hardware sheet is inserted between the grippers 36. The terminal post 37 on the side wall of the gripper 36 can be used to connect the wire to achieve the purpose of communicating with the electrochemical monitoring device. The spring 310 at one end of the limiting rod 38 abuts against the two grippers 36 to clamp each other and cooperate to hold the hardware sheet. The hardware sheet can be extended into the through groove 11, so that the grippers 36 can adapt to the width of different hardware sheets, thereby achieving the purpose of the two sets of grippers 36 being able to hold hardware sheets of different shapes.

[0018] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 A connecting frame 21 is fixedly connected to the top side wall of the fixed frame 1. A fixed rod 2 is fixedly connected to the top of the connecting frame 21. A guide rod 311 is fixedly connected to the top side wall of the fixed frame 1. The guide rod 311 passes through the side wall of the movable frame 31 and is slidably connected to the movable frame 31. A fixed sleeve 33 is fixedly connected to the top of the fixed frame 1. A double threaded rod 32 is rotatably connected to the inner cavity of the fixed sleeve 33. The movable frame 31 is threadedly connected to the outer wall of the double threaded rod 32. Guide grooves 34 are provided on both sides of the fixed frame 1. Both ends of the movable frame 31 pass through the guide grooves 34 and are slidably connected to the guide grooves 34. Next, the fixed rod 2 on the connecting frame 21, in conjunction with the lifting tool, allows the gripper 36 to easily clamp the metal sheet and insert it into the etching solution. By rotating the double threaded rod 32, the double threaded rod 32 rotates stably within the cavity of the fixed sleeve 33. The rotation of the double threaded rod 32 drives the two movable frames 31 to slide relative to each other. The movable frames 31 slide stably in conjunction with the guide rod 311. The end of the movable frame 31 slides within the guide groove 34 and drives the two sets of positioning plates 35 and the gripper 36 to slide relative to each other, thereby allowing the distance between the two sets of grippers 36 to be easily adjusted to accommodate different lengths of metal sheets.

[0019] Reference Figure 3 and Figure 5The gripper 36 has a limiting groove 39 on its side wall. The limiting rod 38 passes through the limiting groove 39 and is slidably connected to the limiting groove 39. One end of the spring 310 is fixedly connected to a positioning block 312, and the other end of the spring 310 is fixedly connected to the end of the limiting rod 38. The positioning block 312 is slidably connected to the outer wall of the limiting rod 38. The bottom of the positioning block 312 is rotatably connected to a roller 313. The roller 313 contacts the side wall of the gripper 36. By inserting the metal sheet between the grippers 36, the limiting rod 38 and the spring 310 cooperate with the opening and closing of the gripper 36. The positioning plate 35 and the roller 313 slide against the side wall of the gripper 36 to cooperate with the sliding of the limiting rod 38 in the limiting groove 39. This allows the elastic force of the spring 310 to act on the gripper 36 and make the gripper 36 stably clamp the metal sheet.

[0020] Working principle: In use, the clamping distance of the clamping mechanism 3 is first adjusted to accommodate the length of the metal sheet. The double-threaded rod 32 is rotated within the fixed sleeve 33, driving the two movable frames 31 to slide relative to each other. The movable frames 31 slide stably in conjunction with the guide rod 311. The ends of the movable frames 31 slide within the guide groove 34, causing the two sets of positioning plates 35 and the grippers 36 to slide relative to each other, thus achieving the purpose of adjusting the distance between the two sets of grippers 36. The metal sheet is then inserted between the grippers 36. The limiting rod 38 slides within the limiting groove 39, and the positioning block 312 and roller 313 engage with the grippers 36. The sidewall slides to cooperate with the sliding of the limiting rod 38, so that the elastic force of the spring 310 acts on the gripper 36 and stably clamps the metal sheet. The metal sheet extends into the through groove 11 to accommodate the width of the metal sheet. During implementation, the lifting tool is used in conjunction with the fixing rod 2 on the connecting frame 21 to extend the fixing frame 1 into the etching solution. The terminal 37 on one side of the gripper 36 is connected to the electrochemical monitoring device. The reference electrode of the electrochemical monitoring device also extends into the etching solution. The gripper 36 clamps the metal sheet and stably extends into the etching solution, thereby achieving the purpose of electrochemical etching monitoring of metal parts of different shapes by the two sets of grippers 36.

[0021] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. An in-situ electrochemical monitoring fixture for metal etching processes, comprising a fixing frame (1), characterized in that: The top of the fixing frame (1) is provided with a fixing rod (2), the bottom of the fixing frame (1) is provided with a clamping mechanism (3), and the middle of the inner cavity of the fixing frame (1) is provided with a through groove (11). The clamping mechanism (3) includes a movable frame (31), which is slidably connected to the outer wall of the fixed frame (1). A double threaded rod (32) is provided on the top of the movable frame (31). Both ends of the movable frame (31) penetrate the bottom of the fixed frame (1) and are fixedly connected to a positioning plate (35). A gripper (36) is rotatably connected to one end of the bottom of the positioning plate (35). A limit rod (38) is rotatably connected to the other end of the bottom of the positioning plate (35). The limit rod (38) penetrates the side wall of the gripper (36) and is slidably connected to the gripper (36). A spring (310) is provided at one end of the limit rod (38). A terminal post (37) is provided on one side of the gripper (36).

2. The in-situ electrochemical monitoring fixture for metal etching process according to claim 1, characterized in that: The top side wall of the fixed frame (1) is fixedly connected to the connecting frame (21), and the fixed rod (2) is fixedly connected to the top of the connecting frame (21).

3. The in-situ electrochemical monitoring fixture for metal etching process according to claim 1, characterized in that: A guide rod (311) is fixedly connected to the top side wall of the fixed frame (1). The guide rod (311) passes through the side wall of the movable frame (31) and is slidably connected to the movable frame (31).

4. The in-situ electrochemical monitoring fixture for metal etching process according to claim 1, characterized in that: The top of the fixed frame (1) is fixedly connected to a fixed sleeve (33), the double threaded rod (32) is rotatably connected to the inner cavity of the fixed sleeve (33), and the movable frame (31) is threadedly connected to the outer wall of the double threaded rod (32).

5. The in-situ electrochemical monitoring fixture for metal etching process according to claim 1, characterized in that: The fixed frame (1) has guide grooves (34) on both sides, and the movable frame (31) has guide grooves (34) through both ends and is slidably connected to the guide grooves (34).

6. The in-situ electrochemical monitoring fixture for metal etching process according to claim 1, characterized in that: The gripper (36) has a limiting groove (39) on its side wall, and the limiting rod (38) passes through the limiting groove (39) and is slidably connected to the limiting groove (39).

7. The in-situ electrochemical monitoring fixture for metal etching process according to claim 1, characterized in that: One end of the spring (310) is fixedly connected to a positioning block (312), and the other end of the spring (310) is fixedly connected to the end of the limiting rod (38). The positioning block (312) is slidably connected to the outer wall of the limiting rod (38), and a roller (313) is rotatably connected to the bottom of the positioning block (312). The roller (313) contacts the side wall of the gripper (36).

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