Mechanical arm connecting structure

Abstract

This utility model relates to the field of wafer fabrication transmission technology, and in particular to a robotic arm connection structure, including a large arm for transmission connection. One end of the large arm is connected to the output end of the robotic arm, and a second connecting component is provided between the large arm and the output end of the robotic arm. The other end of the large arm is connected to a working mechanism, and a third connecting component is provided between the large arm and the front-end working mechanism. A second toothed belt for transmission is connected between the third connecting component and the second connecting component. This utility model utilizes an internal toothed belt to form a long-line transmission, has a simple structure, stable connections between components, good sealing performance, and high transmission accuracy.

Description

Technical Field

[0001] This utility model relates to the field of wafer processing and transmission technology, and in particular to a robotic arm connection structure. Background Technology

[0002] With the continuous development of industrial automation and intelligence, the demand for wafers is increasing both domestically and internationally. Some wafer production processes require environments with liquids, such as cleaning or performing other processes on wafers in the presence of water or corrosive liquids. This necessitates robotic arms that can handle humid conditions, but such robotic arms are relatively rare in the current technology.

[0003] To address the aforementioned technical challenges, a wafer robotic arm specifically designed for transport in humid environments has been developed.

[0004] In practical applications, it was found that the transfer of wafers during wafer processing places high demands on the transmission efficiency and stability of the robotic arm's connection structure. Furthermore, to be suitable for humid environments, the tightness and waterproof sealing of all connections are crucial. Therefore, we developed a robotic arm connection structure to address these technical challenges. Utility Model Content

[0005] The technical problem to be solved by this utility model is to provide a robotic arm connection structure that uses an internal toothed belt to form a long-line transmission. The structure is simple, the connection between the components is stable, the sealing performance is good, and the transmission accuracy is high.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0007] A robotic arm connection structure includes a large arm for transmission connection, one end of the large arm is connected to the output end of the robotic arm, a second connection component is provided between the large arm and the output end of the robotic arm, the other end of the large arm is connected to a working mechanism, a third connection component is provided between the large arm and the front working mechanism, and a second toothed belt for transmission is connected between the third connection component and the second connection component.

[0008] Furthermore, the second connecting component includes a second connecting shaft that passes through and connects the upper arm and the output end of the robotic arm, and a drive gear connected to the output end of the robotic arm is mounted on the second connecting shaft; the third connecting component includes a third connecting shaft that passes through the front working mechanism and the upper arm, and a second transmission gear and a third transmission gear are mounted on the third connecting shaft; the second toothed belt is engaged between the third transmission gear and the drive gear.

[0009] Furthermore, the third connecting shaft is provided with a partition bearing, which is located between the second transmission gear and the third transmission gear. The outer housing of the boom and the front working mechanism are respectively provided with slots corresponding to the partition bearing, and the two ends of the partition bearing are respectively fitted into the slots of the boom and the front working mechanism.

[0010] Furthermore, the two ends of the isolation bearing are respectively provided with a first sealing gasket and a second sealing gasket. The first sealing gasket is located between the isolation bearing and the second transmission gear, and the second sealing gasket is located between the isolation bearing and the third transmission gear.

[0011] Furthermore, one end of the third connecting shaft is provided with a fixed connecting piece for connecting the boom, and the other end of the third connecting shaft is provided with a limiting hole, and a limiting pin is provided between the limiting hole and the front working mechanism.

[0012] Furthermore, the boom includes a boom shell and a boom shell cover, and the boom shell and the boom shell cover are respectively provided with assembly holes corresponding to the third connecting component. The bottom of the boom shell is provided with a second sealing end cap for the assembly holes.

[0013] Furthermore, the second connecting assembly also includes a sealed bearing for connecting the drive gear to the output end of the robotic arm.

[0014] Furthermore, an axial positioning plate is connected to the end of the second connecting shaft, and a support column is fixedly connected to the other end of the axial positioning plate. The support column is fixedly installed on the boom.

[0015] Furthermore, a limiting block for limiting the transmission trajectory of the second toothed belt is sleeved on the middle section of the second toothed belt, and the limiting block is fixedly installed on the boom.

[0016] Furthermore, at least one set of large arms is connected to the output end of the robotic arm.

[0017] The beneficial effects of this utility model are:

[0018] In practical applications, during the transfer of wafers, to achieve flexible gripping and transfer operations, a large arm is installed at the power output end of the robotic arm to connect and transmit power to the front-end working mechanism, enabling spatial transmission operations. The transmission structure is entirely housed within the large arm, facilitating equipment sealing. Second and third connecting components are respectively installed at both ends of the large arm to establish the transmission connection between the various mechanisms. A second toothed belt connects the third and second connecting components for transmission, completing long-distance transmission operations. The structure is simple yet offers high transmission precision. This invention utilizes an internal toothed belt to form a long-line transmission, resulting in a simple structure, stable connections between components, good sealing performance, and high transmission precision. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the structure of the present invention in the assembly and connection state with the equipment;

[0021] Figure 3 This is a schematic diagram of the internal connection and assembly structure of this utility model;

[0022] Figure 4 This is a schematic diagram of the exploded structure of this utility model. Detailed Implementation

[0023] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to embodiments and accompanying drawings. The content mentioned in the embodiments is not intended to limit the present invention.

[0024] like Figure 1 As shown, this utility model provides a robotic arm connection structure, including a large arm 2 for transmission connection. One end of the large arm 2 is connected to the output end 5 of the robotic arm. A second connecting component 6 is provided between the large arm 2 and the output end 5 of the robotic arm. The other end of the large arm 2 is connected to the working mechanism 1. A third connecting component 7 is provided between the large arm and the front working mechanism 1. A second toothed belt 9 for transmission is connected between the third connecting component 7 and the second connecting component 6.

[0025] In this embodiment, during the wafer transfer process, to achieve flexible gripping and transfer operations, a large arm 2 is set at the power output end of the robotic arm to connect and transmit power to the front-end working mechanism, realizing spatial transmission operations. All transmission structures are located inside the large arm 2 to facilitate equipment sealing. Second connecting components 6 and electric triple connecting components 7 are respectively set at both ends of the large arm 2 to realize the transmission connection between various mechanisms. A second toothed belt 9 for transmission is connected between the third connecting component 7 and the second connecting component 6 to complete long-distance transmission operations. The structure is simple yet highly accurate. This connection structure utilizes an internal toothed belt to form a long-line transmission, resulting in a simple structure, stable connections between components, good sealing performance, and high transmission accuracy.

[0026] like Figure 3 and Figure 4As shown, the second connecting assembly 6 includes a second connecting shaft 61 that passes through and connects the upper arm 2 and the output end 5 of the robotic arm. A drive gear 62 connected to the output end 5 of the robotic arm is mounted on the second connecting shaft 61. The third connecting assembly 7 includes a third connecting shaft 71 that passes through the front-end working mechanism 1 and the upper arm 2. A second transmission gear 72 and a third transmission gear 73 are mounted on the third connecting shaft 71. The second toothed belt 9 is meshed between the third transmission gear 73 and the drive gear 62. In this embodiment, during wafer transfer, because the drive gear 62 connected to the upper arm 2 meshes with the third transmission gear 73 through the second toothed belt 9, the relative positions of the drive gear 62 and the third transmission gear 73 of the upper arm 2 change during rotation. The meshing action of the second toothed belt 9 causes the third transmission gear 73 to rotate, which in turn causes the upper arm 2 and the front-end working mechanism 1 to rotate relative to each other around the third connecting shaft 71. The drive gear 62 and the third transmission gear 73... This forms the first planetary gear train; the third transmission gear 73, when rotating, indirectly drives the second transmission gear 72 to rotate, and the rotation of the second transmission gear 72 drives the front-end working mechanism 1. Under the action of the planetary gear train, the boom 2 can achieve long-distance transmission of the robotic arm, facilitating the operation of the working mechanism 1.

[0027] like Figure 4 As shown, the third connecting shaft 71 is provided with a partition bearing 74, which is located between the second transmission gear 72 and the third transmission gear 73. The outer shells of the boom 2 and the front working mechanism 1 are respectively provided with slots corresponding to the partition bearing 74. The two ends of the partition bearing 74 are respectively fitted into the slots of the boom 2 and the front working mechanism 1. In this embodiment, a waterproof sealing ring is provided at the joint between the partition bearing 74 and the slot to play an axial sealing role. At the same time, the partition bearing 74 plays a role in supporting the boom 2 and the front working mechanism 1, so that the two can better cooperate to complete the driving operation during operation.

[0028] like Figure 4 As shown, the isolation bearing 74 has a first sealing gasket 741 and a second sealing gasket 742 at both ends. The first sealing gasket 741 is located between the isolation bearing 74 and the second transmission gear 72, and the second sealing gasket 742 is located between the isolation bearing 74 and the third transmission gear 73. In this embodiment, the first sealing gasket 741 and the second sealing gasket 742 not only play an isolation role, but also reduce wear between parts, protect the second transmission gear 72 and the third transmission gear 73, and can also achieve a tight connection and waterproof sealing effect.

[0029] like Figure 4As shown, one end of the third connecting shaft 71 is provided with a fixed connecting piece 711 for connecting the boom 2, and the other end of the third connecting shaft 71 is provided with a limiting hole 712. A limiting pin 713 is provided between the limiting hole 712 and the front working mechanism 1. In this embodiment, the fixed connecting piece 711 facilitates a stable connection between the third connecting shaft 71 and the boom 2. The open design at the other end facilitates installation. The limiting pin 713 is used to complete the limiting and locking with the front working mechanism 1. The structure is simple, the installation precision is high, and it can effectively prevent relative rotation from occurring and affecting the transmission.

[0030] like Figure 3 and Figure 4 As shown. The boom 2 includes a boom shell 21 and a boom shell cover 22. Assembly holes are respectively provided on the boom shell 21 and the boom shell cover 22 corresponding to the third connecting component 7. A second sealing end cap 23 is provided at the bottom of the boom shell 21 corresponding to the assembly hole. In this embodiment, sealing strips are provided at the connection points of the boom shell 21, the boom shell cover 22 and the second sealing end cap 23. The assembly hole and the second sealing end cap 23 serve as auxiliary limiting and seal the boom 2 at the same time to ensure waterproof effect.

[0031] like Figure 3 As shown, the second connecting component 6 also includes a sealed bearing 63 for connecting the drive gear 62 and the output end 5 of the robotic arm; in this embodiment, the sealed bearing 63 plays the role of sealing connection and, together with other structures, achieves safe transmission operation.

[0032] like Figure 3 As shown, an axial positioning plate 64 is connected to the end of the second connecting shaft 61, and a support column 65 is fixedly connected to the other end of the axial positioning plate 64. The support column 65 is fixedly installed on the upper arm 2. In this embodiment, the axial positioning plate 64 cooperates with the step or groove on the second connecting shaft 61 to mechanically limit the lateral displacement of the second connecting shaft 61, preventing shaft movement caused by load changes or vibration, thereby maintaining the meshing accuracy of the drive gear 62. Similar to the fixing method of the hub and shaft, axial fixing can be achieved through structural cooperation.

[0033] like Figure 3 As shown, a limiting block 91 for limiting the transmission trajectory of the second toothed belt 9 is sleeved and installed in the middle section. The limiting block 91 is fixedly installed on the upper arm 2. In this embodiment, the limiting block 91 guides and limits the transmission, so that the second toothed belt 9 can stably complete the transmission work on the preset trajectory, preventing deviation and affecting the meshing accuracy.

[0034] like Figure 2As shown, the output end 5 of the robotic arm is connected to at least one set of large arms 2; in this embodiment, the output end 5 of the robotic arm can be connected to two or more large arms 2, so as to realize that one drive can operate multiple working mechanisms 1 at the same time, thereby speeding up production efficiency.

[0035] All technical features in this embodiment can be modified in appearance according to actual needs.

[0036] The above embodiments are preferred implementations of this utility model. In addition, this utility model can also be implemented in other ways. Any obvious substitutions without departing from the concept of this technical solution are within the protection scope of this utility model.

Claims

1. A robotic arm connection structure, characterized in that: It includes a large arm (2) for transmission connection, one end of the large arm (2) is connected to the output end (5) of the robotic arm, a second connecting component (6) is provided between the large arm (2) and the output end (5) of the robotic arm, the other end of the large arm (2) is connected to the working mechanism (1), a third connecting component (7) is provided between the large arm and the front working mechanism (1), and a second toothed belt (9) for transmission is connected between the third connecting component (7) and the second connecting component (6).

2. The robotic arm connection structure according to claim 1, characterized in that: The second connecting component (6) includes a second connecting shaft (61) that passes through and connects the large arm (2) and the output end (5) of the robotic arm. A drive gear (62) connected to the output end (5) of the robotic arm is fitted on the second connecting shaft (61). The third connecting component (7) includes a third connecting shaft (71) that passes through the front working mechanism (1) and the boom (2). A second transmission gear (72) and a third transmission gear (73) are mounted on the third connecting shaft (71). The second toothed belt (9) is meshed between the third transmission gear (73) and the drive gear (62).

3. The robotic arm connection structure according to claim 2, characterized in that: The third connecting shaft (71) is provided with a partition bearing (74), which is located between the second transmission gear (72) and the third transmission gear (73). The outer shells of the boom (2) and the front working mechanism (1) are respectively provided with slots corresponding to the partition bearing (74), and the two ends of the partition bearing (74) are respectively fitted into the slots of the boom (2) and the front working mechanism (1).

4. The robotic arm connection structure according to claim 3, characterized in that: The isolation bearing (74) has a first sealing gasket (741) and a second sealing gasket (742) at both ends. The first sealing gasket (741) is located between the isolation bearing (74) and the second transmission gear (72), and the second sealing gasket (742) is located between the isolation bearing (74) and the third transmission gear (73).

5. The robotic arm connection structure according to claim 3, characterized in that: One end of the third connecting shaft (71) is provided with a fixed connecting piece (711) for connecting the boom (2), and the other end of the third connecting shaft (71) is provided with a limiting hole (712). A limiting pin (713) is provided between the limiting hole (712) and the front working mechanism (1).

6. The robotic arm connection structure according to claim 2, characterized in that: The boom (2) includes a boom shell (21) and a boom shell cover (22). Assembly holes are respectively provided on the boom shell (21) and the boom shell cover (22) corresponding to the third connecting component (7). A second sealing end cap (23) is provided at the bottom of the boom shell (21) for the assembly hole.

7. The robotic arm connection structure according to claim 2, characterized in that: The second connection assembly (6) also includes a sealed bearing (63) for connecting the drive gear (62) to the output end (5) of the robotic arm.

8. The robotic arm connection structure according to claim 2, characterized in that: An axial positioning plate (64) is connected to the end of the second connecting shaft (61), and a support column (65) is fixedly connected to the other end of the axial positioning plate (64). The support column (65) is fixedly installed on the boom (2).

9. The robotic arm connection structure according to claim 1, characterized in that: The middle section of the second toothed belt (9) is fitted with a limiting block (91) for limiting the transmission trajectory of the second toothed belt (9), and the limiting block (91) is fixedly installed on the upper arm (2).

10. The robotic arm connection structure according to claim 1, characterized in that: The output end (5) of the robotic arm is connected to at least one set of large arms (2).

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