Double-layer air floating movement platform

Abstract

This utility model relates to a double-layer air-float motion platform, including a base. An upper air-float platform mechanism and a lower air-float platform mechanism are connected to the base. The upper air-float platform mechanism is positioned above the lower air-float platform mechanism, and a product spacing for placing products is provided between them. The upper air-float platform mechanism includes a first moving component that moves along the Y-axis and a second moving component that moves along the X-axis. The first moving component is connected to the base, and the second moving component is movably connected to the first moving component. The lower air-float platform mechanism includes a third moving component that moves along the Y-axis and a fourth moving component that moves along the X-axis. The third moving component is connected to the base, and the fourth moving component is movably connected to the third moving component. This utility model significantly improves the accuracy and yield of transfer operations.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a double-layered air-floating motion platform. Background Technology

[0002] An air flotation platform is a suspension system that uses gas as a medium. Its core working principle is based on the dynamic and static pressure effect of gas. By injecting compressed air into a planar interface, buoyancy is generated through gas flow and bubble formation, thereby supporting the suspended object and forming a gas suspension layer. This technical feature gives air flotation platforms significant advantages such as high precision, high stability, frictionless operation, and vibration-free operation.

[0003] Air-floating platform technology has a wide range of applications, including but not limited to semiconductor manufacturing, optical processing, robotics research and development, flight simulation, and liquid suspension. As these fields continue to develop, the demand for air-floating platforms is also increasing. Particularly in semiconductor manufacturing, air-floating platforms have become an indispensable part of chip production lines, ensuring that wafer surfaces maintain extremely high flatness and precision during micron- and nanometer-level processing.

[0004] In the field of MicroLED displays, mass transfer equipment requires the use of lasers to transfer chips from an upper platform to a lower platform substrate. This necessitates the synchronous movement of two motion platforms. However, dual-layer platforms are extremely rare in the market. Even those that exist typically have a mechanical guide rail platform on the upper layer and an air-bearing motion platform on the lower layer. The precision of this mechanical guide rail platform is lower than that of the air-bearing motion platform on the lower layer. This results in significant synchronization errors when the two platforms move synchronously, preventing the chips on the upper platform from being accurately transferred to the lower motion platform substrate. Consequently, this process fails to meet the precision requirements of current mass transfer processes.

[0005] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create a new type of double-layered air-floating motion platform with greater industrial application value. Utility Model Content

[0006] To solve the above-mentioned technical problems, the purpose of this utility model is to provide a double-layered air-floating motion platform.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] A double-layer air flotation motion platform includes a base, on which an upper air flotation platform mechanism and a lower air flotation platform mechanism are connected. The upper air flotation platform mechanism is positioned above the lower air flotation platform mechanism, and there is a product spacing between them for placing products.

[0009] The upper air flotation platform mechanism includes a first moving component that moves along the Y-axis and a second moving component that moves along the X-axis. The first moving component is connected to the base, and the second moving component is movably connected to the first moving component.

[0010] The first moving component includes a first guide block and a second guide block respectively connected to the left and right sides of the base. The first guide block and the second guide block are respectively provided with a first groove and a second groove. A first drive motor and a second drive motor are respectively connected to the first groove and the second groove. A first air-bearing support component and a second air-bearing support component with the same structure are slidably connected to the first guide block and the second guide block. The first air-bearing support component and the second air-bearing support component are respectively connected to the first drive motor and the second drive motor. A moving crossbeam that moves synchronously with the first air-bearing support component and the second air-bearing support component is connected between them. The second moving component is movably connected to the moving crossbeam.

[0011] The second moving mechanism includes a third air-bearing support assembly and a fourth air-bearing support assembly with the same structure. The front end and rear end of the moving crossbeam are respectively provided with a third groove and a fourth groove. A third drive motor and a fourth drive motor are respectively connected in the third groove and the fourth groove. The third drive motor and the fourth drive motor are respectively connected to the third air-bearing support assembly and the fourth air-bearing support assembly. At the same time, the third air-bearing support assembly and the fourth air-bearing support assembly slide on the front end and the rear end of the moving crossbeam respectively. A load connecting plate is connected between the third air-bearing support assembly and the fourth air-bearing support assembly.

[0012] The lower air flotation platform mechanism includes a third moving component that moves in the Y-axis direction and a fourth moving component that moves in the X-axis direction. The third moving component is connected to the base, and the fourth moving component is movably connected to the third moving component.

[0013] The third moving component includes a third guide block and a fourth guide block located between the first guide block and the second guide block and parallel to each other. A fifth air-bearing support component and a sixth air-bearing support component with the same structure are slidably connected above the third guide block and the fourth guide block, respectively. There is a gap between the fifth air-bearing support component and the sixth air-bearing support component and their corresponding guide blocks. A fifth drive motor and a sixth drive motor are respectively connected above the third guide block and the fourth guide block within their respective gaps. The fifth drive motor and the sixth drive motor are respectively connected to the fifth air-bearing support component and the sixth air-bearing support component. The inner sides of the fifth air-bearing support component and the sixth air-bearing support component are respectively connected to the third air-bearing bearing block and the fourth air-bearing bearing block. A fourth moving component is connected between the third air-bearing bearing block and the fourth air-bearing bearing block.

[0014] The fourth moving component includes a fifth guide block and a sixth guide block. The third air-bearing block and the fourth air-bearing block are connected by the fifth guide block and the sixth guide block, which are arranged opposite to and parallel to each other. The fifth guide block and the sixth guide block are respectively slidably connected to the seventh air-bearing support component and the eighth air-bearing support component with the same structure. There is a gap between the seventh air-bearing support component and the eighth air-bearing support component and their corresponding guide blocks. The seventh drive motor and the eighth drive motor are respectively connected above the fifth guide block and the sixth guide block within their respective gaps. The seventh drive motor and the eighth drive motor are respectively connected to the seventh air-bearing support component and the eighth air-bearing support component. The fifth air-bearing block moves synchronously with the seventh air-bearing support component and the eighth air-bearing support component. At the same time, the seventh air-bearing support component, the eighth air-bearing support component and the fifth air-bearing block form a concave structure for placing the product.

[0015] Preferably, in the above-mentioned double-layer air-bearing motion platform, the first air-bearing support component includes a first air-bearing slider, a second air-bearing slider, and a first air-bearing support block. The first air-bearing slider and the second air-bearing slider are connected through the first air-bearing support block, and the three of them form a concave structure. The first air-bearing slider and the second air-bearing slider are symmetrically arranged on the left and right sides of the first guide block. The first air-bearing support block is connected to the mover of the first drive motor. The motion beam is connected to the first air-bearing support block through the first platform connecting block.

[0016] Preferably, in the upper and lower double-layer air-float motion platform, the first air-float slider and the second air-float slider are positive pressure air-float sliders, and the first air-float bearing block is a vacuum pre-compression type air-float bearing slider.

[0017] Preferably, in the upper and lower double-layer air-float motion platform, both the first guide block and the second guide block are connected to a first grating ruler for cooperating with their respective air-float support components.

[0018] Preferably, in the upper and lower double-layer air-bearing motion platform, the third air-bearing support component includes a third air-bearing slider, a fourth air-bearing slider, and a second air-bearing bearing block. The third air-bearing slider and the fourth air-bearing slider are connected through the second air-bearing bearing block, and the three of them form a concave structure. The third air-bearing slider and the fourth air-bearing slider are symmetrically arranged on the left and right sides of the front guide block of the motion beam. The third air-bearing slider is connected to the mover of the second drive motor.

[0019] Preferably, in the upper and lower double-layer air-float motion platform, the third and fourth air-float sliders are positive pressure air-float sliders, and the second air-float support block is a vacuum pre-compression type air-float support slider.

[0020] Preferably, in the double-layered air-float motion platform, the motion beam has a hollow structure, and a second grating ruler is connected to the motion beam to cooperate with the air-float support assembly.

[0021] Preferably, in the upper and lower double-layer air-float motion platform, the fifth air-float support component includes a fifth air-float slider, a sixth air-float slider, and a first air-float connecting plate. The fifth air-float slider and the sixth air-float slider are connected by the first air-float connecting plate and form a concave structure. The fifth air-float slider and the sixth air-float slider are symmetrically arranged on the left and right sides of the third guide block. The first air-float connecting plate is connected to the moving part of the fifth drive motor.

[0022] The seventh air-bearing support assembly includes a seventh air-bearing slider, an eighth air-bearing slider, and a second air-bearing connecting plate. The seventh and eighth air-bearing sliders are connected by the second air-bearing connecting plate and form a concave structure. The seventh and eighth air-bearing sliders are symmetrically arranged on the left and right sides of the fifth guide block. The second air-bearing connecting plate is connected to the mover of the seventh drive motor.

[0023] Preferably, in the upper and lower double-layer air-float motion platform, the fifth, sixth, seventh, and eighth air-float sliders are all positive pressure air-float sliders.

[0024] Preferably, in the upper and lower double-layer air-float motion platform, the third, fourth and fifth air-float bearing blocks are all vacuum pre-compression type air-float bearing sliders, the ends of the fifth and sixth guide blocks are connected by a second platform connecting block, and each of the third, fourth, fifth and sixth guide blocks is connected with a grating ruler for cooperating with its respective air-float support component.

[0025] By means of the above solution, this utility model has at least the following advantages:

[0026] This invention solves the problem that existing transfer equipment or other equipment that requires the use of upper and lower double-layer motion platforms has a low movement progress of the upper platform, resulting in a large synchronization error between the two platforms, and greatly improves the accuracy and yield of the transfer.

[0027] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0028] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the structure of this utility model;

[0030] Figure 2 This is a schematic diagram of the upper air flotation platform mechanism of this utility model;

[0031] Figure 3 yes Figure 2 Another structural diagram from a different perspective;

[0032] Figure 4 This is a schematic diagram of the lower air flotation platform mechanism of this utility model;

[0033] Figure 5 yes Figure 4 A structural diagram from another perspective. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0035] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0036] like Figures 1 to 5 As shown, a double-layer air-float motion platform includes a base 30, on which an upper air-float platform mechanism 20 and a lower air-float platform mechanism 10 are connected. The upper air-float platform mechanism 20 is placed above the lower air-float platform mechanism 10 and there is a product spacing between them for placing products.

[0037] The upper air flotation platform mechanism 20 includes a first moving component 21 that moves along the Y-axis and a second moving component 22 that moves along the X-axis. The first moving component 21 is connected to the base 30, and the second moving component 22 is movably connected to the first moving component 21.

[0038] The first moving component 21 includes a first guide block 211 and a second guide block 212 respectively connected to the left and right sides of the base 30. The first guide block 211 and the second guide block 212 are respectively provided with a first groove and a second groove. The first drive motor 213 and the second drive motor 214 are respectively connected to the first groove and the second groove. The first air-bearing support component and the second air-bearing support component with the same structure are slidably connected to the first guide block 211 and the second guide block 212. The first air-bearing support component and the second air-bearing support component are respectively connected to the first drive motor 213 and the second drive motor 214. A moving crossbeam 215 that moves synchronously with them is connected between the first air-bearing support component and the second air-bearing support component. The second moving component 22 is movably connected to the moving crossbeam 215.

[0039] In this utility model, the first air-bearing support assembly includes a first air-bearing slider 216, a second air-bearing slider 217, and a first air-bearing support block 218. The first air-bearing slider 216 and the second air-bearing slider 217 are connected through the first air-bearing support block 218, and the three of them form a concave structure. The first air-bearing slider 216 and the second air-bearing slider 217 are symmetrically arranged on the left and right sides of the first guide block 211. The first air-bearing support block 218 is connected to the mover of the first drive motor. The moving crossbeam 215 is connected to the first air-bearing support block 218 through the first platform connecting block 219.

[0040] The first air-float slider 216 and the second air-float slider 217 are positive pressure air-float sliders. The principle is that positive pressure compressed air is connected and air is supplied through the throttling orifice, and the air-float block generates static pressure air-float effect and floats up.

[0041] The first air-bearing block 218 is a vacuum pre-compression type air-bearing block. Its principle is that it is simultaneously supplied with positive and negative pressure. The positive pressure gas is supplied through a throttling orifice, while the negative pressure generates a negative pressure preload force through the vacuum chamber. This causes the air-bearing block to float due to a static pressure air-bearing effect. The negative pressure preload force is opposite to the positive pressure air-bearing force, generating an air film with a thickness of h (a few micrometers to tens of micrometers) that floats the block.

[0042] The first and second guide blocks are arranged at the left and right ends of the base and installed parallel to each other at the same height. The stator of the first drive motor is embedded in the first groove of the first guide block. The mover of the first drive motor is connected to the first air-bearing support block, which is placed on the upper surface of the first guide block and can slide on its surface. The first and second air-bearing sliders are connected through the first air-bearing support block. The first and second air-bearing sliders are symmetrically arranged on the left and right sides of the first guide block. Due to the positive pressure air film being arranged top to top, a high-rigidity static pressure air film can be formed. Similarly, the second drive motor and the second air-bearing support assembly are installed in the same way as described above, and will not be repeated here.

[0043] The moving crossbeam 215 is connected to the first air-bearing support block 218 via the first platform connecting block 219. The moving crossbeam is positioned on the upper part of the platform connecting block. The first grating ruler 2110 is installed on the side of the first guide block, flush with the direction of movement. The moving crossbeam is arranged horizontally and orthogonally to the first and second guide blocks. The orthogonality between the first and second moving mechanisms can be adjusted by adjusting the moving crossbeam.

[0044] The second moving mechanism 22 includes a third air-bearing support assembly and a fourth air-bearing support assembly with the same structure. The front end and rear end of the moving crossbeam 215 are respectively provided with a third groove and a fourth groove. The third groove and the fourth groove are respectively connected to a third drive motor 221 and a fourth drive motor 222. The third drive motor 221 and the fourth drive motor 222 are respectively connected to the third air-bearing support assembly and the fourth air-bearing support assembly. At the same time, the third air-bearing support assembly and the fourth air-bearing support assembly slide on the front end and the rear end of the moving crossbeam 215. A load connecting plate 223 is connected between the third air-bearing support assembly and the fourth air-bearing support assembly.

[0045] The third air-bearing support assembly includes a third air-bearing slider 224, a fourth air-bearing slider 225, and a second air-bearing support block 226. The third air-bearing slider 224 and the fourth air-bearing slider 225 are connected through the second air-bearing support block 226, and the three of them form a concave structure. The third air-bearing slider 224 and the fourth air-bearing slider 225 are symmetrically arranged on the left and right sides of the front guide block of the moving crossbeam. The third air-bearing slider 224 is connected to the mover of the second drive motor.

[0046] The third and fourth air-bearing sliders 224 and 225 are positive-pressure air-bearing sliders. Their principle is that positive-pressure air is supplied through a throttling orifice, causing the air-bearing block to float due to static pressure air buoyancy. The second air-bearing support block 226 is a vacuum-pre-compressed air-bearing support block. Its principle is that positive-pressure compressed air and negative pressure are simultaneously supplied. Positive-pressure gas is supplied through a throttling orifice, while negative pressure generates a negative pressure preload force through a vacuum chamber, causing the air-bearing block to float due to static pressure air buoyancy. The negative pressure preload force is opposite to the positive-pressure air buoyancy force, generating an air film of thickness h that floats the support block.

[0047] The moving beam has a hollow structure, and a second grating ruler 227 for cooperating with the air-bearing support assembly is connected to the moving beam 215. The stator of the third drive motor is embedded in the third groove of the front guide block of the moving beam. The mover of the third drive motor is connected to the third air-bearing slider 304. The second air-bearing support block is placed on the upper surface of the rear guide block of the moving beam and can slide on its surface. The third air-bearing slider and the fourth air-bearing slider are connected through the second air-bearing support block. The third air-bearing slider and the fourth air-bearing slider are symmetrically arranged on both sides of the front guide block of the moving beam. Due to the positive pressure air film being arranged top to top, a high-rigidity static pressure air film can be formed. Similarly, the connection structure of the rear guide block of the moving beam, the fourth drive motor, and the fourth air-bearing support assembly is the same as that of the third drive motor and the third air-bearing support assembly described above, and will not be repeated.

[0048] The second grating ruler is installed below the guide block at the rear end of the moving crossbeam, flush with the direction of movement. The fourth grating ruler is installed below the guide block at the front end of the moving crossbeam, flush with the direction of movement.

[0049] The load connecting plate is placed below the moving crossbeam, with a gap between it and the guide block of the moving crossbeam. The load is fixed upside down to the load connecting plate.

[0050] The lower air flotation platform mechanism 10 includes a third moving component 11 that moves in the Y-axis direction and a fourth moving component 12 that moves in the X-axis direction. The third moving component 11 is connected to the base 30, and the fourth moving component 12 is movably connected to the third moving component 11.

[0051] The third moving component 11 includes a third guide block 111 and a fourth guide block 112 located between the first guide block 211 and the second guide block 212 and parallel to each other. A fifth air-bearing support component and a sixth air-bearing support component with the same structure are slidably connected above the third guide block 111 and the fourth guide block 112, respectively. There is a gap between the fifth air-bearing support component and the sixth air-bearing support component and their corresponding guide blocks. A fifth drive motor 113 and a sixth drive motor 114 are connected above the third guide block 111 and the fourth guide block 112 within their respective gaps. The fifth drive motor 113 and the sixth drive motor 114 are respectively connected to the fifth air-bearing support component and the sixth air-bearing support component. The inner sides of the fifth air-bearing support component and the sixth air-bearing support component are respectively connected to the third air-bearing support block 115 and the fourth air-bearing support block 116. A fourth moving component 12 is connected between the third air-bearing support block 115 and the fourth air-bearing support block 116.

[0052] The fifth air-bearing support assembly includes a fifth air-bearing slider 117, a sixth air-bearing slider 118, and a first air-bearing connecting plate 119. The fifth air-bearing slider 117 and the sixth air-bearing slider 118 are connected by the first air-bearing connecting plate 119 and form a concave structure. The fifth air-bearing slider 117 and the sixth air-bearing slider 118 are symmetrically arranged on the left and right sides of the third guide block 111. The first air-bearing connecting plate 119 is connected to the mover of the fifth drive motor.

[0053] In the fifth air-bearing support assembly, the fifth and sixth air-bearing sliders are connected by the first air-bearing connecting plate, and the two sliders are symmetrically arranged on both sides of the first guide block. The fifth and sixth air-bearing sliders are connected to compressed air, outputting a positive pressure air film to form an air-bearing guide rail. Due to the top-down arrangement of the positive pressure air films, a high-rigidity static pressure air film can be formed. Simultaneously, the mover of the fifth drive motor and the first air-bearing connecting plate are also connected. Similarly, the sixth air-bearing support assembly has the same structure and principle as the fifth air-bearing support assembly described above, and will not be repeated here.

[0054] The third air-bearing support block is connected to the bottom of the guide block, and the fourth air-bearing support block is connected to the bottom of the corresponding guide block. Both air-bearing support blocks can be connected to positive and negative pressure gases; positive pressure provides the gas film, and negative pressure provides preload. The grating ruler is mounted on the side of the guide block, flush with the direction of movement.

[0055] The fourth moving component 12 includes a fifth guide block 121 and a sixth guide block 122. The fifth guide block 121 and the sixth guide block 122 are connected to the third air-bearing block 115 and the fourth air-bearing block 116 and are arranged opposite to and parallel to each other. A seventh air-bearing support component and an eighth air-bearing support component of the same structure are slidably connected to the fifth guide block 121 and the sixth guide block 122, respectively. There is a gap between the seventh air-bearing support component and the eighth air-bearing support component and their corresponding guide blocks. The fifth guide block 121 is located within each of these gaps. A seventh drive motor 123 and an eighth drive motor 124 are connected above the sixth guide block 122, respectively. The seventh drive motor 123 and the eighth drive motor 124 are connected to the seventh air-bearing support assembly and the eighth air-bearing support assembly, respectively. A fifth air-bearing support block 125 is connected between the seventh air-bearing support assembly and the eighth air-bearing support assembly and moves synchronously with the seventh air-bearing support assembly and the eighth air-bearing support assembly. At the same time, the seventh air-bearing support assembly, the eighth air-bearing support assembly and the fifth air-bearing support block 125 form a concave structure for placing products.

[0056] The seventh air-bearing support assembly includes a seventh air-bearing slider 126, an eighth air-bearing slider 127, and a second air-bearing connecting plate 128. The seventh air-bearing slider 126 and the eighth air-bearing slider 127 are connected by the second air-bearing connecting plate 128 and form a concave structure. The seventh air-bearing slider 126 and the eighth air-bearing slider 127 are symmetrically arranged on the left and right sides of the fifth guide block 111. The second air-bearing connecting plate 119 is connected to the mover of the seventh drive motor.

[0057] The fifth air-float slider 117, the sixth air-float slider 118, the seventh air-float slider 126 and the eighth air-float slider 127 are all positive pressure air-float sliders. The principle is that positive pressure compressed air is connected and air is supplied through the throttling orifice, and the air-float block generates static pressure air-float effect and floats up.

[0058] The third air-bearing block 115, the fourth air-bearing block 116, and the fifth air-bearing block 125 are all vacuum pre-compression type air-bearing blocks. The principle is that positive and negative pressure are simultaneously applied. Positive pressure gas is supplied through a throttling orifice, while negative pressure generates a negative pressure preload force through the vacuum chamber, causing the air-bearing block to float due to static pressure air buoyancy. The negative pressure preload force is opposite to the positive pressure air buoyancy force, generating an air film with a thickness of h (a few micrometers to tens of micrometers) that floats the bearing block.

[0059] The ends of the fifth guide block 121 and the sixth guide block 122 are connected by the second platform connecting block 1110. The third guide block 111, the fourth guide block 112, the fifth guide block 121 and the sixth guide block 122 are all connected with grating rulers for cooperating with their respective air flotation support components.

[0060] The seventh air-bearing support assembly includes a seventh air-bearing slider 126, an eighth air-bearing slider 127, and a second air-bearing connecting plate 128. The two sliders are symmetrically arranged on both sides of the fifth guide block. Compressed air can be connected to the seventh and eighth air-bearing sliders 126 and 127 to output a positive pressure air film, forming an air-bearing guide rail. Because the positive pressure air films are arranged top-to-top, a high-rigidity static pressure air film can be formed. Simultaneously, the mover of the seventh drive motor is connected to the connecting plate. Similarly, the structure and working principle of the eighth air-bearing support assembly are the same as those of the seventh air-bearing support assembly, and will not be described further.

[0061] The fifth air-bearing support block is connected to the fifth, sixth, seventh, and eighth air-bearing sliders and is positioned at the bottom of the fifth and sixth guide blocks, with a gap between it and the two guide blocks. The fifth air-bearing support block 1 can be connected to positive and negative pressure gas; positive pressure provides an air film, and negative pressure provides preload. The grating ruler is mounted on the guide block, flush with the direction of movement.

[0062] This invention solves the problem that existing transfer equipment or other equipment that requires the use of upper and lower double-layer motion platforms has a low movement progress of the upper platform, resulting in a large synchronization error between the two platforms, and greatly improves the accuracy and yield of the transfer.

[0063] The working principle of this utility model is the same as that of air buoyancy known to those skilled in the art, and will not be described in detail here.

[0064] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0065] In the description of this application, it should be noted that the terms "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0066] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or vertical, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0067] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0068] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A double-layered air-floating motion platform, characterized in that: Includes a base (30), on which an upper air flotation platform mechanism (20) and a lower air flotation platform mechanism (10) are connected. The upper air flotation platform mechanism (20) is positioned above the lower air flotation platform mechanism (10) and there is a product spacing between them for placing products. The upper air flotation platform mechanism (20) includes a first moving component (21) that moves along the Y-axis and a second moving component (22) that moves along the X-axis. The first moving component (21) is connected to the base (30), and the second moving component (22) is movably connected to the first moving component (21). The first moving component (21) includes a first guide block (211) and a second guide block (212) connected to the left and right sides of the base (30) respectively. The first guide block (211) and the second guide block (212) are respectively provided with a first groove and a second groove. The first drive motor (213) and the second drive motor (214) are respectively connected in the first groove and the second groove. The first air-bearing support component and the second air-bearing support component with the same structure are slidably connected to the first guide block (211) and the second guide block (212). The first air-bearing support component and the second air-bearing support component are respectively connected to the first drive motor (213) and the second drive motor (214). A moving crossbeam (215) that moves synchronously with them is connected between the first air-bearing support component and the second air-bearing support component. The second moving component (22) is movably connected to the moving crossbeam (215). The second moving component (22) includes a third air-bearing support component and a fourth air-bearing support component with the same structure. The front end and rear end of the moving beam (215) are respectively provided with a third groove and a fourth groove. The third groove and the fourth groove are respectively connected to a third drive motor (221) and a fourth drive motor (222). The third drive motor (221) and the fourth drive motor (222) are respectively connected to the third air-bearing support component and the fourth air-bearing support component. At the same time, the third air-bearing support component and the fourth air-bearing support component slide on the front end and the rear end of the moving beam (215). A load connecting plate (223) is connected between the third air-bearing support component and the fourth air-bearing support component. The lower air flotation platform mechanism (10) includes a third moving component (11) that moves in the Y-axis direction and a fourth moving component (12) that moves in the X-axis direction. The third moving component (11) is connected to the base (30), and the fourth moving component (12) is movably connected to the third moving component (11). The third moving component (11) includes a third guide block (111) and a fourth guide block (112) located between and parallel to the first guide block (211) and the second guide block (212). A fifth air-bearing support component and a sixth air-bearing support component of the same structure are slidably connected above the third guide block (111) and the fourth guide block (112), respectively. A gap is provided between the fifth air-bearing support component and the sixth air-bearing support component and their corresponding guide blocks. Within their respective gaps, the third guide block (111) and the fourth guide block (112)... A fifth drive motor (113) and a sixth drive motor (114) are respectively connected above the block (112). The fifth drive motor (113) and the sixth drive motor (114) are respectively connected to the fifth air-bearing support assembly and the sixth air-bearing support assembly. The inner sides of the fifth air-bearing support assembly and the sixth air-bearing support assembly are respectively connected to the third air-bearing support block (115) and the fourth air-bearing support block (116). A fourth moving component (12) is connected between the third air-bearing support block (115) and the fourth air-bearing support block (116). The fourth moving component (12) includes a fifth guide block (121) and a sixth guide block (122). The third air-bearing support block (115) and the fourth air-bearing support block (116) are connected by the fifth guide block (121) and the sixth guide block (122) which are arranged opposite to each other and parallel to each other. The fifth guide block (121) and the sixth guide block (122) are respectively slidably connected to the seventh air-bearing support component and the eighth air-bearing support component with the same structure. There is a gap between the seventh air-bearing support component and the eighth air-bearing support component and their corresponding guide blocks. The fifth guide block (121) within each gap is located at the fifth guide block (122). The seventh drive motor (123) and the eighth drive motor (124) are respectively connected above the sixth guide block (122). The seventh drive motor (123) and the eighth drive motor (124) are respectively connected to the seventh air-bearing support assembly and the eighth air-bearing support assembly. The fifth air-bearing support block (125) is connected between the seventh air-bearing support assembly and the eighth air-bearing support assembly and moves synchronously with the seventh air-bearing support assembly and the eighth air-bearing support assembly. At the same time, the seventh air-bearing support assembly, the eighth air-bearing support assembly and the fifth air-bearing support block (125) form a concave structure for placing the product.

2. The upper and lower double-layer air-floating motion platform according to claim 1, characterized in that: The first air-bearing support assembly includes a first air-bearing slider (216), a second air-bearing slider (217), and a first air-bearing support block (218). The first air-bearing slider (216) and the second air-bearing slider (217) are connected through the first air-bearing support block (218), and the three of them form a concave structure. The first air-bearing slider (216) and the second air-bearing slider (217) are symmetrically arranged on the left and right sides of the first guide block (211). The first air-bearing support block (218) is connected to the mover of the first drive motor. The moving crossbeam (215) is connected to the first air-bearing support block (218) through the first platform connecting block (219).

3. The upper and lower double-layer air-floating motion platform according to claim 2, characterized in that: The first air-bearing slider (216) and the second air-bearing slider (217) are positive pressure air-bearing sliders, and the first air-bearing support block (218) is a vacuum pre-compression type air-bearing support slider.

4. The upper and lower double-layer air-floating motion platform according to claim 1, characterized in that: The first guide block (211) and the second guide block (212) are each connected to a first grating ruler (2110) for cooperating with their respective air flotation support components.

5. The upper and lower double-layer air-floating motion platform according to claim 1, characterized in that: The third air-bearing support assembly includes a third air-bearing slider (224), a fourth air-bearing slider (225), and a second air-bearing support block (226). The third air-bearing slider (224) and the fourth air-bearing slider (225) are connected through the second air-bearing support block (226), and the three of them form a concave structure. The third air-bearing slider (224) and the fourth air-bearing slider (225) are symmetrically arranged on the left and right sides of the front guide block of the moving crossbeam. The third air-bearing slider (224) is connected to the mover of the second drive motor.

6. The upper and lower double-layer air-floating motion platform according to claim 5, characterized in that: The third air-bearing slider (224) and the fourth air-bearing slider (225) are positive pressure air-bearing sliders, and the second air-bearing support block (226) is a vacuum pre-compression type air-bearing support slider.

7. The upper and lower double-layer air-floating motion platform according to claim 1, characterized in that: The moving crossbeam has a hollow structure, and a second grating ruler (227) is connected to the moving crossbeam (215) for use with the air flotation support assembly.

8. The upper and lower double-layer air-floating motion platform according to claim 1, characterized in that: The fifth air-bearing support assembly includes a fifth air-bearing slider (117), a sixth air-bearing slider (118), and a first air-bearing connecting plate (119). The fifth air-bearing slider (117) and the sixth air-bearing slider (118) are connected by the first air-bearing connecting plate (119) and form a concave structure. The fifth air-bearing slider (117) and the sixth air-bearing slider (118) are symmetrically arranged on the left and right sides of the third guide block (111). The first air-bearing connecting plate (119) is connected to the moving part of the fifth drive motor. The seventh air-bearing support assembly includes a seventh air-bearing slider (126), an eighth air-bearing slider (127), and a second air-bearing connecting plate (128). The seventh air-bearing slider (126) and the eighth air-bearing slider (127) are connected by the second air-bearing connecting plate (128) and form a concave structure. The seventh air-bearing slider (126) and the eighth air-bearing slider (127) are symmetrically arranged on the left and right sides of the fifth guide block (121). The second air-bearing connecting plate (128) is connected to the mover of the seventh drive motor.

9. The upper and lower double-layer air-floating motion platform according to claim 8, characterized in that: The fifth air-bearing slider (117), the sixth air-bearing slider (118), the seventh air-bearing slider (126) and the eighth air-bearing slider (127) are all positive pressure air-bearing sliders.

10. The upper and lower double-layer air-floating motion platform according to claim 1, characterized in that: The third air-bearing block (115), the fourth air-bearing block (116), and the fifth air-bearing block (125) are all vacuum pre-compression type air-bearing block sliders. The ends of the fifth guide block (121) and the sixth guide block (122) are connected by a second platform connecting block (1110). The third guide block (111), the fourth guide block (112), the fifth guide block (121), and the sixth guide block (122) are all connected with grating rulers for cooperating with their respective air-bearing support components.

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