A multi-size compatible pack positioning and detection flow channel transport device

Abstract

This utility model discloses a multi-size compatible PACK tray positioning and detection flow channel transport device, including a base plate and multiple support legs disposed on both sides of the top of the base plate; a baffle is disposed on the top of the support legs, a base plate is disposed on the top of the base plate, a conveying guide rail is disposed on the top of the base plate, and a first clamping component and a second clamping component are connected to the top of the conveying guide rail, the first clamping component and the second clamping component can slide along the conveying guide rail; the first clamping component and the second clamping component are used to clamp and fix the PACK tray; a first side pushing mechanism is disposed on one side of the baffle, a second side pushing mechanism is disposed on the other side of the baffle, and a third side pushing mechanism is disposed at one end of the baffle; this application can significantly improve production line efficiency and stability, is compatible with 2 & 4 inch PACK tray positioning and transport, has anti-sticking function, has precise PACK tray positioning function, and improves efficiency.

Description

Technical Field

[0001] This utility model relates to the field of PACK tray transportation technology, and more specifically, to a multi-size compatible PACK tray positioning and detection flow channel transportation device. Background Technology

[0002] Die inspection technology is a crucial step in the semiconductor industry, primarily involving the detection of defects in chips (dies) (such as integrated circuit wafers). With the development of industrial automation, artificial intelligence, and precision measurement technologies, die inspection technology has evolved from traditional manual inspection to intelligent and high-precision automated inspection. Dies are housed in PACK trays of corresponding sizes, and our organization will use linear transport to move the PACK trays containing dies, facilitating subsequent inspection or other processes.

[0003] The existing technology has the following drawbacks:

[0004] Nano-coated workpieces will gradually fail with the frequency of use, requiring regular replacement and maintenance, and the corresponding usage costs and replacement and maintenance costs are relatively high.

[0005] Except for the side push module, which is controlled by cylinders, the flow channels are all servo-controlled, which results in higher costs. Utility Model Content

[0006] To solve at least one of the above-mentioned technical problems, this utility model proposes a flow channel transport device for positioning and detecting PACK disks that are compatible with multiple sizes.

[0007] The first aspect of this utility model provides a multi-size compatible PACK disk positioning and detection flow channel transport device, including: a base plate and multiple support legs disposed on both sides of the top of the base plate;

[0008] A baffle is provided on the top of the support leg, a base plate is provided on the top of the base plate, a conveying guide rail is provided on the top of the base plate, and a first clamping component and a second clamping component are connected to the top of the conveying guide rail. The first clamping component and the second clamping component can slide along the conveying guide rail.

[0009] The first clamping component and the second clamping component are used to clamp and fix the PACK disk;

[0010] A first side-pushing mechanism is provided on one side of the baffle, a second side-pushing mechanism is provided on the other side of the baffle, and a third side-pushing mechanism is provided at one end of the baffle.

[0011] In a preferred embodiment of the present invention, two conveying motors are provided at both ends of the bottom of the base plate, and the conveying motors are connected to synchronous belts. One of the synchronous belts is connected to the first clamping assembly, and the other synchronous belt is connected to the second clamping assembly.

[0012] In a preferred embodiment of this utility model, a tensioning mechanism is provided at one end of the synchronous belt, and the tensioning mechanism is used to control the tension of the synchronous belt.

[0013] In a preferred embodiment of this utility model, a limit block is provided at one end of the conveying guide rail.

[0014] In a preferred embodiment of the present invention, the first side-pushing mechanism includes a connecting plate, a sheet metal is provided on one side of the connecting plate, a photoelectric sensor is provided on one side of the sheet metal, a guide rail fixing plate is provided at the bottom of the sheet metal, a side-pushing guide rail is provided at the top of the guide rail fixing plate, a positioning plate is connected to the top of the side-pushing guide rail, and a spring is provided at one end of the positioning plate.

[0015] In a preferred embodiment of the present invention, a side-push cylinder is provided at the bottom of the guide rail fixing plate, an air pipe connector is provided on one side of the side-push cylinder, and a floating connector is provided at the end of the side-push cylinder.

[0016] In a preferred embodiment of the present invention, the first clamping assembly includes a lifting electric cylinder, a lifting shaft is provided at the top of the lifting electric cylinder, a vertical slider is provided at the top of the lifting shaft, a clamping electric cylinder is fixedly installed on one side of the vertical slider, and two grippers are symmetrically arranged at the top of the clamping electric cylinder.

[0017] In a preferred embodiment of the present invention, the third side-pushing mechanism includes a mounting plate fixedly installed on the top of the base plate, a support rod provided on the top of the mounting plate, a slide cylinder provided on the top of the support rod, a speed regulating valve provided on one side of the slide cylinder, a guide shaft provided at the end of the slide cylinder, and a positioning block connected to the end of the guide shaft.

[0018] In a preferred embodiment of this utility model, tank tracks are provided on both sides of the top of the base plate.

[0019] The above-mentioned technical solution of this utility model has the following advantages compared with the prior art:

[0020] This application can significantly improve production line efficiency and stability, is compatible with 2 & 4 inch PACK positioning and transportation, has anti-sticking function, has precise PACK positioning function, improves efficiency, can prevent PACK from sticking, has high stability in clamping and transporting PACK, all controlled by servo, and has a turnover rate of ≤0.02%. Attached Figure Description

[0021] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, some of the drawings in the following description are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0022] Figure 1 This is a three-dimensional structural diagram of the flow channel transport device for positioning and detecting PACK disks that are compatible with multiple sizes, according to an embodiment of this utility model.

[0023] Figure 2 This is a schematic diagram of the installation of the first clamping component and the second clamping component according to an embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of the structure of the first clamping component according to an embodiment of the present utility model;

[0025] Figure 4 This is a schematic diagram of the first clamping component of this utility model from another angle;

[0026] Figure 5 This is a three-dimensional structural diagram of the third side-push mechanism according to an embodiment of the present invention;

[0027] Figure 6 This is a schematic diagram of the third side-pushing mechanism of this utility model from another angle;

[0028] Figure 7 This is a three-dimensional structural diagram of the first side-push mechanism according to an embodiment of the present utility model.

[0029] In the diagram, 1. Limiting block; 2. First side-pushing mechanism; 201. Sheet metal; 202. Connecting plate; 203. Photoelectric sensor; 204. Floating joint; 205. Air pipe joint; 206. Side-pushing cylinder; 207. Side-pushing guide rail; 208. Guide rail fixing plate; 209. Positioning plate; 210. Spring; 3. First clamping assembly; 301. Gripper; 302. Vertical slider; 303. Lifting shaft; 304. Lifting electric cylinder; 305. 1. Clamping electric cylinder; 4. Second side push mechanism; 5. Baffle; 6. PACK plate; 7. Third side push mechanism; 701. Slide cylinder; 702. Positioning block; 703. Speed ​​control valve; 704. Support rod; 705. Mounting plate; 706. Guide shaft; 8. Conveyor motor; 9. Base plate; 10. Base plate; 11. Second clamping assembly; 12. Conveyor guide rail; 13. Support leg; 14. Synchronous belt; 15. Tank chain; 16. Tensioning mechanism. Detailed Implementation

[0030] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described in detail below with reference to specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0031] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the scope of protection of the present invention is not limited to the specific embodiments disclosed below.

[0032] Example 1

[0033] See Figure 1-7 As shown, this utility model proposes a multi-size compatible PACK disk positioning and detection flow channel transport device, including: a base plate 10 and multiple support legs 13 arranged on both sides of the top of the base plate 10.

[0034] The support leg 13 is provided with a baffle 5 at the top, the base plate 10 is provided with a base plate 9 at the top, the base plate 9 is provided with a conveying guide rail 12 at the top, and the first clamping component 3 and the second clamping component 11 are connected to the top of the conveying guide rail 12. The first clamping component 3 and the second clamping component 11 can slide along the conveying guide rail 12.

[0035] The first clamping component 3 and the second clamping component 11 are used to clamp and fix the PACK tray 6, which contains chips, and to transport the chips.

[0036] A first side-pushing mechanism 2 is provided on one side of the baffle 5, a second side-pushing mechanism 4 is provided on the other side of the baffle 5, and a third side-pushing mechanism 7 is provided at one end of the baffle 5.

[0037] According to an embodiment of the present invention, two conveying motors 8 are provided at both ends of the bottom of the base plate 10. The conveying motors 8 are connected to synchronous belts 14. One synchronous belt 14 is connected to the first clamping component 3, and the other synchronous belt 14 is connected to the second clamping component 11.

[0038] According to an embodiment of the present invention, a tensioning mechanism 16 is provided at one end of the synchronous belt 14, and the tensioning mechanism 16 is used to control the tension of the synchronous belt 14.

[0039] According to an embodiment of the present invention, a limit block 1 is provided at one end of the conveying guide rail 12.

[0040] According to an embodiment of the present invention, the first side-pushing mechanism 2 includes a connecting plate 202, a sheet metal 201 is provided on one side of the connecting plate 202, a photoelectric sensor 203 is provided on one side of the sheet metal 201, a guide rail fixing plate 208 is provided at the bottom of one side of the sheet metal 201, a side-pushing guide rail 207 is provided at the top of the guide rail fixing plate 208, a positioning plate 209 is connected to the top of the side-pushing guide rail 207, and a spring 210 is provided at one end of the positioning plate 209.

[0041] According to an embodiment of the present invention, a side-push cylinder 206 is provided at the bottom of the guide rail fixing plate 208, an air pipe connector 205 is provided on one side of the side-push cylinder 206, and a floating connector 204 is provided at the end of the side-push cylinder 206.

[0042] According to an embodiment of the present invention, the first clamping component 3 includes a lifting electric cylinder 304, a lifting shaft 303 is provided on the top of the lifting electric cylinder 304, a vertical slider 302 is provided on the top of the lifting shaft 303, a clamping electric cylinder 305 is fixedly installed on one side of the vertical slider 302, and two grippers 301 are symmetrically arranged on the top of the clamping electric cylinder 305.

[0043] According to an embodiment of the present invention, the third side-pushing mechanism 7 includes a mounting plate 705 fixedly installed on the top of the base plate 10. A support rod 704 is provided on the top of the mounting plate 705. A slide cylinder 701 is provided on the top of the support rod 704. A speed regulating valve 703 is provided on one side of the slide cylinder 701. A guide shaft 706 is provided at the end of the slide cylinder 701. A positioning block 702 is connected to the end of the guide shaft 706.

[0044] According to an embodiment of the present invention, tank tracks 15 are provided on both sides of the top of the base plate 10.

[0045] The working principle of this application is as follows:

[0046] When the front-end mechanism feeds material onto the flow channel, the first side push mechanism 2 extends to position the PACK disk 6 and presses it against the flow channel edge. At this time, the front-end mechanism releases the PACK disk 6 (the first side push mechanism 2 on this side is to prevent the PACK disk 6 from sticking to the front-end mechanism). Then the first side push mechanism 2 retracts.

[0047] The first clamping component 3 lifts the PACK disk 6 above the flow channel support surface via an electric cylinder, and the gripper 301 clamps the PACK disk 6. At this time, the lower drive mechanism can transfer the PACK disk 6 to the detection module. Then, after the first clamping component 3 is released, the electric cylinder descends, and the PACK disk 6 falls freely into the PACK disk 6 stop edge corresponding to the flow channel. Then, the second side push mechanism 4 extends to position the PACK disk 6, and the upper detection mechanism can detect the defects of the dies inside the PACK disk 6.

[0048] Once the test is complete, the first clamping component 3 rises and clamps the PACK disk 6, moves it to the position where it exchanges with the second clamping component 11, releases the gripper 301, lowers the electric cylinder, and places the PACK disk 6 into the corresponding baffle of the flow channel. The first clamping component 3 can then return to the position of the first side push mechanism 2 to continue picking up the next PACK disk 6.

[0049] The second clamping component 11 moves to the exchange position to pick up the PACK tray 6, and then moves to the unloading position to place the PACK tray 6 onto the corresponding stop edge of the flow channel at the unloading position. The unloading position has a third side pushing mechanism 7, which can support other mechanisms to perform operations such as detection / covering / flipping of the PACK tray 6 at the unloading position.

[0050] In summary, this application can significantly improve production line efficiency and stability, is compatible with 2 & 4 inch PACK tray 6 positioning and transportation, has anti-sticking function, has precise positioning function for PACK tray 6, improves efficiency, can prevent PACK tray 6 from sticking, has high stability in clamping and transporting PACK tray 6, all controlled by servo, and has a turnover rate of ≤0.02%.

[0051] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0052] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to the above embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0053] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A flow channel transport device for multi-size compatible PACK positioning detection, comprising: A base plate and multiple support legs disposed on both sides of the top of the base plate; characterized in that, A baffle is provided on the top of the support leg, a base plate is provided on the top of the base plate, a conveying guide rail is provided on the top of the base plate, and a first clamping component and a second clamping component are connected to the top of the conveying guide rail. The first clamping component and the second clamping component can slide along the conveying guide rail. The first clamping component and the second clamping component are used to clamp and fix the PACK disk; A first side-pushing mechanism is provided on one side of the baffle, a second side-pushing mechanism is provided on the other side of the baffle, and a third side-pushing mechanism is provided at one end of the baffle.

2. The flow channel transport device for multi-size compatible PACK positioning and detection according to claim 1, characterized in that, Two conveyor motors are provided at both ends of the bottom of the base plate. The conveyor motors are connected to synchronous belts. One of the synchronous belts is connected to the first clamping assembly, and the other synchronous belt is connected to the second clamping assembly.

3. The flow channel transport device for multi-size compatible PACK positioning and detection according to claim 2, characterized in that, A tensioning mechanism is provided at one end of the synchronous belt, which is used to control the tension of the synchronous belt.

4. The flow channel transport device for multi-size compatible PACK positioning and detection according to claim 1, characterized in that, A limit block is provided at one end of the conveying guide rail.

5. The flow channel transport device for multi-size compatible PACK positioning and detection according to claim 1, characterized in that, The first side-pushing mechanism includes a connecting plate, a sheet metal is provided on one side of the connecting plate, a photoelectric sensor is provided on one side of the sheet metal, a guide rail fixing plate is provided at the bottom of the sheet metal side, a side-pushing guide rail is provided at the top of the guide rail fixing plate, a positioning plate is connected to the top of the side-pushing guide rail, and a spring is provided at one end of the positioning plate.

6. The flow channel transport device for multi-size compatible PACK disk positioning and detection according to claim 5, characterized in that, A side-push cylinder is provided at the bottom of the guide rail fixing plate, an air pipe connector is provided on one side of the side-push cylinder, and a floating connector is provided at the end of the side-push cylinder.

7. The flow channel transport device for multi-size compatible PACK positioning and detection according to claim 1, characterized in that, The first clamping assembly includes a lifting electric cylinder, a lifting shaft is provided at the top of the lifting electric cylinder, a vertical slider is provided at the top of the lifting shaft, a clamping electric cylinder is fixedly installed on one side of the vertical slider, and two grippers are symmetrically arranged at the top of the clamping electric cylinder.

8. The flow channel transport device for multi-size compatible PACK disk positioning and detection according to claim 1, characterized in that, The third side-pushing mechanism includes a mounting plate fixedly installed on the top of the base plate. A support rod is provided on the top of the mounting plate, and a slide cylinder is provided on the top of the support rod. A speed regulating valve is provided on one side of the slide cylinder, and a guide shaft is provided at the end of the slide cylinder. A positioning block is connected to the end of the guide shaft.

9. A flow channel transport device for positioning and detecting multi-size compatible PACKs according to claim 1, characterized in that, Tank tracks are installed on both sides of the top of the base plate.

Images