Rotary mechanism and transfer device

Abstract

This utility model provides a rotating mechanism and a transfer device, relating to the field of automated silicon wafer loading and unloading technology. The rotating mechanism includes a driving component, a rotating shaft, a first transmission wheel, a second transmission wheel, and a pick-and-place component. The first transmission wheel is fixedly sleeved on the rotating shaft and rotates synchronously with the shaft. The second transmission wheel is fixedly disposed at a non-central position on the rotating seat and is connected to the first transmission wheel. The circumference of the first transmission wheel is C1, the circumference of the second transmission wheel is C2, and the rotation angle of the second transmission wheel around its own central axis is α, where C2 / C1 = 180° / α. By controlling the ratio of the circumference of the first transmission wheel to that of the second transmission wheel, the rotation angle α of the second transmission wheel around its own central axis can be controlled, thereby allowing the pick-and-place component and the silicon wafers on it to rotate to different angles suitable for the loading and unloading tracks. The rotating mechanism is highly versatile.

Description

Technical Field

[0001] This utility model relates to the field of automated loading and unloading technology for silicon wafers, and in particular to a rotating mechanism and a transfer device. Background Technology

[0002] The manufacturing process of silicon wafers involves multiple steps of silicon wafer transportation and handling. During the transportation and handling process, a rotating mechanism moves the silicon wafers from the loading track to the unloading track of the silicon wafer loading and unloading mechanism.

[0003] Existing rotating mechanisms are generally only used to adjust the position of silicon wafers. However, due to terrain or site limitations, there is an angle between the loading and unloading tracks, and existing rotating mechanisms cannot meet the angle requirements of silicon wafers for tracks with different angles, resulting in poor versatility.

[0004] In view of this, a new technical solution is needed to solve the above-mentioned technical problems. Utility Model Content

[0005] To address the issue that rotating mechanisms for handling silicon wafers are unsuitable for tracks with different angles and have poor versatility, the purpose of this invention is to provide a rotating mechanism and transfer device that allows silicon wafers to be handled on tracks with different angles and has strong versatility.

[0006] To achieve the above objectives, the present invention employs the following technical means:

[0007] A first aspect of this utility model provides a rotating mechanism, comprising:

[0008] Drive components;

[0009] A rotating shaft is connected to the driving component for transmission, and a rotating seat is fixedly sleeved on the rotating shaft. The rotating seat rotates around the rotating shaft as an axis under the drive of the rotating shaft.

[0010] The first transmission wheel is fixedly sleeved on the rotating shaft and rotates synchronously with the rotating shaft;

[0011] The second transmission wheel is fixedly disposed at a non-central position of the rotating seat and is connected to the first transmission wheel in a transmission manner.

[0012] The pick-and-place component is connected to the second transmission wheel, rotates with the second transmission wheel about the shaft, and rotates on its own axis about the central axis of the second transmission wheel.

[0013] Wherein, the circumference of the first transmission wheel is C1, the circumference of the second transmission wheel is C2, and the angle of rotation of the second transmission wheel around its own central axis is α, C2 / C1=180° / α.

[0014] Optionally, the first transmission wheel includes a first synchronous roller, the second transmission wheel includes a second synchronous roller, and a synchronous belt is fitted onto the first synchronous roller and the second synchronous roller.

[0015] Optionally, the two second synchronous rollers are respectively disposed at both ends of the bottom surface of the rotating seat.

[0016] Optionally, it further includes two belt tensioners, which are disposed on the rotating seat and on both sides of the first synchronous roller; the synchronous belt is wound around the two belt tensioners.

[0017] Optionally, it also includes a base, the driving member is disposed on the base, and the rotating shaft is rotatably disposed on the base.

[0018] Optionally, a driving gear is fixedly sleeved on the output shaft of the driving component, and a driven gear is fixedly sleeved on the rotating shaft, with the driving gear and the driven gear meshing together.

[0019] Optionally, the first transmission wheel includes a first synchronizing gear, and the second transmission wheel includes a second synchronizing gear, wherein the first synchronizing gear and the second synchronizing gear are meshed together.

[0020] Toothed belts are fitted onto the first synchronous gear and the second synchronous gear.

[0021] Optionally, the second transmission wheel rotates around its own central axis by an angle α, where 0°<α≤180°, and C2 / C1=(1~+∞):1.

[0022] Optionally, the driving component includes a motor and a reducer, with the reducer mounted on the output shaft of the motor; the picking and placing component is a suction cup, a robotic arm, or a gripper.

[0023] A second aspect of this utility model provides a transfer device, including any of the rotating mechanisms described above.

[0024] Compared with the prior art, this utility model brings the following technical effects:

[0025] The rotating mechanism of this utility model drives the rotating shaft to rotate through the driving component. On the one hand, the rotating seat rotates around the rotating shaft under the drive of the rotating shaft, which causes the position of the second transmission wheel on the rotating seat to change, thereby realizing the change of the position of the pick-up and put-down component on the rotating shaft. On the other hand, the rotating shaft also drives the first transmission wheel fixed on it to rotate. The first transmission wheel is connected to the second transmission wheel, so as to drive the second transmission wheel to rotate around its central axis, thereby driving the pick-and-place component to rotate synchronously with the second transmission wheel. In the rotating mechanism of this utility model, the circumference of the first transmission wheel is C1, the circumference of the second transmission wheel is C2, and the angle of rotation of the second transmission wheel around its own central axis is α, C2 / C1=180° / α. The rotating mechanism needs to rotate 180° to complete one wafer pick-and-place operation. The rotation angle of the first transmission wheel is fixed at 180°. Therefore, by controlling the ratio of the circumference of the first transmission wheel to the circumference of the second transmission wheel, the angle of rotation α of the second transmission wheel around its own central axis can be controlled, so that the pick-and-place component and the silicon wafer on the pick-and-place component rotate to different angles between the loading track and the unloading track, which is highly versatile. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This invention provides a schematic diagram of the rotating mechanism of some embodiments of the present invention from one perspective.

[0028] Figure 2 A schematic diagram of the rotating mechanism of some embodiments of the present invention is shown from another perspective.

[0029] Figure 3 A planar structural schematic diagram of the rotating mechanism according to some embodiments of the present invention is shown;

[0030] Figure 4 A schematic diagram of the planar structure of the rotating mechanism concealing the timing belt in some embodiments of the present invention is shown;

[0031] Figure 5 A schematic diagram of the assembly of the suction cups according to some embodiments of the present invention is shown;

[0032] Figure 6 The diagram shows an assembly schematic of the rotating shaft according to some embodiments of the present invention;

[0033] Figure 7The diagram shows a structural schematic of a transfer device according to some embodiments of the present invention;

[0034] Figure 8 The diagram shows structural schematics of the rotating mechanism and the feeding and conveying mechanism according to some embodiments of the present invention.

[0035] Explanation of key component symbols:

[0036] 100-Rotating mechanism; 10-Base; 20-Drive component; 31-Shaft; 32-Rotating seat; 33-First transmission wheel; 34-Second transmission wheel; 35-Synchronous belt; 36-Drive transmission gear; 37-Driven transmission gear; 38-Belt tensioner; 39-Cylinder mounting plate; 40-Pick-and-place component; 50-Lifting cylinder;

[0037] 200 - Transfer equipment; 210 - Loading and conveying mechanism; 220 - Unloading and conveying mechanism. Detailed Implementation

[0038] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0039] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other. The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.

[0040] Please see Figures 1-4 This utility model provides a rotating mechanism 100, including a driving component 20, a rotating shaft 31, a first transmission wheel 33, a second transmission wheel 34, and a pick-and-place component 40.

[0041] The rotating shaft 31 is connected to the driving component 20, and a rotating seat 32 is fixedly sleeved on the rotating shaft 31. The rotating seat 32 rotates around the rotating shaft 31 under the drive of the rotating shaft 31. The first transmission wheel 33 is fixedly sleeved on the rotating shaft 31 and rotates synchronously with the rotating shaft 31. The second transmission wheel 34 is fixedly set at the non-central position of the rotating seat 32 and is connected to the first transmission wheel 33. The pick-and-place component 40 is connected to the second transmission wheel 34, rotates around the rotating shaft 31 with the second transmission wheel 34, and rotates on its own axis around the central axis of the second transmission wheel 34.

[0042] The circumference of the first transmission wheel 33 is C1, the circumference of the second transmission wheel 34 is C2, and the angle of rotation of the second transmission wheel 34 around its own central axis is α, where C2 / C1 = 180° / α.

[0043] Driven by the driving component 20, the rotating shaft 31 rotates. On one hand, the rotating seat 32 rotates around the rotating shaft 31 under the drive of the rotating shaft 31, causing the position of the second transmission wheel 34 on the rotating seat 32 to change, thereby changing the position of the pick-and-place component 40 on the rotating shaft 31. On the other hand, the rotating shaft 31 also drives the first transmission wheel 33 fixed thereon to rotate. The first transmission wheel 33 is connected to the second transmission wheel 34, so that the second transmission wheel 34 rotates around its own central axis, thereby causing the pick-and-place component 40 to rotate synchronously with the second transmission wheel 34.

[0044] The rotating mechanism 100 of this invention has a first transmission wheel 33 with a circumference of C1 and a second transmission wheel 34 with a circumference of C2. The second transmission wheel 34 rotates around its own central axis by an angle α, where C2 / C1 = 180° / α. The rotating mechanism 100 needs to rotate 180° to complete one wafer picking and placing operation, and the rotation angle of the first transmission wheel 33 is fixed at 180°. By controlling the ratio of the circumference of the first transmission wheel 33 to the circumference of the second transmission wheel 34, the rotation angle α of the second transmission wheel 34 around its own central axis can be controlled. This allows the picking and placing component 40 and the silicon wafers on it to rotate to an angle suitable for the loading and unloading tracks, making the rotating mechanism highly versatile.

[0045] The rotating mechanism 100 is used in the transfer equipment 200 to pick up silicon wafers from the loading track and place them in the unloading track. The rotating mechanism 100 rotates 180° to complete one silicon wafer transfer. That is, the first drive wheel 33 rotates 180° around the rotating shaft 31.

[0046] This can be understood as follows: even when the feeding track and the unloading track are at different angles, the first transmission wheel 33 still rotates 180° around the rotating shaft 31. The second transmission wheel 34 can rotate around its own central axis by adjusting the angle α to different angles to accommodate situations where the feeding track and the unloading track are at different angles.

[0047] The silicon wafer can be rectangular, square, or circular. The rotating mechanism 100 can handle items other than silicon wafers, such as crystal wafers, chips, and glass.

[0048] It should be noted that the central axis of the second transmission wheel 34 is perpendicular to the end face of the second transmission wheel and passes through the geometric center of the second transmission wheel 34. The rotating shaft 31 passes through the center of the rotating seat 32, and the non-central position of the rotating seat 32 is any position that avoids the rotating shaft 31.

[0049] Specifically, the driving component 20 consists of a motor and a reducer, with the reducer mounted on the motor's output shaft. The reducer reduces the motor's speed, increases its torque, and improves the stability and precision of the mechanical system. In this embodiment, the transfer and reversal of the silicon wafer can be completed using only one motor and reducer, resulting in a simple and compact structure.

[0050] The pick-and-place device 40 can be a suction cup, a robotic arm, or a gripper. The suction cup is controlled to pick up silicon wafers from the loading track and release them onto the unloading track. The robotic arm or gripper is controlled to clamp silicon wafers from the loading track and release them onto the unloading track. The following description assumes the pick-and-place device 40 is a suction cup.

[0051] The angles of the loading and unloading tracks can be adjusted according to actual use. The angle at which the suction cup rotates around shaft 31 can be adaptively adjusted based on the angles of the loading and unloading tracks. For example, the angle between the loading and unloading tracks can be 0° to 180°.

[0052] Correspondingly, the second transmission wheel 34 rotates around its own central axis by an angle α, where 0° < α ≤ 180°, and C2 / C1 = (1 to +∞):1. Specifically, α can be 1°, 5°, 15°, 23°, 30°, 45°, 53°, 60°, 78°, 90°, 135°, 156°, 169°, 179°, 180°, etc. The ratio of C2 to C1 is adjusted according to α.

[0053] For example, when the angle between the loading track and the unloading track is 90°, α = 90°, C2:C1 = 2:1, the chuck is driven by the rotating seat 32 to rotate 180° around the rotating shaft 31 to complete the position exchange between the two working positions. At the same time, the chuck rotates 90° around the central axis of the second transmission wheel 34. The silicon wafer on the chuck rotates synchronously with the chuck, and the orientation of the silicon wafer is adapted to the extension direction of the unloading track, so that the silicon wafer can be smoothly placed in the unloading track.

[0054] For example, when the angle between the loading track and the unloading track is 60°, α = 60°, C2:C1 = 3:1, the chuck is driven by the rotating seat 32 to rotate 180° around the rotating shaft 31 to complete the position exchange between the two working positions. At the same time, the chuck rotates 60° around the central axis of the second transmission wheel 34. The silicon wafer on the chuck rotates synchronously with the chuck, and the orientation of the silicon wafer is adapted to the extension direction of the unloading track, so that the silicon wafer can be smoothly placed in the unloading track.

[0055] For example, when the angle between the loading track and the unloading track is 45°, α = 45°, C2:C1 = 4:1, the chuck is driven by the rotating seat 32 to rotate 180° around the rotating shaft 31 to complete the position exchange between the two working positions. At the same time, the chuck rotates 45° around the central axis of the second transmission wheel 34. The silicon wafer on the chuck rotates synchronously with the chuck, and the orientation of the silicon wafer is suitable for the extension direction of the unloading track, so that the silicon wafer can be smoothly placed in the unloading track.

[0056] Please see Figure 5 and Figure 6 In one specific embodiment, the first transmission wheel 33 includes a first synchronous roller, the second transmission wheel 34 includes a second synchronous roller, and a synchronous belt 35 is sleeved on the first synchronous roller and the second synchronous roller.

[0057] Both the first and second synchronous rollers are circular wheels, and power is transmitted from the first synchronous roller to the second synchronous roller via a synchronous belt 35.

[0058] In one alternative embodiment, the first drive wheel 33 includes a first synchronous gear, and the second drive wheel 34 includes a second synchronous gear, with the first synchronous gear meshing with the second synchronous gear. Power is transmitted from the first synchronous gear to the second synchronous gear through this meshing connection.

[0059] In one alternative embodiment, the first transmission wheel 33 includes a first synchronous gear, and the second transmission wheel 34 includes a second synchronous gear. A toothed belt is fitted onto both the first and second synchronous gears. The toothed belt transmits power from the first synchronous gear to the second synchronous gear. The toothed belt matches the tooth profiles of both the first and second synchronous gears, preventing slippage during operation and ensuring stable and reliable operation.

[0060] In one specific embodiment, there are two second synchronous rollers, which are respectively located at both ends of the bottom surface of the rotating seat 32.

[0061] Correspondingly, each of the two second synchronous rollers is equipped with a suction cup. While one suction cup is adsorbing the silicon wafer, the other suction cup rotates and releases the silicon wafer. This two-station design improves the transfer efficiency of the rotating mechanism 100. Specifically, a Bernoulli suction cup is used to adsorb or place the silicon wafer.

[0062] In one specific embodiment, the rotating mechanism 100 further includes two belt tensioning pulleys 38, which are disposed on the rotating seat 32 and on both sides of the first synchronous roller; the synchronous belt 35 is wound around the two belt tensioning pulleys 38.

[0063] By setting two belt tensioners 38, the belt tensioners 38 can apply tension to the synchronous belt 35, so that the synchronous belt 35 remains continuously tensioned, thereby improving the stability of power transmission from the first drive wheel 33 to the second drive wheel 34.

[0064] The circumference of the two belt tensioners 38 is the same as that of the first synchronous roller. That is, the circumference of the belt tensioners 38 is also C1. Each belt tensioner 38 is located between the first synchronous roller and the second synchronous roller.

[0065] Please refer to it again. Figure 3 In one specific embodiment, the rotating mechanism 100 further includes a base 10, a driving member 20 disposed on the base 10, and a rotating shaft 31 rotatably disposed on the base 10.

[0066] The base 10 provides a mounting position for the drive component 20 and the rotating shaft 31. A through hole (not shown) is provided on the base 10, the diameter of which is slightly larger than the diameter of the rotating shaft 31, allowing the rotating shaft 31 to pass through and rotate within the through hole. A mounting hole (not shown) is provided on the rotating seat 32, coaxially arranged with the through hole. The diameter of the mounting hole is configured to be slightly smaller than the diameter of the rotating shaft 31, so that the rotating seat 32 is interference-fitted with the rotating shaft 31, thereby fixing the rotating seat 32 to the rotating shaft 31.

[0067] Please continue reading. Figure 3 In one specific embodiment, a drive gear 36 is fixedly sleeved on the output shaft of the drive member 20, and a driven gear 37 is fixedly sleeved on the rotating shaft 31. The drive gear 36 and the driven gear 37 are meshed and connected.

[0068] The drive component 20 is mounted upside down on the base 10, with its output shaft extending downwards. The drive component 20 and the rotating shaft 31 are spaced apart along the length of the base 10 to provide mounting space for the driving gear 36 and the driven gear 37. The driving gear 36 and the driven gear 37 mesh together to convert the rotational force output by the drive into the rotation of the rotating shaft 31.

[0069] In one specific embodiment, the rotating mechanism 100 further includes a lifting cylinder 50 and a cylinder mounting plate 39. The cylinder body of the lifting cylinder 50 is fixedly mounted on the cylinder mounting plate 39, and the piston rod of the lifting cylinder 50 is fixed on the rotating seat 32. The lifting cylinder 50 is used to control the rise and fall of the suction cup to adjust the distance between the suction cup and the adsorbed item.

[0070] Specifically, before the chuck picks up or places the silicon wafer, the piston rod of the lifting cylinder 50 extends to bring the chuck close to the silicon wafer. When transferring the silicon wafer, the piston rod of the lifting cylinder 50 shortens to drive the chuck, which has already picked up the silicon wafer, to rotate around the rotating shaft 31.

[0071] It should be noted that the piston rod of the lifting cylinder 50 first drives the cylinder mounting plate 39 to rise and fall, and then the cylinder mounting plate 39 drives the suction cup to rise and fall synchronously.

[0072] Optionally, the rotating mechanism 100 also includes an NG rejection mechanism (not shown). The NG rejection mechanism lifts the wafer while rejecting the broken wafer to maintain the distance between the wafer and the suction cup and to prevent collisions. This synchronous lifting allows it to adapt to more working conditions and ensures the smooth operation of the mechanism.

[0073] Please see Figure 7 and Figure 8 In a second aspect, this utility model provides a transfer device 200, which includes the rotating mechanism 100 of any of the above embodiments.

[0074] Specifically, the silicon wafer transfer mechanism includes a loading transfer mechanism 210 and a unloading transfer mechanism 220. The loading transfer mechanism 210 includes multiple loading tracks arranged in parallel, and the unloading transfer mechanism 220 includes multiple unloading tracks arranged in parallel. The loading tracks and unloading tracks are arranged in a one-to-one correspondence.

[0075] The width of both the loading and unloading tracks is configured to be wider than the width of the silicon wafer, so that the silicon wafer can be smoothly placed in the loading and unloading tracks.

[0076] Both the feeding and unloading conveyor mechanisms 210 and 220 adopt belt conveyor mechanisms, and the specific structure of the belt conveyor mechanism will not be described in detail here.

[0077] The silicon wafer transfer mechanism of this utility model adopts the rotating mechanism 100 of any of the above embodiments. The circumference of the first transmission wheel 33 is C1, the circumference of the second transmission wheel 34 is C2, and the rotation angle of the second transmission wheel 34 around its central axis is α. C2 / C1 = 180° / α. The rotating mechanism 100 needs to rotate 180° to complete one wafer picking and placing operation. The rotation angle of the first transmission wheel 33 is fixed at 180°. By controlling the ratio of the circumference of the first transmission wheel 33 to the circumference of the second transmission wheel 34, the rotation angle α of the second transmission wheel 34 around its central axis can be controlled. This allows the picking / placing component 40 and the silicon wafers on it to rotate to an angle suitable for the loading and unloading tracks. The rotating mechanism is highly versatile, and the transfer equipment 200 does not need to widen the discharge track or design a new rotating mechanism to adapt to the current track design, thus ensuring the output of the transfer equipment.

[0078] It should be emphasized that for designs with different included angles between the feeding track and the unloading track, it is only necessary to replace the first transmission wheel 33 and the second transmission wheel 34 with different circumference ratios according to the included angle to adapt to the situation.

[0079] To improve the silicon wafer transfer efficiency, two rotating mechanisms 100 can be configured on the same transfer device 200. Each rotating mechanism 100 is equipped with two suction cups, thereby satisfying the four loading tracks of the loading transfer mechanism 210 and the four unloading tracks of the unloading transfer mechanism 220. Of course, users can also adjust the number of loading transfer mechanisms 210 and unloading transfer mechanisms 220 according to their needs.

[0080] It should be noted that the loading track has a loading position, and the unloading track has an unloading position. The rotating mechanism removes the silicon wafer from the loading position and places it in the unloading position. The loading and unloading positions are always on the same axis and are not affected by the angle between the loading and unloading tracks.

[0081] Combination Figure 7 and Figure 8 In this embodiment, the angle between the conveying directions of the loading track and the unloading track is 90°. Combined with... Figure 3 The rotating mechanism rotates 180°, causing the suction cup and the silicon wafer it holds to rotate synchronously 180° around the rotating shaft 31, completing the transition between the two working positions. Simultaneously, the suction cup rotates 90° around the central axis of the second transmission wheel 34 to adapt to the transport via the unloading track. In this embodiment, the ratio of the circumference C1 of the first transmission wheel 33 to the circumference C2 of the second transmission wheel 34 is 1:2.

[0082] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom still fall within the protection scope of this invention.

Claims

1. A rotating mechanism, characterized in that, include: Drive components; A rotating shaft is connected to the driving component for transmission, and a rotating seat is fixedly sleeved on the rotating shaft. The rotating seat rotates around the rotating shaft as an axis under the drive of the rotating shaft. The first transmission wheel is fixedly sleeved on the rotating shaft and rotates synchronously with the rotating shaft; The second transmission wheel is fixedly disposed at a non-central position of the rotating seat and is connected to the first transmission wheel in a transmission manner. The pick-and-place component is connected to the second transmission wheel, rotates with the second transmission wheel about the shaft, and rotates on its own axis about the central axis of the second transmission wheel. Wherein, the circumference of the first transmission wheel is C1, the circumference of the second transmission wheel is C2, and the angle of rotation of the second transmission wheel around its own central axis is α, C2 / C1=180° / α.

2. The rotating mechanism according to claim 1, characterized in that, The first transmission wheel includes a first synchronous roller, the second transmission wheel includes a second synchronous roller, and a synchronous belt is fitted onto the first synchronous roller and the second synchronous roller.

3. The rotating mechanism according to claim 2, wherein there are two second synchronous rollers, and the two second synchronous rollers are respectively disposed at both ends of the bottom surface of the rotating seat.

4. The rotating mechanism according to claim 3, characterized in that, It also includes two belt tensioners, which are located on the rotating seat and on both sides of the first synchronous roller; the synchronous belt is wound around the two belt tensioners.

5. The rotating mechanism according to claim 1, characterized in that, It also includes a base, the driving component is disposed on the base, and the rotating shaft is rotatably disposed on the base.

6. The rotating mechanism according to claim 1, characterized in that, A drive gear is fixedly sleeved on the output shaft of the drive component, and a driven gear is fixedly sleeved on the rotating shaft. The drive gear and the driven gear are meshed together.

7. The rotating mechanism according to claim 1, characterized in that, The first transmission wheel includes a first synchronizing gear, and the second transmission wheel includes a second synchronizing gear. The first synchronizing gear and the second synchronizing gear are meshed together. Toothed belts are fitted onto the first synchronous gear and the second synchronous gear.

8. The rotating mechanism according to any one of claims 1 to 7, characterized in that, The second transmission wheel rotates around its own central axis by an angle α, where 0°<α≤180°, and C2 / C1=(1~+∞):

1.

9. The rotating mechanism according to any one of claims 1 to 7, characterized in that, The driving component includes a motor and a reducer, with the reducer sleeved on the output shaft of the motor; the picking and placing component is a suction cup, a robotic arm, or a gripper.

10. A transfer device, characterized in that, Includes the rotating mechanism described in any one of claims 1 to 9.

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