Substrate handling device

Abstract

This utility model relates to the technical field of glass substrate processing equipment, and in particular to a substrate handling device, including a handling bracket, a gripping component, a first handling arm, a second handling arm, and a drive mechanism. The other end of the second handling arm is connected to the drive mechanism. The handling bracket is connected to a central shaft, and the central shaft is rotatably connected to a rotating shaft that is driven by the first handling arm. The second handling arm is rotatably connected to the handling bracket, and at least two angular contact bearings are connected between the second handling arm and the handling bracket. Each pair of adjacent angular contact bearings are installed face-to-face. The rotation center of the central shaft coincides with that of the second handling arm, and the rotating shaft is driven by the drive mechanism. This utility model is advantageous for handling glass substrates with long arm reach, enabling the gripping requirements of glass substrates to be met in one handling operation, and avoiding frequent movement or adjustment of equipment position when handling large-size glass substrates.

Description

Technical Field

[0001] This utility model relates to the technical field of glass substrate processing equipment, and in particular to a substrate handling device. Background Technology

[0002] Glass substrates are one of the key basic materials in the flat panel display industry. A transparent conductive layer of In2O3 or SnO2, namely ITO film, is deposited on the surface. Transparent conductive patterns are formed by photolithography. These patterns are composed of pixel patterns and external lead patterns. Therefore, the external leads cannot be soldered in the traditional way and can only be connected by conductive rubber strips or conductive tapes.

[0003] As the size of glass substrates increases, traditional short-arm equipment combined with a vacuum suction cup system requires handling large glass substrates in multiple steps. If the edge area is gripped multiple times, the glass substrate will be subjected to uneven stress, which can easily cause micro-cracks or breakage. Moreover, when handling large glass substrates, multiple short-arm equipment need to be moved or adjusted frequently to cover the large substrate. It is impossible to flip or tilt the substrate in one go, which increases the risk of collision during secondary positioning. The time spent on each handling increases, resulting in a longer production cycle. Utility Model Content

[0004] This invention addresses the shortcomings of existing technologies by providing a substrate handling device that can adapt to high-load axial impact loads and facilitates the handling of glass substrates with long reach. It enables the handling of glass substrates in a single operation to meet the gripping requirements, avoids frequent movement or adjustment of equipment position when handling large-sized glass substrates, shortens handling time, and reduces production cycle time.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] This utility model provides a substrate handling device, including a handling bracket, a gripping component for gripping a glass substrate, a first handling arm connected to the gripping component, a second handling arm with one end connected to the first handling arm to cause the gripping component to move, and a driving mechanism, wherein the other end of the second handling arm is connected to the driving mechanism.

[0007] The transport bracket is connected to a central shaft, and the central shaft is rotatably connected to a rotating shaft that is driven by the first transport arm. The second transport arm is rotatably connected to the transport bracket, and at least two angular contact bearings are connected between the second transport arm and the transport bracket. Each pair of adjacent angular contact bearings are installed face to face. The rotation center of the central shaft coincides with that of the second transport arm, and the rotating shaft is driven by a drive mechanism.

[0008] When it is necessary to move the glass substrate, the drive mechanism drives the rotating shaft to rotate, which in turn drives the first handling arm to move so that the gripping component is in the required position.

[0009] The rotating shaft is connected to a gear, which is connected to the first transport arm in a transmission manner. At least two support bearings are symmetrically installed between the gear and the rotating shaft.

[0010] The second transport arm is internally connected to a retainer, which is fitted with a retaining sleeve. The retaining sleeve is coaxially sleeved on the outside of the rotating shaft and is connected to at least one support bearing.

[0011] The retaining sleeve is provided with a first limiting groove, and the gear is provided with a second limiting groove. Both the first limiting groove and the second limiting groove extend circumferentially along the central axis. A limiting body is provided between the first limiting groove and the second limiting groove, and the two ends of the limiting body abut against the inner sidewalls of the first limiting groove and the second limiting groove, respectively.

[0012] When the gear rotates relative to the cage, the limiting body restricts the radial offset between the gear and the cage, so that the gear and the cage rotate about the axis of the central shaft.

[0013] The gripping assembly includes a support base connected to the first conveying arm and at least two gripping arms connected to the support base. Each gripping arm is provided with a support portion, and the support portion is equipped with a detection switch and an adsorption component.

[0014] When the glass substrate is accurately placed on the support, the detection switch confirms that the glass substrate is in the preset position, and the glass substrate is adsorbed by the adsorption component to achieve precise positioning of the glass substrate.

[0015] The adsorption component includes a first adsorption element, a second adsorption element, and a third adsorption element installed at both ends of the support portion, and installed on at least one side of the gripping arm. The third adsorption element is arranged at the same height as the first and second adsorption elements.

[0016] The first adsorption element includes an adsorption seat, an adsorption hole disposed on the adsorption seat, and a sealing gasket. The support part is provided with a connecting hole. The adsorption seat is installed on the support part. The connecting hole communicates with the adsorption hole. The sealing gasket seals the connection between the connecting hole and the adsorption hole.

[0017] The support portion is provided with an installation groove, the adsorption seat is installed in the installation groove, and a buffer washer is installed at the top of the adsorption seat, with the top of the buffer washer being higher than the top of the adsorption hole.

[0018] The gripping arm is provided with an air supply channel, which is connected to a connecting hole. The third adsorption element is connected to an adsorption tube, which is connected to the air supply channel.

[0019] The support base is provided with an installation cavity, and the gas supply channel is connected to the installation cavity.

[0020] The first and second adsorption elements are both connected to adsorption connectors. The adsorption connectors are installed in the gas delivery channel. An isolation gasket is connected between the adsorption connectors and the gas delivery channel. One end of the adsorption connector is connected to a connecting hole.

[0021] The beneficial effects of this utility model are:

[0022] In practical applications, when glass substrates need to be moved, the drive mechanism drives the rotating shaft to rotate, which in turn moves the first handling arm to position the gripping component in the required position, thereby gripping the glass substrate. Since at least two angular contact bearings are connected between the second handling arm and the handling bracket, and each pair of adjacent angular contact bearings are installed face-to-face, the axial load is decomposed into two opposing components, effectively reducing the contact stress of a single bearing. This allows the load of the second handling arm to form multi-point distributed support, avoiding stress concentration and local load exceeding the limit, significantly improving axial stiffness and bidirectional load-bearing capacity. This facilitates the adaptation of this substrate handling device to high-load axial impact loads, can stably support the load required for moving large-size glass substrates, and is suitable for handling glass substrates with long arm spans. It enables the gripping requirements of glass substrates to be met in one handling operation, avoiding frequent movement or adjustment of equipment position when handling large-size glass substrates, shortening handling time, and reducing production cycle time. Attached Figure Description

[0023] Figure 1 This is a front view of the structure of the substrate handling device.

[0024] Figure 2 This is a cross-sectional view of the connection structure with a transport bracket, a central shaft, and a second transport arm.

[0025] Figure 3 This is a cross-sectional view of the partial connection structure between the second transport arm and the transport bracket.

[0026] Figure 4 This is a sectional view of the connection structure with a second handling arm, a rotating shaft, and a handling bracket.

[0027] Figure 5 This is a schematic diagram of the 3D structure of the grabbing component.

[0028] Figure 6 This is an exploded view of the connection structure of the first adsorption element.

[0029] Figure 7 This is a schematic diagram of the exploded structure of the gripper arm.

[0030] Figure 8 This is an exploded view of the 3D structure at the connection between the support base and the gripper arm.

[0031] Figure 9 This is an exploded view of the three-dimensional structure of the adsorption connector.

[0032] 1. Transport bracket; 101. Central shaft; 102. Rotating shaft;

[0033] 1021, Gear; 1022, Support bearing; 10211, Second limiting groove;

[0034] 100. Angular contact bearings;

[0035] 2. Crawling component;

[0036] 21. Support base; 211. Mounting cavity; 22. Gripping arm; 221. Support part; 2211. Connecting hole; 2212. Mounting groove;

[0037] 210. Detection switch;

[0038] 222. Gas transmission channel;

[0039] 3. First transport arm;

[0040] 4. Second transport arm; 41. Cage; 42. Cage sleeve;

[0041] 421. First limiting groove;

[0042] 400. Limiting body;

[0043] 5. Drive mechanism;

[0044] 61. First adsorption element;

[0045] 611. Adsorption base; 612. Adsorption hole; 613. Sealing gasket;

[0046] 610. Buffer washers;

[0047] 62. Second adsorption element; 63. Third adsorption element;

[0048] 7. Adsorption connector; 71. Isolation gasket. Detailed Implementation

[0049] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments.

[0050] refer to Figures 1 to 9As shown, this utility model provides a substrate handling device, including a handling bracket 1, a gripping component 2 for gripping a glass substrate, a first handling arm 3 connected to the gripping component 2, a second handling arm 4 with one end connected to the first handling arm 3 to cause the gripping component 2 to move, and a driving mechanism 5. The other end of the second handling arm 4 is connected to the driving mechanism 5. The handling bracket 1 is connected to a central shaft 101, and the central shaft 101 is rotatably connected to a rotating shaft 102 that is drively connected to the first handling arm 3. The second handling arm 4 is rotatably connected to the handling bracket 1, and at least two angular contact bearings 100 are connected between the second handling arm 4 and the handling bracket 1. Each pair of adjacent angular contact bearings 100 are installed face to face. The rotation center of the central shaft 101 coincides with that of the second handling arm 4, and the rotating shaft 102 is drively connected to the driving mechanism 5.

[0051] refer to Figure 1 , 2 As shown, in practical applications, the drive mechanism 5 uses a servo motor or a bidirectional motor to smoothly drive the rotating shaft 102 to rotate. When it is necessary to move a glass substrate, the drive mechanism 5 drives the rotating shaft 102 to rotate, which in turn moves the first moving arm 3 so that the gripping component 2 is positioned as required, thereby gripping the glass substrate through the gripping component 2. The rotating shaft 102 and the first moving arm 3 are connected by a synchronous belt assembly. The synchronous belt assembly forms a planetary system between the hinge points on the second moving arm 4 and the rotating shaft 102 and the first moving arm 3, respectively. Through the planetary system structure, the rotation of the rotating shaft 102 drives the first moving arm 3 to rotate, which in turn drives the hinge points of the second moving arm 4 and the first moving arm 3 to change synchronously, realizing the synchronous swing of the first moving arm 3 and the second moving arm 4, which facilitates the smooth execution of corresponding actions by the first moving arm 3 and the second moving arm 4. Figure 2 As shown, since at least two angular contact bearings 100 are connected between the second transport arm 4 and the transport bracket 1, and each pair of adjacent angular contact bearings 100 are installed face to face, the axial load is decomposed into two opposing components, effectively reducing the contact stress of a single bearing. This allows the load of the second transport arm 4 to form multi-point distributed support, avoiding stress concentration and local load exceeding the limit, significantly improving axial stiffness and bidirectional load-bearing capacity. This facilitates the adaptation of this substrate transport device to high-load axial impact loads, can stably support the load required for transporting large-size glass substrates, and is conducive to adapting to the transport of glass substrates with long arm spans. It enables the one-time transport to meet the gripping requirements of glass substrates, avoids frequent movement or adjustment of equipment position when transporting large-size glass substrates, shortens transport time, and reduces production cycle time.

[0052] refer to Figure 2 , 3As shown, in this embodiment, the rotating shaft 102 is connected to a gear 1021, which is connected to the first transport arm 3 via a transmission. At least two support bearings 1022 are symmetrically installed between the gear 1021 and the rotating shaft 102. In practical applications, the rotation of the rotating shaft 102 drives the gear 1021 and the first transport arm 3 to move synchronously. The support bearings 1022 stabilize the support points between the gear 1021 and the rotating shaft 102. When the gear 1021 meshes and generates a radial load, the upper and lower distributed support bearings 1022 respectively form a couple constraint, establishing a double support point in the vertical direction. By increasing the constraint conditions, the rigidity of the system is improved, and the load distribution changes from the traditional concentrated bearing to a multi-point distributed bearing mode, effectively suppressing shaft system deflection and deformation, and facilitating the smooth rotation of the gear 1021.

[0053] refer to Figure 4 As shown, in this embodiment, a retainer 41 is internally connected to the second transport arm 4, and a retaining sleeve 42 is installed on the retainer 41. The retaining sleeve 42 is coaxially sleeved on the outside of the rotating shaft 102, and the retaining sleeve 42 is connected to at least one support bearing 1022; Reference Figure 3 , 4 As shown, in actual application, the rotation of the second transport arm 4 drives the retainer 41 to rotate synchronously, which in turn drives the retaining sleeve 42 to provide stable support to one end of the rotating shaft 102, ensuring the coaxiality of the rotating shaft 102 and thus ensuring rotation accuracy.

[0054] refer to Figure 2 , 3 As shown in Figure 4, in this embodiment, the retaining sleeve 42 is provided with a first limiting groove 421, and the gear 1021 is provided with a second limiting groove 10211. The first limiting groove 421 and the second limiting groove 10211 both extend circumferentially along the central axis 101. A limiting body 400 is provided between the first limiting groove 421 and the second limiting groove 10211. The two ends of the limiting body 400 abut against the inner sidewalls of the first limiting groove 421 and the second limiting groove 10211, respectively.

[0055] refer to Figure 2 , 3As shown, in practical applications, the gear 1021 rotates relative to the cage 41, and the limiting body 400 restricts the radial offset between the gear 1021 and the cage 41, so that the gear 1021 and the cage 41 rotate around the axis of the central shaft 101. Through the topological design of the first limiting groove 421 and the second limiting groove 10211 extending circumferentially along the central shaft 101, an annular guide channel is constructed along the circumferential direction of the central shaft 101. When the limiting body 400 is simultaneously embedded in the two grooves, its continuous contact with the groove wall forms a closed kinematic chain, forcing the gear 1021 and the cage 41 to maintain an angle during rotation around the axis. Displacement synchronization, this constraint mode breaks through the traditional single-point limiting mode of keyways, and locks the rotational degree of freedom to the same motion reference plane through distributed contact, eliminating the phase accumulation error caused by assembly gaps; when the gear 1021 has a radial offset tendency due to meshing force or inertia, the contact pressure between the limiting body 400 on the offset direction side and the corresponding groove wall increases, forming nonlinear contact stiffness; while the gap closing process on the reverse side absorbs impact energy through elastic deformation, thereby preferentially suppressing the radial translational degree of freedom, while retaining the rotational degree of freedom of the gear 1021 and the cage 41 around the central axis 101.

[0056] refer to Figure 1 , 5 As shown, in this embodiment, the gripping component 2 includes a support base 21 connected to the first conveying arm 3 and at least two gripping arms 22 connected to the support base 21. The gripping arms 22 are provided with a support portion 221, and the support portion 221 is equipped with a detection switch 210 and an adsorption component. When the glass substrate is accurately placed on the support portion 221, the detection switch 210 confirms that the glass substrate is in a preset position, and the adsorption component adsorbs the glass substrate to achieve accurate positioning of the glass substrate. The accurate adsorption of the glass substrate by the adsorption component facilitates precise positioning of the glass substrate.

[0057] refer to Figure 5 , 6As shown, in this embodiment, the adsorption component includes a first adsorption member 61 and a second adsorption member 62 respectively installed at both ends of the support 221, and a third adsorption member 63 installed on at least one side of the gripping arm 22. The third adsorption member 63 is arranged at the same height as the first adsorption member 61 and the second adsorption member 62. In actual application, the detection switch 210 is a position detection switch 210. When the glass substrate is accurately placed on the support 221, the detection switch 210 confirms that the glass substrate body is in a preset position, thereby accurately determining the position of the glass substrate body. The glass substrate is adsorbed by the first adsorption member 61, the second adsorption member 62 and the third adsorption member 63 to achieve accurate positioning of the glass substrate body. Specifically, the third adsorption member 63 can be installed on both sides of the gripping arm 22 to increase the adsorption area of ​​the glass substrate and improve the adsorption stability. The third adsorption member 63 can also be installed on a single side of the gripping arm 22, and the third adsorption member 63 can be located on different sides of the gripping arm 22 to meet the handling requirements of glass substrates of different sizes, increase the adsorption area of ​​the glass substrate, prevent damage to the glass substrate during handling, and ensure the structural integrity of the glass substrate.

[0058] refer to Figure 6 As shown, in this embodiment, the first adsorption element 61 includes an adsorption seat 611, an adsorption hole 612 disposed on the adsorption seat 611, and a sealing gasket 613. The support portion 221 is provided with a connecting hole 2211. The adsorption seat 611 is installed on the support portion 221, and the connecting hole 2211 communicates with the adsorption hole 612. The sealing gasket 613 seals the connection between the connecting hole 2211 and the adsorption hole 612. In practical applications, the connecting hole 2211 is connected to a vacuum generator, which is a vacuum pump. When the glass substrate is accurately placed on the support portion 221, the vacuum pump generates a negative pressure in the connecting hole 2211 and the adsorption hole 612, thereby successfully adsorbing the glass substrate. The sealing gasket 613 prevents gas leakage along the connection between the connecting hole 2211 and the adsorption hole 612, ensuring the airtightness of the structure. Specifically, the first adsorption element 61 and the second adsorption element 62 have the same structure, which facilitates the successful adsorption of the glass substrate and ensures the airtightness of the structure.

[0059] refer to Figure 1 , 5 As shown in Figure 6, in this embodiment, the support 221 is provided with a mounting groove 2212, and the adsorption seat 611 is installed in the mounting groove 2212. The structure is compact and saves space. A buffer washer 610 is installed at the top of the adsorption seat 611. The top of the buffer washer 610 is higher than the top of the adsorption hole 612, so that the glass substrate can smoothly contact the buffer washer 610 when it is adsorbed by negative pressure. This helps to reduce the impact and vibration of external forces on the glass substrate and protect the glass substrate from damage. The buffer washer 610 surrounds and closes the open end of the top of the adsorption hole 612, which facilitates the formation of a sealed space between the glass substrate and the adsorption hole 612.

[0060] refer to Figure 7 , 8 As shown, in this embodiment, the gripping arm 22 is provided with an air supply channel 222, which is connected to the connecting hole 2211. The third adsorption element 63 is connected to an adsorption tube, which is connected to the air supply channel 222. The support base 21 is provided with an installation cavity 211, which is connected to the air supply channel 222. In actual application, a negative pressure is connected to the installation cavity 211. The negative pressure can be smoothly filled into the connecting hole 2211, the adsorption tube and the third adsorption element 63 through the air supply channel 222, thereby successfully adsorbing the glass substrate.

[0061] refer to Figure 5 , 9 As shown, in this embodiment, both the first adsorption element 61 and the second adsorption element 62 are connected to an adsorption connector 7. The adsorption connector 7 is installed in the gas delivery channel 222, and an isolation gasket 71 is connected between the adsorption connector 7 and the gas delivery channel 222. In actual application, one end of the adsorption connector 7 is connected to the connecting hole 2211, and the other end of the adsorption connector 7 is connected to an external negative pressure generating device through a pipeline, so as to facilitate the smooth delivery of the negative pressure generated by the negative pressure generating device. By setting adsorption connectors 7 at the connection between the first adsorption element 61 and the second adsorption element 62, when maintaining and expanding the system, only the damaged or adjusted adsorption connector 7 needs to be replaced, without disassembling the entire gas delivery channel 222 system, which facilitates the reduction of maintenance time.

[0062] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A substrate handling device, characterized in that, It includes a transport bracket (1), a gripping assembly (2) for gripping a glass substrate, a first transport arm (3) connected to the gripping assembly (2), a second transport arm (4) with one end connected to the first transport arm (3) to cause the gripping assembly (2) to move, and a drive mechanism (5), with the other end of the second transport arm (4) connected to the drive mechanism (5). The transport bracket (1) is connected to a central shaft (101), the central shaft (101) is rotatably connected to a rotating shaft (102) that is driven by the first transport arm (3), the second transport arm (4) is rotatably connected to the transport bracket (1), and at least two angular contact bearings (100) are connected between the second transport arm (4) and the transport bracket (1). Each pair of adjacent angular contact bearings (100) are installed face to face. The rotation center of the central shaft (101) coincides with that of the second transport arm (4), and the rotating shaft (102) is driven by the drive mechanism (5). When it is necessary to move the glass substrate, the drive mechanism (5) drives the rotating shaft (102) to rotate, which in turn drives the first handling arm (3) to move so that the gripping component (2) is in the required position.

2. The substrate handling device according to claim 1, characterized in that, The rotating shaft (102) is connected to a gear (1021), the gear (1021) is connected to the first transport arm (3) for transmission, and at least two support bearings (1022) are symmetrically installed between the gear (1021) and the rotating shaft (102).

3. The substrate handling device according to claim 2, characterized in that, The second transport arm (4) is internally connected to a retainer (41), and a retaining sleeve (42) is installed on the retainer (41). The retaining sleeve (42) is coaxially sleeved on the outside of the rotating shaft (102), and the retaining sleeve (42) is connected to at least one support bearing (1022).

4. The substrate handling device according to claim 3, characterized in that, The retaining sleeve (42) is provided with a first limiting groove (421), and the gear (1021) is provided with a second limiting groove (10211). The first limiting groove (421) and the second limiting groove (10211) both extend circumferentially along the central axis (101). A limiting body (400) is provided between the first limiting groove (421) and the second limiting groove (10211). The two ends of the limiting body (400) respectively abut against the inner sidewalls of the first limiting groove (421) and the second limiting groove (10211). When the gear (1021) rotates relative to the cage (41), the limiting body (400) restricts the radial offset between the gear (1021) and the cage (41) so that the gear (1021) and the cage (41) rotate about the axis of the central shaft (101).

5. The substrate handling device according to claim 1, characterized in that, The gripping assembly (2) includes a support base (21) connected to the first transport arm (3) and at least two gripping arms (22) connected to the support base (21). The gripping arms (22) are provided with a support part (221), and the support part (221) is equipped with a detection switch (210) and an adsorption component. When the glass substrate is accurately placed on the support (221), the detection switch (210) confirms that the glass substrate is in the preset position and the glass substrate is adsorbed by the adsorption component to achieve accurate positioning of the glass substrate.

6. The substrate handling device according to claim 5, characterized in that, The adsorption component includes a first adsorption member (61) and a second adsorption member (62) respectively installed at both ends of the support (221) and a third adsorption member (63) installed on at least one side of the gripping arm (22). The third adsorption member (63) is arranged at the same height as the first adsorption member (61) and the second adsorption member (62).

7. The substrate handling apparatus according to claim 6, characterized in that, The first adsorption element (61) includes an adsorption seat (611), an adsorption hole (612) disposed on the adsorption seat (611), and a sealing gasket (613). The support part (221) is provided with a connecting hole (2211). The adsorption seat (611) is installed on the support part (221). The connecting hole (2211) communicates with the adsorption hole (612). The sealing gasket (613) seals the connection between the connecting hole (2211) and the adsorption hole (612).

8. The substrate handling apparatus according to claim 7, characterized in that, The support part (221) is provided with an installation groove (2212), the adsorption seat (611) is installed in the installation groove (2212), and a buffer washer (610) is installed at the top of the adsorption seat (611), the top of the buffer washer (610) being higher than the top of the adsorption hole (612).

9. The substrate handling device according to claim 6, characterized in that, The gripping arm (22) is provided with an air supply channel (222), which is connected to a connecting hole (2211). The third adsorption element (63) is connected to an adsorption tube, which is connected to the air supply channel (222). The support base (21) is provided with an installation cavity (211), and the gas supply channel (222) is connected to the installation cavity (211).

10. The substrate handling apparatus according to claim 9, characterized in that, The first adsorption element (61) and the second adsorption element (62) are both connected to an adsorption connector (7). The adsorption connector (7) is installed in the gas supply channel (222). An isolation gasket (71) is connected between the adsorption connector (7) and the gas supply channel (222). One end of the adsorption connector (7) is connected to the connecting hole (2211).

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