Lifting mechanism and robot hand

Abstract

This utility model discloses a lifting mechanism and a robotic arm. The lifting mechanism includes a support arm, a telescopic arm, a motor, a lead screw, and a lead screw nut. The motor is mounted on the support arm, one end of the lead screw is connected to the output end of the motor, the lead screw nut is screwed onto the lead screw, and the lead screw nut is connected to the telescopic arm. A sleeve is provided on the telescopic arm, and a first support member is slidably connected inside the sleeve. The other end of the lead screw is rotatably connected to the first support member, and the sleeve accommodates the lead screw. The robotic arm includes a traversing mechanism, the lifting mechanism, a cantilever beam, and a basket. This utility model can avoid radial sway during lead screw transmission, ensure the stability of the telescopic arm during extension and retraction, thereby ensuring the positional accuracy of the silicon wafer immersed in the process tank and improving the yield of silicon wafers.

Description

Technical Field

[0001] This utility model relates to the field of robotic arm technology, specifically to a lifting mechanism and a robotic arm. Background Technology

[0002] During silicon wafer processing, a robotic arm is needed to precisely place the silicon wafers into designated positions within the process tank to ensure process uniformity and consistency. The robotic arm includes a lifting mechanism, a cantilever beam mechanism, and a basket. The lifting mechanism comprises a telescopic arm, a lifting servo motor, a ball screw, and a screw nut. The screw nut is mounted on the telescopic arm. The cantilever beam mechanism is mounted on the telescopic arm, and the basket is mounted on the cantilever beam mechanism.

[0003] During operation, the lifting servo motor drives the ball screw to rotate. The movement of the ball screw causes the screw nut to move, converting the rotation of the ball screw into the extension and retraction of the telescopic arm, which in turn drives the lifting and lowering of the cantilever beam mechanism, thus realizing the operation of lowering and raising the flower basket.

[0004] However, in existing ball screws, one end is fixedly connected to the output end of the lifting servo motor, while the other end is free and unrestrained. As a result, the ball screw is prone to shaking during transmission, affecting the placement accuracy of the silicon wafer. Utility Model Content

[0005] To overcome the shortcomings of the prior art, this utility model provides a lifting mechanism and a robotic arm that can avoid radial sway during lead screw transmission, ensure the stability of the telescopic arm during extension and retraction, thereby ensuring the positional accuracy of the silicon wafer immersed in the process tank and improving the yield of the silicon wafer.

[0006] The technical solution adopted by this utility model to solve its technical problem is:

[0007] A lifting mechanism and a robotic arm include a support arm, a telescopic arm, a motor, a lead screw, and a lead screw nut. The motor is mounted on the support arm, one end of the lead screw is connected to the output end of the motor, the lead screw nut is screwed onto the lead screw, and the lead screw nut is connected to the telescopic arm. The telescopic arm is characterized by having a sleeve, a first support member being slidably connected inside the sleeve, and the other end of the lead screw being rotatably connected to the first support member. The sleeve accommodates the lead screw.

[0008] As a further improvement to the above technical solution, the first support member includes a first bearing fixing seat and a first bearing. The outer ring of the first bearing fixing seat is slidably connected to the inner wall of the sleeve. The first bearing is installed in the first bearing fixing seat, and the inner ring of the first bearing is sleeved on one end of the lead screw.

[0009] As a further improvement to the above technical solution, one end of the lead screw is provided with a first stepped shaft, the first stepped shaft having a first threaded section and a first mounting section, the inner ring of the first bearing cooperating with the first mounting section, and the first threaded section being threadedly connected to a first locking nut.

[0010] As a further improvement to the above technical solution, a second support member is provided on the support arm. The second support member includes a second bearing fixing seat, a second bearing, and a second locking nut. The other end of the lead screw is provided with a second stepped shaft and a connecting shaft. The second stepped shaft has a second threaded section and a second mounting section. The second bearing fixing seat is fixed on the support arm. The second bearing is installed in the second bearing fixing seat. The inner ring of the second bearing mates with the second mounting section. The second locking nut mates with the second threaded section. The connecting shaft is connected to the output end of the motor.

[0011] As a further improvement to the above technical solution, the telescopic arm includes a first base plate, two first side plates and several reinforcing plates. The two first side plates are respectively disposed on both sides of the first base plate. The three sides of the reinforcing plates are respectively connected to the inner sides of the first base plate and the two first side plates. The sleeve is fixed on several reinforcing plates, and the lead screw nut is connected to the bottommost reinforcing plate.

[0012] As a further improvement to the above technical solution, the reinforcing plate is provided with a receiving hole and a threaded hole. The receiving hole is used to receive the sleeve, and the threaded hole is connected to and perpendicular to the receiving hole. One end of the sleeve is provided with a first positioning plane, and one of the receiving holes of the reinforcing plate is provided with a second positioning plane. The first positioning plane cooperates with the second positioning plane.

[0013] As a further improvement to the above technical solution, the support arm includes a second base plate and two second side plates. The two second side plates are respectively disposed on both sides of the second base plate. The first base plate is located inside the second base plate. The two first side plates are respectively located inside the two second side plates. The first base plate is slidably connected to the second base plate, and or the first side plate is slidably connected to the second side plate.

[0014] As a further improvement to the above technical solution, a guide module is provided between the first side plate and the second side plate. The guide module includes a slider and a guide rail. The slider is slidably connected to the guide rail. The slider is disposed on the first side plate and the guide rail is disposed on the second side plate.

[0015] As a further improvement to the above technical solution, the output end of the motor is connected to a speed reducer, and one end of the connecting shaft is connected to the output end of the speed reducer.

[0016] A robotic arm includes a lateral movement mechanism, a cantilever beam, and a flower basket, characterized in that it further includes the aforementioned lifting mechanism, wherein the lateral movement mechanism is used to drive the support arm to move laterally, the cantilever beam is disposed on the telescopic arm, and the flower basket is disposed on the cantilever beam.

[0017] The beneficial effects of this utility model are:

[0018] 1. This utility model provides a lifting mechanism, which includes a sleeve on a telescopic arm, with a first support member slidably connected inside the sleeve. The other end of a lead screw is rotatably connected to the first support member, and the sleeve accommodates the lead screw. During operation, the motor drives the lead screw to rotate, which in turn drives the lead screw nut to move axially. The lead screw nut causes the telescopic arm to extend or retract into the support arm. Simultaneously, the telescopic arm moves linearly along with the sleeve. The first support member at the end of the lead screw slides relative to the inner wall of the sleeve, and the inner wall of the sleeve provides radial constraint on the first support member. This prevents radial swaying during lead screw transmission and ensures the stability of the telescopic arm during extension and retraction.

[0019] 2. This utility model provides a robotic arm that includes a lateral movement mechanism, a lifting mechanism, a cantilever beam, and a basket. The basket can carry multiple silicon wafers. The lateral movement mechanism drives the support arm to move laterally, which in turn drives the lifting mechanism, the cantilever beam, and the basket to move laterally as a whole. The motor of the lifting mechanism drives the telescopic arm to extend or retract the support arm, which in turn drives the cantilever beam and the basket to lift as a whole, preventing the basket from swinging. This allows the silicon wafers on the basket to be accurately immersed into or removed from the process tank, avoiding process defects caused by silicon wafer collisions or positional deviations, and improving the yield of silicon wafers. Attached Figure Description

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0021] Figure 1 This is a schematic diagram of the structure of a robotic arm according to an embodiment of this utility model;

[0022] Figure 2 This is a structural schematic diagram of a lifting mechanism according to an example of this utility model;

[0023] Figure 3 yes Figure 2 Structural diagram of the middle support arm and telescopic arm;

[0024] Figure 4 yes Figure 3 Enlarged view of point A in the middle;

[0025] Figure 5 yes Figure 2 A schematic diagram of the structure of the middle sleeve, lead screw, first support member, and second support member.

[0026] Reference numerals: 110-Support arm, 111-Second base plate, 112-Second side plate, 120-Telescopic arm, 121-First base plate, 122-First side plate, 123-Reinforcing plate, 1231-Accommodation hole, 1232-Threaded hole, 1233-Second positioning plane, 130-Motor, 140-Lead screw, 141-First stepped shaft, 142-Second stepped shaft, 143-Connecting shaft, 150-Lead screw nut, 16 0-Sleeve, 161-First positioning plane, 170-First support member, 171-First bearing fixing seat, 172-First bearing, 173-First locking nut, 180-Second support member, 181-Second bearing fixing seat, 182-Second bearing, 183-Second locking nut, 190-Guide module, 191-Slider, 192-Slide rail, 200-Reducer, 210-Transverse movement mechanism, 220-Cantilever beam. Detailed Implementation

[0027] The following will clearly and completely describe the concept, specific structure, and technical effects of this utility model in conjunction with embodiments and accompanying drawings, so as to fully understand the purpose, features, and effects of this utility model. Obviously, the described embodiments are only a part of the embodiments of this utility model, not all of them. Other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are all within the scope of protection of this utility model. Furthermore, all connections / linkages involved in the patent do not simply refer to direct contact between components, but rather to the ability to form a better connection structure by adding or reducing connecting accessories according to specific implementation conditions. The various technical features in this utility model can be combined interactively without contradicting each other.

[0028] Reference Figures 2 to 5 An embodiment of this utility model provides a lifting mechanism, including a support arm 110, a telescopic arm 120, a motor 130, a lead screw 140, and a lead screw nut 150. The motor 130 is mounted on the support arm 110. One end of the lead screw 140 is connected to the output end of the motor 130. The lead screw nut 150 is screwed onto the lead screw 140 and connected to the telescopic arm 120. A sleeve 160 is provided on the telescopic arm 120. A first support member 170 is slidably connected inside the sleeve 160. The other end of the lead screw 140 is rotatably connected to the first support member 170. The sleeve 160 accommodates the lead screw 140.

[0029] Understandably, during operation, the motor 130 drives the lead screw 140 to rotate, the lead screw 140 drives the lead screw nut 150 to move along the axial direction of the lead screw 140, the lead screw nut 150 drives the telescopic arm 120 to extend or retract into the support arm 110, and at the same time, the telescopic arm 120 drives the sleeve 160 to move linearly together. The first support member 170 set at the end of the lead screw 140 slides relative to the inner wall of the sleeve 160, and the inner wall of the sleeve 160 provides radial constraint to the first support member 170. Thus, radial swaying can be avoided when the lead screw 140 is driven, and the stability of the telescopic arm 120 during extension and retraction can be guaranteed.

[0030] In some preferred embodiments, the first support 170 includes a first bearing fixing seat 171 and a first bearing 172. The outer ring of the first bearing fixing seat 171 is slidably connected to the inner wall of the sleeve 160. The first bearing 172 is installed inside the first bearing fixing seat 171, and the inner ring of the first bearing 172 is sleeved on one end of the lead screw 140.

[0031] Understandably, during the extension and retraction of the telescopic boom 120, the first bearing fixing seat 171 slides relative to the inner wall of the sleeve 160, which can ensure the coaxiality of the first bearing fixing seat 171 and the sleeve 160, thereby ensuring the coaxiality of the lead screw 140 and the sleeve 160. Moreover, the first bearing 172 supports one end of the lead screw 140, which can reduce the rotational resistance of the lead screw 140, reduce the load on the motor 130, and extend the life of the lead screw 140.

[0032] Furthermore, one end of the lead screw 140 is provided with a first stepped shaft 141, the first stepped shaft 141 has a first threaded section and a first mounting section, the inner ring of the first bearing 172 mates with the first mounting section, and the first threaded section is threadedly connected with a first locking nut 173.

[0033] Understandably, after the inner ring of the first bearing 172 is fitted into the first mounting section of the first stepped shaft 141, one side of the first bearing 172 abuts against the shoulder of the first stepped shaft 141. Then, the first locking nut 173 is screwed into the first threaded section of the first stepped shaft 141. The first locking nut 173 limits the other side of the first bearing 172, thereby preventing the first bearing 172 from axially moving. At the same time, it facilitates the disassembly, assembly, and subsequent maintenance of the first bearing 172.

[0034] In some preferred embodiments, a second support member 180 is provided on the support arm 110. The second support member 180 includes a second bearing fixing seat 181, a second bearing 182, and a second locking nut 183. The other end of the lead screw 140 is provided with a second stepped shaft 142 and a connecting shaft 143. The second stepped shaft 142 has a second threaded section and a second mounting section. The second bearing fixing seat 181 is fixed on the support arm 110. The second bearing 182 is installed in the second bearing fixing seat 181. The inner ring of the second bearing 182 mates with the second mounting section. The second locking nut 183 mates with the second threaded section. The connecting shaft 143 is connected to the output end of the motor 130.

[0035] It is understandable that the first support member 170 and the second support member 180 can constrain both ends of the lead screw 140, thereby improving the support stiffness of the lead screw 140, preventing the lead screw 140 from bending and deforming, and ensuring transmission stability.

[0036] In some preferred embodiments, the telescopic boom 120 includes a first base plate 121, two first side plates 122, and several reinforcing plates 123. The two first side plates 122 are respectively disposed on both sides of the first base plate 121. The three sides of the reinforcing plates 123 are respectively connected to the inner sides of the first base plate 121 and the two first side plates 122. A sleeve 160 is fixed to the several reinforcing plates 123, and a lead screw nut 150 is connected to the bottommost reinforcing plate 123. This reduces the overall weight of the telescopic boom 120, achieving lightweight design. At the same time, the several reinforcing plates 123 can improve the bending stiffness of the telescopic boom 120, preventing deformation due to excessive load. The sleeve 160 is fixed to the reinforcing plates 123, placing the sleeve 160 inside the telescopic boom 120, resulting in a compact structure.

[0037] Furthermore, the reinforcing plate 123 has a receiving hole 1231 and a threaded hole 1232. The receiving hole 1231 is used to receive the sleeve 160, and the threaded hole 1232 is connected to and perpendicular to the receiving hole 1231. One end of the sleeve 160 is provided with a first positioning plane 161, and one of the receiving holes 1231 of the reinforcing plate 123 is provided with a second positioning plane 1233. The first positioning plane 161 and the second positioning plane 1233 cooperate with each other.

[0038] Understandably, the engagement of the first positioning plane 161 and the second positioning plane 1233 prevents the sleeve 160 from rotating within the reinforcing plate 123. Simultaneously, the threaded hole 1232 allows for bolt installation, with one end of the bolt abutting against the outside of the sleeve 160 to lock it in place. This ensures the sleeve 160 is securely connected to the reinforcing plate 123, preventing it from wobbling and further improving the stability of the lead screw 140 during transmission.

[0039] In some preferred embodiments, the support arm 110 includes a second base plate 111 and two second side plates 112. The two second side plates 112 are respectively disposed on both sides of the second base plate 111. The first base plate 121 is located inside the second base plate 111, and the two first side plates 122 are respectively located inside the two second side plates 112. The first base plate 121 is slidably connected to the second base plate 111, and / or the first side plate 122 is slidably connected to the second side plate 112.

[0040] Understandably, by fully embedding the telescopic arm 120 into the support arm 110, the overall structure can be made compact. By sliding the first base plate 121 and the second base plate 111 together, and / or sliding the first side plate 122 and the second side plate 112 together, it is possible to prevent the telescopic arm 120 from getting stuck or tilting during the telescopic process.

[0041] It should be noted that only the first base plate 121 and the second base plate 111 can be slidably connected; only the first side plate 122 and the second side plate 112 can be slidably connected; and even the first base plate 121 and the second base plate 111 can be slidably connected, while the first side plate 122 and the second side plate 112 are slidably connected.

[0042] Furthermore, a guide module 190 is provided between the first side plate 122 and the second side plate 112. The guide module 190 includes a slider 191 and a guide rail. The slider 191 is slidably connected to the guide rail. The slider 191 is disposed on the first side plate 122 and the guide rail is disposed on the second side plate 112.

[0043] In other embodiments, the slider 191 may also be disposed on the second side plate 112, and the guide rail may be disposed on the first side plate 122.

[0044] Understandably, by setting up slider 191 and guide rail, slider 191 slides relative to guide rail when telescopic arm 120 extends and retracts, thereby providing high-precision guidance for telescopic arm 120, preventing telescopic arm 120 from shaking, improving stability, and at the same time reducing friction between telescopic arm 120 and support arm 110, preventing telescopic arm 120 from jamming.

[0045] In some preferred embodiments, the output end of the motor 130 is connected to the reducer 200, and one end of the connecting shaft 143 is connected to the output end of the reducer 200.

[0046] Understandably, by setting up the speed reducer 200, the output torque can be increased and the output speed can be reduced, so that the lead screw 140 can withstand a higher load and avoid overloading the motor 130.

[0047] Reference Figure 1This utility model embodiment also provides a robotic arm, including a lateral movement mechanism 210, a cantilever beam 220, a flower basket (not shown in the figure) and the above-mentioned lifting mechanism. The lateral movement mechanism 210 is used to drive the support arm 110 to move laterally. The cantilever beam 220 is arranged on the telescopic arm 120, and the flower basket is arranged on the cantilever beam 220.

[0048] Understandably, the basket can carry multiple silicon wafers. The lateral movement mechanism 210 drives the support arm 110 to move laterally, which in turn drives the lifting mechanism, the cantilever beam 220, and the basket as a whole to move laterally. The motor 130 of the lifting mechanism drives the telescopic arm 120 to extend or retract the support arm 110, which in turn drives the cantilever beam 220 and the basket as a whole to lift and lower, preventing the basket from swaying. This allows the silicon wafers on the basket to be accurately immersed into or removed from the process tank, avoiding process defects caused by silicon wafer collisions or positional deviations, and improving the yield of silicon wafers.

[0049] The above is a detailed description of the preferred embodiments of the present utility model. However, the present utility model is not limited to the described embodiments. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present utility model. All such equivalent modifications or substitutions are included within the scope defined by the claims of this application.

Claims

1. A lifting mechanism, comprising a support arm, a telescopic arm, a motor, a lead screw, and a lead screw nut, wherein the motor is mounted on the support arm, one end of the lead screw is connected to the output end of the motor, the lead screw nut is screwed onto the lead screw, and the lead screw nut is connected to the telescopic arm, characterized in that, The telescopic arm is provided with a sleeve, and a first support member is slidably connected inside the sleeve. The other end of the lead screw is rotatably connected to the first support member, and the sleeve accommodates the lead screw.

2. The lifting mechanism according to claim 1, characterized in that, The first support includes a first bearing mounting base and a first bearing. The outer ring of the first bearing mounting base is slidably connected to the inner wall of the sleeve. The first bearing is installed inside the first bearing mounting base, and the inner ring of the first bearing is sleeved on one end of the lead screw.

3. A lifting mechanism according to claim 2, characterized in that, One end of the lead screw is provided with a first stepped shaft, the first stepped shaft has a first threaded section and a first mounting section, the inner ring of the first bearing is engaged with the first mounting section, and the first threaded section is threadedly connected with a first locking nut.

4. A lifting mechanism according to claim 1, characterized in that, The support arm is provided with a second support member, which includes a second bearing fixing seat, a second bearing, and a second locking nut. The other end of the lead screw is provided with a second stepped shaft and a connecting shaft. The second stepped shaft has a second threaded section and a second mounting section. The second bearing fixing seat is fixed on the support arm. The second bearing is installed in the second bearing fixing seat. The inner ring of the second bearing mates with the second mounting section. The second locking nut mates with the second threaded section. The connecting shaft is connected to the output end of the motor.

5. A lifting mechanism according to claim 1, characterized in that, The telescopic arm includes a first base plate, two first side plates, and several reinforcing plates. The two first side plates are respectively disposed on both sides of the first base plate. The three sides of the reinforcing plates are respectively connected to the inner sides of the first base plate and the two first side plates. The sleeve is fixed on the several reinforcing plates, and the lead screw nut is connected to the bottommost reinforcing plate.

6. A lifting mechanism according to claim 5, characterized in that, The reinforcing plate has a receiving hole and a threaded hole. The receiving hole is used to receive the sleeve. The threaded hole is connected to and perpendicular to the receiving hole. One end of the sleeve is provided with a first positioning plane. One of the receiving holes of the reinforcing plate is provided with a second positioning plane. The first positioning plane cooperates with the second positioning plane.

7. A lifting mechanism according to claim 5, characterized in that, The support arm includes a second base plate and two second side plates. The two second side plates are respectively disposed on both sides of the second base plate. The first base plate is located inside the second base plate. The two first side plates are respectively located inside the two second side plates. The first base plate is slidably connected to the second base plate, and the first side plate is slidably connected to the second side plate.

8. A lifting mechanism according to claim 7, characterized in that, A guide module is provided between the first side plate and the second side plate. The guide module includes a slider and a guide rail. The slider is slidably connected to the guide rail. The slider is disposed on the first side plate and the guide rail is disposed on the second side plate.

9. A lifting mechanism according to claim 4, characterized in that, The output end of the motor is connected to a speed reducer, and one end of the connecting shaft is connected to the output end of the speed reducer.

10. A robotic arm, comprising a lateral movement mechanism, a cantilever beam, and a flower basket, characterized in that, It also includes a lifting mechanism as described in any one of claims 1 to 9, wherein the lateral movement mechanism is used to drive the support arm to move laterally, the cantilever beam is disposed on the telescopic arm, and the flower basket is disposed on the cantilever beam.

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