A warm-up plate storage device and deposition equipment

Abstract

This utility model discloses a warming plate storage device and a deposition equipment, including a storage device with an internal cavity for storing the warming plate; a sensing device including a transmitting module and a receiving module, respectively located on opposite sides of the storage device, the effective sensing area of ​​the sensing device covering the movable area of ​​the warming plate in the storage device; at least two folded heat insulation plates, each located on the side of the transmitting module near the cavity or on the side of the receiving module near the cavity, the folded heat insulation plates being connected to at least one of the storage device and the sensing device; when the temperature in the cavity reaches a preset temperature or when the warming plate is removed from the cavity for a preset time interval, the folded heat insulation plates can switch from a folded state to an unfolded state. In the unfolded state, the sensing device is isolated from the cavity by the at least two folded heat insulation plates. This utility model uses folded heat insulation plates for thermal isolation, which can effectively extend the life of the sensing device and reduce the failure rate.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a warm-up plate storage device and deposition equipment. Background Technology

[0002] In deposition equipment, such as physical vapor deposition (PVD) equipment, the PVD chamber needs to be baked after each preventive maintenance (PM) to quickly remove moisture from the interior of the chamber and the surfaces of the components. Baking time of 8 hours or more can cause the internal temperature of the chamber to reach over 400°C. Furthermore, the storage device in this deposition equipment contains a sensor. Prolonged exposure to high temperatures can slow down the transmitting module and prevent the receiving module from capturing complete signals, leading to intermittent sensor malfunctions. This increases the workload for operators and prolongs machine turnaround time. Moreover, prolonged exposure to high temperatures can cause performance problems or even damage to the internal electronic components of the sensor, preventing it from functioning properly under high-temperature conditions, shortening its lifespan, and increasing costs. Utility Model Content

[0003] To address the problems existing in the prior art, this utility model provides a warming tray storage device and a deposition equipment; the technical solution is as follows: This utility model provides a warming tray storage device, applied to deposition equipment, comprising: A storage device having an internal cavity for storing a warming plate; The sensing device includes a transmitting module and a receiving module coupled together, the transmitting module and the receiving module being located on opposite sides of the storage device, and the effective sensing area of ​​the sensing device covering the movable area of ​​the warming plate in the storage device; At least two folded heat insulation panels, each of which is located on the side of the transmitting module near the receiving cavity or on the side of the receiving module near the receiving cavity, and the folded heat insulation panels are connected to at least one of the storage device and the sensing device; When the temperature in the receiving cavity reaches a preset temperature or the warming plate is removed from the receiving cavity for a preset time interval, the folded heat insulation plate can switch from a folded state to an unfolded state. In the unfolded state, the sensing device is isolated from the receiving cavity through the at least two folded heat insulation plates.

[0004] Furthermore, the sensing device includes a bent mounting assembly, which includes a first mounting part, a second mounting part, and a third mounting part connected in sequence. The first mounting part and the third mounting part are disposed opposite to each other. The first mounting part is connected to the transmitting module, and the third mounting part is connected to the receiving module. Each of the folded heat insulation panels is connected to the first mounting part or the third mounting part.

[0005] Furthermore, the folding heat insulation panel includes a connecting portion and an extension portion that are connected to each other. The connecting portion is connected to at least one of the storage device and the sensing device, and the extension portion is capable of being laterally unfolded in a direction parallel to the outer surface of the storage device.

[0006] Furthermore, a plurality of folding heat insulation panels are provided on one side of the storage device; when the folding heat insulation panels are in the unfolded state, the extensions of the plurality of folding heat insulation panels located on the same side of the storage device are connected to each other.

[0007] Furthermore, it also includes a control device, which is drivenly connected to the folding heat insulation panel and is used to drive the folding heat insulation panel to switch between the unfolded state and the folded state.

[0008] Furthermore, it also includes a temperature sensing device, which is located on the sensing device and electrically connected to the control device. The effective sensing area of ​​the temperature sensing device covers the receiving cavity.

[0009] Furthermore, the storage device is provided with a transparent portion located on the channel between the transmitting module and the receiving module.

[0010] Furthermore, it also includes a thermal insulation covering, which covers the outer surface of the storage device and is disposed adjacent to the sensing device.

[0011] Furthermore, it also includes an anti-interference covering, wherein the sensing device is connected to a signal line, and the anti-interference covering covers the outer surface of the signal line.

[0012] On the other hand, the present invention also provides a deposition apparatus, including a chamber, a moving device, and a warming plate storage device as described in any of the preceding claims, wherein the chamber is in communication with the receiving cavity of the storage device, and the moving device is used to clamp the warming plate and move it between the chamber and the receiving cavity.

[0013] Implementing this utility model has the following beneficial effects: 1. This utility model provides at least two folded heat insulation plates between the storage device cavity and the sensing device. These folded heat insulation plates can switch between a folded state and an unfolded state. When the temperature in the cavity reaches a preset temperature or when the warming plate is removed from the cavity for a preset time interval, the plate switches from the folded state to the unfolded state. This allows the sensing device and the cavity to be thermally isolated by the folded heat insulation plates, effectively reducing the heat transferred to the sensing device during preventive maintenance. This effectively extends the lifespan of the sensing device, reduces the failure rate of the sensing device, and saves labor and equipment maintenance costs. In addition, the folded heat insulation plates can be directly installed into the existing structure of the storage device and / or the sensing device, making installation easy and reducing improvement costs.

[0014] 2. The present invention covers the outer surface of the storage device with an insulating cover, which can effectively reduce the heat loss from the inside of the storage device. The insulating cover works together with the folded heat insulation plate to isolate most of the heat between the sensing device and the storage device, so that the sensing device can operate at normal temperature, reducing the occasional failure caused by high temperature environment and the failure rate of the deposition equipment, which helps to reduce the workload of operators and extend the service life of the sensing device. Attached Figure Description

[0015] To more clearly illustrate the technical solution of this utility model, the accompanying drawings used in the embodiments will be briefly described below, wherein the same components are represented by the same reference numerals. Obviously, the drawings described below are merely some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without any creative effort.

[0016] Figure 1 A cross-sectional schematic diagram of a warming tray storage device provided by this utility model in its unfolded state; Figure 2 for Figure 1 A cross-sectional schematic diagram of the central heating disk storage device in a folded state.

[0017] The corresponding reference numerals in the figure are as follows: 1-Storage device, 11-Accommodation cavity, 2-Sensing device, 21-Transmitting module, 22-Receiving module, 23-First mounting part, 24-Third mounting part, 3-Folded heat insulation plate, 31-Connecting part, 32-Extension part, 4-Control device, 5-Insulation covering. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. It should be noted that the terms "upper," "lower," "left," "right," "inner," "outer," "front," "rear," "both ends," "one end," and "the other end," etc., indicating the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or structure referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present utility model. Furthermore, the described embodiments are merely a part of the embodiments of the present utility model, not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0019] To address the problem that in existing deposition equipment, the sensing devices installed on the storage device are prone to intermittent failure and shortened lifespan under high temperatures during equipment maintenance, this utility model provides a warming tray storage device and a deposition equipment. The warming tray storage device is used in the deposition equipment and is an integral part of the deposition equipment. The warming tray storage device includes a storage device 1, a sensing device 2, and at least two folded heat insulation plates 3. The storage device 1 is internally connected to the chamber of the deposition equipment. During equipment maintenance, the interior of the storage device 1 is also under high temperature. The folded heat insulation plates 3 added to the warming tray storage device can effectively isolate heat, reduce the risk of intermittent failure of the sensing device 2 on the storage device 1 due to high temperature, and also help extend the lifespan of the sensing device 2.

[0020] Specifically, such as Figure 1 As shown, the storage device 1 is a box that is integrally connected with the chamber and stores the warming plate. The storage device 1 has a receiving cavity 11 inside, which is used to store the warming plate. The warming plate can move between the storage device 1 and the chamber of the deposition equipment. Before maintenance, the warming plate is removed from the receiving cavity 11. After maintenance, the warming plate is moved back to the receiving cavity 11.

[0021] Specifically, such as Figure 1 As shown, the sensing device 2 is used to monitor the position of the warming plate in the receiving cavity 11. The sensing device 2 includes a transmitting module 21 and a receiving module 22 coupled together. The transmitting module 21 and the receiving module 22 are located on opposite sides of the storage device 1, respectively. With the direction shown in the figure as a reference, the transmitting module 21 is located above the storage device 1, and the receiving module 22 is located below the storage device 1. The effective sensing area of ​​the sensing device 2 covers the movable area of ​​the warming plate in the storage device 1, so as to improve the effectiveness, accuracy and reliability of monitoring the position of the warming plate.

[0022] Specifically, in some exemplary embodiments, the storage device 1 is provided with a transparent part located on the channel between the transmitting module 21 and the receiving module 22. The channel is responsible for signal transmission and reception. The transparent part does not block the signal emitted by the transmitting module 21, so as to avoid affecting the integrity, transmission rate and signal stability of signal transmission. For example, in some embodiments, the transparent part is transparent glass, which is simple to assemble and has high transparency.

[0023] For example, the emitting module 21 emits rays into the receiving cavity 11, and the receiving module 22 receives the rays. The transparent part does not block the rays. When the warming plate is placed in the receiving cavity 11, the emitting module 21 emits rays. Due to the obstruction of the warming plate, the receiving module 22 below cannot receive the rays. At this time, the sensing device 2 detects the presence of the warming plate in the receiving cavity 11 and can send a signal to the deposition equipment, thereby controlling the indicator light of the sensing device 2 to turn off. The indicator light is turned off to indicate the presence of the warming plate inside the receiving cavity 11. Conversely, when no warming plate is placed in the receiving cavity 11, the rays emitted by the emitting module can be received by the receiving module 22 below due to the lack of obstruction. At this time, the sensing device 2 detects the absence of the warming plate in the receiving cavity 11 and can send a signal to the deposition equipment, thereby controlling the indicator light of the sensing device 2 to turn on. The indicator light is turned on to indicate the absence of the warming plate inside the receiving cavity 11.

[0024] Specifically, such as Figure 1 As shown, in at least two folded heat insulation plates 3, each folded heat insulation plate 3 is located on the side of the transmitting module 21 near the receiving cavity 11 or on the side of the receiving module 22 near the receiving cavity 11. Taking the direction shown in the figure as a reference, the folded heat insulation plate 3 near the transmitting module 21 (i.e., the folded heat insulation plate 3 located above) is located on the side of the transmitting module 21 near the receiving cavity 11, while the folded heat insulation plate 3 near the receiving module 22 (i.e., the folded heat insulation plate 3 located below) is located on the side of the receiving module near the receiving cavity 11. This allows for effective thermal isolation between the sensing device 2 and both the upper and lower sides of the receiving cavity 11 through the folded heat insulation plates 3. This reduces false alarms and damage to internal components of the sensing device 2 caused by the high-temperature environment during maintenance, which helps reduce the extra workload of personnel, extends the service life of the sensing device 2, and reduces internal costs.

[0025] Specifically, the folding heat insulation plate 3 is connected to at least one of the storage device 1 and the sensing device 2; in some exemplary embodiments, the folding heat insulation plate 3 is connected to the storage device 1; in other exemplary embodiments, the folding heat insulation plate 3 is connected to the sensing device 2; thus, the setting method is flexible and can be directly set in the original structure of the sensing device 2 and / or the storage device 1, which also improves the fixing reliability of the immovable end of the folding heat insulation plate 3, thereby helping to improve the heat insulation effectiveness of the folding heat insulation plate 3 in the unfolded state.

[0026] It should be noted that, as Figure 1 and Figure 2 As shown, the folding heat insulation plate 3 can switch between a folded state and an unfolded state. When the deposition equipment is not undergoing preventive maintenance, the internal temperature of the storage device 1 is mostly at room temperature, and the warming plate can be stored normally. At this time, no heat insulation function is needed, and the folding heat insulation plate 3 can be controlled to be in the folded state. However, when the deposition equipment is undergoing preventive maintenance, it is subject to the high-temperature environment required for the maintenance process, and effective heat insulation is needed to prevent it from affecting the sensing device 2. Specifically, when the temperature in the receiving cavity 11 reaches the preset temperature or the warming plate is removed from the receiving cavity 11 at a preset time interval, the folding heat insulation plate 3 can switch from the folded state to the unfolded state. When switched to the unfolded state, the sensing device 2 is isolated from the receiving cavity 11 by at least two folded heat insulation plates 3, thereby effectively reducing the transfer of heat from the receiving cavity 11 to the sensing device 2. This allows the sensing device 2 to operate at normal temperatures, reducing the rate of occasional failures caused by high-temperature environments, reducing the workload of personnel, and also reducing damage to the internal components of the sensing device 2, extending the service life of the sensing device 2, and saving maintenance costs. When the maintenance process is completed, and the temperature inside the receiving cavity 11 drops to room temperature or the warming plate is moved back to the receiving cavity 11 for a period of time, the folded heat insulation plate 3 can switch from the unfolded state back to the folded state to save energy.

[0027] When the temperature in the receiving cavity 11 reaches a preset temperature, it indicates that the deposition equipment is currently undergoing a maintenance process. The temperature will continue to rise as the maintenance process progresses. Therefore, by setting the preset temperature as the critical temperature threshold that would damage the sensing device 2 after the entire maintenance process, the folded heat insulation plate 3 is pre-controlled to unfold to isolate heat transfer. In some optional embodiments, the preset temperature is 90℃ to 120℃. It can be understood that the preset temperature can be any value within the range of 90℃ to 120℃. For example, the preset temperature can be 90℃, 95℃, 100℃, 110℃, 115℃, 120℃, etc. For instance, in a specific embodiment, the preset temperature is 100℃. When the temperature in the receiving cavity 11 reaches 100℃, the folded heat insulation plate 3 is controlled to switch from the folded state to the unfolded state to effectively isolate the sensing device 2 and the receiving cavity 11 thermally.

[0028] The preset time interval for the warming plate to be removed from the receiving cavity 11 also indicates that the deposition equipment is currently undergoing maintenance, and a certain time interval is set to avoid misjudgment; in some optional embodiments, the preset time interval is 20min to 35min; it can be understood that the preset time interval can be any value between 20min and 35min; for example, the preset time interval can be 20min, 22min, 25min, 30min, 35min, etc.; for example, in a specific embodiment, the preset time interval is 30min, then after the warming plate is removed from the receiving cavity 11 for 30min, the folded heat insulation plate 3 is controlled to switch from the folded state to the unfolded state to effectively isolate the sensing device 2 and the receiving cavity 11 thermally.

[0029] Specifically, the folded heat insulation panel 3 can withstand temperatures above 500℃. It can be made of high-temperature resistant metal or high-temperature resistant transparent glass. The raw materials are readily available, the cost is low, the installation is convenient, and the heat insulation efficiency and heat insulation stability are good.

[0030] Specifically, the sensing device 2 includes a bent mounting assembly, which comprises a first mounting portion 23, a second mounting portion (not shown), and a third mounting portion 24 connected in sequence, such as... Figure 2 As shown, the first mounting part 23 and the third mounting part 24 are arranged opposite to each other. The first mounting part 23 is connected to the transmitting module 21, and the third mounting part 24 is connected to the receiving module 22. Further, with the direction shown in the figure as a reference, the first mounting part 23 is located above the receiving cavity 11, the third mounting part 24 is located below the receiving cavity 11, and the second mounting part is located on the outer side of the storage device 1. The second mounting part extends longitudinally, with one end connected to the first mounting part 23 and the other end connected to the third mounting part 24, so as to improve the connection stability of the sensing device 2.

[0031] In this configuration, when the folded heat insulation plate 3 is connected to the sensing device 2, each folded heat insulation plate 3 is connected to the first mounting part 23 or the third mounting part 24; correspondingly, as Figure 1 As shown, the longitudinal distance between the folded heat insulation plate 3 connected to the first mounting part 23 and the receiving cavity 11 is less than the longitudinal distance between the transmitting module 21 and the receiving cavity 11, so as to avoid structural interference between the folded heat insulation plate 3 and the transmitting module 21 during the unfolding process, which may cause jamming or even prevent unfolding; and the longitudinal distance between the folded heat insulation plate 3 connected to the third mounting part 24 and the receiving cavity 11 is less than the longitudinal distance between the receiving module 22 and the receiving cavity 11, so as to avoid structural interference between the folded heat insulation plate 3 and the receiving module 22 during the unfolding process, which may cause jamming or even prevent unfolding, and also helps to further improve the heat insulation effectiveness.

[0032] Specifically, such as Figure 2As shown, the folding heat insulation plate 3 includes a connecting part 31 and an extension part 32 that are connected to each other. The connecting part 31 is connected to at least one of the storage device 1 and the sensing device 2, while the extension part 32 can be extended laterally in a direction parallel to the outer surface of the storage device 1. The reliable connection of the connecting part 31 can also improve the movement stability and unfolding stability of the extension part 32 of the folding heat insulation plate 3. The extension part 32 can cover the longitudinal channel between the sensing device 2 and the receiving cavity 11, thereby effectively preventing heat from escaping from the receiving cavity 11 to the sensing devices 2 at the upper and lower ends, resulting in good heat insulation effect.

[0033] Specifically, such as Figure 1 and Figure 2 As shown, a plurality of folded heat insulation plates 3 are provided on one side of the storage device 1. When the folded heat insulation plates 3 are in the unfolded state, the extensions 32 of the plurality of folded heat insulation plates 3 located on the same side of the storage device 1 are connected to each other. Taking the two folded heat insulation plates 3 connected to the first mounting part 23 in the figure as an example, the connecting parts 31 of the two folded heat insulation plates 3 are respectively connected to different areas of the first mounting part 23, and the extensions 32 of the two folded heat insulation plates 3 can move towards each other, so that the ends of the extensions 32 can be connected to each other, preventing the extensions 32 from bending downwards and causing gaps in the unfolded state, which is beneficial to improving the structural stability, heat insulation effectiveness and heat insulation stability of the folded heat insulation plates 3 in the unfolded state. In addition, the way the extensions 32 are connected to each other can be an overlapping, suction, magnetic attraction and other connection structures, and the way the extensions 32 are unfolded can be a rolling unfolding, louver unfolding and other unfolding structures. This utility model does not make specific limitations on this. As long as the structure can achieve effective connection and unfolding, it can be within the protection scope of this utility model.

[0034] Specifically, such as Figure 2 As shown, in some exemplary embodiments, the warming tray storage device further includes a control device 4, which is drivenly connected to the folding heat insulation plate 3 to switch between an unfolded state and a folded state, resulting in a high degree of automation and high control precision; for example... Figure 2 As shown, the control device 4 can be integrated into the sensing device 2, which has good controllability and precise and convenient control.

[0035] Specifically, in some exemplary embodiments, the warming plate storage device further includes a temperature sensing device 2, which is located on the sensing device 2 and electrically connected to the control device 4. The effective sensing area of ​​the temperature sensing device 2 covers the receiving cavity 11, and is used to monitor the temperature in the receiving cavity 11. It can also transmit signals to the control device 4, thereby sending a signal to the control device 4 based on the monitored temperature of the receiving cavity 11, so that the control device 4 can drive the folding heat insulation plate 3 to unfold or fold, improving the timeliness and effectiveness of heat insulation. In other exemplary embodiments, the effective sensing area of ​​the temperature sensing device 2 covers the area in the receiving cavity 11 opposite to the sensing device 2, which can more accurately control the folding heat insulation plate 3, improving the heat insulation efficiency and accuracy. In some preferred embodiments, the temperature sensing device 2 can be integrated into the control device 4, further improving the integration of the warming plate storage device.

[0036] Thus, when the temperature sensing device 2 detects that the temperature of the receiving cavity 11 has reached the preset temperature, it sends a signal to the control device 4, enabling the control device 4 to immediately activate and drive the folding heat insulation plate 3 to unfold, thereby protecting the sensing device 2 in all directions, isolating the heat transfer between the sensing device 2 and the storage device 1, maintaining the sensing device 2 at a normal temperature, reducing occasional malfunctions caused by high temperature environments, reducing extra workload for personnel, and extending the service life of the sensing device 2; when the temperature sensing device 2 detects that the temperature of the receiving cavity is lower than the preset temperature, the control device 4 can drive the folding heat insulation plate 3 to close, and the folding heat insulation plate 3 will automatically retract and switch to the folded state.

[0037] In addition, the control device 4 can be electrically connected to the control unit of the deposition equipment, and the sensing device 2 can also be electrically connected to the control unit of the deposition equipment, so that the signal of the sensing device 2 can be shared with the control device 4. When the sensing device 2 detects that the warming plate has moved out of the receiving cavity 11 for a preset time interval, that is, after the warming plate has moved into the cavity for a preset time interval, the control device 4 drives the folding heat insulation plate 3 to unfold; conversely, after the warming plate has moved back to the storage device 1 for a certain expected time interval, for example, after the warming plate has moved back to the storage device 1 for 130 seconds, the control device 4 controls the folding heat insulation plate 3 to close, and the folding heat insulation plate 3 returns to the folded state.

[0038] Specifically, such as Figure 2As shown, in some exemplary embodiments, the warming plate storage device further includes a heat insulation covering 5, which covers the outer surface of the storage device 1 to achieve full enclosure of the outer surface of the storage device 1, further reducing the leakage of heat from the storage device 1. Furthermore, since the sensing device 2 is located outside the storage device 1 and protrudes from the outer surface of the storage device 1, the heat insulation covering 5 is arranged adjacent to the sensing device 2, improving the adequacy of the enclosure of the storage device 1. The heat insulation covering 5 and the folded heat insulation plate 3 work together to isolate most of the heat between the sensing device 2 and the storage device 1, enabling the sensing device 2 to operate at normal temperature, reducing occasional failures caused by high temperature environments and the failure rate of the deposition equipment, which helps to reduce the workload of operators and extend the service life of the sensing device 2.

[0039] Specifically, in some exemplary embodiments, the warm-up plate storage device further includes an anti-interference covering, which has strong anti-interference capabilities. The sensing device 2 is connected to a signal line, and the anti-interference covering covers the outer surface of the signal line to prevent the signals of other components in the deposition equipment from interfering with the signal of the sensing device 2. This prevents the sensing device 2 from transmitting incorrect signals and causing false alarms. In other words, it isolates the signal interference between the sensing device 2 and other components in the deposition equipment, effectively reducing the failure rate of the sensing device 2. This, in turn, helps to reduce the workload of personnel and improve the overall working efficiency of the warm-up plate storage device and the deposition equipment.

[0040] On the other hand, this utility model embodiment also provides a deposition device, including a chamber, a moving device, and a warming plate storage device as described above. The chamber is connected to the receiving cavity 11 of the storage device 1. The moving device is used to clamp the warming plate and move it between the chamber and the receiving cavity 11. The moving device can be a robotic arm, which is simple and precise to control and has high moving accuracy of the warming plate. During high-temperature maintenance, this deposition device can effectively reduce the heat transferred to the sensing device 2 through the storage device 1, avoid the sensing device 2 being in a high-temperature environment for a long time, thereby reducing the failure rate of the sensing device 2, reducing the workload of personnel, reducing the damage to the internal components of the high-temperature stack sensing device 2, extending the service life of the sensing device 2, and saving maintenance costs.

[0041] The above description is only some embodiments of the present utility model and is not intended to limit the present utility model. Those skilled in the art should understand that the present utility model may have various changes and improvements. Any modifications, equivalent substitutions and improvements made in accordance with the present utility model fall within the scope of protection claimed by the present utility model.

Claims

1. A warm-up tray storage device, used in a deposition equipment, characterized in that, include: A storage device having an internal cavity for storing a warming plate; The sensing device includes a transmitting module and a receiving module coupled together, the transmitting module and the receiving module being located on opposite sides of the storage device, and the effective sensing area of ​​the sensing device covering the movable area of ​​the warming plate in the storage device; At least two folded heat insulation panels, each of which is located on the side of the transmitting module near the receiving cavity or on the side of the receiving module near the receiving cavity, and the folded heat insulation panels are connected to at least one of the storage device and the sensing device; When the temperature in the receiving cavity reaches a preset temperature or the warming plate is removed from the receiving cavity for a preset time interval, the folded heat insulation plate can switch from a folded state to an unfolded state. In the unfolded state, the sensing device is isolated from the receiving cavity through the at least two folded heat insulation plates.

2. The warming tray storage device according to claim 1, characterized in that, The sensing device includes a bent mounting assembly, which includes a first mounting part, a second mounting part, and a third mounting part connected in sequence. The first mounting part and the third mounting part are disposed opposite to each other. The first mounting part is connected to the transmitting module, and the third mounting part is connected to the receiving module. Each of the folded heat insulation panels is connected to the first mounting part or the third mounting part.

3. The warming tray storage device according to claim 1, characterized in that, The folding heat insulation panel includes a connecting portion and an extension portion that are connected to each other. The connecting portion is connected to at least one of the storage device and the sensing device, and the extension portion is capable of being laterally unfolded in a direction parallel to the outer surface of the storage device.

4. The warming tray storage device according to claim 3, characterized in that, The storage device has a plurality of folding heat insulation panels on one side; when the folding heat insulation panels are in the unfolded state, the extensions of the plurality of folding heat insulation panels located on the same side of the storage device are connected to each other.

5. The warming tray storage device according to claim 1, characterized in that, It also includes a control device, which is driven and connected to the folding heat insulation plate, and is used to drive the folding heat insulation plate to switch between the unfolded state and the folded state.

6. The warming tray storage device according to claim 5, characterized in that, It also includes a temperature sensing device, which is located on the sensing device and electrically connected to the control device. The effective sensing area of ​​the temperature sensing device covers the receiving cavity.

7. The warming tray storage device according to any one of claims 1-6, characterized in that, The storage device has a transparent part located on the channel between the transmitting module and the receiving module.

8. The warming tray storage device according to any one of claims 1-6, characterized in that, It also includes a thermal insulation covering, which covers the outer surface of the storage device and is disposed adjacent to the sensing device.

9. The warming tray storage device according to any one of claims 1-6, characterized in that, It also includes an anti-interference covering, wherein the sensing device is connected to a signal line, and the anti-interference covering covers the outer surface of the signal line.

10. A deposition apparatus, characterized in that, The device includes a chamber, a moving device, and a warming tray storage device as described in any one of claims 1-9, wherein the chamber is in communication with the receiving cavity of the storage device, and the moving device is used to clamp the warming tray and move it between the chamber and the receiving cavity.

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