A multifunctional sample stage device and vacuum coating equipment

Abstract

This utility model relates to the technical field of vacuum coating equipment, and in particular to a multifunctional sample stage device and vacuum coating equipment. The sample stage device includes a sample holder for placing samples, a lifting device, a cooling device, and a temperature measuring device. The sample holder is mounted on the lifting device, which at least partially passes through the assembly part and extends into the vacuum chamber. The cooling device is located between the sample holder and the lifting device, and the temperature measuring device is connected to the cooling device. The lifting device moves up and down relative to the vacuum chamber to drive the sample holder to move up and down within the vacuum chamber, and the cooling device cools the sample holder. At the same time, the temperature measuring device detects the temperature of the cooling device. The sample stage device can realize the functions of lifting, cooling, and temperature measuring of samples within the vacuum chamber. After a sample is loaded once, multiple processes and procedures can be completed in the vacuum chamber through the sample stage device, improving the efficiency of material research in vacuum coating and the consistency of experimental data.

Description

Technical Field

[0001] This utility model relates to the technical field of vacuum coating equipment, and in particular to a multifunctional sample stage device and vacuum coating equipment. Background Technology

[0002] In the vacuum coating process, a sample stage is typically used to fix the sample to be processed within a vacuum chamber, utilizing the vacuum environment to achieve a localized ultra-clean environment. The vacuum environment can effectively avoid interference from atmospheric pollutants, providing a high-purity, low-disturbance experimental basis for research such as material growth, aging simulation, and performance testing.

[0003] However, the sample stage in traditional vacuum coating equipment has a single function, supporting only a single coating process. This leads to the need for samples to be repeatedly removed and reloaded into different functional modules for research requiring multiple steps and processes. This process not only significantly increases the risk of samples being exposed to the atmospheric environment, potentially causing material performance deviations or film defects due to the introduction of atmospheric pollutants, but also affects the continuity of experiments due to process interruptions, ultimately reducing research efficiency and the reliability of results.

[0004] This utility model was proposed in response to the shortcomings of the existing technology. Utility Model Content

[0005] This invention addresses the problems of traditional vacuum coating equipment, such as the single function of the sample stage, the need to repeatedly remove and reload samples into different functional modules, which increases the risk of sample exposure to the atmospheric environment. This can lead to material performance deviations or film defects due to the introduction of atmospheric pollutants, and can also affect the continuity of experiments due to process interruptions, thus reducing research efficiency and the reliability of results. The invention proposes a multifunctional sample stage device and vacuum coating equipment.

[0006] The technical solution adopted by this utility model to solve its technical problem is: A multifunctional sample stage device, comprising: A sample holder, used to hold samples; A lifting device is provided, on which the sample rack is mounted and driven to move the sample rack up and down. A cooling device is provided between the sample holder and the lifting device to cool the sample holder. A temperature measuring device is connected to the cooling device to detect the temperature of the cooling device.

[0007] As described above, a multifunctional sample stage device includes a temperature measuring device comprising a temperature sensor and a wire connected to the temperature sensor. The temperature sensor is used to detect the temperature of the cooling device, and the wire passes through the lifting device and is connected to an external power source to supply power to the temperature sensor.

[0008] As described above, a multifunctional sample stage device includes a cooling device comprising a cooling plate disposed between the sample holder and the lifting device. The bottom of the cooling plate is provided with a mounting cavity for mounting the temperature sensor. An inlet pipe and an outlet pipe are provided on the outside of the cooling plate. The inlet pipe and the outlet pipe pass through the lifting device and extend to the outside, respectively, and coolant is input to and output to the cooling plate through the inlet pipe and the outlet pipe.

[0009] As described above, in a multifunctional sample stage device, the cooling tray is provided with a water inlet, a serpentine flow channel and a water outlet connected in sequence, the water inlet is connected to the water inlet pipe and the water outlet is connected to the water outlet pipe.

[0010] As described above, a multifunctional sample stage device includes a lifting device comprising a driver and a column connected to the driver. The driver drives the column to move up and down. The column is provided with a first lead wire channel, a second lead wire channel, and a third lead wire channel for the electric wire, the water inlet pipe, and the water outlet pipe to pass through, respectively.

[0011] As described above, a multifunctional sample stage device has a first mounting base at the bottom of the column. The column is connected to the moving end of the driver through the first mounting base. The driver drives the column to move up and down, thereby driving the cooling plate and the sample holder to move up and down synchronously. The first mounting base has a first opening, a second opening, and a third opening that are respectively connected to the first lead channel, the second lead channel, and the third lead channel.

[0012] As described above, a multifunctional sample stage device is provided with a second mounting base at the top of the column, and a cooling plate is provided on the second mounting base. The second mounting base is provided with a first through hole, a second through hole, and a third through hole corresponding to the wire, the water inlet pipe, and the water outlet pipe, respectively. A first sealing ring, a second sealing ring, and a third sealing ring corresponding to the first through hole, the second through hole, and the third through hole, respectively, are provided between the cooling plate and the second mounting base.

[0013] The multifunctional sample stage device described above further includes a sealing device disposed on the outside of the column. The sealing device includes a third mounting base, a sealing connection seat disposed on the third mounting base, and a sealing element disposed on the inner side of the sealing connection seat. The column is slidably inserted through the sealing element by the driver. A fourth sealing ring is also provided between the sealing connection seat and the third mounting base.

[0014] As described above, a multifunctional sample stage device includes a sample holder comprising a base plate disposed on a cooling plate and a sample positioning plate disposed on the base plate. The sample positioning plate has a plurality of spaced sample fixing positions. A foolproof structure is provided between the base plate and the cooling plate to position the base plate on the cooling plate.

[0015] This utility model also provides a vacuum coating equipment, including a base, a vacuum chamber disposed on the base, and a sample stage device as described above. The sample stage device is disposed between the base and the vacuum chamber. A vacuum chamber is provided inside the vacuum chamber. An assembly part is provided outside the vacuum chamber. The lifting device passes through at least part of the assembly part and extends into the vacuum chamber. The lifting device moves up and down relative to the vacuum chamber to drive the sample holder to move up and down in the vacuum chamber.

[0016] Compared with the prior art, the beneficial effects of this utility model are: This invention provides a multifunctional sample stage device and a vacuum coating equipment. The sample stage device is located between the base and the vacuum chamber of the vacuum coating equipment. The vacuum chamber contains a vacuum chamber, and an assembly part is located outside the vacuum chamber. The sample stage device includes a sample holder for placing samples, a lifting device, a cooling device, and a temperature measuring device. The sample holder is mounted on the lifting device, which at least partially passes through the assembly part and extends into the vacuum chamber. The cooling device is located between the sample holder and the lifting device. The temperature measuring device is connected to the cooling device. The lifting device moves up and down relative to the vacuum chamber, driving the sample holder to move up and down within the vacuum chamber. The cooling device cools the sample holder, and the temperature measuring device detects the temperature of the cooling device. By integrating the lifting device, cooling device, and temperature measuring device into the sample stage device, the device can achieve sample lifting, cooling, and temperature measurement functions within the vacuum chamber. After a sample is loaded once, multiple processes and procedures can be completed within the vacuum chamber using the sample stage device. This enhances sample protection and the continuity of the coating process, improving the efficiency of material research and the consistency of experimental data in vacuum coating.

[0017] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0018] Figure 1 This is a perspective view of the vacuum coating equipment of this utility model; Figure 2 This is a top view of the vacuum coating equipment of this utility model; Figure 3 for Figure 2 Sectional view A-A in the middle; Figure 4 for Figure 3 Local magnification Figure 1 ; Figure 5 for Figure 3 Local magnification Figure 2 ; Figure 6 Disassembly of the sample stage device of this utility model Figure 1 ; Figure 7 Disassembly of the sample stage device of this utility model Figure 2 ; Figure 8 Disassembly of the sample stage device of this utility model Figure 3 ; Figure 9 for Figure 2 The B-B section view in the diagram; Figure 10 for Figure 9 A magnified view of a portion of the image; Figure 11 for Figure 7 The D-D section view in the middle; Figure 12 for Figure 6 The C-C section view. Detailed Implementation

[0019] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings. The described embodiments are merely some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0020] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0021] Furthermore, the use of terms such as "first" and "second" in this utility model is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0022] like Figure 1 As shown in Figure 12, this utility model provides a vacuum coating equipment 200, including a base 210, a vacuum chamber 220 disposed on the base 210, and a sample stage device 100. The sample stage device 100 is disposed between the base 210 and the vacuum chamber 220. The vacuum chamber 220 has a vacuum chamber 221 inside, and an assembly part 222 is provided on the outside of the vacuum chamber 220. The sample stage device 100 extends at least partially through the assembly part 222 into the vacuum chamber 221, and carries the sample, placing the sample in the vacuum chamber 221. The sample stage device 100 includes a sample holder 110 for placing the sample and a lifting device 12. 0. Cooling device 130 and temperature measuring device 140: The sample holder 110 is mounted on the lifting device 120, which at least partially passes through the assembly part 222 and extends into the vacuum chamber 221. The cooling device 130 is located between the sample holder 110 and the lifting device 120. The temperature measuring device 140 is connected to the cooling device 130. The lifting device 120 moves up and down relative to the vacuum chamber 220 to drive the sample holder 110 to move up and down within the vacuum chamber 221, and the cooling device 130 cools the sample holder 110. At the same time, the temperature of the cooling device 130 is detected by the temperature measuring device 140.

[0023] In this invention, by integrating the lifting device 120, cooling device 130, and temperature measuring device 140 into the sample stage device 100, the sample stage device 100 can perform sample lifting, cooling, and temperature measuring functions within the vacuum chamber 221. Once a sample is loaded, multiple processes and steps can be completed within the vacuum chamber 221 using the sample stage device 100, enhancing sample protection and the continuity of the coating process experiments, and improving the efficiency of material research and the consistency of experimental data in vacuum coating. Specifically, in practical applications, the sample stage device 100 can flexibly move the sample holder 110 within the vacuum chamber 221 via the lifting device 120, eliminating the need for operators to open the vacuum chamber 221 to remove samples and transfer them to different process modules. This design avoids contamination from contact with the atmospheric environment when samples are transferred between different process stations, reducing material performance deviations or film defects caused by atmospheric pollutants. The cooling device 130 is located between the sample holder 110 and the lifting device 120, and can actively cool the sample holder 110 to suppress the temperature rise of the sample caused by heat source radiation or process energy input during the coating process, protecting the heat-sensitive material and reducing film defects caused by thermal stress. At the same time, the temperature measuring device 140 is connected to the cooling device 130, and can detect the temperature status of the cooling device 130 in real time, providing feedback for temperature control during sample research, ensuring that the sample temperature is always within the process requirements range, and improving the stability of multi-process operation and the reliability of experimental results.

[0024] Specifically, such as Figure 3As shown in Figure 6, the temperature measuring device 140 includes a temperature sensor 141 and a wire 142 connected to the temperature sensor 141. The temperature sensor 141 is used to detect the temperature of the cooling device 130. The temperature sensor 141 is directly connected to the cooling device 130, and can accurately detect the temperature status of the cooling device 130 through the temperature sensor 141, so that the operator can control the operation of the cooling device 130 according to the real-time temperature of the cooling device 130, thereby improving the accurate cooling of the sample and protecting the sample. The wire 142 passes through the lifting device 120 and is connected to an external power source to supply power to the temperature sensor 141, thus ensuring the temperature of the sample. This design ensures continuous power supply to the temperature sensor 141 during the sample stage lifting process. Furthermore, the wiring 142 is routed internally through the lifting device 120, optimizing the external wiring structure of the sample stage device 100 and reducing its size. Secondly, the cooling device 130 is installed on the upper part of the lifting device 120, and the temperature sensor 141 is installed between the cooling device 130 and the lifting device 120, within the lifting device 120. This prevents the wire 142 from extending into the vacuum chamber 221 through the sample stage device 100, ensuring the airtightness of the vacuum chamber 221 and preventing the risk of leakage due to cable penetration. Optionally, the temperature sensor 141 can be a thermocouple, as is commonly used in the prior art.

[0025] Specifically, such as Figure 5 , 9As shown, the cooling device 130 includes a cooling plate 131 disposed between the sample holder 110 and the lifting device 120. The bottom of the cooling plate 131 has a mounting cavity 1311 for mounting the temperature sensor 141. An inlet pipe 132 and an outlet pipe 133 are provided on the outside of the cooling plate 131. The inlet pipe 132 and the outlet pipe 133 pass through the lifting device 120 and extend to the outside. The inlet pipe 132 and the outlet pipe 133 are respectively connected to an external cold source, through which coolant is input and output to the cooling plate 131. The coolant can be cold water to reduce the cost of the cooling device 130. The cooling plate 131 is in direct contact with the sample holder 110, and the flow of cold water within the cooling plate 131 achieves efficient cooling of the sample holder 110. Cooling the sample prevents thermal stress, film cracking, or performance degradation caused by localized overheating. The temperature sensor 141 is embedded in the bottom of the cooling plate 131 through the mounting cavity 1311, providing a precise temperature measurement point for the temperature sensor 141 and ensuring the accuracy of temperature detection on the cooling plate 131. The lifting device 120 is located at the lower part of the cooling plate 131, and the temperature measuring device 140 is located inside the lifting device 120 and connected to the cooling plate 131. At the same time, the water inlet pipe 132 and the water outlet pipe 133 pass through the lifting device 120 and extend to the outside, optimizing the wiring layout of the temperature measuring device 140 and the cooling device 130. This improves the structural compactness of the sample stage device 100, thereby reducing the volume of the sample stage device 100 and reducing the external assembly structure of the sample stage device 100, which helps maintain the sealing of the vacuum chamber 221.

[0026] In other alternative embodiments, such as Figure 12 As shown, the cooling plate 131 is provided with a water inlet 1312, a serpentine flow channel 1313, and a water outlet 1314 connected in sequence. The water inlet 1312 is connected to the water inlet pipe 132, and the water outlet 1314 is connected to the water outlet pipe 133. The water inlet 1312 and the water outlet 1314 are located at the bottom of the cooling plate 131. One end of the serpentine flow channel 1313 is connected to the water inlet 1312, and the other end is connected to the water outlet 1314. The coolant can flow quickly and evenly through the serpentine flow channel 1313. The serpentine flow channel 1313 increases the contact area and contact time between the coolant and the sample holder 110, thereby improving the heat conduction efficiency and quickly dissipating the heat generated by the sample holder 110 during coating or high-temperature processes, avoiding material thermal stress, film defects, or performance degradation caused by local overheating; and the serpentine flow channel 1313 can improve the space utilization of the cooling plate 131, making the internal structure of the cooling plate 131 more compact, which is conducive to reducing the volume of the cooling plate 131, enabling the cooling plate 131 to achieve efficient heat exchange within the limited space of the vacuum chamber 221.

[0027] In some alternative embodiments, such as Figure 12 As shown, the inlet 1312 and outlet 1314 are symmetrically arranged at the bottom of the cooling plate 131, and an inlet channel 1315 is provided between the inlet 1312 and the serpentine flow channel 1313. An outlet channel 1316 is provided between the outlet 1314 and the serpentine flow channel 1313. The inlet channel 1315 and the outlet channel 1316 are on the same straight line in the cooling plate 131, and the inlet channel 1315 and the outlet channel 1316 are symmetrically arranged along the central axis of the cooling plate 131. The flow channel 1313 forms an annular serpentine flow channel 1313 and surrounds the outside of the water inlet flow channel 1315 and the water outlet flow channel 1316. By setting a symmetrical internal flow channel in the cooling plate 131, the flow path of the internal flow channel of the cooling plate 131 is optimized, improving the overall heat exchange efficiency and cooling uniformity of the cooling plate 131. At the same time, the symmetrical flow channel structure helps to ensure the airtightness of the internal flow channel of the cooling plate 131, avoiding water leakage and disorder in the flow channel, which would affect the flow efficiency of the coolant, thereby improving the cooling effect of the cooling plate 131.

[0028] Specifically, such as Figure 1 , 3 As shown in Figure 9, the lifting device 120 includes a driver 121 and a column 122 connected to the driver 121. The driver 121 drives the column 122 to move up and down. The column 122 has a first lead wire channel, a second lead wire channel, and a third lead wire channel for the wire 142, the water inlet pipe 132, and the water outlet pipe 133 to pass through, respectively. Optionally, the column 122 can be a hollow column, and the first, second, and third lead wire channels can be formed through the hollow cavity 1220 of the column 122. This simplifies the structure of the column 122 and reduces the manufacturing cost of the sample stage device 100. The wire 142, the water inlet pipe 132, and the water outlet pipe 133 extend directly to the outside through the hollow cavity 1220, further reducing costs. The assembly difficulty of the wires 142, water inlet pipe 132, and water outlet pipe 133 is reduced, while the vertical arrangement of the column 122 enables orderly storage of the pipelines, avoiding mechanical jamming or maintenance difficulties caused by messy wiring, thus simplifying the structure of the sample stage device 100. By encapsulating the wires 142, water inlet pipe 132, and water outlet pipe 133 in the internal channel of the column 122, the risk of seal damage or air leakage that may be caused by traditional external cables or pipes passing through the vacuum chamber 221 is avoided, while preventing coolant leakage from contaminating the vacuum environment. In practical applications, the wires 142, water inlet pipe 132, and water outlet pipe 133 can be isolated from each other within the hollow cavity 1220, preventing short circuits of the wires 142 due to liquid leakage or the impact of high-temperature cables on the stability of the coolant, ensuring electrical safety and the reliability of the cooling system.

[0029] Optional, such as Figure 1 As shown, the driver 121 is mounted in the base 210 via a connecting bracket 101. The driver 121 includes a drive motor 1211 and a telescopic push rod 1212 that is connected to the drive motor 1211. The column 122 is mounted on the upper part of the telescopic push rod 1212. The driver 121 can be a servo electric cylinder in the prior art. The servo electric cylinder integrates the telescopic push rod 1212. The end of the telescopic push rod 1212 forms the moving end of the driver 121 and is connected to the column 122. The servo electric cylinder controls and adjusts the lifting and lowering movement of the column 122 to achieve precise positioning of the sample holder 110 at any position during the lifting and lowering process. Optionally, the driver 121 further includes a transmission assembly connected between the drive motor 1211 and the telescopic push rod 1212. The transmission assembly transmits the mechanical energy of the drive motor 1211 to the telescopic push rod 1212 to achieve the lifting effect of the telescopic push rod 1212 on the column 122. The transmission assembly is provided with an outer cover 1213 connected to the connecting bracket 101 to protect the transmission assembly. It should be noted that the transmission assembly can be an existing pulley transmission assembly, a multi-stage gear transmission assembly, etc., and this utility model does not make a specific limitation.

[0030] Further optional, such as Figure 1 , 3As shown in Figure 9, the column 122 has a first mounting base 123 at its bottom. The column 122 is connected to the moving end of the driver 121 via the first mounting base 123. The driver 121 drives the column 122 to move up and down, thereby driving the cooling plate 131 and the sample holder 110 to move up and down synchronously. The first mounting base 123 has a first opening 1231, a second opening 1232, and a third opening 1233 that communicate with the first lead channel, the second lead channel, and the third lead channel, respectively. The first mounting base 123 can be configured as a first flange at the bottom of the column 122. The first flange can be used to fix the column 122 to the moving end of the driver 121 via bolts, screws, or other connecting parts, so that the column 122 moves up and down in the vacuum coating equipment 200 following the moving end of the driver 121. The mechanical fixation between 21 enables efficient transmission of the driving force of the driver 121, ensuring smooth movement and precise positioning of the column 122 during lifting and lowering. This drives the cooling plate 131 and the sample holder 110 to lift and lower synchronously, avoiding the mechanical asynchrony problem caused by the lag in drive transmission in traditional structures. The ends of the water inlet pipe 132 and the water outlet pipe 133 can be set as Z-shaped bends, and the second opening 1232 and the third opening 1233 are passed through the Z-shaped bends, so that the connection ends of the water inlet pipe 132 and the water outlet pipe 133 face the bottom of the vacuum coating equipment 200. This is beneficial for the connection of the water inlet pipe 132 and the water outlet pipe 133 to the external cold source. During the production process, the external cold source can be set in the base 210 and located below the vacuum chamber 220, which can ensure that the wire 142, the water inlet pipe 132 and the water outlet pipe 133 move up and down with the column 122, ensuring the normal operation of the cooling device 130 and the temperature measuring device 140. It should be noted that the external power supply and external cold source shown can be installed in the base 210 and located at the bottom of the vacuum chamber 220, so as to facilitate the connection of the wire 142, water inlet pipe 132 and water outlet pipe 133 to the external power supply and external cold source respectively. A portion of the wire 142 can be reserved to accommodate the lifting and lowering movement of the column 122 and the cooling plate 131. Similarly, the external piping between the water inlet pipe 132 and the water outlet pipe 133 and the external cold source can be reserved to accommodate the lifting and lowering movement of the column 122 and the cooling plate 131, thereby ensuring the normal operation of the lifting device 120, the cooling device 130 and the temperature measuring device 140.

[0031] Optional, such as Figure 9As shown, the first opening 1231, the second opening 1232, and the third opening 1233 are distributed circumferentially around the first mounting base 123. The second opening 1232 and the third opening 1233 are symmetrically arranged in the first mounting base 123, and the first opening 1231 is located between the second opening 1232 and the third opening 1233, so that the wire 142, the water inlet pipe 132, and the water outlet pipe 133 have different extension directions relative to the first mounting base 123, so as to facilitate the connection of the sample stage device 100 with an external power supply and an external cold source.

[0032] Further optional, such as Figure 1 , 3 As shown in Figure 9, a second mounting base 124 is provided on the top of the column 122, and the cooling plate 131 is disposed on the second mounting base 124. The second mounting base 124 has a first through hole 1241, a second through hole 1242, and a third through hole 1243 corresponding to the wire 142, the water inlet pipe 132, and the water outlet pipe 133, respectively. The wire 142 passes through the first through hole 1241 and is connected to the cooling plate 131. The water inlet pipe 132 and the water outlet pipe 133 are respectively connected to the second through hole. The bottom of the first through hole 1242 and the third through hole 1243; between the cooling plate 131 and the second mounting base 124, there are a first sealing ring 125, a second sealing ring 126, and a third sealing ring 127 corresponding to the first through hole 1241, the second through hole 1242, and the third through hole 1243, respectively. The first sealing ring 125 is located on the outer periphery of the first through hole 1241, the second sealing ring 126 is located on the outer periphery of the second through hole 1242, and the third sealing ring 127... The second mounting base 124 is located on the outer periphery of the third through hole 1243. By providing the second mounting base 124, the cooling plate 131 can be quickly installed and removed from the column 122 via the second mounting base 124. Simultaneously, the second mounting base 124 is designed with independent through holes and sealing rings corresponding to the wire 142, the inlet pipe 132, and the outlet pipe 133, respectively. This effectively isolates the wire 142 from the coolant inlet and outlet pipes, preventing short circuits due to liquid leakage or affecting coolant stability due to high cable temperatures, thus improving... The sample stage device 100 has good overall safety and sealing. In addition, the second mounting base 124 concentrates the passage paths of the wires 142, water inlet pipe 132 and water outlet pipe 133 within the second mounting base 124 through the first through hole 1241, the second through hole 1242 and the third through hole 1243, avoiding mechanical interference and messy wiring that may be caused by traditional external pipelines. At the same time, the precise matching of the sealing ring and the through hole makes the connection between the cooling plate 131 and the lifting device 120 more compact, saving valuable space in the vacuum chamber.

[0033] Optionally, a first receiving groove, a second receiving groove, and a third receiving groove are provided between the cooling plate 131 and the second mounting base 124 for installing the first sealing ring 125, the second sealing ring 126, and the third sealing ring 127. The first sealing ring 125, the second sealing ring 126, and the third sealing ring 127 abut against the cooling plate 131 and the second mounting base 124 to close the assembly gap between the cooling plate 131 and the second mounting base 124, which helps to improve the sealing performance of the sample stage device 100 and ensure the cleanliness of the vacuum chamber 221. Further, the first receiving groove, the second receiving groove, and the third receiving groove can be provided at the bottom of the cooling plate 131, or at the top of the second mounting base 124, or opposite to each other at the bottom of the cooling plate 131 and the top of the second mounting base 124. This utility model does not make specific limitations.

[0034] Further optional, such as Figure 1 and Figure 4As shown, the sample stage device 100 also includes a sealing device 150 disposed on the outside of the column 122. The sealing device 150 includes a third mounting base 151, a sealing connecting base 152 disposed on the third mounting base 151, and a sealing element 153 disposed on the inner side of the sealing connecting base 152. The column 122 is slidably inserted through the sealing element 153 via the driver 121. A fourth sealing ring 154 is also provided between the sealing connecting base 152 and the third mounting base 151. Specifically, the third mounting base 151... 51 is connected to the assembly part 222. The bottom of the third mounting base 151 is provided with a second flange part 1511. The assembly part 222 includes a third flange part 2221 corresponding to the second flange part 1511 and an assembly cylinder 2222 disposed between the third flange part 2221 and the vacuum chamber 220. The second flange part 1511 and the third flange part 2221 can be connected by screws, bolts or other connecting parts. The seat of the third mounting base 151 extends into the vacuum chamber through the cavity of the assembly cylinder 2222. Inside chamber 221, the sealing connection seat 152 is fixed within the vacuum chamber 221. The sealing element 153 can be a skeleton oil seal 153 from the prior art. The column 122 is vertically and movably inserted into the skeleton oil seal 153, which provides a vacuum seal for the column 122. Simultaneously, the top and bottom of the sealing connection seat 152 guide the column 122 to move vertically along the longitudinal direction, thereby enhancing the stability of the lifting device 120. Additionally... The fourth sealing ring 154 abuts against the sealing connection seat 152 and the third mounting seat 151 to close the assembly gap between the sealing connection seat 152 and the third mounting seat 151, further enhancing the sealing performance of the sample stage device 100. Furthermore, the fourth sealing ring 154 abuts against the second flange portion 1511 and the third flange portion 2221, and the second flange portion 1511 and / or the third flange portion 2221 are provided with a fourth receiving groove for installing the fourth sealing ring 154.

[0035] Furthermore, a fifth sealing ring 155 is provided between the second flange portion 1511 and the third flange portion 2221. The fifth sealing ring 155 seals the assembly gap between the third mounting base 151 and the assembly portion 222, thereby improving the connection sealing between the sample stage device 100 and the vacuum chamber 220 and ensuring the stability of the vacuum chamber 221.

[0036] On the other hand, in some alternative embodiments, such as Figure 6As shown, the sample holder 110 includes a base 111 mounted on the cooling plate 131 and a sample positioning plate 112 mounted on the base 111. The sample positioning plate 112 has multiple spaced sample fixing positions 1121. A foolproof structure 113 is provided between the base 111 and the cooling plate 131. The foolproof structure 113 positions the base 111 on the cooling plate 131, ensuring that the base 111 is installed on the cooling plate 131 in a preset direction and position. This effectively prevents installation misalignment, rotational displacement, or loosening, thereby protecting the sample. During the coating process, the sample is always in a precise process position to avoid uneven coating or process failure caused by displacement. Multiple sample fixing positions 1121 distributed at intervals on the sample positioning plate 112 can simultaneously carry multiple samples. Combined with the temperature control function of the cooling plate 131, uniform cooling of batch samples is achieved, which greatly improves the efficiency of single process processing. At the same time, the interval design avoids heat conduction interference between samples and ensures that the process conditions of each sample are independently controllable. In practical applications, the cooling water flow in the cooling plate 131 is used to cool the base plate 111 and further cool the samples.

[0037] Furthermore, such as Figure 5 and Figure 6 As shown, the foolproof structure 113 includes a first foolproof hole 1131 in the chassis 111, a second foolproof hole 1132 in the cooling plate 131 corresponding to the first foolproof hole 1131, and a positioning member 1133 passing between the first foolproof hole 1131 and the second foolproof hole 1132. The positioning member 1133 can be set independently or integrally formed with the chassis 111 or the cooling plate 131. This utility model does not make specific limitations. During assembly, the first foolproof hole 1131 and the second foolproof hole 1132 are aligned, and the positioning member 1133 is fixed in the cooling plate 131 and the chassis 111 by passing through the first foolproof hole 1131 and the second foolproof hole 1132. This facilitates the positioning and insertion of the chassis 111 on the cooling plate 131, simplifies the connection structure between the sample holder 110 and the cooling device 130, and facilitates the disassembly and assembly of the sample holder 110.

[0038] Furthermore, the sample positioning disk 112 can be fixedly connected to the base 111 by screws, bolts or other connecting parts, so as to improve the connection stability of the sample holder 110.

[0039] The above examples are merely illustrative of the technical content of this utility model to facilitate reader understanding, but do not imply that the implementation of this utility model is limited to these embodiments. Any technical extensions or re-creations made based on this utility model are protected by this utility model. The scope of protection of this utility model is defined by the claims.

Claims

1. A multi-functional sample stage apparatus, characterized by, include: A sample holder (110) is used to hold samples; A lifting device (120) is provided, and the sample rack (110) is mounted on the lifting device (120). The lifting device (120) drives the sample rack (110) to move up and down. A cooling device (130) is provided between the sample holder (110) and the lifting device (120) to cool the sample holder (110); A temperature measuring device (140) is connected to the cooling device (130) and the temperature of the cooling device (130) is detected by the temperature measuring device (140).

2. A multi-functional stage apparatus as claimed in claim 1, wherein, The temperature measuring device (140) includes a temperature sensor (141) and a wire (142) connected to the temperature sensor (141). The temperature sensor (141) is used to detect the temperature of the cooling device (130). The wire (142) passes through the lifting device (120) and is connected to an external power source to supply power to the temperature sensor (141).

3. A multi-functional stage apparatus as claimed in claim 2, wherein, The cooling device (130) includes a cooling plate (131) disposed between the sample holder (110) and the lifting device (120). The bottom of the cooling plate (131) is provided with a mounting cavity (1311) for mounting the temperature sensor (141). The cooling plate (131) is provided with an inlet pipe (132) and an outlet pipe (133) on the outside. The inlet pipe (132) and the outlet pipe (133) pass through the lifting device (120) and extend to the outside, respectively. Coolant is input and output to the cooling plate (131) through the inlet pipe (132) and the outlet pipe (133).

4. The multifunctional sample stage device as described in claim 3, characterized in that, The cooling plate (131) is provided with a water inlet (1312), a serpentine flow channel (1313) and a water outlet (1314) connected in sequence. The water inlet (1312) is connected to the water inlet pipe (132), and the water outlet (1314) is connected to the water outlet pipe (133).

5. The multifunctional sample stage device as described in claim 3, characterized in that, The lifting device (120) includes a driver (121) and a column (122) connected to the driver (121). The driver (121) drives the column (122) to move up and down. The column (122) is provided with a first lead wire channel, a second lead wire channel and a third lead wire channel for the electric wire (142), the water inlet pipe (132) and the water outlet pipe (133) to pass through respectively.

6. The multifunctional sample stage device as described in claim 5, characterized in that, The bottom of the column (122) is provided with a first mounting base (123). The column (122) is connected to the moving end of the driver (121) through the first mounting base (123). The driver (121) drives the column (122) to move up and down, so as to drive the cooling plate (131) and the sample holder (110) to move up and down synchronously. The first mounting base (123) is provided with a first opening (1231), a second opening (1232) and a third opening (1233) respectively communicating with the first lead channel, the second lead channel and the third lead channel.

7. The multifunctional sample stage device as described in claim 5, characterized in that, The top of the column (122) is provided with a second mounting base (124), and the cooling plate (131) is provided on the second mounting base (124). The second mounting base (124) is provided with a first through hole (1241), a second through hole (1242) and a third through hole (1243) respectively corresponding to the wire (142), the water inlet pipe (132) and the water outlet pipe (133). A first sealing ring (125), a second sealing ring (126) and a third sealing ring (127) respectively corresponding to the first through hole (1241), the second through hole (1242) and the third through hole (1243) are provided between the cooling plate (131) and the second mounting base (124).

8. The multifunctional sample stage device as described in claim 5, characterized in that, It also includes a sealing device (150) located on the outside of the column (122). The sealing device (150) includes a third mounting base (151), a sealing connection seat (152) located on the third mounting base (151), and a sealing element (153) located on the inside of the sealing connection seat (152). The column (122) is slidably inserted through the sealing element (153) via the driver (121). A fourth sealing ring (154) is also provided between the sealing connection seat (152) and the third mounting base (151).

9. The multifunctional sample stage device as described in claim 3, characterized in that, The sample holder (110) includes a base (111) disposed on the cooling plate (131) and a sample positioning plate (112) disposed on the base (111). The sample positioning plate (112) is provided with a plurality of spaced sample fixing positions (1121). A foolproof structure (113) is provided between the base (111) and the cooling plate (131) to position the base (111) on the cooling plate (131).

10. A vacuum coating apparatus (200), characterized in that, The device includes a base (210), a vacuum chamber (220) disposed on the base (210), and a sample stage device (100) as described in any one of claims 1 to 9. The sample stage device (100) is disposed between the base (210) and the vacuum chamber (220). The vacuum chamber (220) has a vacuum chamber (221) inside and an assembly part (222) outside the vacuum chamber (220). The lifting device (120) passes through at least part of the assembly part (222) and extends into the vacuum chamber (221). The lifting device (120) moves up and down relative to the vacuum chamber (220) to drive the sample holder (110) to move up and down in the vacuum chamber (221).

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