A small-size thin-rod-shaped substrate vacuum coating support and a vacuum coating device

Abstract

This utility model provides a small-sized, thin rod-shaped substrate vacuum coating support and a vacuum coating device. The support includes a main body with a frame structure; the main body includes a top wall, a bottom wall, and two oppositely arranged side walls; the vacuum coating support also includes a fixing structure located between the top wall and the bottom wall for fixing the product to be coated; the fixing structure includes a fixing member and two fixing frames arranged along a first horizontal direction, the two ends of the fixing frames are respectively fixed to the two oppositely arranged side walls, the fixing member is arranged on the fixing frame near the top wall and penetrates the upper and lower surfaces of the fixing frame; the fixing member can move vertically on the fixing frame; the fixing member has a fixing groove with an opening facing the bottom wall; the fixing member is configured to be inserted and fixed to one end of the product to be coated through the fixing groove and press down on the product to be coated by its own weight so that the other end of the product to be coated abuts against the fixing frame near the bottom wall.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology. More specifically, it relates to a small-sized, thin rod-shaped substrate vacuum coating support and a vacuum coating device. Background Technology

[0002] Vacuum coating is a technique for depositing thin film materials on a substrate surface. The coating material is vaporized or ionized through evaporation or sputtering, causing a stationary phase to deposit onto the material surface in a vacuum environment, forming a dense and uniform thin film. This technology is widely used in optical devices, electronic components, tool surface modification, and decorative coatings.

[0003] In vacuum coating, the substrate is typically fixed to a support using a clamp, and then the support is moved into the vacuum coating chamber. An internal driver in the coating machine rotates the support, achieving rotational coating of the substrate. For small, thin rod-shaped coating substrates (typically 1mm in diameter and 15mm in length), current common methods require adjusting fasteners on the support to clamp and secure the substrate. However, small, thin rod-shaped coating substrates are prone to deformation under stress during actual clamping and securing, causing substrate damage. Furthermore, existing substrate installation and securing methods are complex and time-consuming, limiting production efficiency. Utility Model Content

[0004] To address the aforementioned problems, this utility model provides a small-sized, thin rod-shaped substrate vacuum coating support to solve the problem that existing substrate clamping methods easily lead to deformation and damage of small-sized, thin rod-shaped substrates.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] This utility model provides a small-sized, thin rod-shaped substrate vacuum coating support, comprising:

[0007] The main body has a frame structure;

[0008] The main body includes a top wall, a bottom wall, and two oppositely arranged side walls;

[0009] The vacuum coating support also includes a fixing structure located between the top wall and the bottom wall for fixing the product to be coated.

[0010] The fixing structure includes a fixing member and two horizontally arranged fixing frames. The two ends of the fixing frames are respectively fixed to two oppositely arranged side walls. The fixing member is arranged on the fixing frame near the top wall and penetrates the upper and lower surfaces of the fixing frame. The fixing member can move vertically on the fixing frame.

[0011] The fastener has a fastening groove with an opening facing the bottom wall.

[0012] The fastener is configured to be inserted and fixed to one end of the product to be coated via a fixing groove, and to press down on the product to be coated by its own weight so that the other end of the product to be coated abuts against the fixing frame near the bottom wall.

[0013] A preferred embodiment is that the mounting bracket near the top wall includes a through hole for the fastener to pass through, a threaded hole communicating with the through hole, and a clamping member screwed into the threaded hole;

[0014] The axis of the through hole is set in a vertical direction, and the axis of the threaded hole is set in a second horizontal direction; the second horizontal direction is perpendicular to the first horizontal direction; one end of the clamping member along the second horizontal direction abuts against the side wall of the fixing member so that the fixing member abuts against and is fixed to the side wall of the through hole.

[0015] The preferred embodiment is that the fixing frame near the top wall of the fixing structure is the first fixing frame, and the fixing frame near the bottom wall is the second fixing frame; along the extending direction of the first fixing frame, the first fixing frame includes a plurality of through holes penetrating the upper and lower surfaces of the first fixing frame, and a fixing component is installed in each through hole;

[0016] Along the extending direction of the second fixing frame, the second fixing frame includes a plurality of grooves corresponding one-to-one with the through holes; the grooves are formed by indentation from the side surface of the second fixing frame away from the bottom wall.

[0017] In a preferred embodiment, the fastener includes an abutting portion and an inserting portion connected together; the inserting portion passes through the through hole, and the abutting portion abuts against one edge of the through hole near the top wall; the fixing groove is formed on the inserting portion.

[0018] In a preferred embodiment, the horizontal cross-sections of both the groove and the through hole are circular, and the horizontal cross-section of the insertion part is also circular; the circular cross-section of the insertion part is located within the area defined by the circular cross-section of the through hole, and the circular cross-section of the groove is located within the area defined by the circular cross-section of the insertion part; the center of the groove and the center of the through hole are both located on the axis of the clamping member, and the distance between the center of the groove and the center of the through hole is half of the fitting clearance between the through hole and the insertion part.

[0019] A preferred embodiment is that the vacuum coating support further includes a first shaft extending from the top wall in a direction away from the bottom wall and a second shaft extending from the bottom wall in a direction away from the top wall.

[0020] The first shaft and the second shaft are configured to be connected and fixed to the drive mechanism of the vacuum coating equipment, respectively, so as to drive the bracket to rotate.

[0021] In a preferred embodiment, the first shaft and the second shaft are located at the middle positions of the top wall and the bottom wall, respectively, and the first shaft and the second shaft are coaxially arranged.

[0022] A preferred embodiment is that the top wall portion and the bottom wall portion include multiple sets of fixing structures spaced apart along the extension direction of the side wall portion.

[0023] In a preferred embodiment, the horizontal cross-sections of both the fixing groove and the recess are circular, the inner diameter of the fixing groove is 0.6mm-6mm, and the inner diameter of the recess is equal to the inner diameter of the fixing groove.

[0024] This utility model also provides a small-sized, thin rod-shaped substrate vacuum coating equipment, including a coating chamber, a vacuum coating support as described above, and a drive mechanism for driving the vacuum coating support to rotate around its own axis; the drive mechanism is disposed in the coating chamber.

[0025] The beneficial effects of this utility model are as follows:

[0026] This utility model provides a novel coating support, comprising a main body with a frame structure; the main body includes a top wall, a bottom wall, and two oppositely arranged side walls; the vacuum coating support also includes a fixing structure located between the top wall and the bottom wall for fixing the product to be coated; the fixing structure includes a fixing member and two horizontally arranged fixing frames, the two ends of the fixing frames are respectively fixed to the two oppositely arranged side walls, the fixing member is disposed on the fixing frame near the top wall and penetrates the upper and lower surfaces of the fixing frame; the fixing member has a fixing groove with an opening facing the bottom wall; the fixing member is configured to be inserted and fixed to one end of the product to be coated through the fixing groove and press down on the product to be coated by its own weight so that the other end of the product to be coated abuts against the fixing frame near the bottom wall. This vacuum coating holder is fixed to one end of the product to be coated via a fixing groove. Its own weight presses down on the product, causing the other end to abut against the fixing frame near the bottom wall. This ensures uniform and consistent stress on the small, thin rod-shaped substrate, avoiding deformation and damage caused by traditional clamping methods. The coating holder eliminates the need for complex fastening processes, simplifying the installation of small, thin rod-shaped substrates and significantly improving installation efficiency. Attached Figure Description

[0027] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings.

[0028] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0029] Figure 2 This is a schematic diagram of the cross-sectional structure of this utility model.

[0030] Figure 3 This is a schematic diagram of the main structure of the present invention.

[0031] Figure 4 This is a structural schematic diagram of the fastener of this utility model.

[0032] Figure 5 This is a schematic diagram of the fit between the through hole and the groove in this utility model.

[0033] Figure 6 This is a schematic diagram showing the fit between the through hole, groove, and fixing component of this utility model. Detailed Implementation

[0034] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0035] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0036] Technologies and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such technologies and equipment should be considered part of the specification.

[0037] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0038] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0039] To address the problem that existing substrate clamping methods easily lead to deformation and damage of small-sized, thin rod-shaped substrates, this invention provides a vacuum coating support for small-sized, thin rod-shaped substrates, combined with... Figures 1 to 6 As shown, the small-sized, thin-rod-shaped substrate vacuum coating support specifically includes: a main body 1 with a frame structure, the main body 1 including a top wall portion 11, a bottom wall portion 12, and two oppositely arranged side wall portions 13. Both side wall portions 13 are vertically arranged, while the top wall portion 11 and the bottom wall portion 12 are horizontally arranged. This frame structure main body 1 constitutes the mounting body of the coating support.

[0040] Furthermore, the vacuum coating support also includes a fixing structure located between the top wall 11 and the bottom wall 12 for fixing the product 5 to be coated. The product 5 to be coated is specifically a small-sized, thin rod-shaped substrate. This fixing structure allows the small-sized, thin rod-shaped substrate to be fixed onto the frame-structured main body 1. Specifically, the fixing structure includes a fixing member 23 and two horizontally arranged fixing frames, both of which are parallel to the top wall 11. The two ends of the fixing frames along the horizontal direction are respectively fixed to two oppositely arranged side walls 13, and the fixing frames are perpendicular to the side walls 13. Of the two fixing frames in the same fixing structure, the fixing frame closer to the top wall 11 is the first fixing frame 21, and the fixing frame closer to the bottom wall 12 is the second fixing frame 22. The fixing member 23 is disposed on the fixing frame closer to the top wall, i.e., the first fixing frame 21, and penetrates the upper and lower surfaces of the first fixing frame 21. The fixing member 23 can move vertically on the first fixing frame 21 to adapt to products of different lengths. Figure 3 As shown, the first fixing frame 21 has a through hole 211, and the second fixing frame 22 has a groove 221. The fixing member 23 has a fixing groove 231 with an opening facing the bottom wall portion 12, arranged axially along the through hole 211. The through hole 211 is vertical, and the fixing groove 231 is also coaxially arranged with the fixing member 23, with the groove opening facing downwards. The fixing member 23 is configured to be inserted and fixed to the top of the product 5 to be coated via the fixing groove 231, and presses down on the product 5 under its own weight, causing the bottom of the product 5 to abut against the second fixing frame 22 near the bottom wall portion 12, thereby fixing the thin rod-shaped substrate between the fixing member 23 and the second fixing frame 22. The depth of the fixing groove 231 on the fixing member 23 is designed to accommodate one end of the product 5 to be coated, ensuring that the top of the product 5 is stable within the fixing groove 231 and does not easily fall off. It should be noted that... Figure 1 In this diagram, the X direction is the first horizontal direction, and the Y direction is the vertical direction; the X and Y directions are perpendicular. (Combined...) Figure 5 or Figure 6 As shown, the Z direction is the second horizontal direction, and the Z direction is perpendicular to both the X and Y directions.

[0041] In one specific embodiment, the fixing frame near the top wall includes a through hole 211 through which the fixing member 23 passes, a threaded hole communicating with the through hole 211, and a clamping member 6 screwed to the threaded hole; the axis of the through hole 211 is arranged in a vertical direction, and the axis of the threaded hole is arranged in a second horizontal direction; the second horizontal direction is perpendicular to the first horizontal direction; one end of the clamping member 6 along the second horizontal direction abuts against the side wall of the fixing member so that the fixing member 23 abuts against and is fixed to the side wall of the through hole 211. Since coating is an additive manufacturing process, in order to ensure the actual service life of the mold, the through hole 211 and the fixing member 23 should have a large clearance fit, usually 1-2 mm. However, a large clearance fit will cause the thin rod-shaped substrate to swing back and forth when it rotates with the rotating mechanism during the coating process, thereby affecting the uniformity and consistency of the film layer. Therefore, a threaded hole is opened on the side wall of the fixing frame with the through hole in the thickness direction and the threaded hole communicates with the through hole 211. By screwing a threaded clamping member 6 (which can be a fastening screw) into the threaded hole, the fixing member 23 is pressed into the through hole 211, thus stably fixing the fixing member 23 within the through hole 211 and solving the wobbling problem during the substrate coating process. The clamping member 6 only abuts against the fixing member 23 and does not contact the product 5 to be coated. The fixing member 23 and the through hole 211 are not fixed by screws because the downward pressure during tightening is difficult to control precisely. Overly tight screws will cause excessive downward pressure on the substrate, damaging it, while overly loose screws will result in insufficient downward pressure on the substrate, leading to unstable substrate fixation and directly affecting the coating effect.

[0042] Furthermore, multiple sets of fixing structures are spaced apart between the top wall portion 11 and the bottom wall portion 12, extending along the side wall portion 13. Along the extending direction of the first fixing frame 21, the first fixing frame 21 includes several through holes 211 penetrating the upper and lower surfaces of the first fixing frame 21, each through hole 211 housing a fixing member 23. Along the extending direction of the second fixing frame 22, the second fixing frame 22 includes several grooves 221 corresponding one-to-one with the through holes 211. The grooves 221 are formed by inward indentation from the side surface of the second fixing frame 22 facing away from the bottom wall portion. The design of the grooves 221 not only helps to fix the other end, i.e., the bottom end, of the product 5 to be coated, but also reduces friction between the fixing member 23 and the second fixing frame 22 to a certain extent through a limiting effect, making the entire fixing structure easier to operate and improving the stability and reliability of the fixation. Through the above settings, flexible configuration is possible according to the specific quantity of the product 5 to be coated and the actual coating requirements, effectively improving the efficiency of the coating operation. Each set of fixing structures operates independently without interfering with each other, ensuring the stability and reliability of the coating process. Meanwhile, the arrangement of the fixing components 23 on the first fixing frame 21 can be customized according to specific coating requirements to accommodate the fixing needs of thin rod-shaped substrates of different specifications and shapes.

[0043] Regarding the specific structure of the fastener 23, the fastener 23 includes a connecting abutment portion 232 and an insertion portion 233. The abutment portion 232 and the insertion portion 233 can be integrally formed. The insertion portion 233 penetrates the through hole 211, and the abutment portion 232 abuts against one edge of the through hole 211 near the top wall portion 11. The fixing groove 231 is formed on the insertion portion 233. The fixing groove 231 and the insertion portion 233 are coaxially arranged. The diameter of the abutment portion 232 is larger than the diameter of the through hole 211 to ensure that the fastener 23 is securely installed in the through hole 211 and is not easily dislodged. The diameter of the insertion portion 233 is slightly smaller than the diameter of the through hole 211 so that the insertion portion 233 can smoothly pass through the through hole 211 and be inserted and fixed to one end of the product 5 to be coated through the fixing groove 231. Under the action of the fastener 23's own weight, the abutment portion 232 can fit tightly against the top wall of the through hole 211, further enhancing stability.

[0044] Combination Figure 5 and Figure 6 As shown, the horizontal cross-sections of the groove 221 and the through hole 211 are both circular, and the horizontal cross-section of the insertion part 233 is also circular. The circular cross-section of the insertion part 233 is located within the area defined by the circular cross-section of the through hole 211, and the circular cross-section of the groove 221 is located within the area defined by the circular cross-section of the insertion part 233; the distance d between the center O1 of the groove 221 and the center O2 of the through hole 211 is half of the fitting clearance D between the through hole 211 and the insertion part 233, i.e., D = 2d. The center O2 of the through hole 211 is located within the range defined by the circular cross-section of the groove 221. The fitting clearance between the through hole 211 and the insertion part 233 refers to the gap between the insertion part 233 and the threaded hole 233 after the two ends of the coated substrate are respectively installed in the groove 221 and the fixing groove 231, and the insertion part 233 is pressed inward by the clamping member 6. One end of the clamping member 6 along the second horizontal direction abuts against the side wall of the insertion part 233 so that the insertion part 233 abuts against and is fixed to the side wall of the through hole 211. At this time, the distance between the circular cross-section of the insertion part 233 and the circular cross-section of the through hole 211 along the axial direction of the clamping member 6 is the fitting clearance D between the through hole 211 and the insertion part 233. The center O1 of the groove 221 and the center O2 of the through hole 211 are both located on the axis of the clamping member 6, and the clamping member 6 is coaxial with the threaded hole. The above arrangement ensures that the fixing member 23 is stably fixed within the through hole 211, and that the groove 221, the fixing member 23, and the fixing groove 231 are all coaxially arranged. At this time, the substrate to be coated remains vertically aligned along the Y direction, thus ensuring the uniformity and consistency of the film layer during coating. It should be noted that... Figure 6 In the view, the groove 221 is obscured by the insertion part 233, so the circular cross-sectional boundary of the groove 221 is represented by a dashed line.

[0045] The diameter of the thin rod-shaped substrate ranges from 0.5mm to 5mm, and the length ranges from 10mm to 100mm. To accommodate thin rod-shaped substrates of different sizes, the horizontal cross-section of both the fixing groove 231 and the recess 221 is circular. The inner diameter of the fixing groove 231 is 0.6mm to 6mm, and the inner diameter of the recess 221 is equal to that of the fixing groove 231. The insertion part 233 is configured to move along the axial direction (vertical direction) of the through hole 211 within the through hole 211 to fix products of different lengths to be coated. When multiple thin rod-shaped substrates of different lengths need to be assembled simultaneously on the coating support provided in this application, the height at which the top of the thin rod-shaped substrate of different lengths lifts the fixing member 23 is also different.

[0046] In one specific embodiment, since the coating holder needs to be installed in the coating chamber, the coating chamber typically includes a drive mechanism for rotating the coating holder. To facilitate the installation of the coating holder provided in this application within the coating chamber, combined with... Figure 1 As shown, the bracket also includes a first shaft 3 extending from the top wall 11 away from the bottom wall 12, and a second shaft 4 extending from the bottom wall 12 away from the top wall 11, both located on the top wall 11. The first shaft 3 and the second shaft 4 are configured to be connected and fixed to the drive mechanism of the vacuum coating equipment to drive the bracket to rotate.

[0047] Furthermore, in order to ensure the stability of the rotation of the coating support during the vacuum coating process in the coating chamber, so as to make the coating thickness of the thin rod-shaped substrate uniform, the first shaft 3 and the second shaft 4 are respectively located in the middle of the top wall 11 and the bottom wall 12, and the first shaft 3 and the second shaft 4 are coaxially arranged.

[0048] This utility model also provides a small-sized, thin rod-shaped substrate vacuum coating equipment, including a coating chamber for providing the environment required for vacuum coating, a vacuum coating support as described above, and a drive mechanism for driving the vacuum coating support to rotate around its own axis; the drive mechanism is disposed in the coating chamber.

[0049] In practice, the small, thin rod-shaped substrate to be coated is first inserted into the fixing groove 231 of the fixing member 23. Due to the gravity of the fixing member 23, the other end of the product 5 to be coated will abut against the groove 221 on the second fixing frame 22, thereby achieving stable fixation. After all the small, thin rod-shaped substrates are fixed on the coating bracket, the entire coating bracket is installed onto the drive mechanism in the coating chamber via the first shaft 3 and the second shaft 4. After the drive mechanism is started, the coating bracket begins to rotate around its own axis, while the coating material in the coating chamber is evaporated or sputtered and deposited onto the rotating substrate surface to form a uniform and dense thin film.

[0050] More specifically, this utility model relates to a vacuum coating process for a vacuum coating equipment suitable for small, thin rod-shaped substrates. The specific steps are as follows: First, the coating chamber is filled with gas; then, the coating chamber door is opened and the vacuum coating bracket is taken out; then, a thin rod-shaped substrate to be coated is held with tweezers, and one end of the thin rod-shaped substrate is used to lift the fixing member 23 and insert it into the fixing groove 231, so that the fixing member 23 rises and the other end of the thin rod-shaped substrate falls into the groove 221 of the second fixing frame 22. The clamping member 6 is screwed into the threaded hole and the clamping member 6 presses the insertion part 233 inward. One end of the clamping member 6 along the second horizontal direction abuts against the side wall of the insertion part 233 so that the insertion part 233 abuts against and is fixed to the side wall of the through hole 211, so that the thin rod-shaped substrate is vertically set along the Y direction. Complete the installation of other thin rod-shaped substrates in the same manner; then, install the vacuum coating holder onto the rotating mechanism inside the coating chamber; close the coating chamber door and start the vacuum pump; when the vacuum level reaches above the process requirement of E-3Pa, heat the coating chamber and maintain the temperature; after the heat preservation process is completed, start the rotating mechanism to perform glow discharge or ion beam cleaning on the thin rod-shaped substrates; after cleaning, turn on the target power supply to start the coating process; after coating is completed, turn off the target power supply and heating equipment; when the temperature drops below the process requirement, purge the coating chamber; open the coating chamber door, remove the vacuum coating holder, and remove the coated thin rod-shaped substrates one by one from the vacuum coating holder.

[0051] The coating support and coating equipment provided by this utility model not only solve the problem that small-sized thin rod-shaped substrates are prone to deformation and damage during the coating process, but also greatly improve the efficiency and stability of the coating operation, and can ensure the uniformity and consistency of the coating, and has broad application prospects.

[0052] In summary, this utility model provides a novel coating support, comprising a main body with a frame structure; the main body includes a top wall, a bottom wall, and two oppositely arranged side walls; the vacuum coating support further includes a fixing structure located between the top wall and the bottom wall for fixing the product to be coated; the fixing structure includes two horizontally arranged fixing brackets, the two ends of which are respectively fixed to the two oppositely arranged side walls; the fixing bracket near the top wall includes a through hole penetrating the upper and lower surfaces of the fixing bracket and a fixing member passing through the through hole; the fixing member has a fixing groove with an opening facing the bottom wall and arranged axially along the through hole; the fixing member is configured to be inserted and fixed to one end of the product to be coated through the fixing groove and press down on the product to be coated by its own weight so that the other end of the product to be coated abuts against the fixing bracket near the bottom wall. This vacuum coating holder is fixed to one end of the product to be coated via a fixing groove. Its own weight presses down on the product, causing the other end to abut against the fixing frame near the bottom wall. This ensures uniform and consistent stress on the small, thin rod-shaped substrate, avoiding deformation and damage caused by traditional clamping methods. The coating holder eliminates the need for complex fastening processes, simplifying the installation of small, thin rod-shaped substrates and significantly improving installation efficiency.

[0053] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating this utility model, and are not intended to limit the implementation of this utility model. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all the implementation methods here. All obvious variations or modifications derived from the technical solutions of this utility model are still within the protection scope of this utility model.

Claims

1. A small-size thin-rod-like substrate vacuum coating support, characterized in that, include: The main body has a frame structure; The main body includes a top wall, a bottom wall, and two oppositely arranged side walls; The vacuum coating support also includes a fixing structure located between the top wall and the bottom wall for fixing the product to be coated. The fixing structure includes a fixing member and two fixing frames arranged along a first horizontal direction. The two ends of the fixing frames are respectively fixed to two opposite side walls. The fixing member is arranged on the fixing frame near the top wall and penetrates the upper and lower surfaces of the fixing frame. The fixing member can move vertically on the fixing frame. The fastener has a fastening groove with an opening facing the bottom wall. The fastener is configured to be inserted and fixed to one end of the product to be coated via a fixing groove, and to press down on the product to be coated by its own weight so that the other end of the product to be coated abuts against the fixing frame near the bottom wall.

2. The small-size thin-rod-like substrate vacuum coating holder according to claim 1, characterized in that, The mounting bracket near the top wall includes a through hole for the fastener to pass through, a threaded hole communicating with the through hole, and a clamping member screwed into the threaded hole; The axis of the through hole is set in a vertical direction, and the axis of the threaded hole is set in a second horizontal direction; the second horizontal direction is perpendicular to the first horizontal direction; one end of the clamping member along the second horizontal direction abuts against the side wall of the fixing member so that the fixing member abuts against and is fixed to the side wall of the through hole.

3. The small-size thin-rod-like substrate vacuum coating holder according to claim 2, characterized in that The fixing frame near the top wall of the fixed structure is the first fixing frame, and the fixing frame near the bottom wall is the second fixing frame; along the extending direction of the first fixing frame, the first fixing frame includes a plurality of through holes penetrating the upper and lower surfaces of the first fixing frame, and a fixing component is installed in each through hole; Along the extending direction of the second fixing frame, the second fixing frame includes a plurality of grooves corresponding one-to-one with the through holes; the grooves are formed by indentation from the side surface of the second fixing frame away from the bottom wall.

4. The small-size thin-rod-like substrate vacuum coating holder according to claim 3, characterized in that The fastener includes an abutting portion and an inserting portion connected together; the inserting portion passes through the through hole, and the abutting portion abuts against one edge of the through hole near the top wall; the fixing groove is formed on the inserting portion.

5. The small-size thin-rod-like substrate vacuum coating holder according to claim 4, characterized in that The horizontal cross-sections of the groove and the through hole are both circular, and the horizontal cross-section of the insertion part is also circular. The circular cross-section of the insertion part is located within the area defined by the circular cross-section of the through hole, and the circular cross-section of the groove is located within the area defined by the circular cross-section of the insertion part. The center of the groove and the center of the through hole are both located on the axis of the clamping member. The distance between the center of the groove and the center of the through hole is half of the fitting clearance between the through hole and the insertion part.

6. The small-dimension thin-rod-like substrate vacuum coating holder according to claim 1, characterized in that, The vacuum coating support also includes a first shaft extending from the top wall in a direction away from the bottom wall and a second shaft extending from the bottom wall in a direction away from the top wall. The first shaft and the second shaft are configured to be connected and fixed to the drive mechanism of the vacuum coating equipment, respectively, so as to drive the bracket to rotate.

7. The small-sized, thin rod-shaped substrate vacuum coating support according to claim 6, characterized in that, The first shaft and the second shaft are located at the middle positions of the top wall and the bottom wall, respectively, and the first shaft and the second shaft are coaxially arranged.

8. The small-sized, thin rod-shaped substrate vacuum coating support according to claim 1, characterized in that, The top wall and the bottom wall include multiple sets of fixed structures spaced apart along the extension direction of the side wall.

9. The small-sized, thin rod-shaped substrate vacuum coating support according to claim 3, characterized in that, Both the fixing groove and the recess have circular horizontal cross-sections. The inner diameter of the fixing groove is 0.6mm-6mm. The inner diameter of the recess is equal to that of the fixing groove.

10. A vacuum coating equipment for small-sized, thin rod-shaped substrates, characterized in that, It includes a coating chamber, a vacuum coating support as described in any one of claims 1-9, and a drive mechanism for driving the vacuum coating support to rotate about its own axis; the drive mechanism is disposed in the coating chamber.

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