A film thickness dynamic correction mechanism for a vacuum coating machine

Abstract

This invention relates to the field of vacuum coating, specifically to a dynamic film thickness correction mechanism for a vacuum coating machine. The correction mechanism includes a telescopic drive component, a mounting seal, an output shaft, a linkage component, and a correction component. The telescopic drive component is mounted on one side of the mounting seal, and the linkage component is mounted on the other side. The output end of the telescopic drive component is driven by the output shaft passing through the mounting seal and connected to the linkage component, which in turn drives the correction component to oscillate for dynamic film thickness correction. The purpose of this invention is to provide a simple, well-sealed, dynamically responsive, and easily integrated dynamic film thickness correction mechanism. It enables smooth oscillation of the correction component in a vacuum environment and converts linear displacement into controllable oscillation through an effective transmission mechanism, improving the real-time performance and accuracy of film thickness control while reducing maintenance difficulty and overall system cost.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating, specifically to a dynamic thickness correction mechanism for a vacuum coating machine. Background Technology

[0002] Vacuum coating technology is widely used in optical devices, semiconductors, decorative coatings, and other fields. Its core lies in the precise control of film thickness. Traditional coating machines usually use fixed baffles or static correction mechanisms to adjust the film thickness. However, in high-precision coating processes, factors such as fluctuations in the evaporation source and errors in substrate movement can easily lead to insufficient film thickness uniformity.

[0003] In existing technologies, dynamic correction mechanisms mostly adopt linear displacement adjustment, which has problems such as slow response speed, complex mechanical structure and poor sealing. Especially in a vacuum environment, they are prone to failure due to air leakage or jamming of the drive components, making it difficult to achieve high-frequency and high-precision real-time correction. Summary of the Invention

[0004] In order to overcome the shortcomings and deficiencies of the existing technology, the purpose of this utility model is to provide a film thickness dynamic correction mechanism with simple structure, better sealing performance, faster dynamic response and easy integration. It can realize the smooth swing of the correction part in a vacuum environment, and convert linear displacement into controllable swing through an effective transmission mechanism, thereby improving the real-time performance and accuracy of film thickness control, while reducing maintenance difficulty and overall system cost.

[0005] This utility model is achieved through the following technical solution:

[0006] A film thickness dynamic correction mechanism for a vacuum coating machine includes a telescopic drive component, a mounting seal, an output shaft, a linkage component, and a correction component. The telescopic drive component is installed on one side of the mounting seal seat, and the linkage component is installed on the other side of the mounting seal seat; The output end of the telescopic drive component is connected to the linkage component via an output shaft passing through the mounting seal seat, and the linkage component drives the correction component to swing for dynamic film thickness correction.

[0007] The correction component is a quartz crystal oscillator or an optical monitoring chip, which is installed at the end of the linkage component via a quick-release clamp.

[0008] The linkage component includes a connecting shaft, a swing arm, an L-shaped rocker, and a pressing component. One end of the connecting shaft is axially connected to the outer end of the output shaft. One end of the swing arm is hinged to the other end of the connecting shaft. The other end of the swing arm is hinged to one end of the L-shaped rocker. The other end of the L-shaped rocker is fixedly connected to the correction component. The pressing member is located on the side of the mounting seal away from the telescopic drive member, and the outer side of the L-shaped rocker plate presses against the pressing member.

[0009] The system also includes a guide rail and a guide roller. The guide rail is parallel to the output shaft. The guide roller is rotatably connected to one side of the connecting shaft and is slidably connected to the guide rail.

[0010] The linkage component also includes an angle sensor, which is located on the rotation axis of the swing arm.

[0011] The output shaft is made of a high-strength material with a low coefficient of thermal expansion. The inner end of the output shaft is connected to the telescopic drive component via a flexible coupling, and the outer end of the output shaft passes through the mounting seal and is connected to the linkage assembly via a pin or universal joint.

[0012] The mounting sealing seat is a vacuum bellows sealing structure or a magnetohydrodynamic sealing structure.

[0013] The telescopic drive component is either a cylinder or an electric push rod.

[0014] The beneficial effects of this utility model are: This invention discloses a dynamic film thickness correction mechanism for a vacuum coating machine. Through the non-linear displacement adjustment of the telescopic drive component and the linkage component, the film thickness is dynamically corrected in real time, which significantly improves the response speed of film thickness control and ensures the stability of film quality. In addition, the automated correction mechanism reduces the need for manual intervention, reduces the complexity of operation, reduces the possibility of human error, and improves production efficiency. Attached Figure Description

[0015] The present invention will be further described with reference to the accompanying drawings, but the embodiments in the drawings do not constitute any limitation on the present invention. For those skilled in the art, other drawings can be obtained based on the following drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the correction mechanism in one embodiment of the present invention.

[0017] Figure 2 This is another structural schematic diagram of the correction mechanism in one embodiment of the present invention.

[0018] Figure Labels Telescopic drive component--100, mounting seal seat--101, output shaft--102, linkage component--103, connecting shaft--104, swing arm--105, L-shaped rocker--106, pressing component--107, guide slide rail--108, guide roller--109, correction component--110. Detailed Implementation

[0019] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0020] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0021] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0022] like Figure 1 and Figure 2 As shown, this embodiment discloses a film thickness dynamic correction mechanism for a vacuum coating machine, characterized in that it includes a telescopic drive 100, a mounting sealing seat 101, an output shaft 102, a linkage assembly 103, and a correction assembly 110. The telescopic drive component 100 is installed on one side of the mounting sealing seat 101, and the linkage component 103 is installed on the other side of the mounting sealing seat 101. The output end of the telescopic drive component 100 is driven to the linkage component 103 through the output shaft 102 passing through the mounting seal seat 101, and the linkage component 103 drives the correction component 110 to swing for dynamic correction of film thickness.

[0023] In this embodiment, the correction component 110 is preferably a quartz crystal oscillator or an optical monitoring chip, which is installed at the end of the linkage component 103 by a quick-release clamp; the mounting sealing seat 101 is preferably a vacuum bellows sealing structure or a magnetohydrodynamic sealing structure; and the telescopic drive component 100 is preferably one of a cylinder or an electric push rod.

[0024] Specifically, the linkage component 103 includes a connecting shaft 104, a swing arm 105, an L-shaped rocker 106, and a pressing member 107. One end of the connecting shaft 104 is axially connected to the outer end of the output shaft 102. One end of the swing arm 105 is hinged to the other end of the connecting shaft 104. The other end of the swing arm 105 is hinged to one end of the L-shaped rocker 106. The other end of the L-shaped rocker 106 is fixedly connected to the correction component 110. The pressing member 107 is disposed on the side of the mounting sealing seat 101 away from the telescopic drive member 100, and the outer side of the L-shaped rocker 106 presses against the pressing member 107.

[0025] In this embodiment, the lever principle is formed between the L-shaped rocker 106 and the pressing member 107, and the swing of the correction component 110 is realized by the extension and retraction of the telescopic drive member 100, thereby achieving dynamic film thickness correction with faster response speed, simpler structure and better sealing.

[0026] Furthermore, the system also includes a guide rail 108 and a guide roller 109. The guide rail 108 is parallel to the line of the output shaft 102. The guide roller 109 is rotatably connected to one side of the connecting shaft 104 and slidably connected to the guide rail 108. The inner end of the output shaft 102 is connected to the telescopic drive member 100 via a flexible coupling, and the outer end of the output shaft 102 passes through the mounting seal seat 101 and is connected to the linkage assembly 103 via a pin or universal joint. By setting the guide rail 108 and the guide roller 109, the stability of the output shaft when it extends or retracts along the mounting seal seat 101 is further improved.

[0027] Furthermore, the linkage component 103 also includes an angle sensor, which is located on the rotation axis of the swing arm 105. The angle sensor is connected to the controller signal and can obtain the angle of the swing arm 105 at any time, thereby obtaining the position of the correction component 110 at any time.

[0028] In summary, the film thickness dynamic correction mechanism for a vacuum coating machine in this embodiment achieves real-time dynamic correction of film thickness through the non-linear displacement adjustment of the telescopic drive 100 and the linkage component 103, significantly improving the response speed of film thickness control and ensuring the stability of film quality. In addition, the automated correction mechanism reduces the need for manual intervention, lowers operational complexity, reduces the possibility of human error, and improves production efficiency.

[0029] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit the scope of protection of this utility model. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the essence and scope of the technical solutions of this utility model.

Claims

1. A film thickness dynamic correction mechanism for a vacuum coating machine, characterized in that, Includes telescopic drive components, mounting seals, output shafts, linkage components, and correction components; The telescopic drive component is installed on one side of the mounting seal seat, and the linkage component is installed on the other side of the mounting seal seat; The output end of the telescopic drive component is connected to the linkage component via an output shaft passing through the mounting seal seat, and the linkage component drives the correction component to swing for dynamic film thickness correction.

2. The film thickness dynamic correction mechanism for a vacuum coating machine according to claim 1, wherein The correction component is a quartz crystal oscillator or an optical monitoring chip, which is installed at the end of the linkage component via a quick-release clamp.

3. The film thickness dynamic correction mechanism for a vacuum coating machine according to claim 1, characterized in that, The linkage assembly includes a connecting shaft, a swing arm, an L-shaped rocker, and a pressing component. One end of the connecting shaft is axially connected to the outer end of the output shaft. One end of the swing arm is hinged to the other end of the connecting shaft. The other end of the swing arm is hinged to one end of the L-shaped rocker. The other end of the L-shaped rocker is fixedly connected to the correction assembly. The pressing member is located on the side of the mounting seal away from the telescopic drive member, and the outer side of the L-shaped rocker plate presses against the pressing member.

4. The film thickness dynamic correction mechanism for a vacuum coating machine according to claim 3, characterized in that, The linkage component also includes a guide rail and a guide roller. The straight line of the guide rail is parallel to the straight line of the output shaft. The guide roller is rotatably connected to one side of the connecting shaft and is slidably connected to the guide rail.

5. The film thickness dynamic correction mechanism for a vacuum coating machine according to claim 3, characterized in that, The linkage component also includes an angle sensor, which is located on the rotation axis of the swing arm.

6. The film thickness dynamic correction mechanism for a vacuum coating machine according to claim 1, characterized in that, The inner end of the output shaft is connected to the telescopic drive component via a flexible coupling, and the outer end of the output shaft passes through the mounting seal and is connected to the linkage component via a pin or universal joint.

7. The film thickness dynamic correction mechanism for a vacuum coating machine according to claim 1, characterized in that, The mounting sealing seat is a vacuum bellows sealing structure or a magnetohydrodynamic sealing structure.

8. The film thickness dynamic correction mechanism for a vacuum coating machine according to claim 1, characterized in that, The telescopic drive component is either a cylinder or an electric push rod.

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