A chemical vapor deposition furnace tail gas treatment device

Abstract

This utility model relates to the field of exhaust gas treatment technology, specifically to an exhaust gas treatment device for a chemical vapor deposition furnace. By connecting to an external high-pressure gas source and activating an electric push rod via a control panel, the push rod drives a high-pressure gas nozzle to precisely move to the deposition area. The high-pressure gas flow is delivered through a hose and ejected at high speed from the nozzle, directly impacting and removing dust and particulate matter adhering to the pipe wall, effectively preventing pipe blockage. The entire process requires no manual intervention, resulting in thorough cleaning and high efficiency. A second major advantage is its stable structure and reliable operation. The fixing plate in the cleaning component provides auxiliary support and guidance for the moving parts, ensuring smooth and precise nozzle movement. Simultaneously, during the reset process, the spring mechanism ensures the nozzle automatically retracts and remains in its initial standby position, without interfering with the normal flow of exhaust gas, resulting in good system durability and low maintenance requirements.

Description

Technical Field

[0001] This utility model relates to the field of exhaust gas treatment technology, and in particular to an exhaust gas treatment device for a chemical vapor deposition furnace. Background Technology

[0002] Chemical vapor deposition (CVD) furnaces are important industrial equipment widely used in the field of material surface modification. They deposit solid films by introducing specific reactive gases to cause chemical reactions on the surface of a high-temperature substrate. This process generates a large amount of complex exhaust gas, which usually contains unreacted raw material gaseous substances, gaseous reaction byproducts, and micron or nano-sized particulate dust. These gases must be properly treated before being discharged.

[0003] The common practice is to connect the exhaust gas generated by the vapor deposition furnace directly to the scrubbing tower for purification through pipelines. However, during the transportation process, especially at the point where the pipeline direction changes, dust and particulate matter in the airflow will continuously impact the pipe wall due to inertia and gradually adhere and deposit. After long-term operation, it is very easy to form serious blockage inside the pipeline, affecting the normal operation of the system.

[0004] Traditional solutions to this type of blockage require shutting down the machine and manually disassembling parts of the pipeline for cleaning. This method is cumbersome, consumes a lot of manpower and time, significantly increases maintenance costs, interrupts production processes, and reduces equipment efficiency. Utility Model Content

[0005] The purpose of this invention is to provide a chemical vapor deposition furnace tail gas treatment device, which solves the problem of the troublesome cleaning of the pipeline between the traditional chemical vapor deposition furnace and the scrubbing tower.

[0006] To achieve the above objectives, this utility model provides a chemical vapor deposition furnace exhaust gas treatment device, including a pipe elbow connecting the vapor deposition furnace and a scrubbing tower. A housing is movably mounted on the outer side of the pipe elbow, and a control panel is fixedly mounted on the end of the housing away from the pipe elbow. A connecting ring is fixedly mounted on the bottom of the housing, and several through holes are formed on the connecting ring. A fixing ring is fixedly mounted on the outer surface of the pipe elbow. A cleaning component is disposed inside the housing. The pipe elbow is used to connect the vapor deposition furnace and the scrubbing tower and change the direction of exhaust gas flow. The housing serves as an external protective structure to house the internal components. The control panel provides a human-machine interface for operating and setting cleaning parameters. The connecting ring enables mechanical connection between the housing and the pipe section. Fasteners pass through the through holes to fix the connecting ring. The fixing ring is welded to the outer wall of the pipe as a base for connection. The cleaning component is the core module for performing the cleaning function.

[0007] The cleaning component includes an air pipe connector. An air pipe connector is fixedly installed on the outside of the housing, and an electric push rod is fixedly installed inside the housing. The air pipe connector is connected to an external high-pressure air source device, and the electric push rod provides linear power output.

[0008] The electric push rod is fixedly installed at the bottom of the electric push rod, and a fixing plate is fixedly installed on the inner wall of the housing. The push rod transmits the thrust of the electric push rod to the nozzle, and the fixing plate plays a supporting and guiding role to ensure the stability of the movement.

[0009] The push rod has a nozzle fixedly installed at the end away from the electric push rod. A spring is fixedly installed between the nozzle and the fixed plate. The nozzle guides the high-pressure gas and sprays it onto the dust accumulation surface. The spring provides a restoring force to make the nozzle retract when not in operation.

[0010] A flexible hose is fixedly installed between the air pipe connector and the nozzle, and the spring is connected to the fixing plate through a spring seat. The flexible hose flexibly delivers high-pressure gas between the air pipe connector and the nozzle, and the spring seat is used to fix and connect the two ends of the spring.

[0011] A sealing ring is fixedly installed on the inner wall of the fixed ring. The fixed ring and the connecting ring are connected by fastening bolts. The sealing ring fills the gap to prevent exhaust gas leakage. The fastening bolts apply pressure to make the connecting ring and the fixed ring close tightly, thereby fixing the entire device.

[0012] By connecting to an external high-pressure air source and activating the electric push rod via the control panel, the push rod drives the high-pressure gas nozzle to move precisely to the deposition area. The high-pressure airflow is delivered through a hose and ejected at high speed from the nozzle, directly impacting and removing dust and particulate matter adhering to the pipe wall, effectively preventing pipe blockage. The entire process requires no manual intervention, resulting in thorough and efficient cleaning. The second major advantage lies in its stable structure and reliable operation. The fixed plate in the cleaning component provides auxiliary support and guidance for the moving parts, ensuring smooth and precise nozzle movement. Simultaneously, during the reset process, the spring mechanism ensures that the nozzle automatically retracts and remains in the initial standby position, without interfering with the normal flow of exhaust gas, resulting in good system durability and low maintenance requirements. The third major advantage is its excellent sealing performance and environmental safety. The device uses a sealing ring to tightly fit the inner wall of the pipe, effectively preventing the escape of harmful exhaust gases during the cleaning process, protecting the health of operators and the cleanliness of the production environment, and meeting environmental protection requirements. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0014] Figure 1 This is a schematic diagram of the overall structure of the chemical vapor deposition furnace tail gas treatment device according to an embodiment of the present invention.

[0015] Figure 2 This is a schematic diagram of the installation of the tail gas treatment device for a chemical vapor deposition furnace according to an embodiment of this utility model.

[0016] Figure 3 This is a schematic diagram of the cleaning component structure according to an embodiment of the present invention.

[0017] Figure 4 This is a cross-sectional structural diagram of the cleaning component according to an embodiment of the present invention.

[0018] 1. Pipe elbow, 2. Housing, 3. Control panel, 4. Connecting ring, 5. Through hole, 6. Fixing ring, 7. Air pipe connector, 8. Electric push rod, 9. Push rod, 10. Fixing plate, 11. Nozzle, 12. Spring, 13. Hose, 14. Spring seat, 15. Sealing ring, 16. Fastening bolt. Detailed Implementation

[0019] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.

[0020] Please see Figures 1-4 A chemical vapor deposition furnace exhaust gas treatment device includes a pipe elbow 1, which connects the chemical vapor deposition furnace and a scrubbing tower. A housing 2 is movably mounted on the outer side of the pipe elbow 1. A control panel 3 is fixedly mounted on the end of the housing 2 away from the pipe elbow 1. A connecting ring 4 is fixedly mounted on the bottom of the housing 2, and several through holes 5 are formed on the connecting ring 4. A fixing ring 6 is fixedly mounted on the outer surface of the pipe elbow 1. A cleaning assembly is installed inside the housing 2. The pipe elbow 1 is used to connect the chemical vapor deposition furnace and the scrubbing tower and to provide a flow and diversion channel for the exhaust gas. The housing 2 serves as the main outer shell for installing and protecting various internal components. The control panel 3 is used to receive commands and output control signals. The entire cleaning process is controlled by the connector 4, which is used to achieve mechanical connection and fixation between the housing and the pipe. The through hole 5 is used to allow fasteners to pass through for reliable connection. An external high-pressure gas generating device is connected through the air pipe connector 7. For example, an HPG-2000 high-pressure air pump is selected as the air source supply device. This air pump can stably output high-pressure airflow. The cleaning program is set through the control panel 3 and the electric push rod 8 is started. The electric push rod 8 drives the push rod 9 to move downward according to the command, which drives the nozzle 11 to move precisely to the dust accumulation area on the inner wall of the pipe bend 1. High-pressure gas is introduced from the air pipe connector 7, delivered to the nozzle 11 through the pressure-resistant hose 13, and finally sprayed out at a high speed.

[0021] The cleaning component includes an air pipe connector 7, which is fixedly installed on the outside of the housing 2. An electric push rod 8 is fixedly installed inside the housing 2, and a push rod 9 is fixedly installed at the bottom of the electric push rod 8. A fixing plate 10 is fixedly installed on the inner wall of the housing 2. A fixing ring 6 is used to cooperate with the connecting ring to fix the entire device body. The cleaning component, as a core functional module, is used to perform high-pressure gas cleaning of the pipeline. The air pipe connector 7 is used to connect to an external high-pressure gas source, such as an HPG-2000 air pump. The electric push rod 8 is used to receive control signals and provide precise linear reciprocating power output. The push rod 9 is used to transmit the thrust generated by the electric push rod and drive the nozzle to move. The fixing plate 10 is used to provide stable support and motion guidance for the moving parts.

[0022] A nozzle 11 is fixedly installed at the end of the push rod 9 away from the electric push rod 8. A spring 12 is fixedly installed between the nozzle 11 and the fixed plate 10. A hose 13 is fixedly installed between the air pipe connector 7 and the nozzle 11. The spring 12 and the fixed plate 10 are connected by a spring seat 14. A sealing ring 15 is fixedly installed on the inner wall of the fixed ring 6. The fixed ring 6 and the connecting ring 4 are connected by a fastening bolt 16. The nozzle 11 is used to concentrate high-pressure gas onto the dust surface to achieve efficient cleaning. The spring 12 is used to provide restoring force after the nozzle finishes working, so that it automatically retracts to the initial position. The hose 13 is used to flexibly transport high-pressure gas between the air pipe connector and the nozzle. The spring seat 14 is used to reliably install and fix the two ends of the spring. The sealing ring 15 is used to fill the assembly gap between the components and effectively prevent the leakage of harmful waste gas. The fastening bolt 16 is used to lock the connecting ring and the fixed ring to ensure the overall sealing and connection strength of the device.

[0023] Working principle: An external high-pressure gas generating device is connected through the air pipe connector 7, such as an HPG-2000 high-pressure air pump as the gas source. This air pump can stably output high-pressure airflow. The cleaning program is set through the control panel 3 and the electric push rod 8 is started. The electric push rod 8 drives the push rod 9 to move downward according to the command, which drives the nozzle 11 to move precisely to the dust accumulation area on the inner wall of the pipe bend 1. High-pressure gas is introduced from the air pipe connector 7, delivered to the nozzle 11 through the pressure-resistant hose 13, and finally sprayed out at a high speed to impact and remove the dust and particulate matter attached to the pipe wall. After cleaning, the electric push rod 8 performs a reverse movement, pulling the push rod 9 and the nozzle 11 to retract. At this time, the spring 12 provides a restoring force to ensure that the nozzle 11 automatically returns to the initial position when not in operation, so as to avoid obstructing the flow of exhaust gas. The fixed plate 10 plays an auxiliary support and guiding role in the whole process, enhancing the stability of the movement. At the same time, the sealing ring 15 fits tightly against the inner wall of the pipe, effectively preventing exhaust gas from escaping from the device connection during the cleaning process, ensuring operational safety and environmental cleanliness.

[0024] The above-disclosed embodiments are merely one or more preferred embodiments of this application and should not be construed as limiting the scope of this application. Those skilled in the art will understand that all or part of the processes for implementing the above embodiments and equivalent variations made in accordance with the claims of this application are still within the scope of this application.

Claims

1. A chemical vapor deposition furnace exhaust gas treatment apparatus comprising a pipe bend (1), characterized in that, The pipe elbow (1) connects the vapor deposition furnace and the scrubbing tower. A housing (2) is movably installed on the outside of the pipe elbow (1). A control panel (3) is fixedly installed at the end of the housing (2) away from the pipe elbow (1). A connecting ring (4) is fixedly installed at the bottom of the housing (2). Several through holes (5) are opened on the connecting ring (4). A fixing ring (6) is fixedly installed on the outer surface of the pipe elbow (1). A cleaning component is installed inside the housing (2).

2. The chemical vapor deposition furnace exhaust treatment apparatus of claim 1, wherein, The cleaning component includes an air pipe connector (7), the air pipe connector (7) is fixedly installed on the outside of the housing (2), and an electric push rod (8) is fixedly installed inside the housing (2).

3. A chemical vapor deposition furnace exhaust gas treatment apparatus according to claim 2, wherein A push rod (9) is fixedly installed at the bottom of the electric push rod (8), and a fixing plate (10) is fixedly installed on the inner wall of the housing (2).

4. The apparatus for treating exhaust gas of a chemical vapor deposition furnace according to claim 3, wherein A nozzle (11) is fixedly installed at the end of the push rod (9) away from the electric push rod (8), and a spring (12) is fixedly installed between the nozzle (11) and the fixed plate (10).

5. A chemical vapor deposition furnace exhaust gas treatment apparatus according to claim 4, wherein A hose (13) is fixedly installed between the air pipe connector (7) and the nozzle (11), and the spring (12) is connected to the fixing plate (10) through a spring seat (14).

6. The apparatus for treating exhaust gas of a chemical vapor deposition furnace according to claim 1, wherein A sealing ring (15) is fixedly provided on the inner wall of the fixing ring (6), and the fixing ring (6) and the connecting ring (4) are connected by fastening bolts (16).

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