A multi-stage loading public rotating gantry

Abstract

This utility model relates to a multi-stage loading rotating frame, the key technical points of which are: it includes a fixed bushing, a primary sun gear, a secondary sun gear, a support rod assembly, a main shaft, a primary turntable, a secondary turntable, a connecting shaft, a first planetary gear assembly, and a second planetary gear assembly. Multiple first planetary gear assemblies are evenly arranged around the center line of the primary turntable, and the planetary gears of each first planetary gear assembly mesh with the teeth of the primary sun gear. Multiple second planetary gear assemblies are also evenly arranged around the center line of the secondary turntable, and the planetary gears of each second planetary gear assembly mesh with the teeth of the secondary sun gear. A workpiece arrangement area is formed between the primary and secondary turntables. The free ends of the planetary gears in the first and second planetary gear assemblies face each other and are used to fix the workpieces to be processed. This utility model, by adopting a multi-layer / multi-station three-dimensional structure, greatly improves production capacity and ensures good product consistency.

Description

Technical Field

[0001] This utility model relates to the technical field of workpiece support frames used in vacuum processing processes such as vacuum coating and etching, and specifically to a multi-stage loading rotating frame. Background Technology

[0002] Rotating workpiece racks are primarily used in vacuum processing technologies such as vacuum coating and plasma-enhanced chemical vapor deposition (PECVD). During vacuum processes like coating and etching, to achieve more uniform processing results, substrates or wafers awaiting processing are often loaded onto rotating workpiece racks. The rotation of the racks ensures more even processing, thereby improving product quality. For example, in vacuum coating equipment, multiple workpiece carriers are installed on the rotating drive unit to increase furnace loading capacity and thus improve production efficiency.

[0003] However, the existing public-private rotating turntable still has the following problems: 1. In traditional single-layer or fixed-station rotating frames, the workpiece is relatively stationary and easily affected by the "edge effect" of the processing environment, such as the coating source, plasma, and airflow. For example, in vacuum coating, the film layer is thicker on the workpiece closer to the source and thinner on the workpiece farther away, resulting in poor consistency of products in the same batch.

[0004] 2. Single-layer or low-station rotating racks cannot accommodate enough workpieces in a limited space, especially in enclosed equipment such as vacuum chambers and reaction chambers. The single processing capacity is small and the equipment idle time accounts for a high percentage, which restricts large-scale production.

[0005] 3. The carrier size and spacing are fixed, which cannot flexibly adapt to workpieces of different specifications (such as size and shape) (such as irregular parts, wafers / glass substrates of different sizes). When changing the type of workpiece, the entire rotating frame needs to be replaced, which is costly and inefficient. Utility Model Content

[0006] The purpose of this utility model is to provide a multi-stage loading rotating frame with a reasonable structure and reliable use that solves the above problems. By adopting a multi-layer / multi-station three-dimensional structure, it greatly improves production capacity and ensures good product consistency.

[0007] The technical solution of this utility model is: A multi-stage loading rotating frame, the key technical features of which are: a fixed bushing, a primary sun gear connected to the end of the fixed bushing, a secondary sun gear coaxial with and spaced apart from the primary sun gear, a support rod assembly connecting the primary and secondary sun gears, a main shaft supported in the fixed bushing by bearings, a primary turntable connected to the end of the main shaft, a secondary turntable coaxial with and spaced apart from the primary turntable, a connecting shaft connecting the centers of the primary and secondary turntables, a first planetary gear assembly on the primary turntable, and a second planetary gear assembly on the secondary turntable. The first planetary gear assemblies are numerous and evenly arranged around the center line of the primary turntable, with the planetary gears of each first planetary gear assembly meshing with the teeth of the primary sun gear. The second planetary gear assemblies are also numerous and evenly arranged around the center line of the secondary turntable, with the planetary gears of each second planetary gear assembly meshing with the teeth of the secondary sun gear. A workpiece arrangement area is formed between the primary and secondary turntables, and the free ends of the planetary gears of the first and second planetary gear assemblies are opposite each other and used to fix the workpieces to be processed.

[0008] The aforementioned multi-stage loading rotating frame includes a first planetary gear assembly and a second planetary gear assembly, each comprising a bearing housing, a rotating shaft, a bearing assembly disposed between the rotating shaft and the bearing housing, and a planetary gear disposed at one end of the rotating shaft. The bearing housing is connected and fixed to the first-stage or second-stage turntable.

[0009] The aforementioned multi-stage loading rotating frame, wherein the bearing assembly consists of two bearings arranged at intervals and a spacer ring disposed between the two bearings.

[0010] The aforementioned multi-stage loading rotating frame comprises a first-stage sun gear and a second-stage sun gear, each consisting of a connecting sleeve, a gear tooth structure located at one end of the connecting sleeve and meshing with a planetary gear, and an enlarged-diameter fixed disk located at the other end of the connecting sleeve. The gear tooth structures of the first-stage and second-stage sun gears are arranged opposite to each other. Each support rod of the support rod assembly is connected between the edges of the enlarged-diameter fixed disks of the first-stage and second-stage sun gears. The connecting sleeve of the first-stage sun gear is fitted around the outside of the main shaft. The first-stage and second-stage turntables are located within the enclosing space of the support rod assembly.

[0011] The beneficial effects of this utility model are: 1. Multiple first planetary gear assemblies and multiple second planetary gear assemblies form a two-layer, multi-station three-dimensional structure design, which can accommodate several times the number of workpieces in a limited space (such as a vacuum chamber or reaction chamber) compared to a traditional single-layer rotating rack. For example, in PECVD equipment, by layering and loading, multiple wafers can be processed at once, significantly increasing the production capacity per unit time and greatly reducing equipment idle rate.

[0012] 2. The rotating frame can be customized with a three-dimensional layout according to the equipment cavity size, making full use of vertical space and avoiding the waste of planar space in traditional single-layer structures. Even in small and medium-sized equipment, the upgrade to "small space, large capacity" can be achieved by optimizing the spacing and size of the layers.

[0013] 3. During parts transfer, the layered design facilitates the fixing of irregularly shaped workpieces and avoids damage during transfer; the revolution function also enables multi-angle display of workpieces, which is convenient for quality inspection, assembly and other operations. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 yes Figure 1 Sectional view along the AA direction; Figure 3 yes Figure 1 Cross-sectional view along the BB direction; Figure 4 This is a schematic diagram of the planetary gear assembly of this utility model; Figure 5 This is the outline drawing of this utility model; Figure 6 This is another perspective view of the external shape of this utility model; In the diagram: 1. First-stage sun gear, 101. Gear tooth structure, 102. Expanded diameter fixed disk, 2. Planetary gear, 3. First-stage turntable, 4. Connecting shaft, 5. Support rod assembly, 6. Second-stage turntable, 7. Second-stage sun gear, 701. Gear tooth structure, 702. Expanded diameter fixed disk, 8. Workpiece to be processed, 9. Spindle, 10. Bearing, 11. Fixed bushing, 12. Bearing housing, 13. Spacer ring, 14. Bearing, 15. Rotation shaft. Detailed Implementation

[0015] The present invention will be described in detail with reference to the accompanying drawings.

[0016] like Figures 1-6 As shown, the multi-stage loading rotating frame includes a fixed bushing 11, a primary sun gear 1 connected to the end of the fixed bushing 11, a secondary sun gear 7 coaxial with the primary sun gear 1 and spaced apart, a support rod assembly 5 connecting the primary sun gear 1 and the secondary sun gear 7, a main shaft 9 supported in the fixed bushing 11 by bearings 10, a primary turntable 3 connected to the end of the main shaft 9, a secondary turntable 6 coaxial with the primary turntable 3 and spaced apart, a connecting shaft 4 connecting the centers of the primary turntable 3 and the secondary turntable 6, a first planetary gear assembly on the primary turntable 3, and a second planetary gear assembly on the secondary turntable 6.

[0017] In this embodiment, the first planetary gear assembly and the second planetary gear assembly each include a bearing housing 12, a rotation shaft 15, a bearing assembly disposed between the rotation shaft 15 and the bearing housing 12, and a planetary gear 2 disposed at one end of the rotation shaft 15. The bearing housing 12 is connected and fixed to the primary turntable 3 or the secondary turntable 6. The bearing assembly consists of two bearings 14 arranged at intervals and a spacer ring 13 disposed between the two bearings 14. There are six first planetary gear assemblies, which are evenly arranged around the center line of the primary turntable 3. The planetary gears 2 of each first planetary gear assembly mesh with the gear tooth structure 101 of the primary sun gear 1. There are six second planetary gear assemblies, which are evenly arranged around the center line of the secondary turntable 6. The planetary gears 2 of each second planetary gear assembly mesh with the gear tooth structure 701 of the secondary sun gear 7.

[0018] The first-stage sun gear 1 consists of a connecting sleeve fitted around the outside of the main shaft 9, a gear tooth structure 101 located at one end of the connecting sleeve and meshing with the planet gear 2 of the first planet gear assembly, and an expanded diameter fixed disk 102 located at the other end of the connecting sleeve. The second-stage sun gear 7 consists of a connecting sleeve concentric with the main shaft 9, a gear tooth structure 701 located at one end of the connecting sleeve and meshing with the planet gear 2 of the second planet gear assembly, and an expanded diameter fixed disk 702 located at the other end of the connecting sleeve. The gear tooth structures of the first-stage sun gear 1 and the second-stage sun gear 7 are arranged opposite to each other.

[0019] A workpiece arrangement area is formed between the primary turntable 3 and the secondary turntable 6. The free ends of the planetary gears 2 of the first and second planetary gear assemblies are opposite each other and are used to fix the workpieces 8 to be processed. In this embodiment, each support rod of the support rod assembly 5 is connected between the edges of the expanded diameter fixing disk 102 of the primary sun gear 1 and the expanded diameter fixing disk 702 of the secondary sun gear 7. The primary turntable 3 and the secondary turntable 6 are located within the enclosing space of the support rod assembly 5.

[0020] Working principle: 1. External rotational power is provided to the main shaft 9, that is, the rotation of the main shaft 9 drives the first-stage turntable 3 and the second-stage turntable 6 to rotate synchronously.

[0021] 2. The first-stage sun gear 1 and the second-stage sun gear 7 are connected together by the support rod assembly 5. The first-stage sun gear 1, the second-stage sun gear 7, and the support rod assembly constitute a stationary fixed component.

[0022] 3. The first-stage turntable 3 and the second-stage turntable 6 drive the first planetary gear assembly and the second planetary gear assembly to rotate around the center line of the main shaft 9, which is called revolution; at the same time, the planetary gear 2 of the first planetary gear assembly rotates due to meshing with the gear tooth structure 101 of the first-stage sun gear 1, and the planetary gear 2 of the second planetary gear assembly also rotates due to meshing with the gear tooth structure 701 of the second-stage sun gear 7; thus forming the revolution and rotation motion of the workpiece.

[0023] The embodiments of this utility model have been described in detail above, but the content described is only a preferred embodiment of this utility model and should not be considered as limiting the scope of implementation of this utility model. All equivalent changes and improvements made within the scope of this utility model should still fall within the scope of this utility model.

Claims

1. A multi-stage loading rotating frame, characterized in that: The system includes a fixed bushing, a primary sun gear connected to the end of the fixed bushing, a secondary sun gear coaxial with and spaced apart from the primary sun gear, a support rod assembly connecting the primary and secondary sun gears, a main shaft supported in the fixed bushing by bearings, a primary turntable connected to the end of the main shaft, a secondary turntable coaxial with and spaced apart from the primary turntable, a connecting shaft connecting the centers of the primary and secondary turntables, a first planetary gear assembly on the primary turntable, and a second planetary gear assembly on the secondary turntable. The first planetary gear assemblies are multiple and evenly arranged around the centerline of the primary turntable, with each planetary gear in the first planetary gear assembly meshing with the teeth of the primary sun gear. The second planetary gear assemblies are also multiple and evenly arranged around the centerline of the secondary turntable, with each planetary gear in the second planetary gear assembly meshing with the teeth of the secondary sun gear. A workpiece arrangement area is formed between the primary and secondary turntables. The free ends of the planetary gears in the first and second planetary gear assemblies are opposite each other and used to fix the workpieces to be processed.

2. The multi-stage loading rotating frame according to claim 1, characterized in that: The first planetary gear assembly and the second planetary gear assembly each include a bearing housing, a rotation shaft, a bearing assembly disposed between the rotation shaft and the bearing housing, and a planetary gear disposed at one end of the rotation shaft. The bearing housing is connected and fixed to the first-stage turntable or the second-stage turntable.

3. The multi-stage loading rotating frame according to claim 2, characterized in that: The bearing assembly consists of two bearings spaced apart and a spacer ring disposed between the two bearings.

4. The multi-stage loading rotating frame according to claim 1, characterized in that: The first-stage sun gear and the second-stage sun gear are each composed of a connecting sleeve, a gear tooth structure located at one end of the connecting sleeve and meshing with the planetary gear, and an enlarged diameter fixed disk located at the other end of the connecting sleeve. The gear tooth structures of the first-stage sun gear and the second-stage sun gear are arranged opposite to each other. Each support rod of the support rod assembly is connected between the edges of the enlarged diameter fixed disks of the first-stage sun gear and the second-stage sun gear. The connecting sleeve of the first-stage sun gear is sleeved on the outside of the main shaft. The first-stage turntable and the second-stage turntable are located within the enclosing space of the support rod assembly.

Images