Heating device

Abstract

This utility model discloses a heating device, including a first heating element and a second heating element. The first heating element includes a plurality of first heating sections spirally connected in sequence along a first direction, and the first heating sections are arranged around the inner wall of the device body to form a heating space for heating a graphite boat carrying a silicon wafer to be coated. A connection gap is formed between two adjacent first heating sections along the first direction. The second heating element includes a plurality of second heating sections connected in sequence along the first direction, each second heating section being located within a respective connection gap. The second heating sections are used to heat the graphite boat within the heating space. By having each second heating section located within a respective connection gap, the second heating element can fill the temperature gap caused by the connection gap of the first heating element, without affecting the heat diffusion process of the first heating element, thereby creating a more uniform heating environment and improving the coating uniformity of the heating device.

Description

Technical Field

[0001] This application relates to the field of solar cell fabrication, and more particularly to a heating device. Background Technology

[0002] Coating is a crucial process in solar cell production. It primarily involves depositing anti-reflective and passivation films onto the silicon wafer surface to reduce surface reflectivity, optimize spectral response, increase light absorption, and improve photoelectric conversion efficiency. Simultaneously, coating can passivate surface defects on the silicon wafer, creating field-effect passivation, reducing carrier recombination, and improving electrical performance. Furthermore, coating enhances the chemical stability of the silicon wafer, preventing oxidation, corrosion, and impurity diffusion, improving mechanical properties, preventing surface contamination, and overall enhancing the reliability and lifespan of the cell. Therefore, coating is an indispensable and critical process in solar cell production.

[0003] In related technologies, during film deposition, the graphite boat carrying the silicon wafer is often heated in a heating device using a heating wire and an auxiliary heating rod. However, because the auxiliary heating rod occupies a large space, it can obstruct the heat diffusion of the heating wire, resulting in uneven overall temperature within the furnace and thus affecting the uniformity of the film deposition. Utility Model Content

[0004] This utility model discloses a heating device that can improve the uniformity of coating.

[0005] To achieve the above objectives, the first aspect of this utility model discloses a heating device, comprising:

[0006] Equipment body;

[0007] A first heating element is disposed inside the main body of the device. The first heating element includes a plurality of first heating parts that are spirally connected in sequence along a first direction. The first heating parts are arranged around the inner wall of the main body of the device so that a heating space is formed inside the first heating element. The heating space is configured to heat a graphite boat carrying a silicon wafer to be coated. A connection gap is formed between two adjacent first heating parts along the first direction.

[0008] The second heating element is disposed within the main body of the device. The second heating element includes a plurality of second heating parts connected sequentially along the first direction. Each second heating part is located within a connection gap. The second heating part is configured to heat the graphite boat in the heating space.

[0009] As an optional implementation, the second heating element is located on the side of the first heating element near the inner wall of the device body.

[0010] As an optional implementation, the device body has opposing top and bottom sides;

[0011] The second heating element includes two parts, one of which is disposed near the top side of the device body and the other is disposed near the bottom side of the device body, and the two second heating elements are disposed opposite to each other.

[0012] As an optional implementation, the heating device includes:

[0013] A first temperature controller is electrically connected to the first heating element and is configured to adjust the heating temperature of the first heating element.

[0014] A second temperature controller is electrically connected to the second heating element and is configured to adjust the heating temperature of the second heating element.

[0015] As an optional implementation, the main body of the device is provided with a first temperature measuring component, which extends along the first direction. The first temperature measuring component is configured to detect the temperature in the heating space. The first temperature measuring component is electrically connected to both the first temperature controller and the second temperature controller. The first temperature controller and the second temperature controller are configured to adjust the temperature of the first heating element and the second heating element according to the temperature detected by the first temperature measuring component.

[0016] As an optional implementation, multiple first heating elements and multiple second heating elements are provided. The multiple first heating elements are arranged sequentially along the first direction, and the heating space is formed by the interior of the multiple first heating elements. Each first heating element is provided with a corresponding second heating element.

[0017] The heating space includes multiple heating zones, each of the first heating elements forms a heating zone inside, the first temperature measuring component extends in the multiple heating zones, and multiple second temperature measuring components are spaced apart on the first temperature measuring component, each of the second temperature measuring components being located in the corresponding heating zone.

[0018] Multiple first and second temperature controllers are provided. Each first temperature controller is electrically connected to the first heating element in a one-to-one correspondence. Each second temperature controller is electrically connected to the second heating element in a one-to-one correspondence. The second temperature measuring component is electrically connected to the first and second temperature controllers in a one-to-one correspondence. The first and second temperature controllers are configured to adjust the temperature of the first and second heating elements according to the temperature detected by the second temperature measuring component.

[0019] As an optional implementation, the second temperature controller includes two, and the two second heating elements are electrically connected to the two second temperature controllers in a one-to-one correspondence. The second temperature controller is configured to adjust the heating temperature of the corresponding second heating element.

[0020] As an optional implementation, the main body of the device is a furnace tube, the cross-sectional shape of the main body of the device along the direction perpendicular to the first direction is circular, the circumferential direction of the first heating element is the second direction, and the second heating element extends along the second direction;

[0021] Wherein, the first direction is the length direction of the main body of the device, and the second direction is the circumferential direction of the main body of the device.

[0022] As an optional implementation, the extension dimension of the second heating element in the second direction is not less than the dimension of the graphite boat in the second direction.

[0023] As an optional implementation, the second heating element further includes a plurality of first connecting portions and a plurality of second connecting portions. The second heating portion extends along the second direction, and both the first connecting portions and the second connecting portions extend along the first direction. The first connecting portions and the second connecting portions are respectively connected to the two ends of the second heating portion along the second direction. The first connecting portions and the second connecting portions are configured to connect two adjacent second heating portions, and the first connecting portions and the second connecting portions are alternately arranged along the first direction.

[0024] Compared with the prior art, the beneficial effects of this application are:

[0025] This utility model provides a heating device that uses a first heating element and a second heating element on the inner wall of the device body to heat a graphite boat carrying a silicon wafer to be coated within a heating space. The first heating element includes multiple first heating sections spirally connected in a first direction, surrounding the inner wall of the device body, thus forming a heating space within the first heating element. A connecting gap is formed between adjacent first heating sections. The second heating element includes multiple second heating sections spirally connected in the first direction, each second heating section being disposed within a connecting gap. In this way, the first and second heating elements cooperate with each other. The multiple first heating sections of the first heating element, arranged around the inner wall of the device body, can heat the graphite boat in the reaction chamber from multiple directions, allowing for a preliminary uniform distribution of heat within the reaction chamber. The second heating sections of the second heating element, respectively disposed within the connecting gaps formed between adjacent first heating sections, can effectively fill the connecting gaps of the first heating element. Furthermore, the second heating element does not obstruct the heat diffusion of the first heating element, thereby further optimizing the temperature field within the reaction chamber. This ensures that the silicon wafer on the graphite boat is heated uniformly, thus improving the coating uniformity of the heating device. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a front view of the heating device disclosed in the embodiments of this application;

[0028] Figure 2 This is a side view of the heating device disclosed in the embodiments of this application;

[0029] Figure 3 This is a schematic diagram of the structure of the first heating element disclosed in the embodiments of this application;

[0030] Figure 4 This is a schematic diagram of the structure of the second heating element disclosed in the embodiments of this application;

[0031] Figure 5 This is a schematic diagram of the structure of the second heating element disposed within the first heating element, as disclosed in the embodiments of this application;

[0032] Figure 6 This is a schematic diagram of the structure of the heating device (including multiple heating zones) disclosed in the embodiments of this application.

[0033] Explanation of reference numerals in the attached figures:

[0034] 100-Heating device; 1-Main body of the device; 11-Top side; 12-Bottom side; 2-First heating element; 21-First heating section; 22-Heating space; 221-Heating area; 23-Connecting gap; 3-Second heating element; 31-Second heating section; 32-First connecting section; 33-Second connecting section; 4-First temperature controller; 5-Second temperature controller; 6-First temperature measuring component; 61-Second temperature measuring component; 200-Graphite boat; 201-Boat blade; X-First direction; N-Second direction. Detailed Implementation

[0035] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0036] In this application, the terms "upper," "lower," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0037] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0038] Furthermore, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0039] Furthermore, terms such as "first" are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction) and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0040] The coating process for solar cells is a crucial step in solar cell production. Through this process, a thin film is coated onto the surface of the solar cell, which enhances the photoelectric conversion effect and thus improves the photoelectric conversion efficiency of the solar cell.

[0041] Temperature is a key parameter in the coating process. It affects the quality and efficiency of film formation by influencing chemical reaction kinetics, atomic diffusion ability, and film growth mechanism.

[0042] In related technologies, during film deposition, the graphite boat carrying the silicon wafer is often heated in a heating device using a heating wire and an auxiliary heating rod. However, because the auxiliary heating rod occupies a large space, it can obstruct the heat diffusion of the heating wire, resulting in uneven overall temperature within the furnace and thus affecting the uniformity of the film deposition.

[0043] In view of this, this application discloses a heating device, including a first heating element disposed within the device body. The first heating element includes a plurality of first heating sections spirally connected in sequence along a first direction, and the first heating sections are disposed around the inner wall of the device body to form a heating space for heating a graphite boat carrying a silicon wafer to be coated. A connection gap is formed between two adjacent first heating sections along the first direction. The second heating element includes a plurality of second heating sections spirally connected in sequence along the first direction, each second heating section being located within its respective connection gap. The second heating sections are used to heat the graphite boat within the heating space. By having the first heating element include a plurality of first heating sections spirally connected in sequence, with a connection gap formed between two adjacent first heating sections, and the second heating element include a plurality of second heating sections spirally connected in sequence, each second heating section being located within its respective connection gap, the second heating element can fill the temperature gaps created by the connection gaps of the first heating element without affecting the heat diffusion process of the first heating element. This results in a more uniform heating environment and improves the coating uniformity of the heating device.

[0044] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.

[0045] First of all, it should be noted that the following content of this application is based on the application of the heating device 100 in the coating process of battery cells. Of course, the heating device 100 of this application can be used not only in the coating process of battery cells, but also in various processes that require heating.

[0046] Please see Figures 1 to 4 , Figure 1 This is a front view of the heating device disclosed in the embodiments of this application. Figure 2 This is a side view of the heating device disclosed in the embodiments of this application. Figure 3 This is a schematic diagram of the structure of the first heating element disclosed in the embodiments of this application. Figure 4 This is a schematic diagram of the structure of the second heating element disclosed in this application embodiment. The heating device 100 includes a device body 1, a first heating element 2, and a second heating element 3. The first heating element 2 is disposed within the device body 1 and includes a plurality of first heating sections 21 spirally connected in sequence along a first direction X. The first heating sections 21 are arranged around the inner wall of the device body 1 to form a heating space 22 inside the first heating element 2. The heating space 22 is configured to heat a graphite boat 200 carrying a silicon wafer to be coated. A connection gap 23 is formed between two adjacent first heating sections 21 along the first direction X. The second heating element 3 is disposed within the device body 1 and includes a plurality of second heating sections 31 sequentially connected along the first direction X. Each second heating section 31 is located within a connection gap 23. The second heating section 31 is configured to heat the graphite boat 200 in the heating space 22.

[0047] The first heating element 2 has multiple first heating sections 21 spirally connected along the first direction X and distributed around the inner wall surface. During heating, the heat generated by the first heating element 2 can be evenly radiated and conducted into the heating space 22 from different directions and positions, thus providing a relatively stable heating environment for the silicon wafer within the heating space 22. Furthermore, each second heating section 31 is located within its respective connection gap 23. Due to its cooperation with the first heating element 2, the entire heating space 22 can be heated in all directions and positions, resulting in more uniform heat distribution and ensuring the uniformity of the coating.

[0048] Furthermore, by forming a heating space 22 around the inner wall surface with the first heating element 2, heat can be concentrated as much as possible in the target heating area. The second heating element 3 fills the connection gap 23 of the first heating element 2, so that some of the heat that might otherwise be lost at the connection gap 23 can also effectively participate in the heating process of the graphite boat 200 and the silicon wafer. This combination of the first heating element 2 and the second heating element 3 can reduce the heat loss of the entire heating device 100, which helps to ensure the quality of the coating on the one hand, and helps to reduce the operating cost of the heating device 100 on the other hand.

[0049] It is understood that the main body 1 of the above-mentioned equipment can be a furnace tube or a heating box, etc. This application will describe the main body 1 of the equipment as a furnace tube.

[0050] It is understandable that the furnace tube is usually long and narrow, and the cross-sectional shape of the furnace tube along the length direction is usually circular. Therefore, when the heating wire surrounds the inner wall of the main body 1 of the device, the center of the furnace tube can be used as the center, and it will be circular inside the furnace tube.

[0051] It is understood that the first heating element 2 and the second heating element 3 mentioned above can be heating wires or graphite heaters, etc., and this embodiment does not specifically limit them.

[0052] It is understood that the first heating element 2 can be a heating wire arranged in a spiral, that is, the first heating part 21 is a heating wire that surrounds the inner wall of the main body 1.

[0053] It is understood that the first heating element 2 and the second heating element 3 can be embedded in the inner wall of the heating device 100, or can be snapped to the inner wall of the heating device 100, etc. This embodiment does not make specific limitations in this regard.

[0054] Optionally, the second heating element 3 is located on the side of the first heating element 2 near the inner wall of the device body 1.

[0055] By positioning the second heating element 3 outside the first heating element 2 and close to the inner wall of the main body 1, the second heating element 3 can effectively supplement the heating of areas where the first heating element 2 may have weak temperatures. This makes the temperature distribution in the heating space 22 more uniform, reduces the problem of local overheating or low temperature of the graphite boat 200 caused by uneven heat distribution, and thus improves the uniformity of the coating.

[0056] When the graphite boat 200 carrying the silicon wafer to be coated is placed in the heating space 22, since the boat blades 201 of the graphite boat 200 are usually placed vertically and multiple boat blades 201 are arranged at equal intervals in the horizontal direction, during heating, heat can only enter the gaps between the boat blades 201 from the top and bottom ends in the vertical direction, thus heating the interior of the graphite boat 200. This results in uneven heat distribution throughout the graphite boat 200. To make the heat generated in the heating space 22 more uniform, the main body 1 of the device has a top side 11 and a bottom side 12 facing each other. The second heating element 3 includes two parts, one of which is located near the top side 11 of the main body 1, and the other is located near the bottom side 12 of the main body 1, and the two second heating elements 3 are arranged opposite each other.

[0057] By setting two second heating elements 3, respectively close to the top side 11 and bottom side 12 of the main body 1 of the equipment, and arranged opposite each other, heat can enter the gap between the boat blades 201 from both the top and bottom directions of the graphite boat 200 simultaneously. The symmetrical heating method can effectively balance the heat distribution inside the graphite boat 200, reduce the temperature difference caused by heat entering from only one direction, thereby improving the temperature uniformity inside the entire graphite boat 200, and thus ensuring the uniformity of the coating.

[0058] In some embodiments, please refer to Figures 2 to 5 , Figure 5This is a schematic diagram of the structure of the second heating element disposed within the first heating element, as disclosed in the embodiments of this application. The main body 1 of the equipment is a furnace tube, and the cross-sectional shape of the main body 1 perpendicular to the first direction X is circular. The circumferential direction of the first heating element 2 is the second direction N, and the second heating element 3 extends along the second direction N. Wherein, the first direction X is the length direction of the main body 1, and the second direction N is the circumferential direction of the main body 1.

[0059] The main body 1 of the equipment is a furnace tube with a circular cross-section. The first heating element 2 is arranged in a spiral structure around the inner wall of the furnace tube along the second direction N (the circumferential direction of the main body 1). This structure makes the heat distribution in the heating space 22 more uniform. At the same time, the second heating element 3 extends along the second direction N and is located within the connection gap 23 of the first heating element 2. This can further supplement and optimize the temperature distribution in the heating space 22, avoiding local temperature differences caused by unreasonable heating element layout. This allows the graphite boat 200 and the silicon wafer it carries to be heated uniformly in all directions, thereby ensuring the uniformity of the coating.

[0060] Optionally, the extension dimension of the second heating element 3 in the second direction N is not less than the dimension of the graphite boat 200 in the second direction N.

[0061] By ensuring that the extension dimension of the second heating element 3 in the second direction N is not less than the dimension of the graphite boat 200 in the second direction N, it is possible to ensure that the second heating element 3 can cover the entire width range of the graphite boat 200 along the circumferential direction of the main body of the equipment. This effectively avoids insufficient heating in the edge area of ​​the graphite boat 200 and ensures that the entire graphite boat 200 is heated evenly.

[0062] In some embodiments, please refer to the following: Figures 4 to 6 , Figure 6 This is a schematic diagram of the structure of the heating device (including multiple heating zones) disclosed in the embodiments of this application. The second heating element 3 also includes multiple first connecting portions 32 and multiple second connecting portions 33. The second heating portion 31 extends along the second direction N, and the first connecting portions 32 and the second connecting portions 33 both extend along the first direction X. The first connecting portions 32 and the second connecting portions 33 are respectively connected to the two ends of the second heating portion 31 along the second direction N. The first connecting portions 32 and the second connecting portions 33 are each configured to connect two adjacent second heating portions 31. The first connecting portions 32 and the second connecting portions 33 are alternately arranged along the first direction X.

[0063] By using alternating first connecting portions 32 and second connecting portions 33 along the first direction X, multiple second heating elements 31 are connected in series along the length direction (first direction X) to form a single integrated structure. This avoids potential swaying or displacement problems that might occur with multiple independent second heating elements 31 due to their dispersed arrangement, especially during the operation of the heating device 100 (such as when materials expand and contract at high temperatures), maintaining the positional accuracy of the second heating elements 3. Furthermore, the extension of the first connecting portions 32 and second connecting portions 33 along the first direction X evenly distributes the force on each second heating element 31, reducing localized stress concentration and thus extending the service life of the second heating elements 3.

[0064] It is understood that the second heating part 31 may be, for example, a whole heating wire, and the first connecting part 32, the second connecting part 33 and the second heating part 31 are parts of this whole heating wire located at different positions.

[0065] In some embodiments, the heating device 100 includes a first thermostat 4 and a second thermostat 5. The first thermostat 4 is electrically connected to a first heating element 2 and is configured to regulate the heating temperature of the first heating element 2. The second thermostat 5 is electrically connected to a second heating element 3 and is configured to regulate the heating temperature of the second heating element 3.

[0066] By connecting the first heating element 2 and the second heating element 3 to independent temperature controllers (first temperature controller 4 and second temperature controller 5), this independent control method allows the operator to set different temperature parameters for the first heating element 2 and the second heating element 3 according to the actual heating needs, thereby flexibly adjusting the temperature in the heating space 22 and ensuring that the temperature in the heating space 22 is uniform.

[0067] It is understood that the first thermostat 4 and the second thermostat 5 mentioned above can be bimetallic thermostats, capillary thermostats or thermistor thermostats, etc., and this embodiment does not make specific limitations on them.

[0068] In some embodiments, the main body 1 of the device is provided with a first temperature measuring component 6, which extends along a first direction X. The first temperature measuring component 6 is configured to detect the temperature within the heating space 22. The first temperature measuring component 6 is electrically connected to both a first temperature controller 4 and a second temperature controller 5, and the first temperature controller 4 and the second temperature controller 5 are configured to adjust the temperatures of the first heating element 2 and the second heating element 3 based on the temperature detected by the first temperature measuring component 6.

[0069] First, by extending the first temperature measuring component 6 along the first direction X (i.e., the circumferential direction of the main body 1), the first temperature measuring component 6 can detect the temperature at different locations within the heating space 22 and feed the temperature data back to the first temperature controller 4 and the second temperature controller 5, thereby accurately adjusting the temperature distribution within the heating space 22, making the temperature distribution within the heating space 22 more uniform, and ensuring the uniformity of the coating.

[0070] Furthermore, based on the temperature feedback from the first temperature sensing component 6, the temperatures of the first heating element 2 and the second heating element 3 are simultaneously adjusted, enabling them to work in tandem. This way, when a portion of the heating space 22 is detected to be at a higher or lower temperature, the temperatures of the first heating element 2 and the second heating element 3 can be adjusted promptly, thereby achieving a uniform temperature distribution throughout the entire heating space 22.

[0071] It is understood that the first temperature measuring component 6 mentioned above can be a thermocouple, a resistance temperature detector (RTD), or an infrared thermometer, etc., and this embodiment does not specifically limit it.

[0072] It is understood that the aforementioned first temperature measuring component 6 may include two components, respectively located near the top side 11 and bottom side 12 of the graphite boat 200. In this way, when the graphite boat 200 is placed in the heating space 22, the temperature in the space above and below the graphite boat 200 can be detected by the two first temperature measuring components 6, thereby avoiding the inaccuracy of the test structure of a single first temperature measuring component 6, which would affect the temperature uniformity of the entire heating space 22. This application will describe the following based on the assumption that there are two first temperature measuring components 6.

[0073] Optionally, multiple first heating elements 2 and second heating elements 3 are provided. Multiple first heating elements 2 are arranged sequentially along a first direction X, and the interiors of the multiple first heating elements 2 together form the heating space 22. Each first heating element 2 is correspondingly provided with a second heating element 3. The heating space 22 includes multiple heating zones 221, with one heating zone 221 formed inside each first heating element 2. A first temperature measuring component 6 extends within the multiple heating zones 221, and multiple second temperature measuring components 61 are spaced apart on the first temperature measuring component 6. Each second temperature measuring component 61 is located in its corresponding heating zone 221. Multiple first temperature controllers 4 and second temperature controllers 5 are provided. Each first temperature controller 4 is electrically connected to a first heating element 2 component in a one-to-one correspondence, each second temperature controller 5 is electrically connected to a second heating element 3 in a one-to-one correspondence, and each second temperature measuring component 61 is electrically connected to both the first temperature controller 4 and the second temperature controller 5 in a one-to-one correspondence. Both the first temperature controller 4 and the second temperature controller 5 are configured to adjust the temperature of the first heating element 2 and the second heating element 3 according to the temperature detected by the second temperature measuring component 61.

[0074] Multiple heating zones 221 are formed by sequentially arranging multiple first heating elements 2 along a first direction X, and each first heating element 2 is correspondingly provided with a second heating element 3. The temperature of each first heating element 2 is controlled by a corresponding first temperature controller 4, and the temperature of each second heating element 3 is controlled by a corresponding second temperature controller 5. This multi-zone heating design allows the heating space 22 to be subdivided into multiple independent heating areas. This enables more precise temperature control within each heating zone 221, allowing for timely adjustment of the heating temperature within each heating zone 221 when temperature differences arise, thereby ensuring temperature consistency within the heating space 22 and thus guaranteeing the uniformity of the coating.

[0075] Furthermore, since the heating device 100 can be equipped with multiple heating zones 221, and the heating elements and temperature control systems of each heating zone 221 are relatively independent, this allows the device to adapt to graphite boats 200 of different sizes (i.e., silicon wafers of different sizes). For example, when heating smaller graphite boats 200 or those carrying fewer silicon wafers, only some heating zones 221 can be activated, thus saving energy while ensuring heating efficiency. When heating larger graphite boats 200 or a larger number of them, all heating zones 221 can be fully utilized to provide sufficient heat. In addition, this multi-zone heating and independent temperature control structure also facilitates flexible adjustment of the temperature parameters of each heating zone 221 according to different coating process requirements, thereby enhancing the versatility and adaptability of the heating device 100.

[0076] It is understood that the lengths of the multiple first heating elements 2 along the first direction X should be the same, and the lengths of the multiple second heating elements 3 along the first direction X should also be the same. This ensures that the heating elements in each heating zone 221 can generate the same range of heat radiation, thereby helping to ensure the temperature uniformity of the entire heating space 22.

[0077] It is understandable that, in order to achieve individual temperature control for the first heating element 2 and the second heating element 3 in each heating zone 221, in addition to electrically connecting each first heating element 2 to a first temperature controller 4 and each second heating element 3 to a second temperature controller 5 as described above, multiple first heating elements 2 and multiple second heating elements 3 can also be electrically connected to a central control system, through which the temperature of each first heating element 2 and each second heating element 3 can be controlled separately.

[0078] It is understood that the second temperature measuring component 61 mentioned above can be an infrared thermometer or a fiber optic temperature sensor, etc., and this embodiment does not specifically limit it.

[0079] It is understandable that two second heating elements 3 are provided within a heating zone 221, one near the top side 11 of the main body 1 and the other near the bottom side 12 of the main body 1. Both second heating elements 3 can be electrically connected to a single second temperature controller 5, meaning that the upper and lower second heating elements 3 within a heating zone 221 can be controlled synchronously by a single second temperature controller 5. Alternatively, two second temperature controllers 5 can be included, with each second heating element 3 electrically connected to one of the two second temperature controllers 5. Each second temperature controller 5 is configured to adjust the heating temperature of its corresponding second heating element 3; that is, each second heating element 3 is individually temperature-controlled by a different second temperature controller 5. This arrangement allows for a more precise division of the heating space 22, enabling more accurate temperature control of the upper and lower parts within each heating zone 221. When temperature differences arise in different heating zones 221, the heating temperature in each heating zone 221 can be adjusted promptly, thereby ensuring temperature consistency within the heating space 22 and guaranteeing the uniformity of the coating.

[0080] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A heating device, characterized in that, The heating device includes: Equipment body; A first heating element is disposed inside the main body of the device. The first heating element includes a plurality of first heating parts that are spirally connected in sequence along a first direction. The first heating parts are arranged around the inner wall of the main body of the device so that a heating space is formed inside the first heating element. The heating space is configured to heat a graphite boat carrying a silicon wafer to be coated. A connection gap is formed between two adjacent first heating parts along the first direction. The second heating element is disposed within the main body of the device. The second heating element includes a plurality of second heating parts connected sequentially along the first direction. Each second heating part is located within a connection gap. The second heating part is configured to heat the graphite boat in the heating space.

2. The heating device according to claim 1, characterized in that, The second heating element is located on the side of the first heating element near the inner wall of the device body.

3. The heating device according to claim 1, characterized in that, The main body of the device has a top side and a bottom side; The second heating element includes two parts, one of which is disposed near the top side of the device body and the other is disposed near the bottom side of the device body, and the two second heating elements are disposed opposite to each other.

4. The heating device according to claim 3, characterized in that, The heating device includes: A first temperature controller is electrically connected to the first heating element and is configured to adjust the heating temperature of the first heating element. A second temperature controller is electrically connected to the second heating element and is configured to adjust the heating temperature of the second heating element.

5. The heating device according to claim 4, characterized in that, The device body is provided with a first temperature measuring component, which extends along the first direction. The first temperature measuring component is configured to detect the temperature in the heating space. The first temperature measuring component is electrically connected to both the first temperature controller and the second temperature controller. The first temperature controller and the second temperature controller are configured to adjust the temperature of the first heating element and the second heating element according to the temperature detected by the first temperature measuring component.

6. The heating device according to claim 5, characterized in that, Multiple first heating elements and multiple second heating elements are provided. Multiple first heating elements are arranged sequentially along the first direction. The interiors of multiple first heating elements together form the heating space. Each first heating element is provided with a corresponding second heating element. The heating space includes multiple heating zones, each of the first heating elements forms a heating zone inside, the first temperature measuring component extends in the multiple heating zones, and multiple second temperature measuring components are spaced apart on the first temperature measuring component, each of the second temperature measuring components being located in the corresponding heating zone. Multiple first and second temperature controllers are provided. Each first temperature controller is electrically connected to the first heating element in a one-to-one correspondence. Each second temperature controller is electrically connected to the second heating element in a one-to-one correspondence. The second temperature measuring component is electrically connected to both the first and second temperature controllers in a one-to-one correspondence. The first and second temperature controllers are configured to adjust the temperature of the first and second heating elements according to the temperature detected by the second temperature measuring component.

7. The heating device according to claim 4, characterized in that, The second temperature controller includes two, and the two second heating elements are electrically connected to the two second temperature controllers in a one-to-one correspondence. The second temperature controller is configured to adjust the heating temperature of the corresponding second heating element.

8. The heating device according to claim 1, characterized in that, The main body of the equipment is a furnace tube, and the cross-sectional shape of the main body of the equipment perpendicular to the first direction is circular. The circumferential direction of the first heating element is the second direction, and the second heating element extends along the second direction. Wherein, the first direction is the length direction of the main body of the device, and the second direction is the circumferential direction of the main body of the device.

9. The heating device according to claim 8, characterized in that, The extension dimension of the second heating element in the second direction is not less than the dimension of the graphite boat in the second direction.

10. The heating device according to claim 8, characterized in that, The second heating element further includes a plurality of first connecting portions and a plurality of second connecting portions. The second heating portion extends along the second direction. The first connecting portions and the second connecting portions both extend along the first direction. The first connecting portions and the second connecting portions are respectively connected to the two ends of the second heating portion along the second direction. The first connecting portions and the second connecting portions are both configured to connect two adjacent second heating portions, and the first connecting portions and the second connecting portions are alternately arranged along the first direction.

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