A visual single crystal furnace

Abstract

This utility model relates to a visible single crystal furnace, comprising a furnace body, a crucible, a heater, a rotary lifting mechanism, and a heat insulation cover. The furnace body contains a heating chamber, which includes a furnace bottom, a furnace cylinder, and a furnace cover. The furnace cylinder is made of quartz. The crucible and heater are both located within the heating chamber. The rotary lifting mechanism is configured to pull and lift seed crystals. The heat insulation cover, also made of quartz, is located within the heating chamber and on the outer periphery of the heater. The heat insulation cover is composed of multiple concentrically arranged layers, with a sealed vacuum cavity formed between adjacent layers. This utility model, by using a transparent quartz furnace cylinder and heat insulation cover, achieves in-situ, real-time visual monitoring of the entire crystal growth process. The unique multi-layer design of the heat insulation cover effectively blocks heat radiation and convection heat dissipation, maintaining the stability of the high-temperature environment inside the furnace while ensuring excellent visibility, thus ensuring the uniformity of the thermal field and the thermal insulation performance required for crystal growth.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, specifically to a visible single crystal furnace. Background Technology

[0002] In the growth technology of artificial crystal materials, the Czochralski method using a single crystal furnace is one of the mainstream methods. This method is usually carried out in a vacuum or specific atmosphere environment. The raw materials in the crucible are melted by a heater, and crystal growth is completed with the help of seed crystal induction and axial pulling, finally obtaining a crystal material that meets the requirements.

[0003] In existing technologies, the working chamber typically consists of a stainless steel furnace bottom, furnace cylinder, and furnace cover, forming a relatively enclosed space. The internal process is visually monitored through an observation window on the furnace cover. However, due to limitations in the layout and size of the observation window, its viewing range is relatively limited, making it difficult to comprehensively and in real-time reflect the dynamic process of crystal growth. This is particularly detrimental to the detailed observation and process analysis of key growth phenomena. This deficiency not only restricts the optimization of crystal growth processes and fault diagnosis but also limits the effective promotion and application of this technology in teaching, research, demonstration, and training. Utility Model Content

[0004] The purpose of this invention is to provide a novel visual single crystal furnace.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] This utility model provides a visible single crystal furnace, which includes:

[0007] The furnace body has a heating chamber inside. The furnace body includes a furnace bottom, a furnace cylinder, and a furnace cover that is detachably installed on the top of the furnace cylinder. The furnace bottom is provided with an exhaust port. The furnace cylinder is made of quartz material and has a first circulating cooling chamber inside for the introduction and exit of cooling medium.

[0008] A crucible, which is disposed inside the heating chamber;

[0009] A heater is disposed inside the heating chamber and is arranged in a coil shape around the outer periphery of the crucible;

[0010] A rotary lifting mechanism, configured to pull and lift crystal rods, is movably mounted on the furnace cover, with one end extending into the heating chamber; and,

[0011] A heat insulation cover is disposed within the heating chamber and located on the outer periphery of the heater. The heat insulation cover is made of quartz material, and the heat insulation layer is composed of multiple concentrically arranged wall layers, with a sealed vacuum cavity formed between two adjacent wall layers. Preferably, the multiple wall layers include at least an inner wall layer and an outer wall layer covering the inner wall layer.

[0012] In some embodiments, the heat insulation cover includes a cylindrical main body portion and a shoulder portion located on the upper side of the main body portion and extending in the axial direction thereto.

[0013] In some embodiments, the furnace cover is made of quartz, ceramic, metal, or graphite.

[0014] In some embodiments, the heater is an induction coil, a graphite heater, or a resistance wire heater.

[0015] In some embodiments, the furnace cover is provided with a second circulating cooling chamber for the inlet and outlet of the cooling medium.

[0016] In some embodiments, the top and bottom of the furnace cylinder are respectively provided with cooling medium ports that communicate with the first circulating cooling chamber.

[0017] In some embodiments, the crucible is made of quartz.

[0018] In some embodiments, the furnace bottom is further provided with an electrode opening for the end of the heater to pass through.

[0019] In some embodiments, the rotary lifting mechanism includes a rotary motor, a lifting drive assembly, and a lifting rod. The lower end of the lifting rod is used to connect to the seed crystal, and the upper end is connected to the rotary motor. The rotary motor is mounted on the lifting drive assembly.

[0020] In some embodiments, the single crystal furnace further includes a frame, and the furnace body and the rotary lifting mechanism are mounted on the frame.

[0021] In some embodiments, the single crystal furnace further includes a bottom insulation layer disposed within the heating chamber and located at the bottom of the crucible and the heater.

[0022] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:

[0023] This invention utilizes a furnace cylinder and insulation cover made of transparent quartz material to achieve in-situ, real-time visual monitoring of the entire crystal growth process. This allows operators to intuitively observe the complete dynamic changes in raw material melting, seed crystal induction, and crystal crystallization, significantly improving the ability to accurately perceive and control the growth interface and crystallization state.

[0024] Meanwhile, the heat insulation cover adopts a unique multi-layer design, consisting of multiple concentric quartz layers. The adjacent layers form a sealed vacuum interlayer cavity, which effectively blocks heat radiation and convection heat dissipation. While ensuring excellent visibility, it maintains the stability of the high-temperature environment inside the furnace, ensuring the uniformity of the thermal field and thermal insulation performance required for crystal growth.

[0025] In addition, the furnace cylinder is equipped with a circulating cooling chamber, through which cooling medium can be introduced to achieve active temperature control, effectively reducing the external temperature of the furnace body and avoiding equipment deformation or safety hazards caused by high temperature, thereby further improving the reliability and safety of the system in long-term operation. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the single crystal furnace in Example 1;

[0027] Figure 2 This is a schematic diagram of the structure of furnace body 1 in Example 1;

[0028] Among them, 1. Furnace body; 11. Furnace bottom; 111. Exhaust vent; 112. Electrode opening; 12. Furnace cylinder; 121. First circulating cooling chamber; 122. Cooling medium inlet; 123. Cooling medium outlet; 13. Furnace cover;

[0029] 2. Crucible 2; 3. Heater 3; 4. Insulation cover; 41. Outer wall; 42. Inner wall; 43. Vacuum chamber; 44. Main body; 45. Shoulder; 5. Rotary lifting mechanism; 51. Lifting drive assembly; 52. Support frame; 53. Rotary motor; 54. Lifting rod; 6. Insulation board; 7. Frame. Detailed Implementation

[0030] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0031] In the description of the embodiments of this utility model, it should be understood that the terms "upper" and "lower," etc., indicate the orientation or positional relationship as described above. Figure 1 The orientations shown are defined as follows: the furnace cover 13 is positioned above and the frame 7 is positioned below. This is only for the purpose of describing the embodiments of this utility model and simplifying the description, and is not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on the embodiments of this utility model.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0033] In this embodiment of the invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] The following disclosure provides many different implementations or examples for different structures of the embodiments of the present invention. To simplify the disclosure of the embodiments of the present invention, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the embodiments of the present invention. Furthermore, reference numerals and / or reference letters may be repeated in different examples of the embodiments of the present invention; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed.

[0035] In existing technologies, visual single-crystal furnaces typically employ symmetrically arranged observation windows protruding from the furnace lid surface above it (e.g., patent CN 204058655 U). In practical use, operators must press their eyes against the observation windows to observe the crystal growth process inside the furnace, making operation extremely inconvenient. Furthermore, due to structural and size limitations, the viewing range of such windows is limited, failing to comprehensively and in real-time present the dynamic process of crystal growth, especially in terms of precise observation and process analysis during critical growth stages.

[0036] To address the aforementioned issues, the applicant creatively employed transparent quartz to manufacture the furnace cylinder, replacing the traditional stainless steel cylinder. Simultaneously, a transparent quartz insulation cover replaced the traditional graphite felt insulation component, thereby enabling intuitive and comprehensive visual monitoring of the entire process of raw material melting, seed crystal induction, and crystal growth. This design significantly enhances the real-time perception and precise control of the growth interface morphology and crystallization state. Furthermore, through optimization of the insulation cover structure and the overall furnace body design, the applicant ensured both high transparency and the insulation performance and operational safety of the single-crystal furnace system.

[0037] The present invention will be further described below with reference to the embodiments shown in the accompanying drawings.

[0038] Example 1

[0039] A type of visible single-crystal furnace, such as Figure 1 and Figure 2 As shown, it includes a furnace body 1, a crucible 2, a heater 3, a rotary lifting mechanism 5, and a heat insulation cover 4. A heating chamber is formed inside the furnace body 1. The furnace body 1 includes a furnace bottom 11, a furnace cylinder 12, and a furnace cover 13 detachably mounted on top of the furnace cylinder 12. The furnace bottom 11 has an exhaust port 111 for evacuating or filling the heating chamber with a specific protective atmosphere. The furnace cylinder 12 is made of quartz and has a first circulating cooling chamber 121 inside for the passage of cooling media, including but not limited to water. The crucible 2 and heater 3 are both located within the heating chamber, with the heater 3 coiled around the outer periphery of the crucible 2. The rotary lifting mechanism 5 is configured to pull and lift seed crystals, movably mounted on the furnace cover 13, with one end extending into the heating chamber. The heat insulation cover 4 is located inside the heating chamber and on the outer periphery of the heater 3. The heat insulation cover 4 is made of quartz material. The heat insulation layer is composed of multiple concentrically arranged layer walls, and a sealed vacuum cavity 43 is formed between two adjacent layer walls.

[0040] The quartz insulation cover 4, while achieving high transparency and visibility, effectively suppresses heat radiation and convection heat dissipation through a multi-layered vacuum insulation design, significantly reducing heat loss. Under conditions of full visibility, it maintains a high degree of stability in the high-temperature environment inside the furnace, providing uniform and reliable thermal field conditions for crystal growth, while ensuring excellent thermal insulation performance. In this embodiment, the multiple layers include an inner layer wall 42 and an outer layer wall 41 covering the inner layer wall 42. In other embodiments, there may be three or more layers.

[0041] Preferably, the heat insulation cover 4 can be composed of a cylindrical main body 44 and a shoulder 45 located on the upper side of the main body 44 and extending towards its axis. The shoulder 45 is designed to effectively block heat radiation and conduction losses in the upward and lateral directions, significantly enhance the overall thermal sealing of the heat insulation cover 4, further improve the uniformity and stability of the thermal field inside the furnace, and thus improve the heat insulation performance of the entire system.

[0042] The furnace cover 13 is made of quartz material and has a second circulating cooling chamber (not shown in the figure) for the introduction and exit of cooling medium. Preferably, a sealing device is also provided between the furnace cover 13 and the furnace cylinder 12, including but not limited to metal sealing rings and rubber sealing rings.

[0043] like Figure 2 As shown, the top and bottom of the furnace cylinder 12 are respectively provided with cooling medium ports that communicate with the first circulating cooling chamber 121. Preferably, the bottom of the furnace cylinder 12 is provided with a cooling medium inlet 122 for introducing cooling medium, and the top is provided with a cooling medium outlet 123 for discharging cooling medium. Introducing cooling medium enables active temperature control of the furnace body 1, effectively reducing the external temperature of the furnace body, avoiding equipment deformation or safety hazards caused by high temperatures, and further improving the reliability and safety of the system in long-term operation.

[0044] The furnace bottom 11 is also provided with an electrode opening 112 for the end of the heater 3 to pass through. The heater 3 includes, but is not limited to, resistance wire heaters, induction coil heaters, and graphite resistance heaters, and its coil arrangement is preferably an equally spaced spiral structure.

[0045] The crucible 2 can be made of quartz, ceramic, metal or graphite, and its shape can refer to existing technology.

[0046] In this embodiment, the single crystal furnace also includes a frame 7. The furnace body 1 and the rotary lifting mechanism 5 are both mounted on the frame 7. The specific structure of the rotary lifting mechanism 5 can be referred to the prior art. As an example, it includes a rotary motor 53, a lifting drive assembly 51, and a lifting rod 54. The lower end of the lifting rod 54 is used to connect to the seed crystal, and the upper end is connected to the rotary motor 53. The rotary motor 53 is mounted on the lifting drive assembly 51. The lifting drive assembly 51 includes a lifting drive device and a support frame 52 connected to the output shaft of the lifting drive device. The rotary motor 53 can be specifically mounted on the support frame 52. During crystal growth, the lifting drive device controls the support frame 52 to move the lifting rod 54 and the seed crystal up and down synchronously, and the rotary motor 53 controls the lifting rod 54 to rotate with the seed crystal.

[0047] In addition, the single crystal furnace also includes a bottom insulation layer, namely the insulation plate 6, located within the heating chamber and at the bottom of the crucible 2 and heater 3. The insulation plate 6 is made of materials including, but not limited to, graphite felt, ceramic fiber board, porous alumina, or zirconia ceramic board. The design of the bottom insulation plate 6 effectively reduces heat loss from the bottom of the crucible to the furnace bottom, helping to form a controllable axial temperature gradient, promoting crystal growth, and protecting the lower frame. Furthermore, it significantly improves thermal efficiency and reduces energy consumption.

[0048] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A visible single-crystal furnace, characterized in that, include: The furnace body (1) has a heating chamber inside. The furnace body (1) includes a furnace bottom (11), a furnace cylinder (12), and a furnace cover (13) detachably installed on the top of the furnace cylinder (12). The furnace bottom (11) is provided with an exhaust port (111). The furnace cylinder (12) is made of quartz material and has a first circulating cooling chamber (121) inside for the cooling medium to pass through and exit. A crucible (2) is disposed inside the heating chamber; A heater (3) is disposed in the heating chamber and is arranged in a coil shape around the outer periphery of the crucible (2); A rotary lifting mechanism (5), configured to pull up seed crystals, is movably mounted on the furnace cover (13) and one end extends into the heating chamber; and, A heat insulation cover (4) is provided inside the heating chamber and located on the outer periphery of the heater (3). The heat insulation cover (4) is made of quartz material and is composed of multiple concentrically arranged layered walls. A sealed vacuum cavity (43) is formed between two adjacent layered walls.

2. The visible single-crystal furnace according to claim 1, characterized in that, The plurality of walls include at least an inner wall (42) and an outer wall (41) covering the inner wall (42).

3. The visible single crystal furnace according to claim 2, characterized in that, The heat insulation cover (4) includes a cylindrical main body (44) and a shoulder (45) located on the upper side of the main body (44) and extending toward its axis.

4. The visible single crystal furnace according to claim 1, characterized in that, The furnace cover (13) is made of quartz material.

5. The visible single-crystal furnace according to claim 1, characterized in that, The furnace cover (13) is provided with a second circulating cooling chamber for the cooling medium to enter and exit.

6. The visible single crystal furnace according to claim 1, characterized in that, The furnace cylinder (12) has cooling medium ports at its top and bottom that are connected to the first circulating cooling chamber (121).

7. The visible single crystal furnace according to claim 1, characterized in that, The crucible (2) is made of quartz, ceramic, metal or graphite. And / or, the heater (3) is an induction coil, a graphite heater or a resistance wire heater.

8. The visible single crystal furnace according to claim 1, characterized in that, The furnace bottom (11) is also provided with an electrode opening (112) for the end of the heater (3) to pass through.

9. The visible single crystal furnace according to claim 1, characterized in that, The rotary lifting mechanism (5) includes a rotary motor (53), a lifting drive assembly (51), and a lifting rod (54). The lower end of the lifting rod (54) is used to connect to the seed crystal, and the upper end is connected to the rotary motor (53). The rotary motor (53) is mounted on the lifting drive assembly (51).

10. The visible single-crystal furnace according to claim 1, characterized in that, The single crystal furnace also includes a frame (7), and the furnace body (1) and the rotary lifting mechanism (5) are mounted on the frame (7); And / or, the single crystal furnace further includes a bottom insulation layer disposed in the heating chamber and located at the bottom of the crucible (2) and the heater (3).

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