A vacuum pump performance detection device

Abstract

This utility model discloses a vacuum pump performance testing device, specifically relating to the field of vacuum pump performance testing technology. It includes an electrical control cabinet and a support frame located on one side of the cabinet. A test cover, fixed to the top of the support frame by bolts, is fixedly connected to the front of the test cover via a three-way pipe. Two spaced-apart vacuum lines are connected to the front of the three-way pipe, each with a vacuum ball valve installed externally. A first flow meter and a second flow meter are respectively installed externally at the ends of the two vacuum lines closest to the electrical control cabinet. Both the first and second flow meters are located inside the electrical control cabinet. This utility model, through the combination of the test cover, vacuum ball valves, three-way pipe, high-vacuum baffle valve, first and second flow meters, and vacuum gauge, enables automated operation. From equipment connection and testing, parameter setting, program execution to report generation, no manual intervention is required, thus significantly improving testing efficiency.

Description

Technical Field

[0001] This utility model relates to the field of vacuum pump performance testing technology, and more specifically to a vacuum pump performance testing device. Background Technology

[0002] Vacuum pumps, as important industrial equipment, are widely used in semiconductor manufacturing, aerospace, scientific research, chemical production, and many civilian fields. Their main function is to extract gas from a specific space to create and maintain the required vacuum environment. With the development of various industries, the performance requirements for vacuum pumps are increasing. Accurate and efficient testing of various performance indicators of vacuum pumps has become a key link in ensuring product quality, optimizing production processes, and ensuring stable system operation.

[0003] Currently, the production and use of vacuum pumps generally suffer from drawbacks such as overly cumbersome performance testing methods, excessive manual intervention, and low data acquisition accuracy. This is especially true for batch production testing and quality control of vacuum pumps, where existing testing equipment cannot meet the demands for high-precision and efficient testing. Utility Model Content

[0004] To address this issue, this invention provides a vacuum pump performance testing device to solve the problem of low data acquisition accuracy caused by overly cumbersome testing methods and excessive manual intervention in the prior art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a vacuum pump performance testing device, including an electrical control cabinet and a support frame located on one side of the electrical control cabinet. A test cover fixed by bolts is installed on the top of the support frame, and a three-way pipe is fixedly connected to the front side of the test cover. Two spaced vacuum pipelines are connected to the front side of the three-way pipe. Vacuum ball valves are installed on the outside of the two vacuum pipelines, and a first flow meter and a second flow meter are respectively installed on the outside of the two vacuum pipelines near the electrical control cabinet. The first flow meter and the second flow meter are both located inside the electrical control cabinet. The test cover is fixedly connected to a mounting frame on the side away from the electrical control cabinet, and multiple vacuum gauges are installed at intervals on the outside of the mounting frame. A high vacuum baffle valve is installed on the outside of each vacuum gauge.

[0006] Furthermore, a fixing column is installed on the front side of the support frame, and an assembly seat is installed at the front end of the fixing column, with an assembly groove opened on the outer side of the top of the assembly seat.

[0007] Furthermore, a support column is provided inside the top of the assembly slot, and an adjusting ring is sleeved on the outside of the support column and movably connected by a bearing. A first functional plate and a second functional plate are respectively installed on the top and bottom of the adjusting ring, with the first functional plate located on top of the second functional plate.

[0008] Furthermore, both the front sides of the first functional panel and the front sides of the second functional panel are machined with decorative surfaces.

[0009] Furthermore, mounting slots are provided on the rear side of both the first and second functional boards, and a magnetic plate is installed inside each mounting slot.

[0010] Furthermore, a groove is provided inside the rear end of the mounting base, the groove is connected to the mounting slot, and an iron plate is installed inside the groove. The iron plate is positioned in a front-to-back correspondence with the magnetic plate on the second functional board.

[0011] Furthermore, both sides of the first functional board and both sides of the second functional board are equipped with levers.

[0012] Furthermore, a fixing ring is sleeved on the outer rear end of the fixing column, and a plurality of fastening bolts are provided on the front side of the fixing ring. The fastening bolts pass through the fixing ring and extend into the interior of the support frame, and the fastening bolts are threadedly connected to the support frame.

[0013] This utility model has the following advantages: By combining equipment such as test hood, vacuum ball valve, three-way valve, high vacuum baffle valve, first flow meter, second flow meter and vacuum gauge, automated operation can be achieved. From equipment connection and testing, parameter setting, program operation to report generation, no manual intervention is required, which can significantly improve the efficiency of testing work. By switching between the first and second function boards, the operating status of the equipment can be easily monitored and adjusted, thereby preventing danger to external personnel and improving the operational safety of staff. Attached Figure Description

[0014] To more clearly illustrate the embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0015] The structures, proportions, sizes, etc. illustrated in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a front view of the first flow meter of this utility model; Figure 3 This is the main view of the assembly base of this utility model; Figure 4 This is a side sectional view of the assembly base of this utility model; Figure 5 This is a side sectional view of the iron plate of this utility model; Figure 6 This is an exploded view of the magnetic plate of this utility model.

[0017] In the diagram: 1. Electrical control cabinet; 2. Support frame; 3. Test cover; 4. T-shaped pipe; 5. Vacuum pipeline; 6. Vacuum ball valve; 7. First flow meter; 8. Second flow meter; 9. Fixing frame; 10. Vacuum gauge; 11. High vacuum baffle valve; 12. Fixing column; 13. Assembly base; 14. Assembly slot; 15. Support column; 16. Adjusting ring; 17. First function plate; 18. Second function plate; 19. Decorative surface; 20. Mounting slot; 21. Magnetic plate; 22. Embedded groove; 23. Iron plate; 24. Dial bar; 25. Fixing ring; 26. Fastening bolt. Detailed Implementation

[0018] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0019] Refer to the instruction manual appendix Figure 1-6 This utility model provides a vacuum pump performance testing device, including an electrical control cabinet 1 and a support frame 2 located on one side of the electrical control cabinet 1. A test cover 3 fixed to the top of the support frame 2 by bolts is installed, and a three-way pipe 4 is fixedly connected to the front side of the test cover 3. Two spaced vacuum pipelines 5 are connected to the front side of the three-way pipe 4. Vacuum ball valves 6 are installed on the outside of the two vacuum pipelines 5, and a first flow meter 7 and a second flow meter 8 are respectively installed on the outside of the two vacuum pipelines 5 near the electrical control cabinet 1. The first flow meter 7 and the second flow meter 8 are both located inside the electrical control cabinet 1. A fixing frame 9 is fixedly connected to the side of the test cover 3 away from the electrical control cabinet 1, and multiple spaced vacuum gauges 10 are installed on the outside of the fixing frame 9. A high vacuum baffle valve 11 is installed on the outside of the vacuum gauges 10.

[0020] Install the vacuum pump under test through its suction port and seal it within the test hood 3, ensuring no leaks at the connection points. Connect the test hood 3, vacuum ball valve 6, tee, high vacuum baffle valve 11, first flow meter 7, second flow meter 8, and vacuum gauge 10 using vacuum tubing 5 according to the designed process. Confirm that the vacuum gauge 10 is installed in the appropriate position via its mounting bracket 9. Connect the control and signal lines of all electrical components to the control cabinet 1, ensuring normal communication. Then, start the vacuum pump, evacuate the test hood 3, and ensure stable operation. Adjust the vacuum ball valve 6 as needed to control the first flow meter 7 or the second flow meter 8 to achieve the required flow rate, observe the reading on the display of the vacuum gauge 10, and record it. This achieves automated operation, eliminating the need for manual intervention from equipment connection testing, parameter setting, program execution to report generation, thus significantly improving testing efficiency.

[0021] Meanwhile, to ensure safety during vacuum pump testing, it is necessary to promptly notify external personnel. Therefore, a fixing column 12 is installed on the front side of the support frame 2, and an assembly seat 13 is installed at the front end of the fixing column 12. An assembly groove 14 is opened on the outer side of the top of the assembly seat 13. A support column 15 is provided inside the top of the assembly groove 14, and an adjusting ring 16 is fitted on the outside of the support column 15 through a bearing connection. A first functional plate 17 and a second functional plate 18 are respectively installed on the top and bottom of the adjusting ring 16, with the first functional plate 17 located on top of the second functional plate 18. Decorative surfaces 19 are machined on the front sides of both the first functional plate 17 and the second functional plate 18.

[0022] This allows the support column 15 to support the first function plate 17 and the second function plate 18 on the adjusting ring 16, and the adjusting ring 16 is movably connected to the support column 15 via bearings, making it easy for operators to move the first function plate 17 and the second function plate 18 to switch and adjust them. Simultaneously, the first decorative surface 19 allows for markings such as "Under Testing" or "Out of Service" on the first function plate 17 and the second function plate 18, directly informing external personnel of the equipment's operating status, thus preventing potential dangers to external personnel and improving operator safety.

[0023] To improve the ease of adjusting the first function plate 17 and the second function plate 18, levers 24 are installed on both sides of the first function plate 17 and both sides of the second function plate 18. This allows the first function plate 17 and the second function plate 18 to rotate by operating the levers 24, thus improving the convenience for operators to rotate the first function plate 17 and the second function plate 18.

[0024] Furthermore, to ensure the stability of the first functional plate 17 and the second functional plate 18 after adjustment, it is necessary to limit the position of the first functional plate 17 or the second functional plate 18. Therefore, mounting slots 20 are provided on the rear side of both the first functional plate 17 and the rear side of the second functional plate 18, and a magnetic plate 21 is installed inside each mounting slot 20. In addition, a recessed groove 22 is provided inside the rear end of the mounting base 13, which is connected to the mounting groove 14. An iron plate 23 is installed inside the recessed groove 22, and the position of the iron plate 23 corresponds to that of the magnetic plate 21 on the second functional plate 18.

[0025] In this way, the magnetic attraction between the iron plate 23 and the magnetic plate 21 can be used to attract and limit the first functional plate 17 or the second functional plate 18 that has been rotated into the assembly slot 14, ensuring the stability of the first functional plate 17 or the second functional plate 18 after adjustment and avoiding loosening or tilting.

[0026] Meanwhile, to improve the convenience of maintaining the first functional plate 17 or the second functional plate 18, it is necessary to enable easy disassembly of the mounting base 13. Therefore, a fixing ring 25 is fitted onto the outer rear end of the fixing column 12, and multiple spaced fastening bolts 26 are provided on the front side of the fixing ring 25. The fastening bolts 26 pass through the fixing ring 25 and extend into the support frame 2, and are threadedly connected to the support frame 2. This allows the fastening bolts 26 to be removed, separating the fixing ring 25 from the support frame 2. This facilitates the disassembly of the unrestricted mounting base 13, improving the convenience of inspecting and maintaining the first functional plate 17 and the second functional plate 18. Furthermore, by using the connection between the fastening bolts 26 and the support frame 2, the mounting base 13 can be installed onto the support frame 2, thereby facilitating the installation of the first functional plate 17 and the second functional plate 18.

[0027] Although the present invention has been described in detail above with general descriptions and specific embodiments, some modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, all such modifications or improvements made without departing from the spirit of the present invention fall within the scope of protection claimed by the present invention.

Claims

1. A vacuum pump performance testing device, comprising an electrical control cabinet (1) and a support frame (2) disposed on one side of the electrical control cabinet (1), characterized in that: The support frame (2) is equipped with a test cover (3) fixed by bolts on the top, and a three-way pipe (4) is fixedly connected to the front side of the test cover (3). The front side of the three-way pipe (4) is connected to two spaced vacuum pipes (5). Vacuum ball valves (6) are installed on the outside of the two vacuum pipes (5), and a first flow meter (7) and a second flow meter (8) are respectively installed on the outside of the two vacuum pipes (5) near the electrical control cabinet (1). The first flow meter (7) and the second flow meter (8) are both located inside the electrical control cabinet (1). The test cover (3) is fixedly connected to a mounting bracket (9) on the side away from the electrical control cabinet (1), and multiple vacuum gauges (10) are installed on the outside of the mounting bracket (9) at intervals. A high vacuum baffle valve (11) is installed on the outside of the vacuum gauges (10).

2. The vacuum pump performance testing device according to claim 1, characterized in that: The support frame (2) has a fixed column (12) installed on the front side, and an assembly seat (13) is installed at the front end of the fixed column (12), and an assembly groove (14) is opened on the outside of the top of the assembly seat (13).

3. The vacuum pump performance testing device according to claim 2, characterized in that: The top of the assembly slot (14) is provided with a support column (15), and the support column (15) is fitted with an adjustment ring (16) connected by a bearing. The top and bottom of the adjustment ring (16) are respectively equipped with a first function plate (17) and a second function plate (18), and the first function plate (17) is located on top of the second function plate (18).

4. The vacuum pump performance testing device according to claim 3, characterized in that: The front side of the first functional plate (17) and the front side of the second functional plate (18) are both processed with decorative surfaces (19).

5. The vacuum pump performance testing device according to claim 3, characterized in that: The first functional board (17) and the second functional board (18) are provided with mounting slots (20), and each mounting slot (20) is provided with a magnetic plate (21).

6. The vacuum pump performance testing device according to claim 5, characterized in that: The assembly base (13) has a groove (22) inside its rear end. The groove (22) is connected to the assembly groove (14). An iron plate (23) is installed inside the groove (22). The position of the iron plate (23) corresponds to that of the magnetic plate (21) on the second functional plate (18).

7. The vacuum pump performance testing device according to claim 3, characterized in that: Both sides of the first functional board (17) and both sides of the second functional board (18) are equipped with levers (24).

8. The vacuum pump performance testing device according to claim 2, characterized in that: The fixed column (12) is fitted with a fixed ring (25) on the outer rear end, and a number of fastening bolts (26) are provided on the front side of the fixed ring (25) at intervals. The fastening bolts (26) pass through the fixed ring (25) and extend into the support frame (2). The fastening bolts (26) are threadedly connected to the support frame (2).

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