Seal and seal mounting assembly

Abstract

This utility model discloses a sealing element and a sealing installation assembly, relating to the field of semiconductor equipment. The sealing element includes: a main body portion with a through hole, one end of which has a connecting surface for sealing a first component to be connected; and a limiting portion, annularly arranged and protruding from one end of the main body portion, coaxially arranged with the through hole, surrounding the outer periphery of the connecting surface, and the inner peripheral wall of the limiting portion connecting to the outer peripheral edge of the connecting surface. The limiting portion and the connecting surface form an installation space for installing the first component to be connected, and the inner peripheral wall of the limiting portion also abuts against the first component to be connected. The sealing element proposed in this utility model can improve the sealing effect.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a sealing element and a sealing installation assembly. Background Technology

[0002] Semiconductor equipment requires metal flow channels to transport gases or fluids. These flow channels are made of UHPSUS 316L ultra-high purity stainless steel, meeting SEMI F20 semiconductor material requirements. In general, integrated gas systems (IGS) use flow channels with sealing rings before assembling different valve bodies. Furthermore, various flow channel sizes are used, such as ø1 / 4”, ø1 / 8”, and high-flow ø3 / 8” liquid flow channels, and 1 / 2” high-conductivity gas flow channels, as well as various valve housings and gas tank systems. According to SEMI F1-96 and SEMI F1-0812 semiconductor metal component specifications, for helium permeation testing and pipeline permeation testing, applications must pass high and low temperature high pressure tests (≥320°C, 160psi), liquid nitrogen low temperature and high pressure tests (-150°C, 150psi), and high temperature and high pressure cycling tests (>250°C, 125psi, 30 minutes), ensuring that the leakage rate is below the specified requirements.

[0003] After the metal flow channel components are assembled, the entire flow channel needs to form an integral sealed state. In the entire assembly process, the sealing fit between metal parts is achieved through the seal. However, the seal is assembled in a free-moving state, and the sealing performance is greatly affected by the characteristics of its metal material. It is easy for the seal to shift position or for bias pressure to occur, which affects the sealing effect. Utility Model Content

[0004] The main purpose of this utility model is to provide a sealing element and sealing installation assembly, which aims to solve the technical problem that the current sealing element is prone to positional displacement and bias pressure, thus affecting the sealing effect.

[0005] To achieve the above objectives, this utility model proposes a sealing element, comprising:

[0006] The main body has a through hole, and one end of the main body has a connecting surface for sealing the first component to be connected; and

[0007] A limiting part is arranged in a ring shape and protrudes from one end of the main body. The limiting part is coaxially arranged with the through hole and surrounds the outer periphery of the connecting surface. The inner peripheral wall of the limiting part is connected to the outer peripheral edge of the connecting surface. The limiting part and the connecting surface form an installation space. The installation space is used to install the first component to be connected. The inner peripheral wall of the limiting part is also used to abut against the first component to be connected.

[0008] In one embodiment, the limiting portion is integrally formed with the main body portion.

[0009] In one embodiment, the seal further includes an annularly arranged compression portion, which is located at one end of the main body away from the limiting portion, and is used to abut against the second member to be connected.

[0010] In one embodiment, the extrusion portion is integrally formed with the main body portion, and a pointed end of the extrusion portion away from the main body portion is formed, the pointed end being used to abut against the second member to be connected.

[0011] In one embodiment, the main body is provided with a bevel, one end of which is connected to the inner wall of the through hole, and the other end extends to the tip.

[0012] In one embodiment, a plurality of buffer holes are formed on the outer peripheral wall of the main body, the axial direction of the buffer holes is consistent with the radial direction of the main body, and the plurality of buffer holes are arranged at intervals along the circumference of the main body.

[0013] In one embodiment, the main body has a first side protrusion and a second side protrusion. The first side protrusion is disposed near the limiting part, and the second side protrusion is disposed on the side of the main body away from the limiting part. The outer diameter of the first side protrusion is larger than the outer diameter of the second side protrusion.

[0014] In one embodiment, the main body portion has a concave surface, which is arc-shaped and located between the first convex portion and the second convex portion.

[0015] This utility model also proposes a sealing installation assembly, including a fixing member and a sealing member as described above, wherein the fixing member has a connecting hole and the sealing member is snapped into the connecting hole.

[0016] In one embodiment, the fastener has an elongated hole, one end of which communicates with the connecting hole; and / or,

[0017] The fastener is also provided with a mounting hole, and a limiting protrusion is provided in the mounting hole.

[0018] This utility model's technical solution employs a connecting surface and a protruding limiting part at one end of the main body of the sealing element. The limiting part surrounds the outer periphery of the connecting surface; that is, the inner peripheral wall of the limiting part connects to the outer peripheral edge of the connecting surface, forming an installation space. This installation space is used to install a first component to be connected. The first component to be connected is sealed to the sealing surface, and the inner peripheral wall of the limiting part abuts against the first component to be connected, thus limiting radial displacement between the first component to be connected and the main body. In this way, when the first component to be connected is connected to the sealing element, the two are relatively fixed in the radial direction, thereby preventing displacement that could affect the sealing effect and improving the sealing performance. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0020] Figure 1 A cross-sectional structural schematic diagram of an embodiment of the sealing element provided by this utility model;

[0021] Figure 2 A schematic diagram of the structure of an embodiment of the sealing element provided by this utility model;

[0022] Figure 3 A schematic diagram of the assembly of the fastener and seal provided by this utility model.

[0023] Explanation of icon numbers:

[0024] 10. Fastener; 11. Connecting hole; 12. Elongated hole; 13. Mounting hole; 14. Limiting protrusion;

[0025] 100. Main body; 110. Through hole; 120. Connecting surface; 130. Beveled surface; 140. Buffer hole; 150. Concave surface;

[0026] 200. Limiting part;

[0027] 300. Extrusion section; 310. Tip;

[0028] 400. First lateral convex part;

[0029] 500. Second lateral convex part.

[0030] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0032] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0033] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0034] In the existing technology, after the metal flow channel component is assembled, the entire flow channel needs to form an integral sealed state. In the entire assembly process, the sealing fit between metal parts is achieved by the sealing element. However, the sealing element is assembled in a free-moving state, and the sealing performance is greatly affected by the characteristics of its metal material. It is easy for the sealing element to shift position or for bias pressure to occur, which affects the sealing effect.

[0035] This utility model proposes a sealing element.

[0036] Please see Figures 1 to 2In one embodiment of this utility model, the sealing member includes: a main body 100 and a limiting part 200, wherein the main body 100 has a through hole 110, and one end of the main body 100 is provided with a connecting surface 120, which is used to seal the first component to be connected; the limiting part 200 is arranged in a ring shape and protrudes from one end of the main body 100, the limiting part 200 is coaxially arranged with the through hole 110, and the limiting part 200 surrounds the outer periphery of the connecting surface 120, and the inner peripheral wall of the limiting part 200 is connected to the outer peripheral edge of the connecting surface 120. The limiting part 200 and the connecting surface 120 form an installation space, which is used to install the first component to be connected, and the inner peripheral wall of the limiting part 200 is also used to abut against the first component to be connected.

[0037] It should be noted that the sealing element proposed in this utility model is made of metal, and both the first and second parts to be connected are made of metal. That is, the sealing element is used for sealing the connection between metal parts. The sealing element is an integral structure, formed by machining.

[0038] In specific implementation, the main body 100 has a through hole 110, which extends along the axial direction of the main body 100 to connect the gas flow channels, allowing gas to flow between the first and second components to be connected. In this embodiment, one end face of the main body 100 is formed with a connecting surface 120, which is used to seal the connection of the first component to be connected. It is understood that the connecting surface 120 has high machining precision to ensure the sealing of the connection. The first component to be connected can be a pipe structure or a connector of a pipe structure, etc., selected according to the actual situation.

[0039] In this embodiment, the limiting part 200 is arranged in a ring shape and is coaxially arranged with the through hole 110. The limiting part 200 surrounds the outer periphery of the connecting surface 120, that is, the connecting surface 120 is located between the limiting part 200 and the through hole 110. The limiting part 200 protrudes from the end face of the main body 100. Thus, the limiting part 200 and the connecting surface 120 form an installation space for accommodating the first component to be connected. When the first component to be connected is installed into the mounting hole 13, the first component to be connected makes sealing contact with the sealing surface, and the inner peripheral wall of the limiting part 200 abuts against the first component to be connected to limit the radial displacement of the first component to be connected, thereby playing a limiting role, preventing the first component to be connected from moving or shaking relative to the sealing element, and ensuring the sealing of the connection between the first component to be connected and the main body 100. The limiting part 200 and the connecting surface 120 are smoothly connected. Specifically, the inner peripheral wall of the limiting part 200, that is, the side wall edge facing the connecting surface 120, is connected to the outer peripheral edge of the connecting surface 120 to ensure the sealing between the first part to be connected and the connecting surface 120, and to ensure that the limiting part 200 can effectively abut against the first part to be connected.

[0040] This utility model's technical solution employs a connecting surface 120 and a protruding limiting part 200 at one end of the main body 100 of the sealing element. The limiting part 200 surrounds the outer periphery of the connecting surface 120, meaning its inner peripheral wall connects to the outer peripheral edge of the connecting surface 120. This creates an installation space formed by the limiting part 200 and the connecting surface 120, which is used to install a first component to be connected. The first component to be connected is sealed to the sealing surface, and the inner peripheral wall of the limiting part 200 abuts against the first component to be connected, thus limiting radial displacement between the first component to be connected and the main body 100. In this way, when the first component to be connected is connected to the sealing element, they are relatively fixed in the radial direction, preventing displacement that could affect the sealing effect and improving the sealing performance.

[0041] In one embodiment, the limiting part 200 is integrally formed with the main body part 100 to ensure the strength of the limiting part 200 and the overall strength of the sealing element. In specific implementation, the limiting part 200 is formed by machining to reduce stress concentration and improve the overall strength.

[0042] In one embodiment, the seal further includes an annularly arranged compression portion 300, which is located at one end of the main body 100 away from the limiting portion 200 and is used to abut against the second member to be connected.

[0043] The extrusion section 300 presses against the second component to be connected to ensure a tight seal. In a specific implementation, the second component to be connected can be a flow channel block structure. The first component to be connected is attached to the flow channel block and presses against the sealing component, causing the extrusion section 300 to be compressed, thereby ensuring a tight seal between the sealing component and the second component to be connected. In this embodiment, the extrusion section 300 is arranged in a ring shape and surrounds the outer periphery of the through hole 110 to prevent gas leakage.

[0044] In one embodiment, the extrusion portion 300 is integrally formed with the main body portion 100, and a tip 310 is formed at the end of the extrusion portion 300 away from the main body portion 100, the tip 310 being used to abut against the second member to be connected.

[0045] In this embodiment, to ensure the overall strength of the seal, the extrusion part 300 and the main body 100 are integrally formed. During implementation, the extrusion part 300 is machined to reduce stress concentration and ensure its strength. The end of the extrusion part 300 furthest from the main body is a free end, forming a tip 310. That is, it can be understood that the radial extension length of the extrusion part 300 gradually decreases from the end connected to the main body to the free end, thus forming a tip 310 at the free end. The tip 310 presses against the second component to be connected, reducing the contact area and preventing gaps between them, thereby improving sealing and effectively preventing gas leakage.

[0046] In one embodiment, the main body 100 is provided with a bevel 130, one end of which is connected to the inner wall of the through hole 110, and the other end extends to the tip 310. In a specific implementation, when machining the tip 310, the cutting is performed from the inner wall of the through hole 110 to the free end of the extrusion section 300, thereby forming the tip 310, reducing the machining difficulty and facilitating machining.

[0047] In one embodiment, a plurality of buffer holes 140 are provided on the outer peripheral wall of the main body 100. The axial direction of the buffer holes 140 is consistent with the radial direction of the main body, and the plurality of buffer holes 140 are arranged at intervals along the circumference of the main body.

[0048] In this embodiment, the opening end of the buffer hole 140 is located on the outer peripheral wall of the main body. The buffer hole 140 is a blind hole to ensure that it can provide a buffering effect while maintaining a certain strength. Specifically, the main body 100 forms a honeycomb structure, making the main body 100 more elastic. When the seal is subjected to the front and rear pressures of the first and second connecting parts, it provides a buffering effect, distributes the force evenly, and is not easily deformed. This allows the seal to fit tightly against the contact surfaces of the first and second connecting parts, resulting in a better sealing effect.

[0049] In one embodiment, the main body 100 is provided with a first side protrusion 400 and a second side protrusion 500. The first side protrusion 400 is disposed near the limiting part 200, and the second side is disposed on the side of the main body 100 away from the limiting part 200. The outer diameter of the first side protrusion 400 is larger than the outer diameter of the second side protrusion 500.

[0050] In practical implementation, the first side protrusion 400 and the second side protrusion 500 are respectively located near both ends of the main body 100. Specifically, the first side protrusion 400 is connected to and integrally formed with the limiting part 200, and the second side protrusion 500 is located on the side wall of the main body 100 away from the limiting part 200 and is integrally formed with the main body 100. In this way, the seal has a shape that is relatively thin at one end and relatively thick at the other end, which facilitates the assembly of the seal.

[0051] In one embodiment, the main body 100 has a concave surface 150, which is arc-shaped and located between the first convex portion 400 and the second convex portion 500. In a specific implementation, the outer peripheral wall between the first convex portion 400 and the second convex portion 500 is an arc-shaped surface recessed towards the center of the main body 100, forming a groove on the outer peripheral wall of the main body. This facilitates the assembly of the seal, and the groove is used for snap-fit ​​installation, preventing it from easily falling off.

[0052] refer to Figure 3 As shown, this utility model also proposes a sealing installation assembly, which includes a fixing member 10 and a sealing member. The specific structure of the sealing member is as described in the above embodiments. Since this sealing installation assembly adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, and will not be described in detail here. The fixing member 10 has a connecting hole 11, and the sealing member is snapped into the connecting hole 11.

[0053] In this embodiment, the fixing member 10 is elongated and has a sheet-like structure. A connecting hole 11 is formed at the center, and the connecting hole 11 is through-hole. The sealing member is snapped into the connecting hole 11, thereby realizing the assembly of the sealing member and the fixing member 10. In the specific implementation process, the concave surface 150 of the outer peripheral wall of the sealing member is partially opened at the connecting hole 11 to prevent the sealing member from falling off automatically.

[0054] In one embodiment, the fastener 10 has an elongated hole 12, one end of which is connected to the connecting hole 11. In specific implementation, multiple elongated holes 12 are provided, extending from the connecting hole 11 in a direction away from the connecting hole 11. The elongated holes 12 allow the fastener 10 to deform to a certain extent, facilitating the installation of the seal, and after the seal is installed, it can be smoothly snapped and fixed.

[0055] In one embodiment, the fastener 10 is further provided with a mounting hole 13, and a limiting protrusion 14 is provided in the mounting hole 13. The mounting hole 13 is used to fix the fastener 10 to the first or second component to be connected, and bolts or other connecting parts pass through the mounting hole 13 to achieve installation and fixation. The limiting protrusion 14 in the mounting hole 13 cooperates with the first or second component to be connected to achieve a positioning function.

[0056] The above description is merely an exemplary embodiment of the present utility model and does not limit the scope of protection of the present utility model. Any equivalent structural transformations made based on the inventive concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the scope of protection of the present utility model.

Claims

1. A sealing element, characterized in that, include: The main body has a through hole, and one end of the main body has a connecting surface, which is used to seal the first component to be connected. and A limiting part is arranged in a ring shape and protrudes from one end of the main body. The limiting part is coaxially arranged with the through hole and surrounds the outer periphery of the connecting surface. The inner peripheral wall of the limiting part is connected to the outer peripheral edge of the connecting surface. The limiting part and the connecting surface form an installation space. The installation space is used to install the first component to be connected. The inner peripheral wall of the limiting part is also used to abut against the first component to be connected.

2. The seal as claimed in claim 1, characterized in that, The limiting part is integrally formed with the main body.

3. The seal as described in claim 1, characterized in that, The sealing element further includes a ring-shaped compression portion, which is located at one end of the main body away from the limiting portion, and is used to abut against the second component to be connected.

4. The seal as described in claim 3, characterized in that, The extrusion part is integrally formed with the main body, and the end of the extrusion part away from the main body is formed into a pointed part, which is used to abut against the second member to be connected.

5. The seal as claimed in claim 4, characterized in that, The main body is provided with an inclined surface, one end of which is connected to the inner wall of the through hole, and the other end extends to the tip.

6. The seal as claimed in claim 1, characterized in that, Multiple buffer holes are formed on the outer peripheral wall of the main body. The axial direction of the buffer holes is consistent with the radial direction of the main body, and the multiple buffer holes are spaced apart along the circumference of the main body.

7. The seal as claimed in claim 1, characterized in that, The main body is provided with a first side protrusion and a second side protrusion. The first side protrusion is disposed near the limiting part, and the second side protrusion is disposed on the side of the main body away from the limiting part. The outer diameter of the first side protrusion is larger than the outer diameter of the second side protrusion.

8. The seal as claimed in claim 7, characterized in that, The main body has a concave surface, which is arc-shaped and located between the first convex part and the second convex part.

9. A sealing mounting assembly, characterized in that, It includes a fastener and a seal as described in any one of claims 1-8, wherein the fastener has a connection hole and the seal is snapped into the connection hole.

10. The sealing mounting assembly as claimed in claim 9, characterized in that, The fastener has an elongated hole, one end of which communicates with the connecting hole; and / or, The fastener is also provided with a mounting hole, and a limiting protrusion is provided in the mounting hole.

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