Safety valve and vacuum furnace

Abstract

This utility model belongs to the field of safety valve technology and discloses a safety valve and a vacuum furnace. The safety valve includes a valve seat and a sealing assembly. The valve seat has a first flow port. The sealing assembly includes a sealing seat, a first pressure cap, a second pressure cap, and an elastic element. The sealing seat and the valve seat cooperate to form a pressure chamber that can communicate with the first flow port. The sealing seat has an inflation port communicating with the pressure chamber. The first pressure cap is disposed in the pressure chamber and is configured to block the first flow port under the pressure of the gas in the pressure chamber. The sealing seat has a second flow port communicating with the pressure chamber, and the elastic element is configured to apply a biasing force to the second pressure cap to block the second flow port. The safety valve provided by this utility model can effectively seal the first flow port and has high reliability.

Description

Technical Field

[0001] This utility model relates to the field of safety valve technology, and in particular to a safety valve and a vacuum furnace. Background Technology

[0002] A vacuum furnace is an industrial device that performs high-temperature processing in a vacuum or controlled atmosphere, widely used in materials science, metallurgy, electronics, aerospace, and other fields. Safety valves are crucial components of vacuum furnaces. A safety valve is an automatic pressure relief protection device installed on pressure vessels, pipelines, or pressure systems. When the pressure within the system abnormally rises and exceeds a preset safety value, it automatically and rapidly opens to release the excess medium, thereby preventing explosions, ruptures, or other catastrophic accidents due to overpressure.

[0003] In related technologies, safety valves typically include a valve seat, a valve cover, and a compression spring. The valve seat is mounted on the furnace wall of a vacuum furnace and communicates with the interior of the furnace. The valve seat has an exhaust port, which is sealed by the compression spring. When the pressure inside the vacuum furnace exceeds the preload of the compression spring, the valve cover is pushed open, allowing excess gas to escape through the exhaust port.

[0004] However, the preload of the compression spring can cause uneven force applied to the valve cover, leading to valve cover misalignment and failure to seal the exhaust port. Furthermore, the spring force of the compression spring will decrease over time, causing changes in the preload and resulting in low reliability of the vacuum environment in the sealed vacuum furnace. Utility Model Content

[0005] The first objective of this application is to provide a safety valve that can effectively seal the first flow port and has high reliability.

[0006] The second objective of this application is to provide a vacuum furnace with high safety.

[0007] Based on the above concept, the technical solution adopted in this application is:

[0008] Safety valve, including:

[0009] Valve seat, wherein the valve seat is provided with a first flow port;

[0010] A sealing assembly includes a sealing seat, a first pressure cap, a second pressure cap, and an elastic element; the sealing seat and the valve seat cooperate to form a pressure chamber that can communicate with the first flow port, and the sealing seat is provided with an inflation port communicating with the pressure chamber; the first pressure cap is disposed in the pressure chamber and is configured to block the first flow port under the pressure of the gas in the pressure chamber; the sealing seat is provided with a second flow port communicating with the pressure chamber, and the elastic element is configured to apply a biasing force to the second pressure cap to block the second flow port.

[0011] In one embodiment, the sealing seat is further provided with a pressure measuring port, and the safety valve further includes a pressure measuring element, which is installed at the pressure measuring port and used to detect the pressure in the pressure chamber.

[0012] In one embodiment, the sealing seat includes a seat body and a valve core coaxially connected to the seat body. The valve core is coaxially disposed with the first pressure cap, and the first pressure cap is slidably connected to the valve core along a first direction. The valve core, the seat body, and the valve seat cooperate with each other to form the pressure chamber. The air inlet is disposed on the seat body, and the second flow port is disposed on the valve core. The first direction is the axial direction of the valve core.

[0013] In one embodiment, the valve core includes a first core segment disposed within the pressure chamber and a second core segment disposed outside the pressure chamber, the first pressure cap being slidably connected to the first core segment; the first core segment is provided with a first channel communicating with the pressure chamber, the second core segment is provided with a second channel communicating with the first channel, and the second channel forms a second flow port on the surface of the second core segment.

[0014] In one embodiment, the sealing assembly further includes a filter structure, wherein the circumferential sidewall of the first core segment is provided with a vent hole communicating with the first channel and the pressure chamber, and the filter structure is disposed on the first core segment and covers the vent hole.

[0015] In one embodiment, the first core segment is provided with a first external thread, the sealing assembly further includes a first screw block screwed to the first core segment, and the filter structure is sleeved on the first core segment and confined between the first screw block and the inner wall of the sealing seat.

[0016] In one embodiment, the elastic element is sleeved on the second core segment, with one end of the elastic element connected to the second core segment and the other end connected to the second pressure cap.

[0017] In one embodiment, the second core segment is provided with a second external thread, and the sealing assembly further includes a second screw block screwed to the second core segment, with one end of the elastic member facing away from the second pressure cap connected to the second screw block.

[0018] In one embodiment, a filter screen is connected to the surface of the first pressure cap facing the first flow port, and the filter screen is located in the passageway connecting the first flow port and the pressure chamber.

[0019] Vacuum furnace, including the safety valve as described above;

[0020] The vacuum furnace includes a furnace chamber with a communication port. The valve seat is installed in the furnace chamber, and the first flow port is connected to the communication port.

[0021] The beneficial effects of this application are:

[0022] The safety valve provided in this application has a first gland that can block or open the first flow port. The force acting on the first gland is the pressure of the gas in the pressure chamber. Because the pressure distribution in the pressure chamber is more uniform, the force acting on the first gland is also uniform, allowing each position of the first gland to better abut against the valve seat, thereby better blocking the first flow port. This greatly reduces the problem of the first gland shifting due to uneven force, ensuring the effectiveness and reliability of blocking the first flow port. Furthermore, as long as the pressure in the pressure chamber is greater than the pressure on the other side of the first flow port, the first gland can be tightly pressed against the valve seat. When the pressure in the pressure chamber is lost, it can be repressurized through the air inlet, without the problem of poor blocking effect due to excessive use, thus exhibiting high reliability. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments of this application will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this application and these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the structure of the safety valve provided in the embodiment of this application;

[0025] Figure 2 This is an exploded view of the safety valve provided in an embodiment of this application;

[0026] Figure 3 This is a schematic diagram of the valve core structure provided in the embodiments of this application;

[0027] Figure 4 This is a first cross-sectional view of the safety valve provided in the embodiment of this application;

[0028] Figure 5 This is a schematic diagram of the safety valve provided in the embodiments of this application, excluding the sealing seat;

[0029] Figure 6 This is a schematic diagram of the structure of the first cap and filter screen provided in the embodiments of this application;

[0030] Figure 7 This is a second cross-sectional view of the safety valve provided in the embodiments of this application.

[0031] In the picture:

[0032] 10. Valve seat; 101. First flow port; 102. Boss; 20. Sealing assembly; 201. Pressure chamber; 1. Sealing seat; 11. Air inlet; 12. Second flow port; 13. Pressure measuring port; 14. Seat body; 15. Valve core; 151. First core segment; 1511. Vent hole; 1512. First external thread; 1513. Slide groove; 152. Second core segment; 1521. Second external thread; 161. First channel; 162. Second channel; 2. First pressure cap; 21. Cover body; 22. Slider; 3. Second pressure cap; 4. Elastic element; 5. Filter structure; 6. First screw block; 7. Second screw block; 8. Filter screen; 30. Pressure measuring element; 40. First sealing element; 50. Second sealing element; 60. Third sealing element; X, First direction. Detailed Implementation

[0033] To make the technical problems solved by this application, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of this application will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely for explaining this application and not for limiting it. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not all of them.

[0034] It should be understood that the phrase "an embodiment" or "one embodiment" throughout the specification means that a specific feature, structure, or characteristic related to the embodiment is included in at least one embodiment of this application. Therefore, "in one embodiment" or "in one embodiment" appearing throughout the specification does not necessarily refer to the same embodiment. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments.

[0035] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0036] In the description of this application, unless otherwise expressly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0037] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature. In the description of this embodiment, unless otherwise specified, "multiple" specifically refers to two or more.

[0038] In the description of this embodiment, the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of description and simplification of operation. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0039] It should be noted that when a component is referred to as "fixed to" or "set on" another component, it can be directly on the other component or it can be located in between the component.

[0040] The technical solution of this application will be further described below with reference to the accompanying drawings and specific embodiments.

[0041] This embodiment provides a safety valve that can effectively seal the first flow port and has high reliability.

[0042] The safety valve in this embodiment can be used in vacuum furnaces or other equipment that requires pressure relief.

[0043] For example, such as Figures 1 to 7 As shown, the safety valve includes a valve seat 10 and a sealing assembly 20. The valve seat 10 is provided with a first flow port 101 (see...). Figure 2 When the safety valve is applied to a vacuum furnace, the valve seat 10 is fixedly connected to the furnace chamber, and the first flow port 101 communicates with the interior of the vacuum furnace for safe pressure relief. The connection method between the valve seat 10 and the furnace chamber can refer to existing technology, such as connection via flanges or other components. Furthermore, the valve seat 10 and the furnace chamber are sealed to avoid vacuum leakage.

[0044] For example, such as Figure 1 As shown, the sealing assembly 20 includes a sealing seat 1 and a first gland 2 (see Figure 1). Figure 2 ), second pressure cap 3 and elastic element 4. Among them, such as Figure 4 As shown, the sealing seat 1 and the valve seat 10 cooperate to form a pressure chamber 201. The pressure chamber 201 can communicate with the first flow port 101. The pressure chamber 201 can have a certain pressure, and during operation, the pressure inside the pressure chamber 201 is greater than the pressure inside the vacuum furnace. The sealing seat 1 is provided with an air inlet 11 that communicates with the pressure chamber 201. The pressurizing device pressurizes the pressure chamber 201 through the air inlet 11 so that the pressure inside the pressure chamber 201 reaches a certain value. Exemplarily, the air inlet 11 can be connected to the pressurizing device through a pipeline, or it can be directly connected to the pressurizing device; this embodiment does not limit this. The pressurizing device includes, but is not limited to, an air pump.

[0045] In this embodiment, as Figure 4 As shown, the first pressure cap 2 is disposed in the pressure chamber 201 and is used to seal the first flow port 101 under the pressure of the gas in the pressure chamber 201 (see...). Figure 2 As can be seen, in this embodiment, the first pressure cap 2 presses against the valve seat 10 under the action of gas pressure and blocks the first flow port 101, rather than relying on the elastic force of a spring to block the first flow port 101. It should be noted that when the pressure of the gas in the pressure chamber 201 is greater than the pressure in the vacuum furnace, the first pressure cap 2 can always block the first flow port 101; when the pressure of the gas in the pressure chamber 201 is less than the pressure in the vacuum furnace, the first pressure cap 2 will move away from the first flow port 101 under the push of the gas in the vacuum furnace, and then no longer block the first flow port 101. At this time, the gas in the vacuum furnace will enter the pressure chamber 201 through the first flow port 101, realizing the depressurization in the vacuum furnace.

[0046] In one embodiment, the sealing seat 1 is provided with a second flow port 12 communicating with the pressure chamber 201 (see...). Figure 3 The gas inside pressure chamber 201 can flow out through the second flow port 12, thus relieving pressure in pressure chamber 201. In the non-relieving state, such as... Figure 1 As shown, the second flow port 12 is blocked by the second pressure cap 3. Specifically, the elastic member 4 is configured to apply a bias pressure to the second pressure cap 3 to block the second flow port 12, so that when the pressure of the gas in the pressure chamber 201 is insufficient to drive the elastic member 4 to deform, the second elastic member 4 can always press the second pressure cap 3 to block the second flow port 12.

[0047] In this embodiment, the safety valve is used by injecting gas at a certain pressure into the pressure chamber 201 through the inflation port 11, creating a pressure within the chamber. At this pressure, the air in the pressure chamber 201 exerts a force on the first pressure cap 2, causing it to block the first flow port 101. Simultaneously, the gas pressure in the pressure chamber 201 is less than the elastic force of the elastic element 4, allowing the elastic element 4 to apply a biasing force to the second pressure cap 3, blocking the second flow port 12. At this time, the pressure in the pressure chamber 201 stabilizes at a fixed value. When the pressure inside the vacuum furnace exceeds the pressure in the pressure chamber 201, the first pressure cap 2 moves away from the first flow port 101 under the pressure inside the vacuum furnace, connecting the first flow port 101 to the pressure chamber 201. Gas from the vacuum furnace then flows into the pressure chamber 201, relieving pressure in the vacuum furnace. When the pressure in the pressure chamber 201 again exceeds the pressure inside the vacuum furnace, the first pressure cap 2 will again block the first flow port 101 under the pressure inside the pressure chamber 201. The gas in the pressure chamber 201 provides a thrust to the second pressure cap 3, causing the second pressure cap 3 to tend to move away from the second flow port 12. When the thrust provided by the gas in the pressure chamber 201 to the second pressure cap 3 is greater than the biasing force applied to the second pressure cap 3 by the elastic element 4, the elastic element 4 deforms, and the second pressure cap 3 moves away from the second flow port 12, causing the second flow port 12 to open. This allows the gas in the pressure chamber 201 to flow to the outside through the second flow port 12, thus achieving pressure relief of the pressure chamber 201. Therefore, the safety valve provided in this embodiment has a two-stage pressure relief structure.

[0048] The safety valve provided in this embodiment has a first pressure cap 2 that can block or open the first flow port 101. The force acting on the first pressure cap 2 is the pressure of the gas in the pressure chamber 201. Since the pressure distribution in the pressure chamber 201 is more uniform, the force acting on the first pressure cap 2 is also uniform, allowing each position of the first pressure cap 2 to better abut against the valve seat 10, thereby better blocking the first flow port 101. This greatly reduces the problem of the first pressure cap 2 shifting due to uneven force, ensuring the effectiveness and reliability of blocking the first flow port 101. Furthermore, as long as the pressure in the pressure chamber 201 is greater than the pressure on the other side of the first flow port 101, the first pressure cap 2 can be tightly pressed against the valve seat 10. When the pressure in the pressure chamber 201 is lost, it can be repressurized through the air inlet 11, without the problem of poor blocking effect due to excessive use time, thus having high reliability.

[0049] In some alternative embodiments, such as Figure 2As shown, the sealing seat 1 is also provided with a pressure measuring port 13, which communicates with the pressure chamber 201. Furthermore, the safety valve also includes a pressure measuring element 30, which is installed in the pressure measuring port 13 and used to detect the pressure within the pressure chamber 201. It should be noted that the pressure measuring element 30 can also have the function of monitoring or controlling pressure. The pressure measuring element 30 includes, but is not limited to, pressure sensors, pressure transmitters, pressure gauges, pressure switches, etc., but this embodiment does not limit its application to these.

[0050] In one embodiment, the pressure measuring element 30 is a pressure gauge. For example, a mechanical pressure gauge or a digital pressure gauge, etc., are not limited to this embodiment.

[0051] In related technologies, if a vacuum furnace leaks, the safety valve will not sound an alarm; that is, the safety valve only has the function of relieving pressure and does not have the function of sounding an alarm.

[0052] In this embodiment, the pressure gauge can be a pressure gauge with an alarm function. This pressure gauge can also be called an electrical contact pressure gauge or a pressure switch, which can trigger an alarm or control signal when the pressure reaches a preset value. For example, the pressure gauge model can be YX-100, YXG-150, Drucker DPI104, ABB PTX5000, WIKA PMD55, Hongqi Instruments YX-100D, YXW-150, etc., but will not be exemplified further in this embodiment.

[0053] In some optional embodiments, when the pressure in pressure chamber 201 suddenly drops and exceeds atmospheric pressure, the pressure gauge can issue an alarm signal to alert the operator that there is a leak at the second pressure cap 3 of the safety valve. When the pressure in pressure chamber 201 suddenly drops and falls below atmospheric pressure, it will alert the operator that there is a leak at the second pressure cap 3. The safety valve provided in this embodiment has reminder and alarm functions, making it more functional and easier to operate.

[0054] In this embodiment, the pressure measuring port 13 and the air filling port 11 are located on opposite sides of the sealing seat 1. On the one hand, this can avoid the problem of gas at the air filling port 11 interfering with the pressure detection. On the other hand, it can also avoid mutual interference between the pressure measuring component 30 and the pressurization device.

[0055] In at least one possible implementation, such as Figure 2As shown, the sealing seat 1 includes a seat body 14 and a valve core 15 coaxially arranged with the seat body 14. The valve core 15 is connected to the seat body 14. For example, the seat body 14 may have a circular hole (not shown in the figure), through which the valve core 15 is fixed to achieve a fixed connection with the valve seat 10. In this embodiment, one end of the valve core 15 is located inside the pressure chamber 201, and the other end is located outside the pressure chamber 201. The valve core 15 is coaxially arranged with the first pressure cap 2. Thus, the valve core 15, the first pressure cap 2, and the seat body 14 are all coaxially arranged, which improves the symmetry of the structure, further improves the uniformity of pressure applied to the first pressure cap 2, and reduces the risk of the first pressure cap 2 shifting. In this embodiment, the valve core 15, the seat body 14, and the valve seat 10 cooperate to form the pressure chamber 201. In this embodiment, the air inlet 11 is provided on the seat body 14, and the second flow port 12 is provided on the valve core 15. For example, the second flow port 12 is provided on the part of the valve core 15 located outside the seat body 14.

[0056] In at least one possible implementation, the first pressure cap 2 is slidably connected to the valve core 15 along the first direction X. This arrangement serves two purposes: firstly, it allows the valve core 15 to guide the movement of the first pressure cap 2, ensuring that the first pressure cap 2 moves in the first direction X, thereby further reducing the risk of the first pressure cap 2 shifting; secondly, the valve core 15 also acts as a stop structure for the first pressure cap 2, with the first pressure cap 2 abutting against the valve core 15 to limit the maximum distance the first pressure cap 2 can move away from the first flow port 101 in the first direction X, thus facilitating the reset of the first pressure cap 2. Here, the first direction X is the axial direction of the valve core 15.

[0057] In some alternative embodiments, such as Figure 4 As shown, the end face of the valve core 15 facing the first pressure plate 2 is provided with a groove 1513, such as... Figure 6 As shown, the first pressure cap 2 includes a cap body 21 and a slider 22 connected to the cap body 21. Please refer to... Figure 4 and Figure 6 The slider 22 is slidably disposed in the slide groove 1513 along the first direction X to guide the movement of the first pressure cover 2.

[0058] In some possible implementations, such as Figure 3 As shown, the valve core 15 includes a first core segment 151 disposed within the pressure chamber 201 and a second core segment 152 disposed outside the pressure chamber 201. The first pressure cap 2 is slidably connected to the first core segment 151. Figure 4 As shown, the first core segment 151 has a first channel 161 communicating with the pressure chamber 201, allowing gas in the pressure chamber 201 to flow into the first channel 161. The second core segment 152 has a second channel 162 communicating with the first channel 161, allowing gas in the first channel 161 to flow into the second channel 162. The second channel 162 forms a second flow port 12 on the surface of the second core segment 152 (see...). Figure 3 This allows the gas in the second channel 162 to flow out through the second flow port 12.

[0059] In related technologies, the gas discharged through the safety valve may contain particles such as smoke and dust, and since the safety valve has no filtering capability, direct discharge will affect the air.

[0060] In one embodiment, such as Figure 2 or Figure 4 As shown, the sealing assembly 20 in this embodiment also includes a filter structure 5. Wherein, as... Figure 3 As shown, the circumferential sidewall of the first core segment 151 is provided with a vent 1511 connecting the first channel 161 and the pressure chamber 201; that is, the first channel 161 is connected to the pressure chamber 201 through the vent 1511. Figure 4 As shown, the filter structure 5 is set in the first core section 151 and covers the vent hole 1511. The gas in the pressure chamber 201 needs to pass through the filter structure 5 before the vent hole 1511. The filter structure 5 adsorbs the dust and other particles in the gas, thereby greatly reducing the content of particles in the gas entering the first channel 161 through the vent hole 1511, and ensuring the quality of the exhaust.

[0061] The filter structure 5 can be of various types, such as activated carbon filters, electrostatic precipitators, etc., and this embodiment does not limit this. The material of the filter structure 5 can be synthetic fibers (e.g., polypropylene, polyester fibers), natural fibers (cotton, wool), etc., and this embodiment does not limit this. The model of the filter structure 5 can be VOC-1000, ACF-HEPA-48, etc., and this embodiment does not limit this.

[0062] Further optional, such as Figure 3 As shown, the first core segment 151 is provided with a first external thread 1512. For example... Figure 2 or Figure 4 As shown, the sealing assembly 20 also includes a first screw block 6 screwed to the first core segment 151. The first screw block 6 can be rotated to adjust its position on the first core segment 151, that is, the first screw block 6 can move along the first direction X. In this embodiment, the filter structure 5 is cylindrical, sleeved on the first core segment 151, and confined between the first screw block 6 and the inner wall of the sealing seat 1. The length direction of the first core segment 151 is the first direction X. Adjusting the position of the first screw block 6 on the first core segment 151 can compress the filter structure 5, thereby limiting the filter structure 5 and preventing it from moving along the first direction X. It should be noted that the filter structure 5 abuts against the inner wall of the sealing seat 1 in the first direction X.

[0063] In at least one implementation, such as Figure 4As shown, the elastic element 4 is sleeved on the second core segment 152, with one end connected to the second core segment 152 and the other end fixedly connected to the second pressure cap 3. The elastic element 4 provides tension to the second pressure cap 3, causing the second pressure cap 3 to abut tightly against the second core segment 152, thereby sealing the second flow port 12. By sleeved on the second core segment 152, the risk of the elastic element 4 becoming misaligned can be prevented. The elastic element 4 can be a spring or other elastic structure, and this embodiment is not limited to this.

[0064] Optionally, one end of the elastic element 4 can be connected to the second core segment 152 in an adjustable position. That is, the connection position between the elastic element 4 and the second core segment 152 is adjustable, thereby ensuring that the elastic element 4 always provides the required tension to the second pressure cap 3.

[0065] In some alternative implementations, such as Figure 3 As shown, the second core segment 152 is provided with a second external thread 1521, as... Figure 2 or Figure 4 As shown, the sealing assembly 20 also includes a second screw block 7 screwed to the second core segment 152. The end of the elastic member 4 facing away from the second pressure cap 3 is connected to the second screw block 7. By adjusting the position of the second screw block 7 relative to the second core segment 152, the position of one end of the elastic member 4 relative to the second core segment 152 can be adjusted.

[0066] In one embodiment, such as Figure 2 or Figure 6 As shown, a filter screen 8 is connected to the surface of the first pressure cap 2 facing the first flow port 101. The filter screen 8 can be used to filter large particles in the gas and prevent large particles from entering the pressure chamber 201.

[0067] In this embodiment, the filter screen 8 is located in the passage connecting the first flow port 101 and the pressure chamber 201, thereby enabling large particles to pass through the first flow port 101 into the pressure chamber 201. By connecting the filter screen 8 to the first pressure cover 2, when the first pressure cover 2 moves along the first direction X, it can drive the filter screen 8 to move along the first direction X, so that the filter screen 8 can be smoothly positioned in the passage between the first flow port 101 and the pressure chamber 201.

[0068] In this embodiment, the filter 8 is a metal structure, and the size of the mesh can be set according to requirements. This embodiment does not limit this.

[0069] In one possible implementation, such as Figure 4 As shown, a first sealing element 40 is provided between the valve seat 10 and the seat body 14 of the sealing seat 1. The first sealing element 40 is used to seal the gap between the valve seat 10 and the seat body 14 to ensure the sealing performance of the pressure chamber 201. The first sealing element 40 can be a sealing ring, and the material of the sealing ring can be silicone, rubber, etc., which is not limited in this embodiment.

[0070] In one embodiment, such as Figure 4 As shown, a second sealing element 50 is provided between the valve seat 10 and the cover 21 of the first pressure cap 2. The second sealing element 50 is used to seal the gap between the valve seat 10 and the cover 21 of the first pressure cap 2 to ensure the vacuum in the vacuum furnace. The second sealing element 50 can be a sealing ring, and the material of the sealing ring can be silicone, rubber, etc., which is not limited in this embodiment.

[0071] Optionally, a third sealing element 60 is provided between the sealing seat 1 and the second pressure cap 3. The third sealing element 60 is used to seal the gap between the second pressure cap 3 and the sealing seat 1 to ensure the sealing performance of the pressure chamber 201. Specifically, as shown... Figure 4 As shown, the third sealing element 60 is disposed between the second pressure cap 3 and the second core segment 152. The third sealing element 60 can be a sealing ring, and the material of the sealing ring can be silicone, rubber, etc., which is not limited in this embodiment.

[0072] In some alternative embodiments, such as Figure 2 As shown, the valve seat 10 is provided with a boss 102 protruding towards the inside of the pressure chamber 201, and the first flow port 101 is provided on the boss 102, as shown. Figure 4 As shown, the first pressure cap 2 abuts against the end face of the boss 102. The filter screen 8 is at least partially located within the boss 102.

[0073] This embodiment also provides a vacuum furnace, including the aforementioned safety valve. It offers high safety and reliability.

[0074] In this embodiment, the vacuum furnace includes a furnace chamber (not shown in the figure), the furnace chamber is provided with a communication port, the valve seat 10 is installed in the furnace chamber, and the first flow port 101 is connected to the communication port.

[0075] In this embodiment, the safety valve, during normal operation, fills the pressure chamber 201 with a fixed pressure of inert gas through the inflation port 11. The pressure can be 1 kPa to 20 kPa for pressure maintenance. The inert gas in the pressure chamber 201 acts on the first pressure cap 2, which tightly abuts against the valve seat 10, sealing the space on one side of the valve seat 10, i.e., sealing the furnace chamber of the vacuum furnace. When the pressure in the pressure chamber 201 suddenly drops and exceeds atmospheric pressure, the pressure gauge can issue an alarm signal to remind the operator that there is a leak at the second pressure cap 3 of the safety valve. When the pressure in the pressure chamber 201 suddenly drops and falls below atmospheric pressure, it will remind the operator that there is a leak at the first pressure cap 2.

[0076] When the internal pressure of the vacuum furnace is higher than the filling pressure in the pressure chamber 201, such as Figure 7As shown, the first pressure cap 2 is pushed open, and gas enters the pressure chamber 201. At this time, the pressure in the pressure chamber 201 increases, and the gas continues to pass through the filter structure 5 and enters the first channel 161 through the vent 1511 on the first valve core 15. The gas in the first channel 161 enters the second channel 162. When the gas pressure in the second channel 162 exceeds the pulling force of the elastic element 4 on the second pressure cap 3, it pushes open the second pressure cap 3, and the gas in the second channel 162 enters the atmosphere, achieving the purpose of depressurization. After depressurization, the second pressure cap 3, under the pulling force of the elastic element 4, tightly abuts against the valve core 15 of the second core segment 152 and tightly abuts against the third sealing element 60, completing the seal; the gas in the pressure chamber 201 presses the first pressure cap 2 tightly, and the first pressure cap 2 tightly abuts against the valve seat 10, thereby sealing the vacuum furnace chamber. Figure 7 The arrows in the diagram indicate the direction of gas flow.

[0077] The safety valve provided in this embodiment, sealed by a constant-pressure inert gas within the pressure chamber 201, offers more controllable pressure and a wider adjustment range compared to traditional spring-loaded valves. When a vacuum leak occurs within the pressure chamber 201 during normal operation, the pressure inside the chamber suddenly drops. At this time, the pressure sensor 30 can issue an alarm signal to alert the operator that the leak in the furnace chamber is the safety valve. By adding a filter structure 5 and a filter screen 8, particulate matter such as dust and carbon felt powder in the exhaust gas can be filtered out.

[0078] Note that the above are merely preferred embodiments and the technical principles employed in this application. Those skilled in the art will understand that this application is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of this application. Therefore, although this application has been described in detail through the above embodiments, this application is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of this application, the scope of which is determined by the scope of the appended claims.

Claims

1. A safety valve, characterized in that, include: Valve seat (10), wherein the valve seat (10) is provided with a first flow port (101); A sealing assembly (20) includes a sealing seat (1), a first pressure cap (2), a second pressure cap (3), and an elastic element (4); the sealing seat (1) and the valve seat (10) cooperate to form a pressure chamber (201), and the sealing seat (1) is provided with an air inlet (11) communicating with the pressure chamber (201); the first pressure cap (2) is disposed in the pressure chamber (201) and is configured to block the first flow port (101) under the pressure of the gas in the pressure chamber (201); the sealing seat (1) is provided with a second flow port (12) communicating with the pressure chamber (201), and the elastic element (4) is configured to apply a bias pressure to the second pressure cap (3) to block the second flow port (12).

2. The safety valve according to claim 1, characterized in that, The sealing seat (1) is also provided with a pressure measuring port (13), and the safety valve also includes a pressure measuring element (30), which is installed in the pressure measuring port (13) and used to detect the pressure in the pressure chamber (201).

3. The safety valve according to claim 1, characterized in that, The sealing seat (1) includes a seat body (14) and a valve core (15) coaxially connected to the seat body (14). The valve core (15) is coaxially arranged with the first pressure cap (2). The first pressure cap (2) is slidably connected to the valve core (15) along the first direction (X). The valve core (15), the seat body (14), and the valve seat (10) cooperate with each other to form the pressure chamber (201). The air inlet (11) is disposed on the seat body (14), and the second flow port (12) is disposed on the valve core (15). The first direction (X) is the axial direction of the valve core (15).

4. The safety valve according to claim 3, characterized in that, The valve core (15) includes a first core segment (151) disposed in the pressure chamber (201) and a second core segment (152) disposed outside the pressure chamber (201). The first pressure cap (2) is slidably connected to the first core segment (151). The first core segment (151) is provided with a first channel (161) communicating with the pressure chamber (201), and the second core segment (152) is provided with a second channel (162) communicating with the first channel (161). The second channel (162) forms a second flow port (12) on the surface of the second core segment (152).

5. The safety valve according to claim 4, characterized in that, The sealing assembly (20) further includes a filter structure (5). The circumferential sidewall of the first core segment (151) is provided with a vent (1511) that connects the first channel (161) and the pressure chamber (201). The filter structure (5) is disposed on the first core segment (151) and covers the vent (1511).

6. The safety valve according to claim 5, characterized in that, The first core segment (151) is provided with a first external thread (1512), and the sealing assembly (20) further includes a first screw block (6) screwed to the first core segment (151). The filter structure (5) is sleeved on the first core segment (151) and is limited between the first screw block (6) and the inner wall of the sealing seat (1).

7. The safety valve according to claim 4, characterized in that, The elastic element (4) is sleeved on the second core segment (152), and one end of the elastic element (4) is connected to the second core segment (152), and the other end is connected to the second pressure cap (3).

8. The safety valve according to claim 7, characterized in that, The second core segment (152) is provided with a second external thread (1521), and the sealing assembly (20) further includes a second screw block (7) screwed to the second core segment (152), and the end of the elastic member (4) facing away from the second pressure cap (3) is connected to the second screw block (7).

9. The safety valve according to any one of claims 1-8, characterized in that, A filter screen (8) is connected to the surface of the first pressure cap (2) facing the first flow port (101), and the filter screen (8) is located on the passage connecting the first flow port (101) and the pressure chamber (201).

10. A vacuum furnace, characterized in that, Includes the safety valve as described in any one of claims 1-9; The vacuum furnace includes a furnace chamber with a communication port. The valve seat (10) is installed in the furnace chamber, and the first flow port (101) is connected to the communication port.

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