Medium feedthrough structure for a vacuum system

Abstract

This utility model relates to the field of vacuum equipment, specifically a medium feedthrough structure for a vacuum system. It includes a sealing element installed on the cavity wall and sealingly fitted therewith. The sealing element has an extension end that extends from the atmospheric side through the cavity wall to the vacuum side. At least two sets of conveying chambers connecting the atmospheric side and the vacuum side are provided within the extension end. Each conveying chamber is configured to convey different types of media and / or convey the same type of media in different directions. The two ends of each conveying chamber are connected to an atmospheric side conveying pipe and a vacuum side conveying pipe, respectively. A potential isolation element is provided on the atmospheric side conveying pipe to isolate the continuous conductive path between the atmospheric side conveying pipe and the sealing element, with a gap between the potential isolation element and the sealing element. This utility model ensures vacuum sealing and continuous multi-channel medium conveying while cutting off the continuous conductive path of the metal pipeline.

Description

Technical Field

[0001] This utility model relates to the field of vacuum equipment, specifically a medium feedthrough structure for a vacuum system. Background Technology

[0002] In neutral beam injection devices, ion source systems, vacuum experimental platforms, and other high-potential vacuum equipment, it is often necessary to introduce external media into the vacuum chamber. For example, when performing process gas injection, protective gas purging, coolant delivery, liquid media circulation, or experimental media supply within the vacuum chamber, it is usually necessary to transport the gas or liquid media from the atmospheric side to the vacuum side through pipelines, joints, flanges, or feedthrough structures. Existing methods for introducing vacuum media mostly employ structures such as metal pipelines and compression fittings.

[0003] These structures can meet general mechanical connection and sealing requirements. However, since pipelines, joints, and flanges are usually continuous metal parts, when they cross vacuum boundaries or connect different potential regions, they can easily form continuous conductive paths between external gas supply pipelines, the vacuum chamber cavity, and internal high-potential components. Furthermore, in practical engineering applications, vacuum chambers often require more than just a single gas channel. Sometimes, gas injection, liquid delivery, and liquid return are needed simultaneously, or different gases and liquids need to be introduced into the vacuum chamber separately. If each medium requires a separate connection structure to enter the vacuum chamber, it will not only increase the number of openings and installation space requirements in the vacuum chamber but also increase sealing points and potential leakage risks, reducing system integration and reliability. Therefore, how to ensure vacuum sealing and continuous delivery of multiple media while cutting off the continuous conductive path of the metal pipelines has become an urgent technical problem to be solved. Utility Model Content

[0004] To avoid and overcome the technical problems existing in the prior art, this utility model provides a medium feedthrough structure for a vacuum system. This utility model ensures vacuum sealing and continuous multi-channel medium transport while cutting off the continuous conductive path of the metal pipeline.

[0005] To achieve the above objectives, this utility model provides the following technical solution: A medium feedthrough structure for a vacuum system includes a sealing element installed on and sealingly fitted to the cavity wall. The sealing element has an extension end that extends from the atmospheric side through the cavity wall to the vacuum side. At least two sets of delivery chambers connecting the atmospheric side and the vacuum side are provided in the extension end. Each delivery chamber is configured to deliver different types of media and / or deliver the same type of media in different directions. The two ends of the delivery chamber are respectively connected to an atmospheric side delivery pipe and a vacuum side delivery pipe. A potential isolation element is provided on the atmospheric side delivery pipe to isolate the continuous conductive path between the atmospheric side delivery pipe and the sealing element. There is a gap between the potential isolation element and the sealing element.

[0006] As a further embodiment of this utility model: the potential isolation component includes an alumina ceramic insulating tube and Kovar end tubes coaxially arranged on both sides of the alumina ceramic insulating tube. The alumina ceramic insulating tube and the Kovar end tube are connected by a sealing layer. Both the alumina ceramic insulating tube and the Kovar end tube have a medium channel opened along the axial direction for the medium to pass through.

[0007] As a further improvement of this utility model, the atmospheric side conveying pipe has a two-section structure. One section of the atmospheric side conveying pipe is integrally fixed with the sealing element and then connected to the other section of the atmospheric side conveying pipe through a potential isolation element.

[0008] As a further improvement of this utility model: along the direction from the atmospheric side to the vacuum side, the sealing element has a two-section stepped columnar structure that is wider at the front and narrower at the back. The large-diameter section of the sealing element abuts against the cavity wall, and the small-diameter section of the sealing element extends into the vacuum side as an extension end and is fastened and fixed.

[0009] As a further improvement of this utility model: the outer ring of the extended end of the seal is provided with a threaded section, and the clamping nut located on the vacuum side is threadedly engaged with the threaded section to clamp and fix the seal.

[0010] As a further improvement of this utility model, a sealing gasket is provided between the clamping nut and the cavity wall, and the inner diameter of the sealing gasket is larger than the outer diameter of the extension end of the sealing element.

[0011] As a further improvement of this utility model: a sealing groove is provided on the contact surface between the sealing element and the cavity wall, which is coaxially arranged with the clamping nut, and a sealing ring is installed in the sealing groove.

[0012] As a further improvement of this utility model: each conveying cavity at the extension end is coaxially arranged with a corrugated compensation pipe, and each conveying cavity is connected to the vacuum side conveying pipe that conveys the corresponding medium through the corrugated compensation pipe.

[0013] As a further embodiment of this utility model: the ends of the atmospheric side conveying pipe and the vacuum side conveying pipe are respectively provided with atmospheric side connecting joints and vacuum side connecting joints, and each connecting joint is one of VCR joints, VCO joints, compression fittings, pagoda joints, welded joints, threaded joints, KF joints or CF flange joints.

[0014] As a further improvement of this utility model, each atmospheric side delivery pipe and / or vacuum side delivery pipe is equipped with a control valve to independently control the on / off state of the pipeline.

[0015] Compared with the prior art, the beneficial effects of this utility model are: 1. The ceramic potential isolation component of this utility model can prevent the formation of a continuous conductive path between the external metal pipeline and the vacuum side metal structure, thus meeting the single-point grounding requirements of the vacuum system. While ensuring vacuum sealing, the sealing component can ensure the continuous delivery of multiple media, maintaining potential isolation even under multi-channel media delivery conditions, avoiding damage to the single-point grounding state. At the same time, it significantly reduces the number of openings required on the vacuum cavity, lowers the risk of leakage, and simplifies the layout of the vacuum system.

[0016] 2. The ceramic potential isolation component of this utility model adopts a ceramic Kovar sealing structure. The central medium channel is continuous, while no continuous metal conductive path is formed between the two Kovar end tubes. This can achieve reliable potential isolation while ensuring medium transportation. The sealing structure combining the alumina ceramic insulating tube and the Kovar end tube can improve the thermal expansion matching between ceramic and metal, reduce the thermal stress generated during cold and hot cycles or sealing process, and improve airtightness and structural reliability.

[0017] 3. The sealing element of this utility model is tightened and fixed by a compression nut and a sealing gasket, which improves the sealing reliability at the vacuum boundary. It adopts a two-stage stepped columnar structure. The large-diameter section abuts against the cavity wall to achieve axial limiting, and the small-diameter section extends to the vacuum side and is tightened by the compression nut. It uses atmospheric pressure difference to achieve self-tightening sealing. The contact surface between the sealing element and the cavity wall is provided with an independent sealing ring groove, which, together with the sealing ring, forms an end face static seal, further blocking the leakage path from the atmospheric side to the vacuum side.

[0018] 4. This utility model features a corrugated compensation tube arranged coaxially at each delivery chamber opening at the extension end. This effectively absorbs the thermal expansion and contraction deformation of the vacuum side pipeline caused by temperature changes, while compensating for alignment deviations and mechanical vibrations during installation. It isolates pipeline stress from the seals and cavity walls, avoiding the risk of micro-cracks in the seals or weld cracks caused by rigid connections, and extending the service life of the feedthrough structure. The multiple types of connectors can adapt to various pipeline interface forms, making it suitable for neutral beam injection systems, ion source systems, high-potential vacuum equipment, vacuum experimental platforms, and other vacuum systems requiring single-point grounding. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of this utility model.

[0020] Figure 2 This is a schematic diagram of the potential isolation component in this utility model.

[0021] In the picture: 1. Cavity wall; 2. Seal; 21. Conveying cavity; 22. Extension end; 23. Threaded section; 3. Vacuum side delivery pipe; 31. Vacuum side connection joint; 4. Atmospheric side delivery pipe; 41. Atmospheric side connection joint; 5. Potential isolation components; 51. Kovar terminal blocks; 52. Alumina ceramic insulating tube; 53. Sealing layer; 54. Medium channel; 6. Compression nut; 61. Sealing gasket; 7. Corrugated compensating pipe. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figures 1-2 In this embodiment of the present invention, a medium feed structure for a vacuum system is applied between the atmospheric side and the vacuum side of the cavity wall 1 of the vacuum system, and an opening is made in the cavity wall 1 to install a sealing element 2. The sealing element 2 is integrally formed.

[0024] From the atmospheric side to the vacuum side, the seal 2 is constructed as a two-section stepped columnar structure, wider at the front and narrower at the back. Its larger diameter section, located on the atmospheric side, has a flat annular end face that abuts against the outer surface of the cavity wall 1. The smaller diameter section of the seal 2, serving as an extension end 22, passes through a mounting hole in the cavity wall 1 and extends into the vacuum side. The outer ring of the extension end 22 is machined with a threaded section 23. On the vacuum side, a clamping nut 6 is screwed onto the threaded section 23. When the clamping nut 6 is tightened, its end face transmits pressure to the inner surface of the cavity wall 1 through the sealing gasket 61, thereby pressing the larger diameter end face of the seal 2 against the outer surface of the cavity wall 1. The inner diameter of the sealing gasket 61 is designed to be larger than the outer diameter of the extension end 22 of the seal 2, ensuring a uniform distribution of clamping force while preventing positional interference between the gasket and the extension end 22.

[0025] To achieve a seal, a sealing groove is provided on the contact surface between the sealing element 2 and the cavity wall 1, which is coaxially arranged with the sealing element 2. An O-ring is installed in the sealing groove. When the sealing element 2 is pressed, the sealing ring deforms elastically, thereby achieving a seal between the atmospheric side and the vacuum side.

[0026] The seal 2 has at least two sets of parallel conveying chambers 21 machined along its axial direction inside. The conveying chambers 21 penetrate the seal 2 and open at both ends to the atmosphere side and the vacuum side, respectively. Each set of conveying chambers 21 is configured to independently convey a medium and / or convey the same type of medium in different directions. In this embodiment, two sets of conveying chambers 21 are provided to convey liquid and gaseous media, respectively.

[0027] On the atmospheric side end face of the seal 2, the openings of each delivery chamber 21 are coaxially fixedly connected to an atmospheric side delivery pipe 4 by welding or threading. In this embodiment, the atmospheric side delivery pipe 4 has a two-section structure: the first section is integrally fixedly connected to the seal 2, and the first section and the second section of the delivery pipe are connected by a potential isolation component 5. The potential isolation component prevents the atmospheric side delivery pipe 4 from not forming a continuous metal conductive path with the vacuum side delivery pipe 3, thereby achieving potential isolation.

[0028] In this embodiment, the potential isolator 5 specifically includes an alumina ceramic insulating tube 52 located at the center. Both axial ends of the alumina ceramic insulating tube 52 are coaxially connected to Kovar end tubes 51 via sealing layers 53. The Kovar end tubes are preferably made of 4J33 Kovar alloy, and the alumina ceramic insulating tube is preferably made of 95% alumina ceramic. The ceramic-Kova sealing structure improves the thermal expansion matching between the ceramic and metal, reduces thermal stress generated during thermal cycling or sealing, and improves the airtightness and structural reliability of the ceramic potential isolator. The alumina ceramic insulating tube 52 and the Kovar end tubes 51 at both ends are provided with through-channels 54 along their axial directions, thus forming a medium flow path and ensuring smooth medium passage.

[0029] To compensate for installation errors, thermal expansion and contraction displacement, vibration displacement, and relative displacement between the vacuum chamber and external pipelines, a set of corrugated compensation pipes 7 are coaxially fixedly connected to the opening of each delivery chamber 21 of the extension end 22 of the seal 2. The end of the corrugated compensation pipe 7 is connected to the vacuum side connection joint 31 through the vacuum side delivery pipe 3.

[0030] To accommodate different on-site installation requirements, each atmospheric side delivery pipe 4 is equipped with an atmospheric side connection joint 41 at its outlet end, and each vacuum side delivery pipe 3 is equipped with a vacuum side connection joint 31 at its inlet end. Each connection joint is one or more of the following: VCR joint, VCO joint, compression fitting, pagoda joint, welded joint, threaded joint, KF joint, or CF flange joint. The vacuum side connection joint 31 is used to connect to the internal piping, nozzles, samples, cooling components, or other functional components within the vacuum chamber.

[0031] In addition, in order to independently control the on / off or flow rate of each medium, control valves are installed on each atmospheric side delivery pipe 4 and / or each vacuum side delivery pipe 3 to independently open or close the delivery of any medium.

[0032] During installation, first, the sealing element 2 with the sealing ring is inserted into the through hole of the cavity wall 1 from the atmospheric side. Then, the sealing gasket 61 is fitted on the vacuum side and the clamping nut 6 is tightened to achieve fixation and sealing. On the vacuum side, the vacuum side delivery pipe 3 is connected through the corrugated compensation pipe 7 and the vacuum side connection joint 31. On the atmospheric side, the first section of the atmospheric side delivery pipe 4 is first connected to the sealing element 2, and then the second section of the atmospheric side delivery pipe 4 is connected through the potential isolation element 5. Finally, control valves and terminal joints are installed on each pipeline. During operation, different process media are delivered from the atmospheric side to the vacuum side through different delivery chambers 21 in a sealed and electrically isolated state.

[0033] The above description is only a preferred embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural changes made using the content of this application specification, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

[0034] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0035] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

Claims

1. A dielectric feedthrough structure for a vacuum system, characterized in that, The device includes a sealing element (2) installed on the cavity wall (1) and sealingly fitted with the cavity wall (1). The sealing element (2) is provided with an extension end (22) that extends from the atmospheric side through the cavity wall (1) and to the vacuum side. The extension end (22) is provided with at least two sets of conveying chambers (21) that connect the atmospheric side and the vacuum side. Each conveying chamber (21) is configured to convey different types of media and / or convey the same type of media in different directions. The two ends of the conveying chamber (21) are respectively connected to the atmospheric side conveying pipe (4) and the vacuum side conveying pipe (3). The atmospheric side conveying pipe (4) is provided with a potential isolation element (5) that isolates the continuous conductive path between the atmospheric side conveying pipe (4) and the sealing element (2). There is a gap between the potential isolation element (5) and the sealing element (2).

2. The dielectric feedthrough structure for a vacuum system according to claim 1, characterized in that, The potential isolation component (5) includes an alumina ceramic insulating tube (52) and Kovar end tubes (51) arranged coaxially on both sides of the alumina ceramic insulating tube (52). The alumina ceramic insulating tube (52) and the Kovar end tube (51) are connected by a sealing layer (53). Both the alumina ceramic insulating tube (52) and the Kovar end tube (51) have a medium channel (54) along the axial direction for the medium to pass through.

3. The dielectric feedthrough structure for a vacuum system according to claim 2, characterized in that, The atmospheric side delivery pipe (4) has a two-section structure. One section of the atmospheric side delivery pipe (4) is fixed together with the sealing element (2) and then connected to the other section of the atmospheric side delivery pipe (4) through the potential isolation element (5).

4. A dielectric feedthrough structure for a vacuum system according to any one of claims 1 to 3, characterized in that, Along the direction from the atmospheric side to the vacuum side, the seal (2) has a two-section stepped columnar structure that is wider at the front and narrower at the back. The large diameter section of the seal (2) abuts against the cavity wall (1), and the small diameter section of the seal (2) extends into the vacuum side as an extension end (22) and is fastened.

5. A dielectric feedthrough structure for a vacuum system according to claim 4, characterized in that, The outer ring of the extension end (22) of the seal (2) is provided with a threaded section (23), and the clamping nut (6) located on the vacuum side is threadedly engaged with the threaded section (23) to clamp and fix the seal (2).

6. A dielectric feedthrough structure for a vacuum system according to claim 5, characterized in that, A sealing gasket (61) is provided between the clamping nut (6) and the cavity wall (1), and the inner diameter of the sealing gasket (61) is larger than the outer diameter of the extension end (22) of the seal (2).

7. A dielectric feedthrough structure for a vacuum system according to claim 5, characterized in that, A sealing groove is provided on the contact surface between the sealing element (2) and the cavity wall (1), which is coaxially arranged with the clamping nut (6), and a sealing ring is installed in the sealing groove.

8. A dielectric feedthrough structure for a vacuum system according to any one of claims 1 to 3, characterized in that, The opening of each delivery chamber (21) at the extension end (22) is coaxially arranged with a corrugated compensation pipe (7), and each delivery chamber (21) is connected to the vacuum side delivery pipe (3) that delivers the corresponding medium through the corrugated compensation pipe (7).

9. A dielectric feedthrough structure for a vacuum system according to any one of claims 1 to 3, characterized in that, Atmospheric side delivery pipe (4) and vacuum side delivery pipe (3) are respectively provided with atmospheric side connection joint (41) and vacuum side connection joint (31). Each connection joint is one of VCR joint, VCO joint, compression fitting joint, pagoda joint, welded joint, threaded joint, KF joint or CF flange joint.

10. A dielectric feedthrough structure for a vacuum system according to any one of claims 1 to 3, characterized in that, Each atmospheric side delivery pipe (4) and / or vacuum side delivery pipe (3) is equipped with a control valve to independently control the opening and closing of the pipeline.

Images