A leveling device for a cooling tray and a cooling tray

Abstract

This utility model relates to the field of semiconductor fabrication technology and discloses a leveling device for a cooling tray. The leveling device for a cooling tray includes a leveling device, which comprises a ring-shaped support and multiple fixed supports. One end of each fixed support is connected to the inner side of the ring-shaped support, and the other ends of the fixed supports are connected to each other. At least one detection device is provided on each of the multiple fixed supports for detecting the placement state of the cooling tray. This utility model provides a leveling device for a cooling tray, which includes a leveling device, a ring-shaped support, and multiple fixed supports. One end of each fixed support is connected to the inner side of the ring-shaped support, and the other ends of the fixed supports are connected to each other. At least one detection device is provided on each of the multiple fixed supports for detecting the placement state of the cooling tray.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor fabrication technology, and in particular to a leveling device and a cooling plate for a cooling plate. Background Technology

[0002] During the manufacturing process of semiconductor devices, heat is generated inside the device. If this heat cannot be dissipated in time, it will affect the performance of the semiconductor device. Therefore, semiconductor devices are often placed on cooling pads inside the semiconductor manufacturing equipment for cooling. When installing the cooling pads inside the semiconductor manufacturing equipment, they need to be placed horizontally. Currently, there are no suitable testing tools to check whether the cooling pads are placed horizontally, making it inconvenient for operators.

[0003] Therefore, there is an urgent need for a leveling device and a cooling plate for the cooling plate to solve the above-mentioned technical problems. Utility Model Content

[0004] The purpose of this invention is to provide a leveling device for cooling trays, which can solve the problem that there are currently no suitable testing tools to detect whether the cooling trays are placed horizontally during the installation of cooling trays inside semiconductor equipment, making it inconvenient for operators.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A leveling device for a cooling tray includes a leveling device comprising an annular support and a plurality of fixed supports. One end of each fixed support is connected to the inner side of the annular support, and the other ends of each fixed support are connected to each other. At least one detection device is provided on each of the plurality of fixed supports for detecting the placement status of the cooling tray.

[0007] As an optional solution, the number of fixed supports is three, the included angle between two adjacent fixed supports is 120 degrees, and each fixed support is equipped with a detection device.

[0008] As an optional solution, the detection device is a dial indicator, which is fixed to the fixed bracket by an indicator clip.

[0009] As an alternative, the indicator clip includes a fixing part and a clamping part connected to the fixing part. The fixing bracket is provided with a mounting hole, and the fixing rod of the dial indicator is at least partially inserted into the mounting hole. The indicator clip is fixed to the outside of the mounting hole, and the clamping part is used to clamp the fixing rod of the dial indicator.

[0010] As an alternative, the clamping part includes a clamping hole and two clamping members extending from the clamping hole, wherein the fixing rod is at least partially clamped in the clamping hole, and the two clamping members are used to adjust the clamping state of the clamping hole on the fixing rod.

[0011] As an optional solution, the indicator clamp also includes an adjusting member, which is a bolt. The two clamping members are provided with threaded holes at corresponding positions, and the bolt passes through at least part of the threaded holes. The bolt is used to adjust the distance between the two clamping members.

[0012] As an optional solution, a calibration device is also included, which includes a sidewall and a calibration surface disposed at the lower end of the sidewall. The sidewall is adapted to the shape of the horizontal measuring device, and the horizontal measuring device can be accommodated within the accommodating space enclosed by the sidewall.

[0013] This application also provides a cooling plate, including a cooling part, a connecting part, and a fixing member. The cooling part is disposed at one end of the connecting part, and the fixing member is disposed at the other end of the connecting part. The fixing member is provided with a fixing connector, which is used to fix the fixing member to a semiconductor manufacturing device.

[0014] This utility model has at least the following beneficial effects:

[0015] This utility model provides a leveling device for a cooling tray. During the installation of the cooling tray inside semiconductor manufacturing equipment, the leveling device is placed on the cooling tray. The operator can observe the detection device to determine whether the cooling tray is in a horizontal position and make corresponding adjustments to the cooling tray, so that it can be installed horizontally on the semiconductor manufacturing equipment, which is convenient for the staff to operate. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model, the accompanying drawings used in the description of the embodiments of this utility model will be briefly introduced below.

[0017] Figure 1 A schematic diagram of a leveling device for a cooling tray provided in an embodiment of this utility model;

[0018] Figure 2 An exploded view of a leveling device for a cooling tray provided in an embodiment of this utility model;

[0019] Figure 3 A schematic diagram of the structure of the horizontal measuring device provided in this embodiment of the utility model;

[0020] Figure 4A schematic diagram of the horizontal measuring device provided in this embodiment of the invention from another angle;

[0021] Figure 5 A schematic diagram of the structure of the indicator clip provided in this embodiment of the utility model;

[0022] Figure 6 A schematic diagram of the structure of a cooling plate provided in this embodiment of the utility model;

[0023] Figure 7 A schematic diagram of a cooling plate installed inside a semiconductor manufacturing equipment cavity, provided for an embodiment of this utility model;

[0024] Figure 8 This is a schematic diagram showing a cooling plate installed in the cavity of a semiconductor manufacturing device at another angle, as provided in this embodiment of the invention.

[0025] Figure label:

[0026] 1. Horizontal measuring device; 11. Ring support; 12. Fixed support; 2. Calibration device; 21. Side wall; 22. Calibration surface; 3. Dial indicator; 31. Dial; 32. Fixed rod; 33. Measuring rod; 4. Indicator clamp; 41. Fixing part; 42. Clamping part; 421. Clamping hole; 422. Clamping component; 5. Cooling plate; 51. Cooling part; 52. Connecting part; 53. Fixing component; 531. Connecting component; 6. Cavity for manufacturing semiconductor equipment. Detailed Implementation

[0027] In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0028] In existing technologies, semiconductor devices generate heat during manufacturing. To dissipate this heat effectively, the semiconductor devices are often placed on cooling pads inside the semiconductor manufacturing equipment. However, the cooling pads need to be installed horizontally. Currently, there are no suitable tools to check whether the cooling pads are horizontally positioned, making it inconvenient for operators.

[0029] Therefore, such as Figures 1 to 8 As shown, an embodiment of this utility model provides a leveling device for a cooling tray to solve the above-mentioned technical problems.

[0030] Specifically, a leveling device for a cooling tray includes a leveling device 1. The leveling device 1 includes an annular support 11 and multiple fixed supports 12. One end of each fixed support 12 is connected to the inner side of the annular support 11, and the other ends of each fixed support 12 are connected to each other. At least one detection device is provided on each of the multiple fixed supports 12. The detection device is used to detect the placement state of the cooling tray, which includes a horizontal state and a non-horizontal state. During the process of installing the cooling tray inside the semiconductor manufacturing equipment, the leveling device for the cooling tray is placed on the cooling tray. The operator can observe the detection device, judge in time whether the cooling tray has reached the horizontal placement state, and make corresponding adjustments to the cooling tray, so that it can be installed horizontally on the semiconductor manufacturing equipment, which is convenient for the operator.

[0031] In some embodiments, in order to accurately detect the placement status of the cooling plate, the number of fixed brackets 12 in this application is three, the included angle between two adjacent fixed brackets 12 is 120 degrees, and each fixed bracket 12 is provided with a detection device.

[0032] In some embodiments, in order to improve the accuracy of detecting the placement status of the cooling tray, the detection device is preferably a dial indicator 3, wherein the dial indicator 3 includes a dial 31, a fixing rod 32 and a measuring rod 33, and the dial 31 has a pointer that can display the placement status of the cooling tray. The dial indicator 3, dial 31, fixing rod 32 and measuring rod 33 described herein are all prior art and will not be described in detail here.

[0033] In some embodiments, in order to facilitate fixing the dial indicator 3 to the fixed bracket 12, an indicator clip 4 is fixedly installed on the fixed bracket 12. The indicator clip 4 includes a fixing part 41 and a clamping part 42 connected to the fixing part 41. The fixed bracket 12 is provided with a mounting hole. The fixing rod 32 of the dial indicator 3 passes through the mounting hole at least partially. The indicator clip 4 is fixed outside the mounting hole. The clamping part 42 is used to clamp the fixing rod 32 of the dial indicator 3.

[0034] In some embodiments, in order to facilitate the adjustment of the clamping state of the clamping part 42 on the fixing rod 32, the clamping part 42 of this application includes a clamping hole 421 and two clamping members 422. The clamping hole 421 is at least partially open, and the two clamping members 422 extend outward from the open part of the clamping hole 421, and there is a certain distance between the two clamping members 422. The fixing rod 32 is at least partially clamped in the clamping hole 421. In this way, the clamping state of the clamping hole 421 on the fixing rod 32 can be adjusted by adjusting the distance between the two clamping members 422.

[0035] In some embodiments, in order to facilitate the adjustment of the distance between the two clamping members 422, the indicator clamp 4 also includes an adjusting member, which is a bolt. The two clamping members 422 are provided with threaded holes at corresponding positions, and the bolt is at least partially inserted into the threaded holes, so that the distance between the two clamping members 422 can be adjusted by means of the bolt.

[0036] In some embodiments, before using the leveling device for the cooling plate of this application, it is generally necessary to place it on a horizontal plane to calibrate the detection device. In order to facilitate the calibration of the detection device, this application also includes a calibration device 2, wherein the calibration device 2 includes a side wall 21 and a calibration surface 22 disposed at the lower end of the side wall 21. The side wall 21 is adapted to the shape of the horizontal measuring device 1, and the horizontal measuring device 1 can be accommodated in the accommodating space enclosed by the side wall 21. When the horizontal measuring device 1 is placed in the accommodating space, the detection device and the calibration surface 22 are at least partially in contact, thereby calibrating the detection device using the calibration surface 22.

[0037] This application also provides a cooling tray 5, including a cooling part 51, a connecting part 52, and a fixing member 53. The cooling part 51 is disposed at one end of the connecting part 52, and the fixing member 53 is disposed at the other end of the connecting part 52. The fixing member 53 is provided with a fixing connector 531, which is used to fix the fixing member 53 to the semiconductor manufacturing equipment. During the process of installing the cooling tray inside the semiconductor manufacturing equipment, a leveling device for the cooling tray is placed on the cooling part 51. The operator can observe the detection device to judge in time whether the cooling tray has reached the horizontal placement state and make corresponding adjustments to the connector 531, so that it can be horizontally installed in the cavity of the semiconductor manufacturing equipment. The connector 531 mentioned here can be a bolt. A threaded hole is provided at the corresponding position of the semiconductor manufacturing equipment, and the bolt can be partially inserted into the threaded hole.

[0038] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A leveling device for a cooling tray, characterized in that, The device includes a level measuring device (1), which includes an annular bracket (11) and multiple fixed brackets (12). One end of each fixed bracket (12) is connected to the inner side of the annular bracket (11), and the other ends of each fixed bracket (12) are connected to each other. At least one detection device is provided on each of the multiple fixed brackets (12), and the detection device is used to detect the placement status of the cooling tray.

2. The leveling device for a cooling tray according to claim 1, characterized in that, The number of fixed brackets (12) is three, the included angle between two adjacent fixed brackets (12) is 120 degrees, and each fixed bracket (12) is equipped with a detection device.

3. A leveling device for a cooling tray according to claim 1, characterized in that, The detection device is a dial indicator (3), which is fixed on the fixed bracket (12) by an indicator clip (4).

4. A leveling device for a cooling tray according to claim 3, characterized in that, The indicator clip (4) includes a fixing part (41) and a clamping part (42) connected to the fixing part (41). The fixing bracket (12) is provided with a mounting hole. The fixing rod (32) of the dial indicator (3) is at least partially inserted into the mounting hole. The indicator clip (4) is fixed outside the mounting hole. The clamping part (42) is used to clamp the fixing rod (32) of the dial indicator (3).

5. A leveling device for a cooling tray according to claim 4, characterized in that, The clamping part (42) includes a clamping hole (421) and two clamping members (422) extending from the clamping hole (421). The fixing rod (32) is at least partially clamped in the clamping hole (421). The two clamping members (422) are used to adjust the clamping state of the clamping hole (421) on the fixing rod (32).

6. A leveling device for a cooling tray according to claim 5, characterized in that, The indicator clamp (4) also includes an adjusting member, which is a bolt. The two clamping members (422) are provided with threaded holes at corresponding positions. The bolt is at least partially inserted into the threaded holes and is used to adjust the distance between the two clamping members (422).

7. A leveling device for a cooling tray according to any one of claims 1 to 6, characterized in that, It also includes a calibration device (2), which includes a side wall (21) and a calibration surface (22) disposed at the lower end of the side wall (21). The side wall (21) is adapted to the shape of the horizontal measuring device (1), and the horizontal measuring device (1) can be accommodated within the accommodating space enclosed by the side wall (21).

8. A cooling tray, characterized in that, It includes a cooling part (51), a connecting part (52) and a fixing member (53). The cooling part (51) is disposed at one end of the connecting part (52), and the fixing member (53) is disposed at the other end of the connecting part (52). The fixing member (53) is provided with a fixing connector (531), which is used to fix the fixing member (53) to the semiconductor manufacturing equipment.

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