A rapid loading device for multi-size quartz tubes

CN224623487UActive Publication Date: 2026-08-11博宇(天津)半导体材料有限公司 +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-10
Publication Date
2026-08-11

AI Technical Summary

Technical Problem

这种人工操作方式不仅操作不便,而且存在较高的安全风险,容易导致操作人员受伤

Benefits of technology

[0022]本实用新型提供了一种多尺寸石英管的快速装载装置,该装置通过电动控制升降组件、平移组件、输送组件和承载组件的相互配合,实现了石英管的自动化装载,减少了人工操作,提高了生产效率;

✦ Generated by Eureka AI based on patent content.

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Abstract

This utility model discloses a rapid loading device for multi-size quartz tubes, belonging to the technical field of mobile loading equipment. It includes: a housing; a lifting assembly, disposed within the housing and extending through the top of the housing, for vertically moving the quartz tube to a position flush with the inlet of an annealing furnace; a translation assembly, disposed on top of the lifting assembly, for horizontally adjusting the position of the quartz tube to align with the annealing furnace inlet; a rolling support assembly, fixedly disposed on the top of the translation assembly near the annealing furnace, for providing rolling support to one end of the quartz tube; a conveying assembly, disposed on the top of the translation assembly away from the annealing furnace, for conveying the quartz tube into the annealing furnace; a battery, fixedly disposed within the housing; and an electrical control box, electrically connected to both the battery and the lifting assembly. This device enables rapid loading and unloading of quartz tubes, saving manpower while improving operational safety and positioning accuracy.
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Description

Technical Field

[0001] This utility model relates to the field of mobile loading equipment technology, and in particular to a rapid loading device for multi-size quartz tubes. Background Technology

[0002] In the field of second-generation semiconductor materials, such as gallium arsenide (GaAs) and indium phosphide (InP), quartz tubes serve as crucial containers for carrying the workpieces, and their frequent loading and unloading within the annealing furnace is a vital part of the production process. However, currently, the handling of quartz tubes mainly relies on manual operation, a process fraught with problems.

[0003] Traditional quartz tube annealing furnaces employ a vertical structure, and due to the considerable height of the upper chamber, at least two tall operators are required to handle the loading and unloading of quartz tubes. This manual operation method is not only inconvenient but also poses significant safety risks, easily leading to operator injury. Furthermore, manual operation suffers from poor positioning accuracy, making it difficult to meet the high-precision process requirements of modern semiconductor manufacturing. Utility Model Content

[0004] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a rapid loading device for multi-size quartz tubes, which enables quick loading and unloading of quartz tubes, saves manpower, and improves operational safety and positioning accuracy.

[0005] This utility model provides a rapid loading device for multi-size quartz tubes, comprising:

[0006] Box;

[0007] A lifting assembly is installed inside the box and extends through the top of the box to move the quartz tube vertically to a position flush with the inlet of the annealing furnace.

[0008] A translation component, located at the top of the lifting component, is used to adjust the position of the quartz tube in the horizontal direction so that it is aligned with the inlet of the annealing furnace;

[0009] A rolling support assembly is fixedly installed at the top of the translation assembly near the annealing furnace, and is used to provide rolling support for one end of the quartz tube;

[0010] A conveying assembly is located at the top end of the translation assembly away from the annealing furnace, and is used to convey the quartz tube into the annealing furnace;

[0011] The storage battery is fixedly installed inside the enclosure;

[0012] The electrical control box is electrically connected to the battery and the lifting assembly, respectively.

[0013] Furthermore, the lifting assembly includes a rack and pinion motor located inside the housing and fixedly connected to its top wall; the rack on the rack and pinion motor passes through the top wall of the housing and both ends of the rack are fixedly connected to crossbeams, and both ends of each crossbeam are fixedly connected to lifting plates perpendicular to each other, and two first guide shafts passing through the top wall of the housing are fixedly arranged between the two lifting plates in the vertical direction.

[0014] Furthermore, the translation component includes a support plate and two first slide rails, which correspond one-to-one with and are fixedly connected to the two lifting plates on the top of the lifting component; each first slide rail is slidably connected to two first sliders, and any one of the first sliders has a threaded hole on its side wall, with a locking handle threaded into the threaded hole; the support plate is fixedly installed on the top of the four first sliders.

[0015] Furthermore, the conveying assembly includes a second slide rail fixedly mounted on the support plate and extending along its length; a second slider is slidably connected to the second slide rail, a drive motor is fixedly mounted on the second slider, a worm gear meshing with a worm is fixedly mounted on the output shaft of the drive motor, a lead screw is threaded onto the worm gear, and a support plate for supporting the quartz tube is fixedly mounted at the top end of the lead screw; two second guide shafts are arranged parallel to each other on one side of the second slide rail, a moving plate is slidably connected to the two second guide shafts, and a groove is opened vertically on the side of the moving plate near the second slide rail to slide with the support plate.

[0016] Furthermore, the movable plate has two through holes for the second guide shaft to pass through, and a linear bearing with a locking device is fixedly installed in either of the through holes.

[0017] Furthermore, a photoelectric sensor is fixedly installed on the side of the movable plate near the rolling support assembly, and the photoelectric sensor and the drive motor are both electrically connected to the electrical control box.

[0018] Furthermore, the rolling support assembly includes two sets of symmetrically arranged support rollers, and the two sets of support rollers are distributed in an inverted "V" shape; each set of support rollers consists of two rollers, and both support rollers are rotatably mounted on a wheel seat; the wheel seat is hinged to the top of the bracket, and the bottom end of the bracket is fixedly mounted on the base plate; the base plate is fixedly mounted on the support plate, and the base plate is located at one end of the second slide rail and extends along the width direction of the support plate.

[0019] Furthermore, the top of the bracket is provided with a groove; the wheel seat is provided with a threaded hole corresponding to the groove, and a bolt is threaded into the threaded hole. When the bolt is rotated, the wheel seat rotates around the hinge of the bracket.

[0020] Furthermore, casters are provided at the four corners of the bottom of the box.

[0021] Compared with the prior art, the beneficial effects of this utility model are:

[0022] This utility model provides a rapid loading device for quartz tubes of various sizes. The device achieves automated loading of quartz tubes through the cooperation of electrically controlled lifting components, translation components, conveying components and bearing components, reducing manual operation and improving production efficiency.

[0023] In this invention, different diameter quartz tubes can be quickly adapted by tightening the bolts. Combined with photoelectric sensors and lead screw adjustment, automatic height compensation is achieved, ensuring that quartz tubes of different diameters can obtain horizontal and stable support, which significantly improves the versatility of the equipment.

[0024] In this invention, the design of the electrical control box allows operators to quickly load quartz tubes through simple operations, reducing operational difficulty and improving operational convenience.

[0025] It should be understood that the description in this utility model description section is not intended to limit the key or essential features of the embodiments of this utility model, nor is it intended to restrict the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description

[0026] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0027] Figure 1 This is a schematic diagram of the rapid loading device;

[0028] Figure 2 A schematic diagram showing the structure of the cabinet door opening;

[0029] Figure 3 This is a schematic diagram of the structure for the translation component and the conveying component to work together;

[0030] Figure 4 A schematic diagram of the structure in which the conveying component and the load-bearing component work together;

[0031] Figure 5 This is a structural schematic diagram of the load-bearing component;

[0032] Figure 6 This is a cross-sectional view of the supporting component;

[0033] Figure 7 A schematic diagram of the structure for the connection between the crossbeam and the lifting plate;

[0034] The following components are labeled in the diagram: 1. Housing; 2. Lifting assembly; 21. Rack and pinion motor; 22. Crossbeam; 23. Lifting plate; 24. First guide shaft; 3. Translation assembly; 31. Support plate; 32. First slide rail; 33. First slider; 34. Locking handle; 4. Conveying assembly; 41. Second slide rail; 42. Second slider; 43. Drive motor; 44. Lead screw; 45. Support plate; 46. Second guide shaft; 47. Moving plate; 48. Slide groove; 49. Through hole; 410. Linear bearing; 411. Photoelectric sensor; 5. Rolling support assembly; 51. Base plate; 52. Bracket; 53. Wheel seat; 54. Support roller; 55. Groove; 56. Bolt; 6. Battery; 7. Moving wheel. Detailed Implementation

[0035] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings.

[0036] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.

[0037] Example 1

[0038] Please refer to Figure 1-2 As shown, an embodiment of this utility model provides a rapid loading device for multi-size quartz tubes, including: a housing 1, a lifting assembly 2, a translation assembly 3, a rolling support assembly 5, a storage battery 6, and an electrical control box.

[0039] Box 1, serving as the load-bearing foundation of the entire device, is welded from high-strength alloy materials, possessing excellent structural stability and load-bearing capacity. Its interior forms a space for installing various functional components, and its external surface undergoes anti-corrosion treatment to adapt to industrial environments.

[0040] The lifting assembly 2 is located inside the housing 1 and extends through the top of the housing 1. This assembly adopts a precision transmission structure, which can realize the smooth lifting of the quartz tube in the vertical direction. Through precise control, quartz tubes of different specifications can be accurately moved to a position flush with the inlet of the annealing furnace. The lifting stroke can be adjusted according to actual needs to meet the usage requirements of annealing furnaces of different heights.

[0041] The translation component 3 is located on top of the lifting component 2 and forms a stable connection with the lifting component 2. It is equipped with a high-precision guiding mechanism and positioning device, which can flexibly adjust the position of the quartz tube in the horizontal direction. The adjustment process is smooth and without shaking, ensuring that the quartz tube can be accurately aligned with the annealing furnace inlet, eliminating loading difficulties caused by position deviation.

[0042] The rolling support assembly 5 is fixedly installed at the top of the translation assembly 3 near the annealing furnace. This assembly includes multiple sets of rotatable support structures, which can form a stable rolling support for one end of the quartz tube. During the transportation of the quartz tube, it can effectively reduce frictional resistance and avoid scratching the surface of the quartz tube. At the same time, its support angle and spacing can be adaptively adjusted according to the diameter of the quartz tube to meet the support requirements of quartz tubes of different sizes.

[0043] The conveying component 4 is located at the top of the translation component 3, away from the annealing furnace, and smoothly and uniformly conveys the quartz tube placed on it into the annealing furnace.

[0044] The storage battery 6 is fixedly installed inside the housing 1. It is a high-capacity, long-life industrial-grade storage battery 6, which can provide a stable power supply for all electrical components of the entire device. It is equipped with an intelligent charging management system, which can realize fast charging and overcurrent protection, ensuring that the device can work normally without an external power source, and improving the mobility of the device.

[0045] The electrical control box is electrically connected to the battery 6 and the lifting assembly 2 respectively. It has a built-in microprocessor and control circuit, which can precisely control the lifting action of the lifting assembly 2. It also integrates the operation panel and status indicator lights. The operator can set relevant parameters through the operation panel, and the status indicator lights can display the operating status of the device in real time, which is convenient for the operator to monitor and operate. In addition, the electrical control box also has overload protection, fault alarm and other functions to improve the safety of the device.

[0046] Each of the four corners of the bottom of the housing 1 is equipped with casters 7, including two directional casters and two omnidirectional casters, with brakes on the omnidirectional casters. The omnidirectional casters allow the device to move flexibly in the horizontal direction, making it easy for operators to change the direction of movement in workshops and other locations, without being limited by space or angle. The brakes lock the omnidirectional casters when the device reaches the designated position, preventing accidental slippage during operations such as loading quartz tubes, ensuring the device maintains a stable position during operation, and further improving the convenience and safety of the device.

[0047] Example 2

[0048] like Figure 2 , Figure 7As shown, the lifting assembly 2 includes a rack and pinion motor 21 located inside the housing 1 and fixedly connected to its top wall by high-strength bolts 56. The rack and pinion motor 21 adopts a high-precision gear transmission mechanism, which has the characteristics of large output torque, smooth operation and low noise. Its rated speed can be adjusted according to the actual lifting requirements to ensure controllability during the lifting process.

[0049] The rack on the rack and pinion motor 21 passes vertically upward through a pre-set hole in the top wall of the housing 1, and both ends of the rack are fixedly connected to horizontally arranged crossbeams 22 by bushings and screws. The crossbeams 22 are made of thick-walled square steel and have extremely strong load-bearing capacity, which can effectively distribute the load borne by the rack. Each end of the crossbeams 22 is fixedly connected to lifting plates 23 perpendicular to each other by welding. The lifting plates 23 are rectangular steel plates with polished surfaces to ensure the flatness of the connecting plane.

[0050] Two parallel guide shafts 24, which pass through guide holes in the top wall of the housing 1, are fixed between the two vertically positioned lifting plates 23 by bushings and screws. The first guide shafts 24 are made of high-hardness alloy steel and are chrome-plated to reduce the coefficient of friction. They are clearance-fitted with the guide holes in the top wall of the housing 1 and can play a precise guiding role when the rack drives the crossbeam 22 and the lifting plates 23 to rise and fall, effectively preventing deviation or shaking during the lifting process and ensuring the stability and reliability of the entire lifting assembly 2.

[0051] Example 3

[0052] like Figure 2-4 As shown, the translation component 3 is located outside the box 1 and is in the middle of the entire device. It mainly includes a horizontally set support plate 31 and two parallel first slide rails 32. The support plate 31 is made of high-strength alloy plate and the surface is finely ground to ensure flatness. It can stably support the weight of the conveying component 4, the rolling support component 5 and the quartz tube installed above.

[0053] The two first slide rails 32 correspond one-to-one with the two lifting plates 23 on the top of the lifting assembly 2, and are fixedly connected to the upper surface of the lifting plate 23 by countersunk bolts 56. The first slide rails 32 are made of wear-resistant steel, and their length direction is perpendicular to the annealing furnace inlet direction, so as to provide sufficient stroke space for horizontal adjustment.

[0054] Each of the first slide rails 32 is slidably connected to two high-precision first sliders 33. The first sliders 33 are inlaid with wear-resistant balls to ensure smooth sliding without jamming. The fit gap between the first sliders 33 and the first slide rails 32 is precisely controlled to ensure the straightness of the sliding.

[0055] One of the first sliders 33 has a through threaded hole on its side wall along a direction perpendicular to the length of the first slide rail 32. A locking handle 34 with a rubber anti-slip pad is threaded into the threaded hole. When the translation position is adjusted to the correct position, the end of the locking handle 34 is pressed tightly against the side wall of the first slide rail 32 when the locking handle 34 is rotated, which can fix the first slider 33 and the first slide rail 32 relative to each other and prevent displacement during operation.

[0056] The tops of the four first sliders 33 are fixed with the support plates 31 by screws, thereby forming a stable four-point support structure. This ensures that the support plates 31 remain horizontal during translation adjustment, avoiding tilting or deformation caused by uneven force, and thus ensuring the stability and positional accuracy of the quartz tube during horizontal movement.

[0057] Example 4

[0058] like Figure 2-4 As shown, the conveying component 4 serves as the core power mechanism for the quartz tube to enter the annealing furnace. It includes a second slide rail 41 that is fixed to the upper surface of the support plate 31 by screws and extends along the length of the support plate 31. The second slide rail 41 adopts a high-precision linear guide structure and is made of high-strength alloy steel. The surface is hardened to improve wear resistance and ensure that it can maintain good guiding accuracy after long-term use.

[0059] A matching second slider 42 is slidably connected to the second slide rail 41. The second slider 42 is embedded with balls, which can achieve low friction and high stability sliding. A small drive motor 43 is fixed on the top of the second slider 42 by positioning pins and screws. The drive motor 43 adopts servo drive technology and has the characteristics of adjustable speed and fast start and stop response, which can accurately control the speed.

[0060] A worm gear is fixedly mounted on the output shaft of the drive motor 43 and meshes with the turbine. The turbine is rotatably connected to the top wall of a protective cover via a bearing seat. The drive motor 43, the worm gear, and the turbine are all located inside the protective cover. A lead screw 44 is threaded onto the turbine and passes through a pre-drilled hole at the top of the protective cover. A support plate 45 for supporting the quartz tube is fixedly mounted at the top of the lead screw 44. A high-temperature resistant silicone pad is attached to the surface of the support plate 45 that contacts the quartz tube, which can stably support the quartz tube and avoid damage to the surface of the quartz tube from hard contact.

[0061] Two second guide shafts 46, which are fixedly connected to the support plate 31, are arranged parallel to each other on one side of the second slide rail 41. The shafts of the two second guide shafts 46 are chrome-plated to reduce the coefficient of friction. A rectangular moving plate 47 is slidably connected to them. The moving plate 47 has a groove 48 in the middle of the side of the second slide rail 41 that slides with the support plate 45 in the vertical direction. The width of the groove 48 is slightly larger than the thickness of the support plate 45. It plays an auxiliary guiding and anti-tilting role during the transport of quartz tubes.

[0062] The movable plate 47 has two circular through holes 49 for the second guide shaft 46 to pass through. A linear bearing 410 with a locking device is fixedly installed in either of the through holes 49 by interference fit. This bearing can not only reduce the resistance of the movable plate 47 sliding along the second guide shaft 46, but also fix the movable plate 47 at any position on the second guide shaft 46 during the conveying process.

[0063] A photoelectric sensor 411 is fixedly installed on the side of the movable plate 47 near the rolling support assembly 5. The photoelectric sensor 411 and the drive motor 43 are both electrically connected to the electrical control box. Specifically, the photoelectric sensor 411 converts the light signal obtained by identifying the height difference between the pallet 45 and the rolling support assembly 5 into an electrical signal. The electrical signal is transmitted to the electrical control box, which then controls the drive motor 43 to drive the lead screw 44 to rotate, thereby causing the pallet 45 to move upward until the center of the quartz tube placed on the pallet 45 and the rolling support assembly 5 reaches the same horizontal line as the annealing furnace inlet. The pallet 45 will then stop moving upward.

[0064] Example 5

[0065] like Figure 3-6 As shown, the rolling support assembly 5, as a key support structure in the quartz tube conveying process, includes two sets of support rollers 54 symmetrically arranged along the width direction of the support plate 31, and the two sets of support rollers 54 are distributed in an inverted "V" shape. This layout can form a "clamping" support through the rollers on both sides. Even if there are slight differences in the diameter of the quartz tube, it can achieve stable support through the adaptive contact of the rollers. At the same time, the inverted "V" structure can guide the quartz tube to automatically align during the conveying process, further improving the alignment accuracy.

[0066] Each set of support rollers 54 includes two cylindrical rollers of the same size. The rollers are made of wear-resistant ceramic material and the surface is polished to reduce the coefficient of friction with the quartz tube and prevent scratching the outer wall of the quartz tube during transport. Both support rollers 54 are rotatably mounted on wheel seats 53 via stainless steel shafts. Miniature deep groove ball bearings are installed at the connection between the shaft and the wheel seat 53 to ensure that the support rollers 54 rotate flexibly and without jamming, thereby reducing the resistance during the transport of the quartz tube.

[0067] The wheel seat 53 is an "L"-shaped metal component. The bottom of the wheel seat 53 is hinged to the top of the bracket 52 by a pin and can rotate around the pin at a certain angle. The bracket 52 is made of solid square steel and has a high load-bearing capacity. The bottom of the bracket 52 is fixed to the base plate 51 by welding.

[0068] The base plate 51 is a rectangular square steel plate, which is fixed to the upper surface of the support plate 31 by screws. The installation position of the base plate 51 is located at the end of the second slide rail 41 near the annealing furnace and extends along the width direction of the support plate 31. This installation position can ensure that the support roller 54 and the pallet 45 of the conveying assembly 4 form a continuous support path. At the same time, the width of the base plate 51 is slightly larger than the distribution width of the two sets of support rollers 54, which provides sufficient space for subsequent adjustment of the angle of the support rollers 54.

[0069] To accommodate quartz tubes of different diameters, the top of the bracket 52 is provided with an arc-shaped groove 55, and the inner wall of the groove 55 is polished to reduce friction. The wheel seat 53 is provided with a threaded hole corresponding to the groove 55, and a bolt 56 with an anti-slip knob is threaded into the threaded hole. When the bolt 56 is rotated, the wheel seat 53 rotates around the hinge of the bracket 52.

[0070] When adjusting the angle of the support rollers 54, the operator simply needs to turn the anti-slip knob on the bolt 56: if the bolt 56 rotates clockwise, its end will push into the groove 55, forcing the wheel seat 53 to rotate outward around the hinge, thereby reducing the opening width between the two sets of support rollers 54 to accommodate quartz tubes with larger diameters; if the bolt 56 rotates counterclockwise, its end will retract from the groove 55, and the wheel seat 53 will rotate inward under the weight of the quartz tube or with manual assistance, increasing the opening width between the two sets of support rollers 54 to accommodate quartz tubes with smaller diameters. The entire adjustment process requires no disassembly of parts, is convenient to operate, and has high angle adjustment accuracy, meeting the support needs of various specifications of quartz tubes.

[0071] The working process of the rapid loading device:

[0072] In use, first place one end of the quartz tube on the support plate 45 and the other end on the support roller 54. Then, control the rack and pinion motor 21 via the control box. The rack and pinion motor 21 drives the rack to move up and down, which in turn drives the translation assembly 3, the conveying assembly 4, the rolling support assembly 5, and the quartz tube to move vertically until the quartz tube is flush with the annealing furnace inlet. Next, push the support plate 31 to make the first slider 33 slide on the first slide rail 32, adjusting the horizontal position of the quartz tube so that it is aligned with the annealing furnace inlet. After adjustment, tighten the locking handle 34 to fix it. Then, convey the quartz tube into the annealing furnace, while the moving plate 47 slides on the second guide shaft 46, which guides and provides auxiliary support for the quartz tube.

[0073] When a large-sized quartz tube needs to be transported, one end of the quartz tube is first placed on the support plate 45 and the other end is placed on the support roller 54. By rotating the bolt 56, the angle of the wheel seat 53 is adjusted so that the support roller 54 can support one end of the quartz tube well. The photoelectric sensor 411 converts the light signal obtained by identifying the height difference between the support plate 45 and the rolling support assembly 5 into an electrical signal. The electrical signal is transmitted to the electrical control box, which then controls the drive motor 43 to drive the lead screw 44 to rotate, thereby moving the support plate 45 upward until the center of the quartz tube placed on the support plate 45 and the rolling support assembly 5 reaches the same horizontal line as the annealing furnace inlet. Then the quartz tube can be pushed into the annealing furnace inlet.

[0074] In the description of this specification, the terms "connection," "installation," and "fixing," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0075] In the description of this specification, the terms "one embodiment," "some embodiments," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0076] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A rapid loading device for multi-size quartz tubes, characterized in that, include: Box (1); The lifting assembly (2) is located inside the housing (1) and extends through the top of the housing (1) to move the quartz tube vertically to a position flush with the inlet of the annealing furnace. Translation component (3) is located on top of lifting component (2) and is used to adjust the position of quartz tube in the horizontal direction so that it is aligned with the annealing furnace inlet. A rolling support assembly (5) is fixedly installed at the top of the translation assembly (3) near the annealing furnace and is used to provide rolling support for one end of the quartz tube. A conveying assembly (4) is disposed at the top end of the translation assembly (3) away from the annealing furnace, for conveying the quartz tube into the annealing furnace; A storage battery (6) is fixedly installed inside the housing (1); The electrical control box is electrically connected to the battery (6) and the lifting assembly (2), respectively.

2. The rapid loading device for multi-size quartz tubes according to claim 1, characterized in that, The lifting assembly (2) includes a rack and pinion motor (21) located inside the housing (1) and fixedly connected to its top wall; the rack on the rack and pinion motor (21) passes through the top wall of the housing (1) and both ends of the rack are fixedly connected to crossbeams (22), both ends of each crossbeam (22) are fixedly connected to lifting plates (23) perpendicular to each other, and two first guide shafts (24) passing through the top wall of the housing (1) are fixedly arranged between the two lifting plates (23) in the vertical direction.

3. The rapid loading device for multi-size quartz tubes according to claim 2, characterized in that, The translation component (3) is located outside the housing (1) and includes a support plate (31) and two first slide rails (32). The two first slide rails (32) correspond one-to-one with the two lifting plates (23) on the top of the lifting component (2) and are fixedly connected. Each first slide rail (32) has two first sliders (33) slidably connected to it. A threaded hole is opened on the side wall of any one of the first sliders (33), and a locking handle (34) is threaded into the threaded hole. The support plate (31) is fixedly installed on the top of the four first sliders (33).

4. The rapid loading device for multi-size quartz tubes according to claim 3, characterized in that, The conveying assembly (4) includes a second slide rail (41) fixedly mounted on the support plate (31) and extending along its length; a second slider (42) is slidably connected to the second slide rail (41), a drive motor (43) is fixedly mounted on the second slider (42), a worm gear meshing with a turbine is fixedly mounted on the output shaft of the drive motor (43), a lead screw (44) is threaded onto the turbine, and a support plate (45) for carrying a quartz tube is fixedly mounted at the top end of the lead screw (44); two second guide shafts (46) are parallel to one side of the second slide rail (41), a moving plate (47) is slidably connected to the two second guide shafts (46), and a groove (48) is opened vertically on the side of the moving plate (47) near the second slide rail (41) to slide and engage with the support plate (45).

5. The rapid loading device for multi-size quartz tubes according to claim 4, characterized in that, The movable plate (47) has two through holes (49) through which the second guide shaft (46) passes, and a linear bearing (410) with a locking device is fixedly installed in either of the through holes (49).

6. The rapid loading device for multi-size quartz tubes according to claim 4, characterized in that, A photoelectric sensor (411) is fixedly installed on the side of the moving plate (47) near the rolling support assembly (5). The photoelectric sensor (411) and the drive motor (43) are both electrically connected to the control box.

7. The rapid loading device for multi-size quartz tubes according to claim 4, characterized in that, The rolling support assembly (5) includes two sets of symmetrically arranged support rollers (54), and the two sets of support rollers (54) are distributed in an inverted "V" shape; each set of support rollers (54) consists of two rollers, and both support rollers (54) are rotatably mounted on a wheel seat (53); the wheel seat (53) is hinged to the top of the bracket (52), and the bottom end of the bracket (52) is fixedly mounted on the base plate (51); the base plate (51) is fixedly mounted on the support plate (31), and the base plate (51) is located at one end of the second slide rail (41) and extends along the width direction of the support plate (31).

8. The rapid loading device for multi-size quartz tubes according to claim 7, characterized in that, The top of the bracket (52) is provided with a groove (55); the wheel seat (53) is provided with a threaded hole corresponding to the groove (55), and a bolt (56) is threadedly connected in the threaded hole. When the bolt (56) is rotated, the wheel seat (53) rotates around the hinge of the bracket (52).

9. The rapid loading device for multi-size quartz tubes according to claim 1, characterized in that, The box (1) is equipped with casters (7) at the four corners of its bottom.