A hot air utilization device

Abstract

This utility model relates to the field of energy-saving technology in production and processing, and discloses a hot air utilization device. The hot air utilization device includes: a machine base with a hot air source outlet; a hot air duct with a hot air inlet and a hot air outlet, the hot air inlet being connected to the hot air source outlet; a cooling device including an inner duct and an outer duct, the inlet of the inner duct being connected to the hot air outlet, and a cooling medium being disposed between the outer duct and the inner duct; a cold air duct with a cold air outlet and a cold air inlet, the cold air inlet being connected to the outlet of the inner duct; and a product storage area located inside the machine base. The machine base also has a cold air source inlet corresponding to the product storage area, the cold air source inlet being connected to the cold air outlet. In this application, the hot air in the machine base is transformed into cold air after passing through the hot air duct, cooling device, and cold air duct and re-enters the machine base. This reduces the amount of hot air entering the plant's thermal exhaust system, thereby reducing the energy consumption of the plant's thermal exhaust system and its impact on ambient temperature, and reducing the cost of generating fresh clean cold air.

Description

Technical Field

[0001] This application relates to the field of energy-saving technology in production and processing, and in particular to a hot air utilization device. Background Technology

[0002] Diffusion, annealing, and coating processes are common steps in the manufacturing of products such as solar cells. After these processes, the products are removed from the furnace in a hot tub. During this process, heat diffuses from the furnace to the machine, causing the air temperature inside the machine to rise. Normally, this high-temperature gas is discharged outdoors as hot air through the plant's exhaust ventilation system. However, this method of hot air discharge leads to several problems, including: firstly, it results in high energy consumption for the plant's exhaust ventilation system; secondly, the direct discharge of hot air as clean air wastes resources; and thirdly, the direct discharge of hot air outdoors raises outdoor temperatures and has a certain impact on the environment. Therefore, it is necessary to address these issues. Utility Model Content

[0003] This application discloses a hot air utilization device that can solve the problems of high energy consumption of fans in current plant heat exhaust systems, resource waste caused by direct exhaust of hot air, and environmental impact.

[0004] To achieve the above objectives, this application discloses a hot air utilization device, comprising:

[0005] The machine has a hot air source outlet for discharging hot air.

[0006] A hot air duct, wherein the hot air duct has a hot air inlet and a hot air outlet, and the hot air inlet is connected to the hot air source outlet;

[0007] A cooling device includes an inner pipe and an outer pipe located outside the inner pipe. The inlet of the inner pipe is connected to the hot air outlet, and a cooling medium is configured between the outer pipe and the inner pipe to cool the hot air into cold air.

[0008] A cold air duct, wherein the cold air duct has a cold air outlet and a cold air inlet, and the cold air inlet is connected to the outlet of the inner duct;

[0009] The product storage area is located inside the machine. The machine also has a cold air source inlet corresponding to the product storage area, and the cold air source inlet is connected to the cold air outlet.

[0010] Furthermore, the hot air outlet includes a first branch outlet and a second branch outlet. The first branch outlet is connected to the external plant heat exhaust system of the hot air utilization device, and the second branch outlet is connected to the internal pipeline inlet.

[0011] Furthermore, the hot air duct also includes:

[0012] A first temperature sensor is located at the hot air inlet and has a first preset temperature, which is less than or equal to the maximum allowable temperature of the cooling device.

[0013] A first blower is disposed between the hot air inlet and the hot air outlet, and the first blower is configured to deliver the hot air from the hot air inlet to the hot air outlet;

[0014] A first hot air control valve is located at the outlet of the first branch. The first control valve is configured to be open when the temperature of the hot air is greater than the first preset temperature, and the first hot air control valve is also configured to be closed when the temperature of the hot air is less than or equal to the first preset temperature.

[0015] Furthermore, the cold air inlet includes a first branch inlet and a second branch inlet, the first branch inlet being connected to a clean cold air source in the external environment, and the second branch inlet being connected to the outlet of the internal duct.

[0016] Furthermore, the cold air duct also includes:

[0017] A second temperature sensor is located at the cold air outlet and has a second preset temperature.

[0018] A second blower is disposed between the cold air inlet and the cold air outlet, and the second blower is configured to deliver the cold air from the cold air inlet to the cold air outlet;

[0019] A first cold air control valve is located at the inlet of the first branch. The first cold air control valve is configured to be in a closed state when the temperature of the cold air is less than or equal to the second preset temperature. The first cold air control valve is also configured to be in an open state when the temperature of the hot air is greater than the second preset temperature.

[0020] Furthermore, the hot air outlet includes a first branch outlet and a second branch outlet. The first branch outlet is connected to the external plant heat exhaust system of the hot air utilization device, and the second branch outlet is connected to the inlet of the internal pipeline. The hot air pipeline also includes a first hot air control valve located at the first branch outlet and a second hot air control valve located at the second branch outlet.

[0021] The cold air inlet includes a first branch inlet and a second branch inlet. The first branch inlet is connected to a clean cold air source in the external environment, and the second branch inlet is connected to the outlet of the internal pipeline. The cold air pipeline includes a first cold air control valve located at the first branch inlet and a second cold air control valve located at the second branch inlet.

[0022] When the cooling device is in a stopped working state, the first hot air control valve and the first cold air control valve are configured to be in the open state, and the second hot air control valve and the second cold air control valve are configured to be in the closed state.

[0023] Furthermore, the product storage area is configured to store products to be cooled, and the cold air is used to cool the products;

[0024] The product storage area includes several vertically stacked layers. The product storage area includes a first type of storage area near the cold air source inlet and a second type of storage area away from the cold air source inlet. The first type of storage area is configured to store the product with a first temperature, and the second type of storage area is configured to store the product with a second temperature. The first temperature is higher than the second temperature.

[0025] Furthermore, the machine includes a furnace tube equipment area and a clean bench. The furnace tube equipment area includes a plurality of furnace tube devices. The furnace tube equipment area and the clean bench are connected or separated by the furnace door of the furnace tube device.

[0026] The furnace tube is configured to diffuse the hot air to the purification table, the purification table is provided with the hot air source outlet, the purification table is provided with the product temporary storage area, and the hot air pipeline, the cooling equipment and the cold air pipeline are located outside the purification table.

[0027] Furthermore, the cleanroom also includes a robotic arm configured to move products with heat to the product storage area and to move products from the first type of storage area to the second type of storage area.

[0028] Furthermore, the cooling medium of the cooling device includes either a water-based medium or an oil-based medium.

[0029] Furthermore, the products temporarily stored in the product storage area are silicon wafers, solar cell semi-finished products, or solar cells.

[0030] Preferably, the hot air is clean hot air.

[0031] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0032] This application provides a hot air utilization device that can recycle the hot air discharged from the machine, which can reduce the energy consumption of the factory's hot exhaust system, reduce the waste of hot air resources, and prevent the hot air from being directly discharged outdoors and causing environmental impact.

[0033] The hot air utilization device of this application can transport hot air from the machine to a cooling device via hot air ducts, where the hot air is cooled into cold air. The cold air from the cooling device is then circulated back into the machine via cold air ducts to cool products in the temporary storage area inside the machine. This reduces the amount of hot air entering the factory's thermal exhaust system and discharging it outdoors, thus effectively reducing the energy consumption of the system and minimizing its impact on ambient temperature. Furthermore, because the hot air is processed into cold air by the cooling device and then re-enters the machine, the demand for fresh clean cold air within the machine is reduced, achieving both hot air recycling and effectively lowering the cost of generating new clean cold air. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a front view of a schematic diagram of the hot air utilization device disclosed in the embodiments of this application;

[0036] Figure 2 yes Figure 1 A magnified view of a portion of region I;

[0037] Figure 3 This is a side view of a schematic diagram of the structure of the hot air utilization device disclosed in the embodiments of this application;

[0038] Figure 4 This is a top view of the structural schematic diagram of the hot air utilization device disclosed in the embodiments of this application.

[0039] Explanation of reference numerals in the attached drawings: 100, machine platform; 110, furnace tube equipment area; 111, furnace tube equipment; 120, clean bench; 121, hot air source outlet; 122, cold air source inlet; 123, robotic arm; 200, hot air duct; 210, hot air inlet; 220, hot air outlet; 221, first branch outlet; 222, second branch outlet; 230, first temperature sensor; 240, first blower; 251, first hot air controller. 252. Second hot air control valve; 300. Cooling equipment; 400. Cold air duct; 410. Cold air outlet; 420. Cold air inlet; 421. First branch inlet; 422. Second branch inlet; 430. Second temperature sensor; 440. Second blower; 451. First cold air control valve; 452. Second cold air control valve; 500. Product temporary storage area; 510. First type temporary storage area; 520. Second type temporary storage area. Detailed Implementation

[0040] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0041] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this invention and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0042] Furthermore, in addition to indicating direction or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances.

[0043] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0044] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0045] The technical solution provided by this utility model will be further described below with reference to the embodiments and accompanying drawings.

[0046] like Figures 1 to 4 As shown in the figure, this application discloses a hot air utilization device, including a machine 100, a hot air duct 200, a cooling device 300, a cold air duct 400, and a product storage area 500.

[0047] The machine tool 100 has a hot air outlet 121 for discharging hot air. The machine tool is mainly used for product processing and cooling. During product processing and cooling, heat dissipation occurs, causing the air temperature inside the machine tool to rise. This hot air can be used as a source of hot air.

[0048] Taking silicon wafers as an example, where the silicon wafers are placed in the diffusion furnace of machine 100 for diffusion processing, after the silicon wafers are processed in machine 100, the heat in the diffusion furnace often diffuses within machine 100, causing the air temperature inside machine 100 to rise. During the cooling process of the silicon wafers, the silicon wafers themselves also dissipate heat, which similarly causes the air temperature inside machine 100 to rise. This hot air inside machine 100 is discharged from machine 100 as a hot air source through hot air source exhaust port 121.

[0049] The hot air duct 200 has a hot air inlet 210 and a hot air outlet 220. The hot air inlet 210 is connected to the hot air source outlet 121 so that hot air from the machine 100 enters the hot air duct 200 through the hot air inlet 210 and is discharged through the hot air outlet 220.

[0050] The cooling device 300 includes an inner pipe and an outer pipe located outside the inner pipe. The inlet of the inner pipe is connected to the hot air outlet 220, and a cooling medium is provided between the outer pipe and the inner pipe. This arrangement allows hot air to enter through the inner pipe and exchange heat with the cooling medium to cool down into cold air. In one optional embodiment, the inner and outer pipes can be in the form of a sleeve, with the inner pipe coaxially fitted around the outer circumference of the inner pipe, and a cooling medium flowing between them to cool the hot air passing through the inner pipe. In another optional embodiment, the outer pipe can be arranged in a wound manner around the outer circumference of the inner pipe, which can also achieve the effect of cooling the hot air. In addition, the cooling medium is selected according to the requirements of different processes. Optionally, the cooling medium can be a water-based medium or an oil-based medium. Preferably, water can be used as the cooling medium.

[0051] The cold air duct 400 has a cold air outlet 410 and a cold air inlet 420. The cold air inlet 420 is connected to the outlet of the inner duct so that the cold air flowing out from the cooling device 300 enters the cold air duct 400 through the cold air inlet 420 and is discharged from the cold air outlet 410.

[0052] The product storage area 500 is located inside the machine 100. The machine 100 also has a cold air inlet 122, which is connected to a cold air outlet 410 so that cold air enters the machine 100 from the cold air outlet 410 through the cold air inlet 122. At the same time, the position of the cold air inlet 122 corresponds to that of the product storage area 500 so that the cold air enters the machine 100 and is directly delivered to the product storage area 500.

[0053] In this application, hot air generated during product transfer and cooling within the machine is discharged as hot air through the hot air source outlet 121. The hot air then enters the cooling equipment 300 via the hot air duct 200. The cooling equipment 300 cools the hot air into cold air, which is then delivered through the cold air duct 400 and via the cold air source inlet 122 to the product storage area 500 within the machine 100 corresponding to the location of the cold air source inlet 122 for product cooling. During this process, the amount of hot air entering the factory's thermal exhaust system and being discharged outdoors is reduced, thus effectively reducing the energy consumption of the factory's thermal exhaust system and minimizing its impact on ambient temperature. Furthermore, through the aforementioned hot air utilization process, there is no need to obtain a large amount of new clean cold air from outside the hot air utilization device, achieving both hot air recycling and effectively reducing the cost of producing new clean cold air.

[0054] In one optional embodiment, the machine 100 includes a furnace tube equipment area 110 and a clean bench 120. The furnace tube equipment area 110 includes a plurality of furnace tube devices 111 for processing products. The furnace tube equipment area 110 and the clean bench 120 are connected or separated by the furnace door of the furnace tube device 111 to allow air to circulate between the two areas.

[0055] The furnace tube equipment area 110 is configured to diffuse hot air to the purification table 120. The purification table 120 is provided with a hot air source outlet 121 so that the hot air in the purification table 120 is discharged from the purification table 120 as a hot air source. The hot air duct 200, the cooling device 300 and the cold air duct 400 are located outside the purification table 120 so that the air source discharged from the hot air source outlet 121 is cooled into cold air and then returns to the purification table 120. The purification table 120 is provided with a product temporary storage area 500 to cool the products.

[0056] The furnace tube equipment 111 is used for product processing and can be a diffusion furnace, annealing furnace or coating furnace. This application does not limit the type of furnace tube equipment 111, and users can choose according to different processing technologies.

[0057] Furthermore, the clean bench 120 is also equipped with a robotic arm 123 so that the product can enter the product storage area 500 at the same time as it is removed from the furnace tube equipment 111. In addition, the robotic arm 123 can also move the product in the product storage area 500.

[0058] In this application, after the product in the furnace tube equipment 111 is processed, the furnace door is opened, and the product is lifted out of the furnace tube equipment 111. A robotic arm 123 transfers the product from the furnace tube equipment area 110 to the product storage area 500 in the clean bench 120 for cooling. During the product cooling process, heat dissipates, causing the air temperature in the clean bench 120 to rise; this hot air is a type of hot air source. Simultaneously, during the lifting process, heat from the furnace tube equipment area 110 dissipates to the clean bench 120, causing the air temperature in the clean bench 120 area to rise; this hot air is also a type of hot air source. The hot air is discharged from the hot air source outlet 121, and then enters the cooling device 300 through the hot air duct 200. The cooling device 300 cools the hot air into cold air, which is then sent through the cold air duct 400 and through the cold air source inlet 122 to the product storage area 500 within the clean bench 120, corresponding to the location of the cold air source inlet 122, to cool the product. During this process, the amount of hot air entering the plant's thermal exhaust system and being discharged outdoors is reduced, thus effectively reducing the energy consumption of the system and minimizing its impact on ambient temperature. Furthermore, after the aforementioned hot air utilization process, the cold air converted from the hot air enters the clean bench 120, eliminating the need to obtain large quantities of new clean cold air from outside the hot air utilization device. This achieves both the recycling of hot air and effectively reduces the cost of producing new clean cold air.

[0059] In one optional embodiment, the hot air outlet 220 in the hot air duct 200 includes a first branch outlet 221 and a second branch outlet 222. The first branch outlet 221 is connected to the inlet of the inner duct, and the second branch outlet 222 is connected to the external plant heat exhaust system of the hot air utilization device, so that hot air is discharged from the hot air duct 200 through the second branch outlet 222.

[0060] Furthermore, the hot air duct 200 also includes a first temperature sensor 230, a first blower device 240, and a first hot air control valve 251. The first temperature sensor 230 is located at the hot air inlet 210 and has a first preset temperature, wherein the first preset temperature is less than or equal to the maximum allowable temperature of the cooling device 300; the first blower device 240 is located between the hot air inlet 210 and the hot air outlet 220, and this device can deliver hot air from the hot air inlet 210 to the hot air outlet 220; the first hot air control valve 251 is located at the first branch outlet 221, and is in an open state when the temperature of the hot air is greater than the first preset temperature, and in a closed state when the temperature of the hot air is less than or equal to the first preset temperature.

[0061] The plant heat exhaust system is mainly used to collect, treat and discharge waste heat, high-temperature gases or steam generated during the production process, so as to ensure the safety of the production environment, the stable operation of equipment and the compliance of environmental protection requirements.

[0062] The first temperature sensor 230 is used to sense temperature. Depending on the measurement method, it can be a contact sensor or a non-contact sensor. Depending on the structural form, it can be any one of a probe sensor, a chip-integrated sensor, a thin-film sensor, or a wireless module sensor. This application does not limit the type of the first temperature sensor 230; users can choose according to different situations. Similarly, the second temperature sensor 430 described below is not limited in its specific type.

[0063] The maximum allowable temperature of the cooling equipment 300 refers to the highest temperature limit that its key components (such as heating elements, shell, cooling medium, etc.) can withstand under the premise that the cooling equipment 300 is operating normally, safely and reliably, and without affecting its performance and lifespan.

[0064] Furthermore, the first preset temperature can be adjusted according to the different maximum allowable temperatures determined by different devices, so that the cooling device can safely and reliably cool the hot air.

[0065] The first blower 240 is used to promote gas flow, and this blower can be an axial flow blower. The second blower 440 described below is similar and will not be repeated. The first blower 240 delivers hot air from the hot air inlet 210 to the hot air outlet 220.

[0066] The first hot air control valve 251 can be a gate valve, ball valve, or butterfly valve, etc., and this application does not limit the type of the first hot air control valve 251. Similarly, the second hot air control valve 252, the first cold air control valve 451, and the second cold air control valve 452 described below are not limited in their specific types.

[0067] In this embodiment, when the hot air temperature detected by the first temperature sensor 230 exceeds the first preset temperature, the first hot air control valve 251 is opened. At this time, under the action of the first blower 240, part of the hot air is discharged from the hot air utilization device through the first branch outlet 221 and enters the plant's thermal exhaust system, dispersing the amount of hot air entering the cooling equipment 300 through the second branch outlet 222. This reduces the processing pressure of the cooling equipment 300, ensuring the cooling effect of the cooling equipment 300, thereby reducing the need to replenish the amount of new cold air during subsequent product cooling and reducing costs. When the hot air temperature detected by the first temperature sensor 230 does not exceed the first preset temperature, the first hot air control valve 251 is closed. Under the action of the first blower 240, the hot air only enters the cooling equipment 300 through the second branch outlet 222. In this case, the amount of hot air entering the plant's thermal exhaust system and being discharged outdoors is reduced, thereby reducing the energy consumption of the thermal exhaust fan and reducing the impact on the ambient temperature.

[0068] In order to make the temperature of the cold air entering the product cooling zone adjustable and to ensure the air temperature in the product storage area 500, in an optional embodiment, the cold air inlet 420 of the cold air duct 400 includes a first branch inlet 421 and a second branch inlet 422. The first branch inlet 421 is connected to a clean cold air source in the external environment, and the second branch inlet 422 is connected to the outlet of the inner duct, so that the clean cold air source in the external environment enters the cold air duct 400 through the first branch inlet 421.

[0069] In addition, the cold air duct 400 also includes a second temperature sensor 430, a second blower 440, and a first cold air control valve 451. The second temperature sensor 430 is located at the cold air outlet 410 and has a second preset temperature; the second blower 440 is located between the cold air inlet 420 and the cold air outlet 410, and the second blower 440 delivers cold air from the cold air inlet 420 to the cold air outlet 410; the first cold air control valve 451 is located at the first branch inlet 421, and the first cold air control valve 451 is in a closed state when the temperature of the cold air is less than or equal to the second preset temperature, and in an open state when the temperature of the hot air is greater than the second preset temperature.

[0070] The external environment, specifically the clean cold air source, refers primarily to the workshop where the hot air utilization device is located. The air in this workshop has a cleanliness level of 10,000 and its temperature is maintained below 30°C. Therefore, the air in the workshop can be used as a clean cold air source for cooling the products awaiting cooling in the product storage area 500. In this embodiment, because the hot air generated by the machine 100 is effectively utilized as the cold air for cooling the products, the demand for a clean cold air source from the external environment is reduced. In other words, originally, a large amount of clean cold air needed to be manufactured to cool the products in the product storage area 500. However, this embodiment utilizes the hot air generated inside the machine 100 as the cold air, thus reducing the demand for a clean cold air source from the external environment and lowering the cost of manufacturing a dedicated clean cold air source.

[0071] The second preset temperature depends on the temperature required for cooling the products in the product storage area 500 and can be set according to different needs.

[0072] In this embodiment, when the cold air temperature detected by the second temperature sensor 430 is lower than the second preset temperature, the first cold air control valve 451 is closed. Under the action of the second blower 440, the cold air discharged from the cooling device 300 enters the cold air duct 400 through the second branch inlet 422, and then enters the product storage area 500 through the cold air source inlet 122, thereby cooling the product and avoiding the need to generate cold air again, which would increase costs. When the cold air temperature detected by the second temperature sensor 430 is higher than the second preset temperature, the first cold air control valve 451 is open. Under the action of the second blower 440, hot air from a clean cold air source in the external environment enters the cold air duct 400 through the first branch inlet 421, and then enters the product storage area 500 together with the cold air from the second branch inlet 422 through the cold air outlet 410 and the cold air source inlet 122, thereby reducing the temperature of the cold air entering the product storage area 500 and better ensuring the cooling effect of the product.

[0073] In one optional embodiment, the hot air duct 200 further includes a first hot air control valve 251 located at the first branch outlet 221 and a second hot air control valve 252 located at the second branch outlet 222. The second hot air control valve 252 allows hot air to selectively enter or not enter the second branch outlet 222.

[0074] Additionally, a first cold air control valve 451 is provided at the first branch inlet 421 of the cold air duct 400, and a second cold air control valve 452 is provided at the second branch inlet 422. The second cold air control valve 452 allows cold air to selectively bypass the second branch inlet 422.

[0075] When the cooling device 300 is in a stopped working state, the first hot air control valve 251 and the first cold air control valve 451 are in the open state, and the second hot air control valve 252 and the second cold air control valve 452 are in the closed state.

[0076] In this embodiment, the cooling device 300 is maintainable and repairable. When the cooling device 300 requires maintenance, the second hot air control valve 252 and the second cold air control valve 452 can be closed, while the first hot air control valve 251 and the first cold air control valve 451 can be opened. At this time, hot air will not enter the cooling device 300 from the second branch outlet 222, nor will it enter the cold air duct 400 from the second branch inlet 422. Thus, the cooling device 300 can be disassembled for maintenance. In this case, the hot air utilization device is unaffected and can still operate normally. At this time, the hot air is discharged from the first branch outlet 221 to the plant's thermal exhaust system, and the clean cold air from the external environment enters the cooling zone through the first branch inlet 421 to cool the products.

[0077] To improve the cooling effect of the products, in an optional embodiment, the product storage area 500 is configured to store products to be cooled, and these products are cooled by cold air obtained from the cooling device 300.

[0078] The product storage area 500 comprises several vertically stacked layers, including a first-type storage area 510 near the cold air source inlet 122 and a second-type storage area 520 away from the cold air source inlet 122. The first-type storage area 510 is used to store products with a first temperature, and the second-type storage area 520 is used to store products with a second temperature, wherein the first temperature is higher than the second temperature. The first-type storage area 510 can be multi-layered, and the second-type storage area 520 can also be multi-layered. The first-type storage area 510 is always closer to the cold air source inlet 122 than the second-type storage area 520.

[0079] In this embodiment, the products with higher temperatures are stored in the first-type temporary storage area 510, which is closer to the cold air source inlet 122, for cooling. This allows for more efficient use of the cold air temperature entering the product storage area, resulting in better cooling. Simultaneously, once the product temperature in the first-type temporary storage area 510 drops to a certain level, the robotic arm 123 in the cleanroom 120 can transfer the products from the first-type temporary storage area 510 to the second-type temporary storage area 520 for further cooling. This arrangement allows for more efficient use of the cold air, resulting in higher cooling effect and efficiency.

[0080] The following description uses silicon wafers as the product and a diffusion furnace as the furnace equipment to illustrate the working process of the hot air utilization device in this application embodiment:

[0081] After the silicon wafer completes the diffusion process in the diffusion furnace area of ​​the machine 100, the furnace door is opened, and the silicon wafer is lifted out of the diffusion furnace. A robotic arm 123 then transfers the silicon wafer to the first temporary storage area 510 in the cleanroom 120 of the machine 100 for cooling. During the cooling process, heat dissipates, causing the air temperature in the cleanroom 120 area to rise; this hot air serves as a heat source. Simultaneously, during the wafer removal process, heat from the diffusion furnace diffuses to the cleanroom 120 area, causing the air temperature in the cleanroom 120 area to rise; this hot air serves as another heat source.

[0082] The hot air source exits from the hot air source outlet 121 on the clean bench 120 and then enters the hot air duct 200 through the hot air inlet 210. When the first temperature sensor 230 detects that the hot air temperature is higher than the first preset temperature, the first hot air control valve 251 opens. Under the action of the first blower 240, part of the hot air exits from the first branch outlet 221 through the hot air duct 200 and enters the plant's hot exhaust system. The remaining hot air enters the inner duct of the cooling equipment 300 through the second branch outlet 222. Under the action of the cooling medium, the hot air is converted into cold air.

[0083] Cold air enters the cold air duct 400 through the second branch inlet 422. When the second temperature sensor 430 detects that the cold air temperature is higher than the second preset temperature, the first cold air control valve 451 is opened. Clean cold air from the external environment enters the cold air duct 400 through the first branch inlet 421. After passing through the cold air outlet 410 and the cold air source inlet 122, the cold air enters the first temporary storage area 510 in the clean bench 120 to cool the silicon wafer. When the silicon wafer in the first temporary storage area 510 cools down to a certain degree (e.g., to the second temperature), the robotic arm 123 transfers the silicon wafer to the second temporary storage area 520 for further cooling.

[0084] During the operation of the above-mentioned hot air utilization device, the amount of hot air entering the plant's thermal exhaust system and being discharged outdoors is reduced, thus effectively reducing the energy consumption of the plant's thermal exhaust system and also reducing the impact on ambient temperature. Furthermore, after the hot air utilization process, the cold air converted from the hot air enters the clean bench 120, reducing the demand for new clean cold air within the clean bench 120. This achieves both the recycling of hot air and effectively reduces the cost of producing new clean cold air.

[0085] The foregoing embodiments of this application focus on describing the differences between various embodiments. As long as the different optimization features between embodiments are not contradictory, they can be combined to form better embodiments. For the sake of brevity, these differences will not be elaborated upon here. The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art, under the guidance of this application, can make many modifications without departing from the spirit and scope of the claims, all of which fall within the protection scope of this application.

Claims

1. A hot air utilization device, characterized in that, The hot air utilization device includes: The machine has a hot air source outlet for discharging hot air. A hot air duct, wherein the hot air duct has a hot air inlet and a hot air outlet, and the hot air inlet is connected to the hot air source outlet; A cooling device includes an inner pipe and an outer pipe located outside the inner pipe. The inlet of the inner pipe is connected to the hot air outlet, and a cooling medium is configured between the outer pipe and the inner pipe to cool the hot air into cold air. A cold air duct, wherein the cold air duct has a cold air outlet and a cold air inlet, and the cold air inlet is connected to the outlet of the inner duct; The product storage area is located inside the machine. The machine also has a cold air source inlet corresponding to the product storage area, and the cold air source inlet is connected to the cold air outlet.

2. The hot air utilization device according to claim 1, characterized in that, The hot air outlet includes a first branch outlet and a second branch outlet. The first branch outlet is connected to the external plant heat exhaust system of the hot air utilization device, and the second branch outlet is connected to the inlet of the internal pipeline.

3. The hot air utilization device according to claim 2, characterized in that, The hot air duct also includes: A first temperature sensor is located at the hot air inlet and has a first preset temperature, which is less than or equal to the maximum allowable temperature of the cooling device. A first blower is disposed between the hot air inlet and the hot air outlet, and the first blower is configured to deliver the hot air from the hot air inlet to the hot air outlet; A first hot air control valve is located at the outlet of the first branch. The first hot air control valve is configured to be in an open state when the temperature of the hot air is greater than the first preset temperature, and the first hot air control valve is also configured to be in a closed state when the temperature of the hot air is less than or equal to the first preset temperature.

4. The hot air utilization device according to claim 1, characterized in that, The cold air inlet includes a first branch inlet and a second branch inlet. The first branch inlet is connected to a clean cold air source in the external environment, and the second branch inlet is connected to the outlet of the internal pipeline.

5. The hot air utilization device according to claim 4, characterized in that, The cold air duct also includes: A second temperature sensor is located at the cold air outlet and has a second preset temperature. A second blower is disposed between the cold air inlet and the cold air outlet, and the second blower is configured to deliver the cold air from the cold air inlet to the cold air outlet; A first cold air control valve is located at the inlet of the first branch. The first cold air control valve is configured to be in a closed state when the temperature of the cold air is less than or equal to the second preset temperature. The first cold air control valve is also configured to be in an open state when the temperature of the hot air is greater than the second preset temperature.

6. The hot air utilization device according to claim 1, characterized in that, The hot air outlet includes a first branch outlet and a second branch outlet. The first branch outlet is connected to the external plant heat exhaust system of the hot air utilization device, and the second branch outlet is connected to the inlet of the internal pipeline. The hot air pipeline also includes a first hot air control valve located at the first branch outlet and a second cold air control valve located at the second branch outlet. The cold air inlet includes a first branch inlet and a second branch inlet. The first branch inlet is connected to a clean cold air source in the external environment, and the second branch inlet is connected to the outlet of the internal pipeline. The cold air pipeline includes a first cold air control valve located at the first branch inlet and a second cold air control valve located at the second branch inlet. When the cooling device is in a stopped working state, the first hot air control valve and the first cold air control valve are configured to be in the open state, and the second cold air control valve and the second cold air control valve are configured to be in the closed state.

7. The hot air utilization device according to claim 1, characterized in that, The product storage area is configured to store products to be cooled, and the cold air is used to cool the products. The product storage area includes several vertically stacked layers. The product storage area includes a first type of storage area near the cold air source inlet and a second type of storage area away from the cold air source inlet. The first type of storage area is configured to store the product with a first temperature, and the second type of storage area is configured to store the product with a second temperature. The first temperature is higher than the second temperature.

8. The hot air utilization device according to claim 7, characterized in that, The machine includes a furnace tube equipment area and a clean bench. The furnace tube equipment area includes several furnace tube devices. The furnace tube equipment area and the clean bench are connected or separated by the furnace door of the furnace tube device. The furnace tube equipment area is configured to diffuse the hot air to the purification table. The purification table is provided with the hot air source outlet. The purification table is provided with the product temporary storage area. The hot air pipeline, the cooling equipment and the cold air pipeline are located outside the purification table.

9. The hot air utilization device according to claim 8, characterized in that, The cleanroom also includes a robotic arm configured to move products with heat to the product storage area, and the robotic arm is further configured to move products from the first type of storage area to the second type of storage area.

10. The hot air utilization device according to any one of claims 1 to 9, characterized in that, The cooling medium of the cooling device includes one of a water-based medium and an oil-based medium; and / or, The product storage area temporarily stores silicon wafers, semi-finished solar cells, or solar cells; and / or, The hot air is clean hot air.

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