A reactor temperature control system and heating equipment

Abstract

This invention discloses a temperature control system and heating equipment for a reactor, comprising: multiple heating units respectively installed on the outer and inner furnace bodies; a first temperature detection unit located outside the process reaction chamber on the outer furnace body and a second temperature detection unit located inside the process reaction chamber; a third temperature detection unit located outside the process reaction chamber on the inner furnace body; a power regulator connected to each heating unit for adjusting heating power; and a temperature control unit connected to each temperature detection unit and the power regulator. This invention, through the combination of heating units arranged on both the inner and outer furnace bodies and multi-point temperature detection, can control the temperature field distribution within the process reaction chamber. This ensures the reaction process remains stable within the target temperature range, meeting the requirements for heating rate and temperature stability in large-diameter furnace processes; and reduces interference from the external environment on temperature detection, avoiding impact on the temperature stability of the reaction chamber.

Description

Technical Field

[0001] This utility model relates to the field of solar energy technology, specifically to a reactor temperature control system and heating equipment. Background Technology

[0002] Currently, the photovoltaic industry commonly uses tubular furnaces for heating and temperature control. However, existing tubular furnaces have small diameters and low output, making them unsuitable for promoting grid parity for photovoltaic power generation. In related technologies, tubular furnaces with larger diameters only heat the outer furnace body, resulting in a slow temperature response at the center of the cavity. This can easily lead to uneven temperature distribution across the same horizontal cross-section within the large-diameter cavity. Utility Model Content

[0003] In order to solve the technical problems in the prior art, this utility model proposes a reaction furnace temperature control system and heating equipment.

[0004] The technical solution adopted in this utility model is:

[0005] This utility model proposes a temperature control system for a reactor, comprising: multiple heating units respectively installed on the outer furnace body and the inner furnace body; a first temperature detection unit installed on the outer furnace body located outside the process reaction chamber and a second temperature detection unit installed on the inner furnace body located outside the process reaction chamber; a power regulator connected to each heating unit for adjusting the heating power; and a temperature control unit connected to each temperature detection unit and the power regulator.

[0006] Furthermore, the first temperature detection unit, the second temperature detection unit, and the third temperature detection unit each include multiple thermocouples, and the detection ends of the multiple thermocouples in each temperature detection unit are located at different heights of the furnace body.

[0007] Furthermore, the multiple heating units specifically include: an outer furnace body heating unit installed on the outer furnace body, and an inner furnace body heating unit installed on the inner furnace body.

[0008] Furthermore, the outer furnace body is divided into a first furnace body and a second furnace body in the horizontal direction; the first furnace body and the second furnace body are each divided into at least one temperature zone in the height direction, each temperature zone corresponds to an outer furnace body sub-heating unit of the outer furnace body heating unit, and each outer furnace body sub-heating unit is connected to the power regulator through a wire.

[0009] Furthermore, cooling devices are provided at the top and bottom of the outer furnace body.

[0010] In the first embodiment, the first furnace body and the second furnace body are respectively divided into at least three temperature zones along the height direction. The outer furnace body sub-heating unit corresponding to the uppermost temperature zone of the first furnace body is connected to the outer furnace body sub-heating unit corresponding to the uppermost temperature zone of the second furnace body to form a loop, and the outer furnace body sub-heating unit corresponding to the lowermost temperature zone of the first furnace body is connected to the outer furnace body sub-heating unit corresponding to the lowermost temperature zone of the second furnace body to form a loop.

[0011] Furthermore, the inner furnace body is divided into at least one temperature zone along the height direction, each temperature zone corresponds to an inner furnace body sub-heating unit of an inner furnace body heating unit, and each inner furnace body sub-heating unit is connected to a power regulator via a wire.

[0012] Furthermore, the reactor includes: an outer furnace body, an inner furnace body disposed within the outer furnace body, and a closed area between the outer furnace body and the inner furnace body forming a process reaction chamber.

[0013] Preferably, the temperature control unit includes: a cascade control unit corresponding to the heating unit on the outer furnace body and the first and second temperature detection units, and a single-loop control unit or a cascade control unit corresponding to the heating unit on the inner furnace body and the third temperature detection unit.

[0014] This utility model also proposes a heating device, including the temperature control system of the above-mentioned reaction furnace.

[0015] Compared with the prior art, the present invention has the following advantages:

[0016] This system, through the combination of heating units arranged in both the inner and outer furnace bodies and multi-point temperature detection, can precisely control the temperature field distribution in the process reaction chamber. It ensures the reaction process remains stable within the target temperature range, while reducing energy consumption and the risk of temperature control lag, meeting the requirements for heating rate and isothermal stability in large-diameter furnace processes; and minimizing external environmental interference with temperature detection, thus avoiding impacts on the temperature stability of the reaction chamber. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the temperature control system in an embodiment of the present invention;

[0019] Figure 2 This is a functional block diagram of the temperature control unit in an embodiment of the present invention;

[0020] Figure 3 This is a connection diagram of the power regulator in the first embodiment of the present invention;

[0021] Figure 4 This is a connection diagram of the power regulator in the second embodiment of the present invention.

[0022] Explanation of reference numerals in the attached figures:

[0023] 1. Temperature control unit;

[0024] 11. Ethernet communication module; 12. Cascade control unit; 13. Single-loop control unit; 14. Temperature display unit.

[0025] 2. Power regulator;

[0026] 3. Second temperature detection unit;

[0027] 4. Third temperature detection unit;

[0028] 5. Inner furnace body;

[0029] 6. Process reaction chamber;

[0030] 7. Outer furnace body;

[0031] 8. First temperature detection unit;

[0032] 9. External furnace heating unit; 10. Internal furnace heating unit. Detailed Implementation

[0033] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0034] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0035] In existing technologies, the heat transfer from the heating wires on the inner wall of the furnace to the reaction chamber is delayed, resulting in low stability of furnace temperature control and affecting the processing quality of the solar cells within the reaction chamber. In particular, existing large-diameter furnaces only heat the outer furnace body, with the temperature at the center of the cavity heating relatively slowly.

[0036] In this regard, such as Figure 1 As shown in the figure, an embodiment of this utility model proposes a temperature control system for a reactor, including: an outer furnace body 7, an inner furnace body 5, multiple heating units, a first temperature detection unit 8, a second temperature detection unit 3, a third temperature detection unit 4, a power regulator 2, and a temperature control unit 1. Wherein:

[0037] The outer furnace body 7 and the inner furnace body 5 are coaxially arranged, and the annular area between them forms the process reaction chamber 6. The heating unit is located on the inner wall of the outer furnace body 7 and inside the inner furnace body 5, and is used to provide heat input to the process reaction chamber 6.

[0038] The first temperature detection unit 8 is installed on the outer furnace body 7 and located outside the process reaction chamber 6. It indirectly reflects the heat conduction in the process reaction chamber 6 through the surface temperature of the outer furnace body 7 and is used to provide feedback on auxiliary measurement values. The second temperature detection unit 3 is directly installed inside the process reaction chamber 6 (its wires can be connected to the top of the outer furnace body 7). It collects the temperature data of the process reaction chamber 6 and provides feedback on the main measurement values. The third temperature detection unit 4 is installed inside the inner furnace body 5 and located outside the process reaction chamber 6. It indirectly reflects the heat conduction in the process reaction chamber 6 through the surface temperature of the inner furnace body 5.

[0039] The power regulator 2 connects to all heating units via wires and adjusts the output power of each heating unit according to the control commands of the temperature control unit 1 to achieve the distribution of heating energy. The temperature control unit 1 receives real-time temperature signals from the first temperature detection unit 8, the second temperature detection unit 3, and the third temperature detection unit 4, generates corresponding adjustment commands, and sends them to the power regulator 2, ultimately forming a closed-loop control.

[0040] This system, through the coordinated arrangement of heating units in the inner furnace body 5 and outer furnace body 7, along with multi-point temperature detection, can precisely control the temperature field distribution in the process reaction chamber 6. The heating units on the outer furnace body 7 and inner furnace body 5 can each handle different heat load requirements. Combined with the three temperature detection units inside and outside the process reaction chamber, the heating power can dynamically respond to temperature fluctuations, ensuring that the reaction process remains stable within the target temperature range, while reducing energy consumption and the risk of temperature control lag.

[0041] In a specific embodiment, the first temperature detection unit 8, the second temperature detection unit 3, and the third temperature detection unit 4 all adopt a multi-point distributed thermocouple structure. Each temperature detection unit contains multiple thermocouples, whose detection ends are arranged at intervals along the height of the furnace body.

[0042] The thermocouple detection ends of the first temperature detection unit 8 are arranged in layers in the vertical direction on the surface of the outer furnace body, covering multiple height positions from the bottom to the top of the furnace body, in order to capture temperature signals at different heights of the outer furnace body.

[0043] The thermocouples of the second temperature detection unit 3 are directly arranged in the process reaction chamber, and their detection ends are distributed at different heights along the axial direction of the outer furnace body 7, forming a multi-layer monitoring of the temperature field of the process reaction chamber; the thermocouples of the third temperature detection unit 4 are arranged along the height direction of the inner wall of the inner furnace body, and by monitoring the temperature difference at different heights on the surface of the inner furnace body, the efficiency and uniformity of heat transfer between the inner and outer layers of the furnace body can be determined.

[0044] This highly layered thermocouple configuration enables the temperature control unit to acquire three-dimensional temperature distribution data inside and outside the furnace and the reaction chamber. The coordinated detection at multiple height points effectively compensates for the limitations of single-location temperature sampling, and can accurately identify phenomena such as local overheating, uneven heat dissipation, or abnormal heat conduction, providing the power regulator 2 with a more refined basis for power adjustment, thereby improving the dynamic response capability and global uniformity of temperature control.

[0045] In a specific embodiment, the multiple heating units specifically include: an outer furnace body heating unit 9 disposed on the inner wall of the outer furnace body 7, and an inner furnace body heating unit 10 disposed inside the inner furnace body 5.

[0046] The outer furnace heating unit 9 is laid on the inner wall surface of the outer furnace in the form of heating wires, evenly distributed along the circumference of the furnace. It provides basic heat to the entire reactor through the heating wires on the inner wall, mainly used to maintain the thermal balance between the furnace and the environment and for external insulation. The inner furnace heating unit 10 can be a heating element inserted inside the inner furnace, close to the inner area of ​​the process reaction chamber 6, to ensure that the temperature of the process reaction chamber 6 reaches the process requirements.

[0047] The heating wires feature rapid response and uniform heating, and their arrangement can be customized according to the furnace structure: the outer heating wires are spirally or grid-like wound around the outer wall to achieve wide-range heat diffusion; the inner heating elements are densely arranged axially or circumferentially along the inner wall to form concentrated heating of the reaction area. The synergistic effect of both reduces heat loss to the external environment and avoids localized overheating or excessive temperature differences within the reaction chamber.

[0048] In specific embodiments, such as Figure 3 , 4 As shown, the outer furnace body 7 is divided into two regions along the longitudinal direction: the first furnace body and the second furnace body (as in a left-right layout). Each furnace body is further divided vertically into multiple temperature zones along the transverse direction. For example, the first furnace body can be divided into upper, middle, and lower temperature zones, and the second furnace body has the same or different numbers of vertical temperature zones. Each temperature zone has an outer furnace body sub-heating unit, whose heating wires are laid along the height range of that temperature zone on the outer wall surface.

[0049] Each sub-heating unit of the outer furnace body is connected to the power regulator 2 via an independent wire, allowing the temperature control unit 1 to adjust the heating power of each temperature zone individually. For example, when the temperature in the upper temperature zone of the first furnace body drops due to localized heat dissipation, the power regulator 2 only needs to increase the output of the sub-heating unit in that area; if the lower temperature zone of the second furnace body needs to maintain a constant temperature, the power of the corresponding sub-unit can be kept stable. This dual-zone design in both the horizontal and vertical directions gives the outer furnace heating system a precise three-dimensional spatial control capability.

[0050] Furthermore, cooling devices are provided at the top and bottom of the outer furnace body 7. Both the first and second furnace bodies are divided into at least three vertical temperature zones along the transverse direction: for example, the top, middle, and bottom regions.

[0051] In the first embodiment:

[0052] like Figure 3 As shown, the outer furnace body 7 can be vertically divided into a first furnace body (left) and a second furnace body (right). The first and second furnace bodies can be horizontally divided into multiple temperature zones, each connected to a power regulator 2 for individual temperature control. Specifically, as shown, the first and second furnace bodies can be divided into a first temperature zone, a second temperature zone, a third temperature zone, a fourth temperature zone, and a fifth temperature zone. Because cooling devices are installed at the top and bottom of the outer furnace body 7, to improve the accuracy of the heating temperature of the furnace wires in the outer furnace body 7, the first temperature zone (1-left) of the first furnace body and the first temperature zone (1-right) of the second furnace body can be connected to the same circuit. Similarly, the fifth temperature zone (5-left) of the first furnace body and the fifth temperature zone (5-right) of the second furnace body are also connected to the same circuit. This ensures that the first and fifth temperature zones of the first and second furnace bodies do not process the battery cells, preventing the cooling devices from affecting temperature accuracy. Thus, only the second, third, and fourth temperature zones of the first and second furnace bodies maintain a constant temperature for processing the battery cells. In this configuration, the power regulator 2 has a total of eight circuits connecting to the outer furnace body. The first and fifth temperature zones of the first and second furnace bodies are connected to the same circuit, which also saves on furnace body manufacturing costs and avoids waste caused by complex and redundant circuits. This design defines the top and bottom temperature zones as non-processing isolation zones, whose main function is to balance the heat loss from the cooling device and prevent it from interfering with the temperature field of the intermediate processing area. The cooling device absorbs excess heat from the top and bottom to prevent heat from diffusing upwards or downwards. At the same time, the unified heating compensation of the top and bottom temperature zones can stabilize the temperature of the isolation zone, forming a thermal barrier to protect the process reaction chamber.

[0053] In the second embodiment:

[0054] like Figure 3 As shown, the first temperature zone (1-left) of the first furnace body and the first temperature zone (1-right) of the second furnace body can also be connected to different circuits, and the fifth temperature zone (5-left) of the first furnace body and the fifth temperature zone (5-right) of the second furnace body can also be connected to different circuits, thereby realizing independent temperature control for each temperature zone and making temperature control more accurate.

[0055] It should be noted that the outer furnace body 7 has at least one temperature zone, so the power regulator 2 is connected to at least two circuits, and can also be 12 circuits, 14 circuits, etc., which are not limited here.

[0056] In a specific embodiment, the inner furnace body 5 is divided into several vertical temperature zones along its height, specifically four temperature zones as shown in the figure. Each temperature zone is equipped with an independent inner furnace body sub-heating unit 10. The heating elements of the inner furnace body sub-heating unit 10 are directly inserted into the inner furnace body of the corresponding temperature zone. For example, the heating elements of the inner furnace body sub-heating units 10 in each temperature zone are densely arranged axially or circumferentially to ensure that heat is directionally conducted to the process reaction chamber 6.

[0057] Each sub-heating unit 10 of the inner furnace body is connected to the power regulator 2 via an independent wire, and the temperature control unit can adjust the heating power of each temperature zone individually. For example, when the temperature in the middle of the process reaction chamber 6 needs to be increased rapidly, the power of the sub-heating unit in the corresponding temperature zone is increased.

[0058] In specific embodiments, such as Figure 2 As shown, the temperature control unit 1 includes: an Ethernet communication module 11, a cascade control unit 12 corresponding to the heating unit and temperature detection unit on the outer furnace body, a single-loop control unit 13 (or cascade control unit 12) corresponding to the heating unit and temperature detection unit on the inner furnace body, and a temperature display unit 14.

[0059] Specifically, the temperature control unit 1 includes: a 5-channel cascade control unit 12, a 4-channel single-loop control unit 13, and a 5-loop temperature display unit 14. The 5-channel cascade control unit 12 corresponds to the five temperature zones of the outer furnace body in the above example; the 4-channel single-loop control unit 13 corresponds to the four temperature zones of the inner furnace body; and the 5-loop temperature display unit 14 can correspond to the five temperature zones of the outer furnace body 7 in the above example.

[0060] The cascade control unit 12 adjusts the output signal through PID calculations, thereby regulating the output power of the power regulator 2. Since the outer furnace body 7 and the inner furnace body 5 are controlled independently, different temperatures for the outer furnace body 7 and the inner furnace body 5 can be set according to the temperature distribution across the same horizontal cross-section of the process reaction chamber 6, thus reducing temperature deviation across the same horizontal cross-section of the process reaction chamber 6. The outer furnace body 7 is composed of two halves, and the output power of the heating wires on the left and right halves can be set through the power regulator 2 to reduce temperature deviation between the left and right sides of the process reaction chamber 6. This achieves precise temperature control of the reaction chamber. Therefore, the low-pressure diffusion oxidation, annealing, and deposition furnace reaction chamber temperature control system of this invention has advantages such as high control accuracy and high reliability.

[0061] This utility model also proposes a heating device, including the temperature control system of the above-mentioned reaction furnace.

[0062] It should be noted that the terminology used above is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this utility model. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, operations, devices, components, and / or combinations thereof.

[0063] In the description of this utility model, it should be understood that the orientation or positional relationship indicated by directional terms such as "horizontal, vertical, horizontal" and "top, bottom" is usually based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0064] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A reactor temperature control system, characterized in that, include: Multiple heating units are respectively installed on the outer furnace body and the inner furnace body; a first temperature detection unit is installed on the outer furnace body located outside the process reaction chamber and a second temperature detection unit is installed on the inner furnace body located outside the process reaction chamber; a power regulator is connected to each heating unit for adjusting the heating power; and a temperature control unit is connected to each temperature detection unit and the power regulator.

2. The reactor temperature control system as described in claim 1, characterized in that, The first temperature detection unit, the second temperature detection unit, and the third temperature detection unit each include multiple thermocouples, and the detection ends of the multiple thermocouples in each temperature detection unit are located at different heights of the furnace body.

3. The reactor temperature control system as described in claim 1 or 2, characterized in that, The plurality of heating units specifically include: an outer furnace body heating unit disposed on the outer furnace body, and an inner furnace body heating unit disposed on the inner furnace body.

4. The reactor temperature control system as described in claim 3, characterized in that, The outer furnace body is divided into a first furnace body and a second furnace body along the longitudinal direction; the first furnace body and the second furnace body are each divided into at least one temperature zone along the transverse direction, each temperature zone corresponds to an outer furnace body sub-heating unit of the outer furnace body heating unit, and each of the outer furnace body sub-heating units is connected to the power regulator through a wire.

5. The reactor temperature control system as described in claim 4, characterized in that, Cooling devices are provided at the top and bottom of the outer furnace body.

6. The reactor temperature control system as described in claim 5, characterized in that, The first furnace body and the second furnace body are each divided into at least three temperature zones in the transverse direction. The outer furnace body sub-heating unit corresponding to the uppermost temperature zone of the first furnace body is connected to the outer furnace body sub-heating unit corresponding to the uppermost temperature zone of the second furnace body to form a loop, and the outer furnace body sub-heating unit corresponding to the lowermost temperature zone of the first furnace body is connected to the outer furnace body sub-heating unit corresponding to the lowermost temperature zone of the second furnace body to form a loop.

7. The reactor temperature control system as described in claim 3, characterized in that, The inner furnace body is divided into at least one temperature zone in the horizontal direction. Each temperature zone corresponds to an inner furnace body sub-heating unit of the inner furnace body heating unit, and each inner furnace body sub-heating unit is connected to the power regulator through a wire.

8. The reactor temperature control system as described in claim 1, characterized in that, The reactor includes: an outer furnace body, an inner furnace body disposed within the outer furnace body, and the enclosed area between the outer furnace body and the inner furnace body forms a process reaction chamber.

9. The reactor temperature control system as described in claim 1, characterized in that, The temperature control unit includes: a cascade control unit corresponding to the heating unit on the outer furnace body and the first and second temperature detection units, and a single-loop control unit or a cascade control unit corresponding to the heating unit on the inner furnace body and the third temperature detection unit.

10. A heating device, characterized in that, The temperature control system for the reactor is as described in any one of claims 1 to 9.

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