A non-contact measuring device for dicing machine blades

Abstract

This invention proposes a non-contact measuring device for dicing machine blades, belonging to the technical field of dicing machines. It includes a main unit with a blade structure mounted on its output end. A measuring component is located on one side of the blade structure, used for real-time and stable measurement of the blade body. The measuring component includes a mounting frame located on one side of the main unit. A protective cover is bolted to the top of the mounting frame. A laser emitter, a first aspherical mirror, a filter aperture, and a second aspherical mirror are all installed inside the protective cover. The output end of the laser emitter faces the first aspherical mirror, and the filter aperture is located between the first and second aspherical mirrors. Both the first and second aspherical mirrors are plano-convex aspherical lenses. This invention has a simple structure, low light energy loss, and can perform stable real-time measurement of the blade body.

Description

Technical Field

[0001] This utility model relates to the field of dicing machine technology, and in particular to a non-contact measuring device for dicing machine blades. Background Technology

[0002] A dicing machine is a key piece of equipment in semiconductor post-packaging, used to divide devices into individual circuit units or separate large-sized materials into smaller ones. Especially in wafer fabrication, the precision required for the cutting depth is extremely high. However, as the dicing blade wears down during the cutting process, its outer diameter decreases, affecting the cutting depth. To measure the wear value of the dicing blade during cutting and thus accurately control the cutting depth to ensure machining accuracy, a non-contact measuring device for the dicing machine blade is needed.

[0003] Existing dicing machine blades require manual or automatic operation of a mechanical probe to contact the blade edge for measurement after the machine is stopped. This significantly reduces equipment utilization and production efficiency, and cannot reflect the dynamic wear changes of the blade during continuous cutting in real time. While some non-contact measuring devices can measure the dicing machine blades in real time, the receiving end often cannot receive the entire beam emitted by the light emitting end, resulting in insufficient beam energy density and affecting the stability of the height measurement system. In order to ensure that the receiving end can receive the entire beam emitted by the light emitting end, the beam optical axis diameter must be larger. However, a larger beam optical axis diameter is affected by stray light or areas of energy discontinuity around the beam, which affects the stability of the light blocking. This greatly affects the measurement accuracy of the height measurement system, thereby affecting the cutting depth of the workpiece. Utility Model Content

[0004] To address the aforementioned issues, this invention proposes a non-contact measuring device for dicing machine blades, which more accurately solves the problem that stray light at the edge of the measuring beam or the lack of concentrated energy at the center can affect the stability of light blocking when measuring existing dicing machine blades.

[0005] This utility model is achieved through the following technical solution:

[0006] This utility model proposes a non-contact measuring device for dicing machine blades, including a main unit, a blade structure installed at the output end of the main unit, and a measuring component provided on one side of the blade structure. The measuring component is used to perform real-time stable measurement of the blade body.

[0007] Furthermore, the blade structure includes a limiting base, a blade body, a limiting top cover, and a tightening component. The limiting base is sleeved and installed outside the main unit output end. The blade body is located above the limiting base, the limiting top cover is located above the blade body, and the tightening component is sleeved and installed outside the limiting top cover.

[0008] Furthermore, the limiting base is screwed into the output end of the main unit via a thread, and the limiting top cover is screwed into the tightening component via a thread. The dimensions of both the limiting base and the limiting top cover are smaller than the blade body.

[0009] Furthermore, the measuring component includes a mounting frame disposed on one side of the host unit. A protective cover is bolted to the top of the mounting frame. A laser emitting end is installed inside the protective cover. A first aspherical mirror, a filter aperture, and a second aspherical mirror are installed inside the protective cover.

[0010] Furthermore, the output end of the laser emitter faces the first aspherical mirror, and the filter stop is located between the first aspherical mirror and the second aspherical mirror.

[0011] Furthermore, both the first aspherical mirror and the second aspherical mirror are plano-convex aspherical lenses, and the filter stop is a pinhole stop.

[0012] Furthermore, a first deflecting prism is installed at the end of the protective cover, a second deflecting prism is installed at the end of the protective cover, and a laser receiver is installed inside the protective cover.

[0013] Furthermore, the first deflecting prism and the second deflecting prism are symmetrically located on both sides of the blade body, and the laser receiving end and the laser emitting end are correspondingly arranged.

[0014] The beneficial effects of this utility model are:

[0015] This utility model proposes a non-contact measuring device for dicing machine blades. By using a first aspherical mirror and a second aspherical mirror, the divergence angle can be compressed. Combined with a filter aperture, edge stray light and weak light can be eliminated, while strengthening the central beam. During output, it provides convenient beam collimation and good convergence effect, making the laser beam energy more concentrated and the contact with the blade body more sensitive, thereby improving the stability of the measurement system. Moreover, the aspherical lens group method has a simple structure and low light energy loss. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the blade structure of this utility model;

[0018] Figure 3 This is a schematic diagram of the measuring component structure of this utility model;

[0019] Figure 4 This is a schematic diagram of the internal structure of the protective cover of this utility model.

[0020] The attached figures are labeled as follows:

[0021] In the diagram: 1. Main unit; 2. Blade structure; 3. Limiting base; 4. Blade body; 5. Limiting top cover; 6. Tightening component; 7. Fixing frame; 8. Protective cover; 9. Laser emitting end; 10. First aspherical mirror; 11. Filter aperture; 12. Second aspherical mirror; 13. First deflecting prism; 14. Second deflecting prism; 15. Laser receiving end. Detailed Implementation

[0022] To more clearly and completely illustrate the technical solution of this utility model, the following description, in conjunction with the accompanying drawings, will further explain this utility model.

[0023] Please refer to Figures 1-4 This utility model proposes a non-contact measuring device for dicing machine blades, including a main unit 1. A blade structure 2 is installed at the output end of the main unit 1. A measuring component is provided on one side of the blade structure 2. The measuring component is used to perform real-time stable measurement of the blade body 4.

[0024] The blade structure 2 includes a limiting base 3, a blade body 4, a limiting top cover 5, and a tightening component 6. The limiting base 3 is sleeved and installed outside the output end of the main unit 1 to limit and fix the blade body 4. The blade body 4 is located above the limiting base 3 and is used for cutting the workpiece. The limiting top cover 5 is located above the blade body 4 and is used to limit and fix the blade body 4. The tightening component 6 is sleeved and installed outside the limiting top cover 5 to limit and fix the limiting top cover 5. The limiting base 3 is screwed into the output end of the main unit 1, and the limiting top cover 5 is screwed into the output end of the main unit 1. The tightening component 6 is screwed on by threads. The dimensions of the limiting base 3 and the limiting top cover 5 are both smaller than the blade body 4. When installing the blade body 4, the user screws the limiting base 3 onto the outside of the output end of the main unit 1, then places the blade body 4 and the limiting top cover 5 on the limiting base 3 respectively, and finally screws the tightening component 6 onto the outside of the limiting top cover 5 and fixes it, thus completing the limiting and fixing of the blade body 4 and ensuring subsequent cutting of the workpiece. When replacing the blade body 4, the user contacts the fixing of the tightening component 6, then unscrews the tightening component 6 to remove the blade body 4.

[0025] The measuring assembly includes a mounting frame 7, which is disposed on one side of the main unit 1 and is used to install and fix structures such as the protective cover 8. The protective cover 8 is bolted to the top of the mounting frame 7. A laser emitting end 9 is installed inside the protective cover 8 for emitting a laser beam. A first aspherical mirror 10 is installed inside the protective cover 8 for focusing the laser beam. A filter aperture 11 is installed inside the protective cover 8 for spatial filtering of the laser beam to eliminate edge stray light and weak light areas. A second aspherical mirror 12 is installed inside the protective cover 8. The output end of the laser emitting end 9 faces the first aspherical mirror 10. The filter aperture 11 is located between the first aspherical mirror 10 and the second aspherical mirror 12. Both the first aspherical mirror 10 and the second aspherical mirror 12 are plano-convex aspherical lenses. The filter aperture 11 is a pinhole aperture. A first deflecting prism 13 and a second deflecting prism 14 are installed at the end of the protective cover 8. 4. For changing the optical path, a laser receiver 15 is installed inside the protective cover 8 to receive the enhanced laser beam. The first deflecting prism 13 and the second deflecting prism 14 are symmetrically located on both sides of the blade body 4. The laser receiver 15 is correspondingly set with the laser emitter 9. Both the laser emitter 9 and the laser receiver 15 are connected to the controller. When measuring the blade body 4, the laser beam emitted by the laser emitter 9 enters the first aspherical mirror 10. After the beam is focused, it is spatially filtered at the aperture to eliminate edge stray light and weak light areas. Then it enters the second aspherical mirror 12 and outputs the enhanced beam. Then it enters the first deflecting prism 13 to change the optical path. The non-contact measurement process is carried out between the two deflecting prisms. After passing through the second deflecting prism 14, it enters the laser receiver 15. The measurement system processes the relevant measurement data. The measurement process is then completed, realizing real-time and accurate measurement of the blade body 4 and stable measurement of the blade body 4.

[0026] Of course, there may be other implementations of this utility model. Based on this implementation, other implementations obtained by those skilled in the art without any creative effort are all within the scope of protection of this utility model.

Claims

1. A non-contact measuring device for dicing machine blades, characterized in that, The system includes a main unit, an output end of which is equipped with a blade structure. A measurement component is located on one side of the blade structure, used for real-time stable measurement of the blade body. The measurement component includes a mounting bracket located on one side of the main unit. A protective cover is bolted to the top of the bracket. A laser emitter is installed inside the protective cover. A first aspherical mirror, a filter aperture, and a second aspherical mirror are also installed inside the protective cover. The output end of the laser emitter faces the first aspherical mirror. The filter aperture is located between the first and second aspherical mirrors. Both the first and second aspherical mirrors are plano-convex aspherical lenses. The filter aperture is a pinhole aperture. A first deflecting prism and a second deflecting prism are installed at the end of the protective cover. A laser receiver is installed inside the protective cover.

2. The non-contact measuring device for dicing machine blades according to claim 1, characterized in that, The blade structure includes a limiting base, a blade body, a limiting top cover, and a tightening component. The limiting base is sleeved and installed outside the main unit output end. The blade body is located above the limiting base, the limiting top cover is located above the blade body, and the tightening component is sleeved and installed outside the limiting top cover.

3. The non-contact measuring device for dicing machine blades according to claim 2, characterized in that, The limiting base is screwed into the output end of the main unit via a thread, and the limiting top cover is screwed into the tightening component via a thread. The dimensions of both the limiting base and the limiting top cover are smaller than the blade body.

4. The non-contact measuring device for dicing machine blades according to claim 1, characterized in that, The first deflecting prism and the second deflecting prism are symmetrically located on both sides of the blade body, and the laser receiving end and the laser emitting end are correspondingly arranged.

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