A multidimensionally adjustable Fabry-Perot interferometer

CN224623850UActive Publication Date: 2026-08-11WUHAN INST OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-10-23
Publication Date
2026-08-11

AI Technical Summary

Technical Problem

[0006]本实用新型的目的在于,针对现有技术的不足,提供一种多维调节的法布里-珀罗干涉仪,旨在解决现有干涉仪通用性差的问题

Benefits of technology

1、本实用新型设计移动机构,利用移动机构带动第一镜架移动,可实现对干涉腔长度的调节;同时设计压电陶瓷管,利用压电陶瓷管的逆压电效应,对压电陶瓷管施加电压可改变压电陶瓷管的长度,从而实现对干涉腔长度的调节;本实用新型设计角度调节机构,改变第二镜架的倾斜角度,继而可实现对镜片平行度的调节,可以提高试验精度;本实用新型可满足不同实验场景对干涉腔长度的要求,通用性好。2、本实用新型在壳体内壁设置电热膜通过加热,可实现对干涉腔温度的调节。

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Abstract

This utility model discloses a multidimensional adjustable Fabry-Perot interferometer, including a housing, a moving mechanism, and a first mirror frame, a second mirror frame, and a piezoelectric ceramic tube disposed inside the housing. A first mirror is mounted on the first mirror frame, and a fixing plate is mounted on the second mirror frame. The piezoelectric ceramic tube is located between the first and second mirror frames, with its outer end connected to the fixing plate, which is mounted on the second mirror frame. A second mirror is mounted on the inner end of the piezoelectric ceramic tube. The center lines of the first mirror, the second mirror, and the fixing plate are collinear with the axis of the piezoelectric ceramic tube. The driving end of the moving mechanism is connected to the first mirror frame. The second mirror frame is equipped with an angle adjustment mechanism, which includes a fixing frame and an adjusting screw. The advantages of this utility model are: the moving mechanism drives the first mirror frame to move and utilizes the characteristics of piezoelectric ceramics to adjust the length of the interference cavity; the angle adjustment mechanism allows for adjustment of the mirror parallelism; and it has good versatility.
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Description

Technical Field

[0001] This utility model relates to the field of spectral measurement technology, specifically to a multidimensional adjustable Fabry-Perot interferometer. Background Technology

[0002] The Fabry-Perot (FP) interferometer is a high-resolution spectral analysis device based on the principle of multi-beam interference. It is widely used in applications requiring extremely high frequency sensitivity, such as laser linewidth measurement, gas composition identification, and Brillouin scattering spectrum analysis. The basic structure of the Fabry-Perot (FP) interferometer consists of an interference cavity composed of two highly reflective mirrors. Incident light undergoes multiple reflections within the cavity before being transmitted to form an interference spectrum. The position of the transmission peak is affected by the inter-mirror spacing (cavity length) and the incident angle. The spectral resolution is determined by both the mirror reflectivity and the cavity length.

[0003] Fabry-Perot (FP) interferometers have advantages such as simple structure, clear interference fringes, and high theoretical resolution. However, they still have many structural limitations in different experimental applications, which seriously affect their practicality and system integration capabilities in specific environments.

[0004] First, existing interferometers lack a high-precision, flexibly adjustable cavity length adjustment mechanism, making it difficult to adapt to the dynamic requirements of cavity length in different experimental scenarios and resulting in poor versatility. Second, during long-term experiments, minute changes in ambient temperature can cause changes in the refractive index of the medium inside the cavity, while the mirrors deform due to thermal expansion and contraction, leading to fluctuations in optical path difference, causing interference fringes to drift and reducing measurement accuracy. Finally, adjusting the parallelism of the mirrors is difficult; even a slight tilt between the two mirrors can cause interference fringes to overlap, directly weakening spectral resolution and failing to meet the requirements of high-precision experiments.

[0005] Therefore, it is necessary to improve existing technologies. Summary of the Invention

[0006] The purpose of this invention is to provide a multidimensional adjustable Fabry-Perot interferometer to address the shortcomings of existing technologies and solve the problem of poor versatility of existing interferometers.

[0007] The technical solution adopted in this utility model is: a multidimensional adjustable Fabry-Perot interferometer, including a housing, a moving mechanism, and a first mirror frame, a second mirror frame, and a piezoelectric ceramic tube disposed inside the housing; The first lens is mounted on the first frame, and the fixing plate is mounted on the second frame; The piezoelectric ceramic tube is located between the first eyeglass frame and the second eyeglass frame, and the outer end of the piezoelectric ceramic tube is connected to the fixing plate, which is mounted on the second eyeglass frame. A second lens is installed at the inner port of the piezoelectric ceramic tube; The center lines of the first lens, the second lens, and the fixing plate are collinear with the axis of the piezoelectric ceramic tube; The drive end of the moving mechanism is connected to the first eyeglass frame; The second frame is equipped with an angle adjustment mechanism, which includes a fixing frame and an adjustment screw; The fixing bracket is mounted on the outside of the second frame and is fixedly connected to the housing; the adjusting screw is connected to the fixing bracket and the end of the adjusting screw is pressed against the outside of the second frame.

[0008] According to the above scheme, the moving mechanism includes a first fixed seat, a second fixed seat, a lead screw, and a moving block; The first fixing seat and the second fixing seat are respectively located at both ends inside the housing, and the two ends of the lead screw are respectively installed in the first fixing seat and the second fixing seat; One end of the lead screw is threadedly connected to the moving block, and the moving block is fixedly connected to the first eyeglass frame.

[0009] According to the above scheme, the moving mechanism is also provided with a guide rod, the two ends of which are connected to the first fixed seat and the second fixed seat respectively, and the moving block and the first frame both pass through the guide rod.

[0010] According to the above scheme, there are two guide rods, located at the upper and lower parts of the lead screw respectively; the outer end of the lead screw is provided with a knob.

[0011] According to the above scheme, the positions of the lead screw and the guide rod are staggered from the positions of each lens.

[0012] According to the above scheme, an electric heating film is installed on both sides inside the housing between the first eyeglass frame and the second eyeglass frame.

[0013] According to the above scheme, a mounting hole is provided on the first eyeglass frame, and a thermocouple is installed in the mounting hole.

[0014] According to the above scheme, the angle adjustment mechanism further includes a tension spring, the two ends of which are respectively connected to the second frame and the fixing frame.

[0015] According to the above scheme, the fixing frame includes a horizontal section and a vertical section; there are two adjusting screws, which are respectively connected to the horizontal section and the vertical section of the fixing frame.

[0016] According to the above scheme, four ear plates are connected to the rear side plate of the housing.

[0017] The beneficial effects of this utility model are as follows: 1. This invention features a moving mechanism that moves the first mirror frame, allowing adjustment of the interference cavity length. It also incorporates a piezoelectric ceramic tube; by applying voltage to the tube using its inverse piezoelectric effect, the tube's length can be altered, thus adjusting the interference cavity length. Furthermore, an angle adjustment mechanism changes the tilt angle of the second mirror frame, thereby adjusting the mirror parallelism and improving experimental accuracy. This invention meets the interference cavity length requirements of various experimental scenarios and offers good versatility. 2. The invention also includes an electrothermal film on the inner wall of the housing, which, through heating, allows for temperature adjustment of the interference cavity. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of Example 1.

[0019] Figure 2 This is a schematic diagram of the internal structure of the shell in Embodiment 1. Figure 1 .

[0020] Figure 3 This is a schematic diagram of the internal structure of the shell in Embodiment 1. Figure 2 .

[0021] Figure 4 This is a schematic diagram of the internal structure of the shell in Embodiment 1. Figure 3 .

[0022] The components are: 1. First frame; 2. Second frame; 3. Moving mechanism; 4. Housing; 5. Heating film; 6. Thermocouple; 7. Moving block; 8. Lead screw; 9. Piezoelectric ceramic tube; 10. First fixing seat; 11. Fixing frame; 12. Tension spring; 13. Guide rod; 14. Adjusting screw; 15. First lens; 16. Second lens; 17. Fixing plate; 18. Ear plate; 19. Second fixing seat; 20. Steel ball. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0024] In the description of the embodiments of this application, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0025] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0026] In the embodiments of this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0027] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the embodiments of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples, without contradiction. Additionally, the term "a plurality of" indicates two or more.

[0028] Example 1 like Figures 1-4The Fabry-Perot interferometer shown is a multidimensional adjustable Fabry-Perot interferometer with controllable cavity length, adjustable cavity temperature, and adjustable mirror frame tilt. It includes a housing 4, a moving mechanism 3, and a first mirror frame 1, a second mirror frame 2, and a piezoelectric ceramic tube 9 disposed inside the housing 4. The first lens 15 is installed on the first frame 1, and the fixing piece 17 is installed on the second frame 2. The fixing piece 17 is a light-transmitting flat piece. The piezoelectric ceramic tube 9 is located between the first lens frame 1 and the second lens frame 2, and the outer end of the piezoelectric ceramic tube 9 is connected to the fixing plate 17. The inner port of the piezoelectric ceramic tube 9 is equipped with a second lens 16; The center lines of the first lens 15, the second lens 16, and the fixing plate 17 are collinear with the axis of the piezoelectric ceramic tube 9.

[0029] The driving end of the moving mechanism 3 is connected to the first frame 1, which drives the first frame 1 to move away from or towards the second frame 2.

[0030] In this invention, the aperture of the piezoelectric ceramic tube 9 does not exceed the aperture of the two lenses; the apertures of the two lenses are the same size and do not exceed the aperture of the fixing plate 17; an interference cavity is formed between the first lens 15 and the second lens 16. During operation, light enters through the first lens 15 or the second lens 16, and multi-beam interference occurs in the interference cavity, ultimately exiting from the second lens 16 or the first lens 15, thus meeting the requirements for interference spectrum measurement in multiple scenarios. The centerlines of the first lens 15, the second lens 16, and the fixing plate 17 are designed to be collinear with the piezoelectric ceramic tube 9, ensuring optical path coaxiality and avoiding stray light interference.

[0031] In this embodiment, the first lens 15, the second lens 16, and the fixing plate 17 have the same light transmission aperture.

[0032] In this invention, when the moving mechanism 3 moves the first mirror frame 1, the length of the interference cavity can be coarsely adjusted.

[0033] In this invention, by applying a voltage to the piezoelectric ceramic tube 9 using the inverse piezoelectric effect of the piezoelectric material, the length of the piezoelectric ceramic tube 9 can be changed, thereby achieving fine adjustment of the length of the interference cavity.

[0034] Preferably, the moving mechanism 3 includes a first fixed seat 10, a second fixed seat 19, a lead screw 8, and a moving block 7; The first fixed seat 10 and the second fixed seat 19 are respectively installed inside the two ends of the housing 4, and the two ends of the lead screw 8 are respectively installed in the first fixed seat 10 and the second fixed seat 19, and can rotate within the first fixed seat 10; One end of the lead screw 8 is threadedly connected to the moving block 7, and the moving block 7 is fixedly connected to the first mirror frame 1.

[0035] Preferably, the moving mechanism 3 is further provided with a guide rod 13, the two ends of which are connected to the first fixed seat 10 and the second fixed seat 19 respectively, and the moving block 7 and the first frame 1 both pass through the guide rod 13.

[0036] In this utility model, there are two guide rods 13, located at the upper and lower parts of the lead screw 8 respectively; the outer end of the lead screw 8 (the end that passes through the first fixing seat 10 and is away from the first frame 1) is provided with a knob.

[0037] In this invention, the positions of the lead screw 8 and the guide rod 13 are offset from the positions of each lens.

[0038] In this invention, the movable block 7 is connected to the first frame 1 by screws.

[0039] In this invention, rotating the lead screw 8 via a knob causes the movable block 7, which is threadedly connected to the lead screw 8, to move the first mirror frame 1 axially along the lead screw 8, thereby changing the length of the interference cavity. For each revolution of the lead screw 8, the movable block 7 moves horizontally 0.8 mm in a predetermined direction.

[0040] Preferably, an electric heating film 5 is installed inside the housing 4 between the first frame 1 and the second frame 2.

[0041] In this invention, the electrothermal film 5 can be disposed on the inner top or both inner sides of the housing 4 to heat the interference cavity. Specifically, the electrothermal film 5 can be a polyimide electrothermal film.

[0042] Preferably, a mounting hole is provided on the first lens frame 1 or the second lens frame 2, and a thermocouple 6 is installed in the mounting hole.

[0043] In this embodiment, the thermocouple 6 is mounted on the first mirror frame 1, which can monitor the temperature inside the interference cavity in real time so that the temperature inside the interference cavity can be further adjusted in the future.

[0044] Preferably, such as Figure 3 and Figure 4 As shown, the second frame 2 is provided with an angle adjustment mechanism. Specifically, the angle adjustment mechanism includes a fixing frame 11 and an adjustment screw 14. The fixing frame 11 is located on the outside of the second frame 2 (away from the first frame 1), and the fixing frame 11 is connected and fixed to the housing 4; the adjusting screw 14 is threadedly connected to the fixing frame 11, and the end of the adjusting screw 14 is pressed against the outside of the second frame 2.

[0045] In this utility model, the fixing frame 11 is L-shaped, including a horizontal section and a vertical section; there are two adjusting screws 14, which are respectively located on the horizontal section and the vertical section of the fixing frame 11; by rotating and pushing the two adjusting screws 14 through the length of the fixing frame 11, the tilt of the second frame 2 can be adjusted.

[0046] Preferably, the angle adjustment mechanism further includes a tension spring 12, the two ends of which are connected to the second mirror frame 2 and the fixing frame 11, respectively.

[0047] In this utility model, the tension spring 12 is a double-hook tension spring; the tension spring 12 is designed in two sets, which are respectively arranged in the horizontal section and the vertical section of the fixing frame 11.

[0048] In this utility model, a steel ball 20 is provided between the fixing frame 11 and the second frame 2 to prevent the fixing frame 11 from fitting together with the second frame 12; a groove adapted to the steel ball 20 can be opened on the outside of the fixing frame 11.

[0049] In this invention, the horizontal and vertical sections of the fixing frame 11 are connected to the second mirror frame 2 by double-hook tension springs. Steel balls are used to separate the second mirror frame 2 from the fixing frame 11. By rotating and pushing the adjusting screws 14 on the fixing frame 11 in different directions (horizontal or vertical), when the adjusting screws 14 on the horizontal and vertical sections of the fixing frame 11 are pushed forward by different distances, the second mirror frame 2 will tilt at different angles. Thus, the appropriate tilt can be selected according to the experimental conditions.

[0050] In this invention, the housing 4 is formed by a bottom plate, a top plate, a front side plate, and a rear side plate. A first eyeglass frame 1 and a second eyeglass frame 2 are respectively provided at both ends of the housing 4. The bottoms of the first fixing seat 10 and the second fixing seat 19 are connected and fixed to the bottom plate. The upper and lower ends of the first eyeglass frame 1 are respectively attached to the top and bottom plates of the housing 4, and the upper and lower ends of the second eyeglass frame 2 are respectively attached to the top and bottom plates of the housing 4. A guide rail is provided on the bottom plate to facilitate the movement of the moving block 7 and the first eyeglass frame 1. The fixing frame 11 is fixedly connected to the rear side plate of the housing 4. The knob at the end of the lead screw 8 of the moving mechanism 3 is located outside the housing 4.

[0051] In this invention, four ear plates 18 are connected to the rear side plate of the housing 4 to facilitate the installation and fixation of the interferometer.

[0052] Example 2 The difference between this embodiment and Embodiment 1 is that only one guide rod is provided.

[0053] The working principle of this utility model is as follows: 1. The first mirror frame 1 is connected to the moving block 7 of the moving mechanism 3. By twisting the lead screw 8 of the moving mechanism 3, the moving block 7 can be displaced, and the first mirror frame 1 connected to it will move accordingly, so as to achieve the effect of initially adjusting the length of the interference cavity.

[0054] 2. By changing the applied voltage of the piezoelectric ceramic tube 9, the length of the piezoelectric ceramic tube 9 is changed, thereby finely adjusting the length of the interference cavity.

[0055] 3. The second frame 2 is connected to the adjusting screw 14, and the tilt of the lens can be finely adjusted by pushing the adjusting screw 14.

[0056] The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0057] Finally, it should be noted that the above are merely preferred embodiments of this application and are not intended to limit this application. Although this application has been described in detail with reference to the embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. However, any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A multidimensionally adjustable Fabry-Perot interferometer, characterized in that, It includes a housing, a moving mechanism, and a first lens frame, a second lens frame, and a piezoelectric ceramic tube disposed inside the housing; The first lens is mounted on the first frame, and the fixing plate is mounted on the second frame; The piezoelectric ceramic tube is located between the first eyeglass frame and the second eyeglass frame, and the outer end of the piezoelectric ceramic tube is connected to the fixing plate, which is mounted on the second eyeglass frame. A second lens is installed at the inner port of the piezoelectric ceramic tube; The center lines of the first lens, the second lens, and the fixing plate are collinear with the axis of the piezoelectric ceramic tube; The drive end of the moving mechanism is connected to the first eyeglass frame; The second frame is equipped with an angle adjustment mechanism, which includes a fixing frame and an adjustment screw; The fixing bracket is mounted on the outside of the second frame and is fixedly connected to the housing; the adjusting screw is connected to the fixing bracket and the end of the adjusting screw is pressed against the outside of the second frame.

2. The Fabry-Perot interferometer with multidimensional adjustment as described in claim 1, characterized in that, The moving mechanism includes a first fixed seat, a second fixed seat, a lead screw, and a moving block; The first fixing seat and the second fixing seat are respectively located at both ends inside the housing, and the two ends of the lead screw are respectively installed in the first fixing seat and the second fixing seat; One end of the lead screw is threadedly connected to the moving block, and the moving block is fixedly connected to the first eyeglass frame.

3. The Fabry-Perot interferometer with multidimensional adjustment as described in claim 2, characterized in that, The moving mechanism is also provided with a guide rod, the two ends of which are connected to the first fixed seat and the second fixed seat respectively, and the moving block and the first frame both pass through the guide rod.

4. The Fabry-Perot interferometer with multidimensional adjustment as described in claim 3, characterized in that, Two guide rods are provided, located at the upper and lower parts of the lead screw respectively; a knob is provided at the outer end of the lead screw.

5. The Fabry-Perot interferometer with multidimensional adjustment as described in claim 4, characterized in that, The positions of the lead screw and the guide rod are offset from the positions of each lens.

6. The Fabry-Perot interferometer with multidimensional adjustment as described in claim 1, characterized in that, An electric heating film is installed on both sides inside the housing between the first and second eyeglass frames.

7. The Fabry-Perot interferometer with multidimensional adjustment as described in claim 1, characterized in that, A mounting hole is provided on the first eyeglass frame, and a thermocouple is installed in the mounting hole.

8. The Fabry-Perot interferometer with multidimensional adjustment as described in claim 1, characterized in that, The angle adjustment mechanism also includes a tension spring, the two ends of which are connected to the second frame and the fixing frame, respectively.

9. The Fabry-Perot interferometer with multidimensional adjustment as described in claim 8, characterized in that, The fixing frame includes a horizontal section and a vertical section; there are two adjusting screws, which are respectively connected to the horizontal section and the vertical section of the fixing frame.

10. The multidimensionally adjustable Fabry-Perot interferometer as described in claim 1, characterized in that, Four lugs are connected to the rear side plate of the housing.