Pressure-resistant structure of diaphragm pressure sensor
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-01
- Publication Date
- 2026-08-11
AI Technical Summary
由于隔膜的变形具有有限的过压能力,当压力传感器压力过大时,传感器隔膜容易发生破裂
[0017]1、本实用新型的耐压结构,通过耐压组件隔膜、隔膜护环、隔膜护件的结构创新设计,大压力作用于传感器,压力就会完全作用于拱形或伞形隔膜上,隔膜护件套设于隔膜护环内,隔膜护环对隔膜变形方向进行约束,且隔膜变形过程中变形部分与隔膜护件完全贴合,作用力会传递到隔膜护件和隔膜护环上,隔膜能够承受更大的压力,不易变形破裂,无需增加隔膜的强度和厚度,隔膜护件动态跟随隔膜形变而移动,消除了传统隔膜保护方式对隔膜形变的阻碍,微小压力变化仍可被精准检测,从而兼顾实现隔膜保护和传感器精度、灵敏度的平衡。
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Figure CN224623905U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of pressure sensor technology, and in particular to a pressure-resistant structure for a diaphragm pressure sensor. Background Technology
[0002] Existing diaphragm pressure sensors typically use diaphragms made of silicone, rubber, or metal. When the diaphragm is subjected to pressure, it deforms and displaces. The sensor converts this physical variable into an electrical signal, which is the sensor's output signal. Therefore, the diaphragm plays a crucial role in signal transmission within the sensor. However, because the diaphragm's deformation has a limited overpressure capacity, it is prone to rupture when the pressure on the sensor is too high. To address this issue, methods such as adding fibers to the diaphragm to increase its strength or thickening it are commonly used to enable it to withstand greater pressure. However, the accuracy and sensitivity of diaphragm sensors depend on the diaphragm's responsiveness to pressure changes. Increasing the diaphragm's strength or thickness requires a wider range of pressure variations to detect changes, which in turn affects its responsiveness to pressure changes, leading to reduced sensor accuracy and sensitivity. This makes it unsuitable for applications requiring high accuracy and sensitivity. Utility Model Content
[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a pressure-resistant structure for a diaphragm pressure sensor that achieves a balance between overpressure protection and high sensitivity.
[0004] The objective of this utility model is achieved through the following technical solution:
[0005] A pressure-resistant structure for a diaphragm pressure sensor, comprising:
[0006] The top cover has a pressure measuring port.
[0007] A diaphragm pressure-resistant assembly includes a diaphragm, a diaphragm retaining ring, and a diaphragm protector. The diaphragm is arched or umbrella-shaped and is disposed on the diaphragm retaining ring. The edge of the diaphragm is sealed to the upper cover and the diaphragm retaining ring. The diaphragm retaining ring is connected to the upper cover. The diaphragm protector is sleeved inside the diaphragm retaining ring, and the top of the diaphragm protector is fitted and connected to the diaphragm.
[0008] The lower shell is connected to the diaphragm retaining ring. The lower shell is provided with a limiting step and an elastic element inside. The limiting step is located below the diaphragm retaining ring. One end of the elastic element is connected to the lower shell, and the other end of the elastic element is connected to the bottom of the diaphragm retaining ring. When the pressure of the medium entering through the pressure measuring port acts on the diaphragm, the diaphragm retaining ring deforms and compresses the elastic element as the diaphragm deforms, causing it to move between the bottom of the diaphragm retaining ring and the limiting step.
[0009] In a preferred embodiment, the diaphragm is provided with a positioning force-bearing area, a deformation film thickness area, a transition area, and a sealing area sequentially from the top to the edge. The positioning force-bearing area faces the pressure measuring port. The deformation film thickness area connects the positioning force-bearing area and the transition area. The positioning force-bearing area and the deformation film thickness area are attached to the top of the diaphragm protector. The transition area is connected to the sealing area and is attached to the diaphragm retaining ring. The sealing area is sealed to the upper cover and the diaphragm retaining ring.
[0010] In a preferred embodiment, the diameter of the positioning force-bearing area is larger than the diameter of the pressure measuring port.
[0011] In a preferred embodiment, the cross-sectional shape of the deformable film thickness region is U-shaped.
[0012] In a preferred embodiment, an interlocking structure is provided between the positioning force-bearing area and the top of the diaphragm protector. The diaphragm retaining ring is provided with a positioning groove and a fitting hole. The positioning groove is located on the upper part of the diaphragm retaining ring and is used to support the transition area and the sealing area. The depth of the positioning groove is the same as the thickness of the transition area. The fitting hole is located below the positioning groove and is coaxially connected to the positioning groove. The diameter of the fitting hole is smaller than the diameter of the positioning groove. The diaphragm protector is fitted into the fitting hole.
[0013] In a preferred embodiment, the diaphragm protector includes a first boss, a second boss, and a base connected sequentially from top to bottom. The outer side of the first boss fits the shape of the positioning force area and the deformation film thickness area. The second boss is fitted into the fitting hole. The diameter of the second boss is larger than the diameter of the first boss. The diameter of the base is larger than the diameter of the second boss. The base can abut against the diaphragm guard ring or the limiting step during the movement of the diaphragm protector.
[0014] In a preferred embodiment, the chassis is provided with a receiving hole that extends upward into the second boss, the elastic element is connected to the receiving hole, and the outer diameter of the elastic element is transitionally fitted with the inner wall of the receiving hole.
[0015] In a preferred embodiment, the diaphragm retaining ring is integrally designed with the lower shell.
[0016] Compared with the prior art, the present invention has at least the following advantages:
[0017] 1. The pressure-resistant structure of this utility model, through the innovative structural design of the pressure-resistant component diaphragm, diaphragm retaining ring, and diaphragm protector, ensures that when high pressure is applied to the sensor, the pressure is entirely applied to the arched or umbrella-shaped diaphragm. The diaphragm protector is fitted inside the diaphragm retaining ring, which constrains the direction of diaphragm deformation. During the deformation process, the deformed part of the diaphragm is completely in contact with the diaphragm protector, and the force is transmitted to the diaphragm protector and the diaphragm retaining ring. The diaphragm can withstand greater pressure and is not easily deformed or broken, eliminating the need to increase the strength and thickness of the diaphragm. The diaphragm protector dynamically moves with the deformation of the diaphragm, eliminating the obstruction of diaphragm deformation by traditional diaphragm protection methods. Small pressure changes can still be accurately detected, thus achieving a balance between diaphragm protection and sensor accuracy and sensitivity.
[0018] 2. The pressure-resistant structure of this utility model features a diaphragm with a partitioned structure design. The sealing area forms a sealing contact surface with the upper cover and the diaphragm guard ring. The transition area can prevent the force of the sealing area being deformed by compression from being transmitted to the deformation film thickness area. It can also preferentially undergo elastic deformation under overpressure to absorb some energy and protect the deformation film thickness area. This does not affect the shape of the positioning force area. Furthermore, during the diaphragm deformation process, the positioning force area and the deformation film thickness area can fit well with the diaphragm guard, enhancing the pressure resistance of the diaphragm. At the same time, the vertical stroke of the diaphragm guard is limited by the diaphragm guard ring and the limiting step, preventing permanent deformation of the diaphragm due to overpressure, which would affect the measurement accuracy and sensitivity of the sensor. This effectively maintains the long-term reliability of the sensor.
[0019] 3. The pressure-resistant structure of this utility model is also equipped with an elastic element to ensure that the diaphragm is safely attached to the diaphragm guard ring and that the diaphragm guard is deformed, displaced, and reset, thereby further preventing the diaphragm from being excessively deformed and causing local rupture. Attached Figure Description
[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the embodiments will be briefly described below.
[0021] Figure 1 This is a schematic diagram of the pressure-resistant structure of the diaphragm pressure sensor of this utility model;
[0022] Figure 2 This is an exploded view of the diaphragm pressure-resistant component of this utility model;
[0023] Figure 3 This is a schematic diagram of the diaphragm pressure-resistant component of this utility model. Detailed Implementation
[0024] To facilitate understanding of this utility model, a more comprehensive description of this utility model will be given below with reference to the accompanying drawings.
[0025] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. Furthermore, unless otherwise explicitly specified and limited, the terms "connection," "fixing," etc., should be interpreted broadly. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances.
[0026] It should also be understood that the terms "upper", "lower", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and should not be construed as limiting this utility model.
[0027] See Figures 1 to 3 The pressure-resistant structure of the diaphragm pressure sensor includes an upper cover 100, a diaphragm pressure-resistant assembly, and a lower shell 500. The upper cover 100 has a pressure measuring port 110. The diaphragm pressure-resistant assembly includes a diaphragm 200, a diaphragm retaining ring 300, and a diaphragm protector 400. The diaphragm 200 is arched or umbrella-shaped and is mounted on the diaphragm retaining ring 300. The edge of the diaphragm is sealed to the upper cover 100 and the diaphragm retaining ring 300. The diaphragm retaining ring 300 is connected to the upper cover 100. The diaphragm protector 400 is fitted inside the diaphragm retaining ring 300. The top of the diaphragm 200 is fitted and connected to the diaphragm retainer 300; the lower shell 500 is connected to the diaphragm retainer 300. The lower shell 500 has a limiting step 510 and an elastic element 600 inside. The limiting step 510 is located below the diaphragm retainer 400. One end of the elastic element 600 is connected to the lower shell 500, and the other end is connected to the bottom of the diaphragm retainer 400. When the pressure of the medium entering through the pressure testing port 110 acts on the diaphragm 200, the diaphragm retainer 400 deforms and compresses with the diaphragm 200, causing the elastic element to move between the bottom of the diaphragm retainer 300 and the limiting step 510. It is understood that, to enhance overall sealing and ease of assembly, the diaphragm retainer 300 can be integrated with the lower shell 500, and the elastic element 600 can be a spring, an elastic rubber component, or other existing elastic structural components.
[0028] It should be noted that, in response to the problem that the diaphragm of the diaphragm pressure sensor is prone to breakage under overpressure and that traditional reinforcement methods reduce accuracy and sensitivity, this pressure-resistant structure achieves a balance between overpressure protection and high sensitivity through the structural cooperation of the arched or umbrella-shaped diaphragm 200, diaphragm retaining ring 300, and diaphragm protector 400. In this pressure-resistant structure, the diaphragm 200 adopts an arched or umbrella-shaped design, which, compared to traditional flat diaphragms, easily distributes the pressure load across the entire curved surface, avoiding localized stress concentration. Without thickening or adding fibers, it can withstand higher pressures without rupture and exhibits controllable deformation under pressure, ensuring sensitivity. The diaphragm retaining ring 300 serves as a fixed support for the diaphragm 200, working together with the upper cover 100 to secure the edge of the diaphragm 200, preventing tearing or excessive stretching. The diaphragm protector 400 is fitted inside the diaphragm retaining ring 300, with its top abutting against the diaphragm 200. When the diaphragm 200 is deformed under pressure, the diaphragm protector 400 moves synchronously with the diaphragm 200, and its stroke is limited between the diaphragm retaining ring 300 and the limiting step 510. It is understood that the diaphragm protector 400 is made of a pressure-resistant rigid material, forming a "flexible-rigid" composite with the diaphragm 200. In the preferred configuration, the elastic element 600 is a spring. The spring, through pre-compression force, keeps the diaphragm 200 initially attached to the top of the diaphragm protector 400. As the pressure gradually increases, the diaphragm 200 deforms, and the diaphragm protector 400 moves downward within the diaphragm retaining ring 300. During this process, the spring compression deformation ensures that the diaphragm 200 remains evenly and tightly attached to the top surface of the diaphragm protector 400. That is, within the normal pressure range, the elastic element 600 and the diaphragm retaining ring 300 together ensure the diaphragm is safely attached to the diaphragm protector 400 within the diaphragm retaining ring 300, allowing the diaphragm protector 400 to deform and displace axially. When the pressure is too high, the elastic element 600 can absorb some of the impact energy, and the limiting step 510 restricts the downward movement of the diaphragm protector 400, preventing the diaphragm 200 from excessive deformation and local rupture. This eliminates the need to strengthen or thicken the diaphragm to withstand greater pressure, ensuring the sensor's response sensitivity and measurement accuracy.
[0029] Its working principle is briefly described as follows: In the initial state, the diaphragm 200 and the diaphragm protector 400 are in contact, and the diaphragm protector 400 is stopped at the upper stroke limit (bottom of the diaphragm retaining ring 300). The pressure of the medium entering through the pressure measuring port 110 acts on the diaphragm, and the diaphragm 200 deforms. During normal pressure measurement, the diaphragm protector 400 moves synchronously with the deformation of the diaphragm 200 without interfering with the deformation process of the diaphragm 200. The sensor converts the diaphragm deformation into an electrical signal output to measure the pressure value. When the pressure exceeds the threshold, the diaphragm deformation increases, and the diaphragm protector 400 moves downward to the lower stroke limit (limiting step 510 surface). The diaphragm protector 400 can no longer move downward, thus preventing the diaphragm from further deforming and avoiding diaphragm rupture. After the pressure is released, the elastic element causes the diaphragm 200 and the diaphragm protector 400 to return to their initial state.
[0030] In some embodiments, the diaphragm 200 is provided with a positioning force-bearing area 210, a deformation film thickness area 220, a transition area 230 and a sealing area 240 sequentially from the top to the edge. The positioning force-bearing area 210 faces the pressure measuring port 110. The deformation film thickness area 220 connects the positioning force-bearing area 210 and the transition area 230. The positioning force-bearing area 210 and the deformation film thickness area 220 are attached to the top of the diaphragm protector 400. The transition area 230 is connected to the sealing area 240 and is attached to the diaphragm retaining ring. The sealing area 240 is sealed to the upper cover 100 and the diaphragm retaining ring 300.
[0031] It should be noted that, as described above, the diaphragm 200 is designed with partitions, such as... Figure 1 As shown, the positioning stress zone 210 is located on the top of the diaphragm 200, directly facing the pressure port, and is the initial application area of the pressure load. This area is in close contact with the top of the diaphragm guard 400, transmitting the pressure to the guard without loss and reducing energy loss. The deformation film thickness zone 220 is the main deformation area of the diaphragm. When the positioning stress zone 210 is under pressure, it moves downward to stretch the deformation film thickness zone 220. The transition zone 230 connects the deformation film thickness zone 220 and the sealing zone 240, which can prevent the compression deformation of the sealing zone 240 from being transmitted to the deformation film thickness zone 220, and can preferentially undergo elastic deformation under overpressure to absorb some energy and protect the deformation film thickness zone 220 from rupture. The sealing zone 240 is located at the edge of the diaphragm and is sealed to the upper cover 100 and the diaphragm guard ring 300 to fix the edge of the diaphragm and prevent the diaphragm from sliding or misaligning. After the diaphragm is installed into the sensor, the sealing area 240 is compressed by the top cover 100 and the diaphragm retainer ring 300, resulting in elastic deformation and forming a sealing contact surface. Because the diaphragm has a transition area 230, the compression deformation is not transmitted to the diaphragm deformation thickness area 220, and the sealing diaphragm does not change the shape of the diaphragm positioning force area 210. Therefore, the diaphragm 200 can fit well with the diaphragm retainer 400 during deformation. It is understandable that the diaphragm 200 with this partition design can be formed by one-time injection molding or stamping without complex post-processing.
[0032] Furthermore, the diameter of the positioning force-bearing area 210 is larger than the diameter of the pressure measuring port. It can be understood that when the diameter of the positioning force-bearing area 210 is larger than the diameter of the pressure measuring port, the positioning force-bearing area 210 covers the area surrounding the pressure measuring port. After the pressurized fluid flows in from the pressure measuring port, it will first diffuse to the entire surface of the positioning force-bearing area 210, resulting in a larger pressure application area and significantly reducing the stress per unit area, rather than concentrating the impact on a local area.
[0033] Furthermore, the cross-sectional shape of the deformation film thickness region 220 is U-shaped. It should be noted that the smooth transition of the U-shaped cross-section can disperse the deformation stress under pressure. Moreover, when the deformation in this region is large under excessive pressure, the smooth transition with the transition zone allows some stress to be transferred to the transition zone 230, thereby reducing the overall crack initiation and propagation of the diaphragm and improving the fatigue life of the diaphragm 200. During the deformation process, the deformation film thickness region 220 remains in contact with the diaphragm protector 400 and maintains the deformation direction, allowing the diaphragm to undergo significant deformation under small pressure. The diaphragm does not need to be thickened or post-processed to strengthen its strength, thereby improving the sensor's ability to capture pressure signals.
[0034] To further improve the tightness of the fit between the diaphragm and the diaphragm protector 400 and the stability during use, an interlocking structure is provided between the positioning stress area 210 and the top of the diaphragm protector 400. Compared with traditional surface contact, the interlocking structure ensures that the diaphragm protector 400 and the positioning stress area 210 maintain a stable connection under extreme working conditions, reducing the risk of diaphragm 200 damage due to connection failure, and effectively resisting forces caused by external vibration, impact, and medium pressure fluctuations. Specifically, an interlocking protrusion can be provided in the middle of the positioning stress area 210, and an interlocking groove can be provided on the top of the diaphragm protector 400, with the interlocking protrusion and the interlocking groove interlocking and connecting with each other.
[0035] In some embodiments, the diaphragm retainer ring 300 is provided with a positioning groove 310 and a fitting hole 320. The positioning groove 310 is provided on the upper part of the diaphragm retainer ring 300 and is used to support the transition area 230 and the sealing area 240. The depth of the positioning groove 310 is the same as the thickness of the transition area 230. The fitting hole 320 is provided below the positioning groove 310 and coaxially communicates with the positioning groove 310. The diameter of the fitting hole is smaller than the diameter of the positioning groove 310. The diaphragm protector 400 is fitted into the fitting hole 320.
[0036] It should be noted that the positioning groove 310 is located on the upper part of the diaphragm retaining ring 300, supporting the transition area 230 and sealing area 240 of the diaphragm. Thus, under pressure on the diaphragm 200, the positioning groove 310 distributes the pressure evenly to the edge of the diaphragm 200 through surface contact support, avoiding localized stress concentration. The depth of the positioning groove 310 is consistent with the transition area 230, further improving the alignment of the diaphragm 200 edges (transition area 230 and sealing area 240) between the upper cover 100 and the diaphragm retaining ring 300. The fixed constraint between 0; the sleeve hole 320 and the positioning groove 310 are coaxially connected, and the diameter of the sleeve hole 320 is smaller than the diameter of the positioning groove 310. Thus, the diaphragm guard ring 300 forms an upper support for the diaphragm 200 and a lower sleeve structure for the diaphragm guard 400 connected to the diaphragm. This effectively prevents the diaphragm guard from falling off and also maintains the coaxiality between the diaphragm guard 400 and the diaphragm 200, avoiding uncontrollable deformation of the diaphragm 200 or easy damage to the diaphragm caused by eccentric loading during pressure measurement.
[0037] In some embodiments, the diaphragm protector 400 includes a first boss 420, a second boss 430, and a base 440 connected sequentially from top to bottom. The outer side of the first boss 420 fits the shape of the positioning force area 210 and the deformation film thickness area 220. The second boss 430 is fitted into the fitting hole 320. The diameter of the second boss 430 is larger than the diameter of the first boss 420. The diameter of the base 440 is larger than the diameter of the second boss 430. During the movement of the diaphragm protector 400, the base 440 can abut against the diaphragm guard ring 300 or the limiting step 510.
[0038] It should be noted that the aforementioned diaphragm protector 400 adopts a layered boss design. The outer shape of the first boss 420 fits the shape of the positioning stress area 210 and the deformation film thickness area 220. Therefore, under pressure, this part of the diaphragm is completely fitted with the diaphragm protector 400, ensuring that the diaphragm 200 deforms uniformly along the curved surface of the first boss 420 when under stress, avoiding local stress concentration. The first boss 420 and the second boss 430 can move within the sleeve hole 320. The base 440 is used to connect with the diaphragm retaining ring 300. The limiting step 510 limits the movement of the diaphragm protector 400. When the diaphragm protector 400 moves upward to the bottom of the diaphragm retainer ring 300 after releasing pressure, the chassis 440 abuts against the bottom of the diaphragm retainer ring 300 to prevent the diaphragm protector 400 from moving too upward and causing the diaphragm 200 to be over-compressed. When the diaphragm protector 400 moves downward to the lower limit under pressure, the chassis 440 abuts against the surface of the limiting step 510 to prevent the diaphragm protector 400 from falling off or the diaphragm 200 from being over-stretched.
[0039] In some embodiments, the chassis 440 is provided with a receiving hole 441, which extends upward into the second boss 430. An elastic member 600 is connected in the receiving hole 441, and the outer diameter of the elastic member 600 is in transition fit with the inner wall of the receiving hole 441.
[0040] It should be noted that the transition fit between the outer diameter of the elastic element 600 and the inner wall of the receiving hole 441 helps maintain the linear deformation of the elastic element 600 in the axial direction. Linear deformation ensures stable force, displacement, and signal conversion efficiency, avoiding sensitivity fluctuations and hysteresis caused by nonlinearity. Moreover, linear deformation, through uniform force transmission and deformation control, suppresses local stress concentration and overload deformation, thus improving the fatigue life of the diaphragm. On the other hand, the fact that the elastic element 600 is built into the receiving hole 441 also saves axial space, making the sensor structure more compact.
[0041] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.
Claims
1. A pressure-resistant structure of a diaphragm type pressure sensor, characterized by comprising: include: The upper cover has a pressure measuring port. A diaphragm pressure-resistant assembly includes a diaphragm, a diaphragm retaining ring, and a diaphragm protector. The diaphragm is arched or umbrella-shaped and is disposed on the diaphragm retaining ring. The edge of the diaphragm is sealed to the upper cover and the diaphragm retaining ring. The diaphragm retaining ring is connected to the upper cover. The diaphragm protector is sleeved inside the diaphragm retaining ring, and the top of the diaphragm protector is fitted and connected to the diaphragm. The lower shell is connected to the diaphragm retaining ring. The lower shell is provided with a limiting step and an elastic element inside. The limiting step is located below the diaphragm retaining ring. One end of the elastic element is connected to the lower shell, and the other end of the elastic element is connected to the bottom of the diaphragm retaining ring. When the pressure of the medium entering through the pressure measuring port acts on the diaphragm, the diaphragm retaining ring deforms and compresses the elastic element as the diaphragm deforms, causing it to move between the bottom of the diaphragm retaining ring and the limiting step.
2. The diaphragm pressure sensor pressure-resistant structure according to claim 1, characterized by, The diaphragm is provided with a positioning force-bearing area, a deformation film thickness area, a transition area and a sealing area in sequence from the top to the edge. The positioning force-bearing area faces the pressure measuring port. The deformation film thickness area connects the positioning force-bearing area and the transition area. The positioning force-bearing area and the deformation film thickness area are attached to the top of the diaphragm protector. The transition area is connected to the sealing area and is attached to the diaphragm retaining ring. The sealing area is sealed to the upper cover and the diaphragm retaining ring.
3. The diaphragm pressure sensor pressure-resistant structure according to claim 2, characterized by, The diameter of the positioning force zone is larger than the diameter of the pressure measuring port.
4. The diaphragm pressure sensor pressure-resistant structure according to claim 2, characterized by, The cross-sectional shape of the deformed film thickness region is U-shaped.
5. The diaphragm pressure sensor pressure-resistant structure according to claim 2, characterized by, An interlocking structure is provided between the positioning force-bearing area and the top of the diaphragm protector.
6. The pressure-resistant structure of the diaphragm pressure sensor according to claim 3, characterized in that, The diaphragm retaining ring is provided with a positioning groove and a fitting hole. The positioning groove is located on the upper part of the diaphragm retaining ring and is used to support the transition area and the sealing area. The depth of the positioning groove is the same as the thickness of the transition area. The fitting hole is located below the positioning groove and is coaxially connected to the positioning groove. The diameter of the fitting hole is smaller than the diameter of the positioning groove. The diaphragm retaining member is fitted into the fitting hole.
7. The pressure-resistant structure of the diaphragm pressure sensor according to claim 6, characterized in that, The diaphragm protector includes a first boss, a second boss, and a base connected sequentially from top to bottom. The outer side of the first boss fits the shape of the positioning force area and the deformation film thickness area. The second boss is fitted into the fitting hole. The diameter of the second boss is larger than the diameter of the first boss. The diameter of the base is larger than the diameter of the second boss. The base can abut against the diaphragm guard ring or the limiting step during the movement of the diaphragm protector.
8. The pressure-resistant structure of the diaphragm pressure sensor according to claim 7, characterized in that, The chassis is provided with a receiving hole that extends upward into the second boss. The elastic element is connected to the receiving hole, and the outer diameter of the elastic element is in transition fit with the inner wall of the receiving hole.
9. The pressure-resistant structure of the diaphragm pressure sensor according to claim 1, characterized in that, The diaphragm retaining ring is integrated with the lower shell.