A vacuum valve protection device

Abstract

This utility model discloses a vacuum valve protection device, belonging to the field of vacuum valve technology. It includes a three-way pipe, a first pumping pipeline assembly, a second pumping pipeline assembly, a detection pipeline assembly, a support, a primary pumping mechanism, a secondary pumping mechanism, and a detection mechanism. The support is arranged in pairs, with a three-way pipe installed on the top. The three ports of the three-way pipe are respectively connected to one end of the first pumping pipeline assembly, the second pumping pipeline assembly, and the detection pipeline assembly. The primary pumping mechanism is connected to the other end of the first pumping pipeline assembly, the secondary pumping mechanism is connected to the other end of the second pumping pipeline assembly, and the detection mechanism is connected to the other end of the detection pipeline assembly. This invention solves the problem of inaccurate detection results caused by the lack of a protective structure for vacuum valves in existing technologies. It also features high compatibility and economical maintenance.

Description

Technical Field

[0001] This utility model relates to the field of vacuum valve technology, and specifically to a vacuum valve protection device. Background Technology

[0002] In airtightness testing in manufacturing industries such as automobiles and precision instruments, helium mass spectrometry leak detection technology has become an industry standard due to its ultra-high sensitivity. This technology requires placing the workpiece under test in a vacuum testing chamber, establishing a negative pressure environment, and filling the workpiece with helium tracer medium. A helium mass spectrometer is then used to capture leaking molecules, achieving non-destructive quantitative detection. The vacuum valve, as a core component controlling the airflow direction and pipeline opening / closing, directly affects the detection accuracy and system stability.

[0003] The current system faces two major drawbacks: First, the rubber or metal sealing rings of the vacuum valves are prone to attracting foreign objects such as dust and metal shavings during frequent opening and closing, which can damage the sealing surface and cause contamination of the high vacuum pump unit and helium mass spectrometer leak detector, thus affecting the detection results; Second, the traditional single-chamber series pipeline design makes it impossible to run the vacuuming and detection processes in parallel, while when multiple chambers are connected in parallel, the pressure difference can cause gas backflow, thus masking the true leakage signal.

[0004] Therefore, how to provide a vacuum valve protection device that overcomes the defects of the existing structure is a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] Therefore, this utility model provides a vacuum valve protection device to solve the problem of inaccurate detection results caused by the lack of a protective structure for vacuum valves in the prior art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] This utility model discloses a vacuum valve protection device, comprising:

[0008] The brackets are arranged in pairs, with a three-way pipe installed on the top. The three ports of the three-way pipe are respectively connected to one end of the first pumping pipeline assembly, the second pumping pipeline assembly, and the detection pipeline assembly.

[0009] The primary pumping mechanism is connected to the other end of the first pumping pipeline assembly;

[0010] An advanced pumping mechanism is connected to the other end of the second pumping piping assembly;

[0011] The testing mechanism is connected to the other end of the testing pipeline assembly.

[0012] In one possible implementation, the first pumping piping assembly includes:

[0013] The second shut-off valve is provided in pairs, with one end connected to the port of the three-way pipe and the other end of the bottom of the second shut-off valve connected to a cavity connecting pipe, the bottom of which is connected to a cavity.

[0014] The second pipeline is installed in pairs, with one end inserted into the side wall of the cavity connecting pipe and the other end connected to the first shut-off valve. A venting valve is installed in the middle section of the second pipeline.

[0015] The first conduit is connected between the two first shut-off valves;

[0016] The first transmission tube has one end inserted into the side wall of the first through pipe, and the other end of the first transmission tube is connected to the primary pumping mechanism.

[0017] In one possible implementation, the second pumping piping assembly includes:

[0018] Dual-function vacuum valves, installed in pairs, with one end connected to the port of the three-way pipe;

[0019] The second conduit is connected between the two dual-function vacuum valves;

[0020] The second transmission tube has one end inserted into the side wall of the second through tube, and the other end of the second transmission tube is connected to the advanced pumping mechanism.

[0021] In one possible implementation, the detection piping assembly includes:

[0022] The third shut-off valve is installed in pairs, with one end connected to the port of the tee pipe;

[0023] The third pipe is connected between the two third shut-off valves;

[0024] The third transmission tube has one end inserted into the side wall of the third through pipe, and the other end of the third transmission tube is connected to the detection mechanism.

[0025] In one possible implementation, the primary pumping mechanism includes:

[0026] The filters are installed in pairs, with one end connected to the first transmission pipe and the other end connected to one end of the connecting pipe.

[0027] The middle section of the T-shaped pipe is connected to the other end of the connecting pipe, and one end of the T-shaped pipe is connected to a fourth shut-off valve.

[0028] The first vacuum pump, arranged in pairs, is connected to the other two ports of the T-tube.

[0029] In one possible implementation, the advanced pumping mechanism is a second vacuum pump, one end of which is connected to one end of the second transmission tube, and the bottom port of the second vacuum pump is connected to the fourth shut-off valve.

[0030] This invention employs a multi-stage contamination interception and dual-chamber alternating working mechanism, significantly improving the lifespan of the dual-function vacuum valve's sealing ring and the reliability of the equipment. In the primary pumping stage, gas in the chamber flows through the first shut-off valve and the first pumping pipeline assembly to the filter, locking a large amount of dust, metal debris, and other contaminants within the filter and the first shut-off valve. During primary pumping, the second shut-off valve is closed, preventing contaminants from entering the second vacuum pump and leak detector. In the advanced pumping stage, gas in the chamber flows through the second shut-off valve and the dual-function vacuum valve through the second pumping pipeline assembly to the second vacuum pump. Because most contaminants remain in the filter and the gas flow rate slows down after primary pumping, contaminants have difficulty reaching the dual-function vacuum valve and the second vacuum pump, thus ensuring the lifespan of the precision equipment. The dynamic alternation of the dual chambers enables parallel operation of detection and vacuuming. The dual-function vacuum valve also implements an anti-backflow mechanism, isolating non-activated vacuuming paths during detection to prevent gas backflow caused by pressure differences, ensuring that the helium mass spectrometer only captures leaked molecules from the tested component. This invention solves problems such as sealing ring contamination, equipment damage, and low testing efficiency, while also offering high compatibility and economical maintenance. Attached Figure Description

[0031] To more clearly illustrate the embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0032] The structures, proportions, sizes, etc. illustrated in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0033] Figure 1 A perspective view of the vacuum valve protection device provided by this utility model;

[0034] Figure 2 A perspective view of the first pumping pipeline assembly provided by this utility model;

[0035] Figure 3 A perspective view of the second pumping pipeline assembly provided by this utility model;

[0036] Figure 4 A perspective view of the detection pipeline assembly provided by this utility model;

[0037] Figure 5 A perspective view of the primary pumping mechanism and the advanced pumping mechanism provided by this utility model;

[0038] In the diagram: 1. T-junction; 2. First pumping pipeline assembly; 21. Cavity connecting pipe; 22. Second shut-off valve; 23. Air rupture valve; 24. First shut-off valve; 25. Second pipeline; 26. First connecting pipe; 27. First transmission pipe; 3. Second pumping pipeline assembly; 31. Dual-function vacuum valve; 32. Second connecting pipe; 33. Second transmission pipe; 4. Detection pipeline assembly; 41. Third shut-off valve; 42. Third connecting pipe; 43. Third transmission pipe; 5. Support; 6. Primary pumping mechanism; 61. Filter; 62. First vacuum pump; 63. Connecting pipe; 64. T-tube; 7. Advanced pumping mechanism. Detailed Implementation

[0039] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0040] Please refer to Figures 1-5 The present invention discloses a vacuum valve protection device, as follows: Figure 1 It includes a three-way pipe 1, a first pumping pipeline assembly 2, a second pumping pipeline assembly 3, a detection pipeline assembly 4, a bracket 5, a primary pumping mechanism 6, and a high-level pumping mechanism 7. The brackets 5 are arranged in pairs, and a three-way pipe 1 is installed on the top. The three ports of the three-way pipe 1 are respectively connected to one end of the first pumping pipeline assembly 2, the second pumping pipeline assembly 3, and the detection pipeline assembly 4. The primary pumping mechanism 6 is connected to the other end of the first pumping pipeline assembly 2, the high-level pumping mechanism 7 is connected to the other end of the second pumping pipeline assembly 3, and the detection mechanism (not shown in the figure) is connected to the other end of the detection pipeline assembly 4.

[0041] The usage process of this utility model embodiment is as follows: The control unit (not shown in the figure) activates the dual-chamber alternation mechanism. When one of the chambers (not shown in the figure) activates the detection pipeline assembly 4 to connect with the detection mechanism to perform workpiece helium detection, it simultaneously blocks its first pumping pipeline assembly 2 and second pumping pipeline assembly 3, that is, closes the first shut-off valve 24 and the dual-function vacuum valve 31. The dual-function vacuum valve 31 can also isolate and prevent gas from other chambers from flowing back through the second pumping pipeline assembly 3. At the same time, the other chamber activates the first pumping pipeline assembly 2, that is, opens the first shut-off valve 24 and closes the second shut-off valve 22, so that the gas containing pollutants flows through the filter 61 to the first vacuum pump 62 for primary pumping, and traps pollutants such as dust or metal fragments in the filter 61 to achieve primary interception. When the initial pumping stage (reducing pressure from atmospheric pressure to a basic vacuum level) is achieved, the control unit switches the chamber to the advanced pumping stage (further reducing the pressure to a high vacuum level based on the basic vacuum achieved in the initial pumping stage). The first shut-off valve 24 is closed, and the second pumping pipeline assembly 3 is activated, i.e., the second shut-off valve 22 and the dual-function vacuum valve 31 are opened, connecting the advanced pumping mechanism 7 to pump to a high vacuum state. At this time, because contaminants have been intercepted and the airflow is slowed down, the dual-function vacuum valve 31 and the second vacuum pump are effectively protected. The dual-function vacuum valve 31 is located in the flow path of the chamber during the detection stage, effectively preventing backflow of airflow from the high-pressure pumping stage chamber into the low-pressure detection stage chamber.

[0042] When the vacuum level is qualified, the control unit triggers a dual-chamber role alternation. After the original detection chamber is used to change the workpiece, it enters the vacuuming process, sequentially activating the first pumping pipeline assembly 2 and the second pumping pipeline assembly 3. Meanwhile, the original vacuuming chamber blocks the pumping path and activates the detection pipeline assembly 4 to connect to the detection mechanism, and so on. Relying on the anti-backflow function of the dual-function vacuum valve 31, the contaminant interception function of the filter 61 and the first shut-off valve 24, and the dual-chamber parallel mechanism, precision equipment protection and detection efficiency are simultaneously achieved.

[0043] In a specific embodiment, such as Figure 2The first pumping pipeline assembly 2 includes a cavity connecting pipe 21, a second shut-off valve 22, a venting valve 23, a first shut-off valve 24, a second pipeline 25, a first connecting pipe 26, and a first transmission pipe 27. The second shut-off valves 22 are arranged in pairs, with one end connected to the port of the three-way pipe 1, and the other end of the bottom of the second shut-off valve 22 connected to the cavity connecting pipe 21. The bottom of the cavity connecting pipe 21 is connected to a cavity. The second pipelines 25 are arranged in pairs, with one end inserted into the side wall of the cavity connecting pipe 21, and the other end connected to the first shut-off valve 24. A venting valve 23 is installed in the middle section of the second pipeline 25. The first connecting pipe 26 connects between the two first shut-off valves 24. One end of the first transmission pipe 27 is inserted into the side wall of the first connecting pipe 26, and the other end of the first transmission pipe 27 is connected to the primary pumping mechanism 6. The cavity connecting pipe 21 serves as the direct interface to the cavity under test and is the inlet for the pollutant gas to enter the pumping and detection path. The first shut-off valve 24 and the second shut-off valve 22 are the control valves for this path. The first shut-off valve 24 opens during primary pumping, allowing gas to flow to subsequent components, and closes during advanced pumping and detection. Its function is to open during primary pumping to form a complete path, allowing dust and metal debris carried by the high-speed airflow to flow through the second pipe 25, the first through pipe 26, and the first transmission pipe 27 to the filter 61 and be locked in the valve channel and the filter. The second shut-off valve 22 closes during primary pumping and opens during advanced pumping and detection. Its function is to prevent contaminants from entering the second pumping pipeline assembly 3 and the detection pipeline assembly 4, and to prevent gas backflow from interfering with detection. The second pipe 25 connects the cavity connecting pipe 21, the venting valve 23, and the first shut-off valve 24, and forms a contaminant transmission channel. It closes after primary pumping is completed, isolating the contaminated primary path and preparing for switching to advanced pumping. The first through pipe 26 connects the two symmetrical first shut-off valves 24, realizing a parallel structure where a single primary pumping mechanism 6 serves two cavities. The first transmission pipe 27 completes the final delivery of contaminants, transmitting the gas from the first shut-off valve 24 to the filter 61 for final interception. The venting valve 23 serves as an auxiliary valve, used to disrupt the vacuum balance pressure during workpiece replacement or maintenance.

[0044] In the primary pumping state, the gas flows out of the cavity first, through the cavity connecting pipe 21, into the second pipe 25, then through the venting valve 23 and the first shut-off valve 24, and then through the first through pipe 26 and the first transmission pipe 27, finally reaching the primary pumping mechanism 6.

[0045] In a specific embodiment, such as Figure 3The second pumping pipeline assembly 3 includes a dual-function vacuum valve 31, a second connecting pipe 32, and a second transmission pipe 33. The dual-function vacuum valves 31 are arranged in pairs, with one end connected to the port of the three-way pipe 1. The second connecting pipe 32 connects between the two dual-function vacuum valves 31. One end of the second transmission pipe 33 is inserted into the side wall of the second connecting pipe 32, and the other end connects to the advanced pumping mechanism 7. The dual-function vacuum valve 31 achieves both control of the advanced pumping path and backflow prevention. Because the primary pumping has intercepted most contaminants and reduced the gas flow rate, contaminants are unlikely to reach the dual-function vacuum valve 31 and the downstream high-vacuum pump, and are therefore closed during the detection stage. Its most critical function is to physically isolate the second connecting pipe 32, which is shared by the detection chamber and the pumping chamber, thus solving the problem of gas backflow into the detection chamber caused by the pressure difference resulting from the different vacuum states of the chambers. The second connecting pipe 32 connects the two dual-function vacuum valves 31, realizing a parallel structure of the dual-chamber advanced pumping path, allowing a single advanced pumping mechanism 7 to serve both chambers. The second transmission pipe 33 serves as a gas transmission channel, directing the gas flow through the dual-function vacuum valve 31 to the high vacuum pump 7 to ensure the establishment of a high vacuum environment.

[0046] During the advanced pumping stage, the gas flows out of the cavity, through the cavity connecting pipe 21, into the second shut-off valve 22, then through the three-way pipe 1, into the dual-function vacuum valve 31, and then through the second connecting pipe 32 and the second transmission pipe 33, finally reaching the advanced pumping mechanism 7.

[0047] In a specific embodiment, such as Figure 4 The detection pipeline assembly 4 includes a third shut-off valve 41, a third through pipe 42, and a third transmission pipe 43. The third shut-off valves 41 are arranged in pairs, with one end connected to the port of the three-way pipe 1. The third through pipe 42 connects between the two third shut-off valves 41. One end of the third transmission pipe 43 is inserted into the side wall of the third through pipe 42, and the other end is connected to the detection mechanism. The third shut-off valve 41 acts as the opening and closing controller of the detection path. It opens when the cavity is in the detection state, ensuring that helium molecules leaking from the workpiece enter the helium mass spectrometer. It closes during the vacuuming stage, isolating the cavity airflow during the vacuuming stage from impacting the leak detector and ensuring the purity of the detection environment. The third through pipe 42 connects to the parallel dual-cavity third shut-off valves 41, enabling rapid switching between the dual-cavity dynamic alternating pumping mode and the detection mode. The third transmission pipe 43 acts as a gas delivery pipe, directionally delivering the gas from the detection cavity to the leak detector. Its sealing structure ensures the lossless transmission of helium molecules.

[0048] During the testing phase, the gas starts from the cavity, flows through the cavity connecting pipe 21, enters the three-way pipe 1, then passes through the third shut-off valve 41, and finally passes through the third pipe 42 and the third transmission pipe 43 to the testing agency.

[0049] In a specific embodiment, such as Figure 5The primary pumping mechanism 6 includes a filter 61, a first vacuum pump 62, a connecting pipe 63, a T-tube 64, and a fourth shut-off valve 65. The filters 61 are arranged in pairs, with one end connected to the first transmission pipe 27 and the other end connected to one end of the connecting pipe 63. The middle section of the T-tube 64 is connected to the other end of the connecting pipe 63, and the fourth shut-off valve 65 is connected to one end of the T-tube 64. The first vacuum pump 62 is arranged in pairs and connected to the other two ports of the T-tube 64. The filter 61 acts as a multi-stage contaminant interceptor, capturing contaminants such as dust and metal fragments in the primary pumping flow, protecting downstream precision equipment. The first vacuum pump 62 provides primary pumping power, reducing the chamber pressure from atmospheric pressure to a predetermined pressure through pumping. The connecting pipe 63 connects the filter 61 and the T-tube 64, delivering the filtered gas. The fourth shut-off valve 65 is installed at the vertical port of the T-tube 64 for isolation, maintenance, or airflow regulation.

[0050] In a specific embodiment, such as Figure 5 The advanced pumping mechanism 7 is a second vacuum pump, with one end connected to one end of the second transmission pipe 33, and the bottom port of the second vacuum pump connected to the fourth shut-off valve 65. As the power source for advanced pumping, the second vacuum pump 7 starts after the primary pumping reaches the basic vacuum level. It further reduces the chamber pressure to a high vacuum state through the second pumping pipeline assembly 3, ensuring that helium molecules leaking from the workpiece can be accurately captured by the helium mass spectrometer under high vacuum conditions. This pump is protected by a multi-stage contamination interception mechanism. In the primary pumping stage, the filter 61 and the first shut-off valve 24 intercept most contaminants, allowing it to handle only clean, low-speed gas flow, significantly extending its service life.

[0051] Although the present invention has been described in detail above with general descriptions and specific embodiments, some modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, all such modifications or improvements made without departing from the spirit of the present invention fall within the scope of protection claimed by the present invention.

Claims

1. A vacuum valve protection device, characterized by, include: The bracket (5) is set in pairs and a three-way pipe (1) is installed on the top. The three ports of the three-way pipe (1) are respectively connected to one end of the first pumping pipeline assembly (2), the second pumping pipeline assembly (3) and the detection pipeline assembly (4); The primary pumping mechanism (6) is connected to the other end of the first pumping pipeline assembly (2); Advanced pumping mechanism (7) is connected to the other end of the second pumping pipeline assembly (3); The testing mechanism is connected to the other end of the testing pipeline assembly (4).

2. The vacuum valve protection device of claim 1, wherein, The first pumping pipeline assembly (2) includes: The second shut-off valve (22) is set in pairs, with one end connected to the port of the three-way pipe (1), and the other end of the bottom of the second shut-off valve (22) is connected to a cavity connecting pipe (21), and the bottom of the cavity connecting pipe (21) is connected to a cavity. The second pipeline (25) is arranged in pairs, with one end inserted into the side wall of the cavity connecting pipe (21), and the other end of the second pipeline (25) is connected to the first shut-off valve (24). A vent valve (23) is installed in the middle section of the second pipeline (25). The first conduit (26) is connected between the two first shut-off valves (24); The first transmission tube (27) is inserted at one end into the side wall of the first through tube (26), and the other end of the first transmission tube (27) is connected to the primary pumping mechanism (6).

3. The vacuum valve protection device of claim 2, wherein The second pumping pipeline assembly (3) includes: A pair of dual-function vacuum valves (31) are provided, with one end connected to the port of the three-way pipe (1); The second conduit (32) is connected between the two dual-function vacuum valves (31); The second transmission tube (33) is inserted at one end into the side wall of the second through tube (32), and the other end of the second transmission tube (33) is connected to the advanced pumping mechanism (7).

4. The vacuum valve protector of claim 1, wherein The detection pipeline assembly (4) includes: The third shut-off valve (41) is installed in pairs, with one end connected to the port of the three-way pipe (1); The third pipe (42) is connected between the two third shut-off valves (41); The third transmission tube (43) is inserted at one end into the side wall of the third through tube (42), and the other end of the third transmission tube (43) is connected to the detection mechanism.

5. The vacuum valve protector of claim 3, wherein The primary pumping mechanism (6) includes: The filters (61) are arranged in pairs, with one end connected to the first transmission pipe (27) and the other end connected to one end of the connecting pipe (63); The middle section of the T-shaped pipe (64) is connected to the other end of the connecting pipe (63), and one end of the T-shaped pipe (64) is connected to a fourth shut-off valve (65). The first vacuum pump (62) is arranged in pairs and connected to the other two ports of the T-tube (64).

6. The vacuum valve protection device of claim 5, wherein, The advanced pumping mechanism (7) is a second vacuum pump, one end of which is connected to one end of the second transmission pipe (33), and the bottom port of the second vacuum pump is connected to the fourth shut-off valve (65).

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