An annealing apparatus

Abstract

This utility model relates to an annealing apparatus, including a base, a heating stage, a sample stage, and a lifting device. The heating stage is fixed on the base, the sample stage is used to place the sample to be annealed, the heating stage serves as a heat source to heat the sample stage and the sample, and the lifting device adjusts the distance between the sample stage and the heating stage by raising or lowering the sample stage. This apparatus, by setting up the base, heating stage, sample stage, and lifting device, provides an annealing apparatus that can independently control the heating time of each group of samples.

Description

Technical Field

[0001] This utility model relates to an annealing device, belonging to the field of mechanical equipment. Background Technology

[0002] In experimental research in materials science, chemical synthesis, and semiconductor fabrication, heating and annealing are crucial process steps. Traditional heating stages, as commonly used heating equipment, heat samples through heat conduction or radiation. However, their functional design is relatively simple, exhibiting significant limitations, especially when processing batches of samples. For example, when a single experiment requires heating or annealing multiple samples for different durations, traditional heating stages typically cannot independently control the heating time of each sample, requiring manual timing and operation. This method is not only inefficient but also prone to timing errors due to human negligence (such as omissions or timeouts), thus affecting the repeatability and accuracy of experimental results. Summary of the Invention

[0003] To address the aforementioned problems, this invention provides an annealing apparatus. This apparatus, comprising a base, a heating stage, a sample stage, and a lifting device, allows for independent control of the heating time for each group of samples. The structure of this apparatus is as follows: An annealing apparatus includes a base, a heating stage, a sample stage, and a lifting device. The heating stage is fixed on the base, and the sample stage is used to place the sample to be annealed. The heating stage serves as a heat source to heat the sample stage and the sample. The lifting device adjusts the distance between the sample stage and the heating stage by raising or lowering the sample stage. There are n sample stages, where n ≥ 2. The n sample stages are divided into N groups, where 0 < N ≤ n. Sample stages in the same group are raised and lowered synchronously, while sample stages in different groups are raised and lowered independently. When n = N, each sample stage can move independently.

[0004] As a preferred embodiment, the heating stage is provided with a number of grooves, the number of grooves corresponding to the number of sample stages. During sample annealing, the lifting device drives the sample stage to descend and fall into the grooves. After annealing is completed, the lifting device drives the sample stage away from the grooves.

[0005] As a preferred embodiment, the lifting device includes a fixed end and a telescopic end. The fixed end is disposed on the base, and the telescopic end is connected to the sample stage. The heating stage is provided with a through hole, and the lifting device passes through the through hole to connect the base and the heating stage.

[0006] As a preferred embodiment, a recess is provided on the bottom wall of the sample stage, and a photosensitive sensor is provided in the recess. After the annealed battery cell is placed on the sample stage, the photosensitive sensor receives a light blocking signal and transmits the signal to the lifting device. The lifting device drives the sample stage to descend into the groove of the heating stage.

[0007] As a preferred embodiment, the grooves on the heating platform are arranged in an array, and the arrayed grooves are divided into a first region and a second region. The first region has a number of heating wires, which are connected to a first heating controller. The second region has a number of heating wires, which are connected to a second heating controller.

[0008] As a preferred embodiment, the heating wire is distributed between two adjacent rows of grooves; the heating wire is a nickel-chromium flat sheet heating wire.

[0009] As a preferred embodiment, the heating platform is mounted on the base via a supporting connecting column, which is a hollow structure; a heating switch is mounted on the base, and the heating switch is electrically connected to the heating controller; the hollow structure contains the wiring between the heating switch and the heating controller.

[0010] As a preferred embodiment, the lifting device is an electric telescopic rod, with one end of the electric telescopic rod threadedly connected to the base and the other end welded to the sample stage.

[0011] The beneficial effects of this utility model are as follows: Attached Figure Description

[0012] Figure 1 This is a schematic diagram showing the state of the annealing device in this invention when it is raised. Figure 2 This is a schematic diagram showing the state of the annealing device during its descent in this invention; Figure 3 for Figure 2 Side view of the device shown; Figure 4 This is a diagram showing the distribution of the heating wires on the groove side; Figure 5 This is a structural diagram of the heating wire. Detailed Implementation

[0013] The present invention will be further explained in detail below with reference to the accompanying drawings and specific embodiments, but it should be understood that the scope of protection of this utility model is not limited to the specific embodiments. The directional terms such as "up" and "down" mentioned below are all... Figure 1 The description is based on the placement of the device.

[0014] like Figure 1The annealing apparatus of the present invention includes a base 3, a heating stage 1, and a sample stage 5. The heating stage 1 is mounted on the base 3 via a supporting connecting column 2. The sample stage 5 is mounted on the base 3 via a lifting device 4. The sample stage 5 is provided with a sample area for placing the sample to be annealed. The sample stage 5 is preferably made of a thermally conductive material, such as a metal. During annealing, the sample to be annealed is placed on the sample stage 5, and the sample stage 5 is in thermal contact with the heating stage 1. The heating stage 1 transfers heat to the sample stage 5 and the sample. After annealing is completed, the lifting device 4 drives the sample stage 5 to rise away from the heating stage 1, and the heating is terminated. Figure 1 The state of the device shown is when the lifting device 4 lifts the sample stage 5. Figure 2 The device is in the state where the lifting device 4 lowers the sample stage 5 into the heating stage 1.

[0015] In this utility model, there are n sample stages 5, where n≥3; the movement relationship between each sample stage 5 can be as follows: (1) Divide all sample stages 5 into N groups, with the same or different number of sample stages 5 in each group. For example, divide into 3 groups, the first group contains 6 sample stages 5, the second group contains 8 sample stages 5, and the third group contains 10 sample stages 5. The sample stages 5 in the first group are driven synchronously by the lifting device 4, the sample stages 5 in the second group are driven synchronously, and the sample stages 5 in the third group are driven synchronously. The sample stages 5 in each group are driven independently. At this time, one lifting device 4 is set for each group. (2) Each sample stage 5 is independent of each other. At this time, N=n, each sample stage 5 corresponds to at least one lifting device 4, and the lifting of each sample stage 5 is independent of each other. The preferred method of this utility model is (2), that is, each sample stage 5 lifts and lowers independently. The following will further elaborate on the method (2) as an example.

[0016] In this invention, each sample stage 5 has a recessed hole on its bottom side, and a photosensitive sensor 6 is installed inside the recessed hole. When a sample is placed on the sample stage 5, it blocks the recessed hole, thus preventing the photosensitive sensor 6 from receiving light. The photosensitive sensor 6 receives a signal that the sample has been placed on the sample stage 5 and transmits the signal to the lifting device 4. The lifting device 4 drives the sample stage 5 to descend into the groove 101 of the heating stage 1. When the sample is removed, the photosensitive sensor 6 in the recessed hole receives the light signal and transmits it to the lifting device 4. The lifting device 4 then drives the sample stage 5 to rise to the set position.

[0017] The heating platform 1 of this utility model is provided with several through holes, corresponding to several lifting devices 4. The lifting device 4 is an electric telescopic rod. One end of the electric telescopic rod is connected to the base 3 by a thread, and the other end passes through the through hole to connect to the sample stage 5. The sample stage 5 is welded to the end of the electric telescopic rod.

[0018] The grooves 101 of this invention are arranged in an array on the heating table 1, such as... Figure 1The grooves 101 in the middle are seven horizontal grooves 101 and seven vertical grooves 101. Preferably, the heating wires 8 are distributed on the heating platform 1 on the sidewall of the grooves 101. More preferably, such as Figure 4 and Figure 5 A heating wire 8 is provided between every two rows of grooves 101, dividing all grooves 101 into a first temperature control zone and a second temperature control zone. The heating wire 8 used to heat the grooves 101 in the first temperature control zone is controlled by a first heater 7, and the heating wire 8 used to heat the grooves 101 in the second temperature control zone is controlled by a second heater 7. This arrangement helps prevent excessive temperature differences in the heating areas. Because the heating platform 1 of this invention has a large number of grooves 101, the space for arranging the heating wires 8 is limited. The heating wires are preferably nickel-chromium flat sheet heating wires 8, which have high resistivity, generate more heat under the same current, and have a stable structure that is not easily deformed.

[0019] The device of this utility model includes functional components such as a heating switch, a temperature adjustment knob, a lifting device control knob, a temperature display screen, a PCL controller, and a timer. These components are all commercially available. The heating switch, lifting device control knob, and temperature display screen can all be mounted on the base 3. If electrical connections are required between the components on the base 3 and the components on the heating platform 1, the connection circuits can be distributed within the hollow structure of the supporting connecting columns. The operation process of the device is as follows: Turn on the heating switch, adjust the temperature control knob to the set temperature, and the heating stage 1 will heat up. In the initial state, all sample stages 5 have been raised to the highest position by the lifting device 4, that is, the distance between them and the heating stage 1 is the maximum distance. Set the sample annealing time using a timer; When the sample is placed on the sample stage 5, the photosensitive sensor 6 senses that the sample has been placed on the sample stage 5 and transmits the signal to the PCL controller. The PCL controller controls the lifting device 4 to start, so that the sample stage 5 falls into the corresponding groove 101 and the timer starts recording the time signal. After the sample is annealed to the set time, the timer transmits a signal to the PCL controller, which in turn controls the lifting device 4 to drive the sample stage 5 to rise away from the heating stage 1.

[0020] It is worth noting that the control button for the lifting device 4 is for manual control of raising or lowering the lifting device 4. The number of control buttons and timers for the lifting device 4 can correspond to the number of lifting devices 4, allowing for one-to-one control. The temperature display screen is used to display the temperature of the heating platform 1.

[0021] If method (1) is adopted, that is, all sample stages 5 are divided into N groups, and the number of sample stages 5 in each group is the same or different. The sample stages in the same group are raised and lowered synchronously, and the sample stages in different groups are raised and lowered independently. At this time, the structure of the device can be modified based on the setting when n=N. If the sample stages in the same group can be fixedly connected and then raised and lowered by the same lifting device, the synchronous raising and lowering of the sample stages in the same group can be achieved. The sample stages in different groups are controlled by different lifting devices, thereby achieving their independent movement.

[0022] The above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention.

Claims

1. An annealing apparatus, characterized in that: The device includes a base, a heating stage, a sample stage, and a lifting device. The heating stage is fixed on the base, the sample stage is used to place the sample to be annealed, the heating stage serves as a heat source to heat the sample stage and the sample, and the lifting device adjusts the distance between the sample stage and the heating stage by raising or lowering the sample stage. The sample stage is provided with n, n≥2, and the n sample stages are divided into N groups, 0<N≤n. Each group of sample stages contains at least one sample stage. Sample stages in the same group are raised and lowered synchronously, while sample stages in different groups are raised and lowered independently.

2. The annealing apparatus according to claim 1, characterized in that: The heating stage is provided with a number of grooves, the number of which corresponds to the number of sample stages. During sample annealing, the lifting device drives the sample stage to descend and fall into the grooves. After annealing, the lifting device drives the sample stage away from the grooves.

3. The annealing apparatus according to claim 1, characterized in that: The lifting device includes a fixed end and a telescopic end. The fixed end is set on the base, and the telescopic end is connected to the sample stage. The heating stage is provided with a through hole, and the lifting device passes through the through hole to connect the base and the heating stage.

4. The annealing apparatus according to claim 1, characterized in that: A recessed hole is provided on the bottom wall of the sample stage, and a photosensitive sensor is provided in the recessed hole. After the annealed battery cell is placed on the sample stage, the photosensitive sensor receives a light blocking signal and transmits the signal to the lifting device. The lifting device drives the sample stage to descend into the groove of the heating stage.

5. The annealing apparatus according to claim 1, characterized in that: The heating platform has several grooves arranged in an array, which are divided into a first region and a second region. Several heating wires are distributed in the first region and connected to a first heating controller. Several heating wires are distributed in the second region and connected to a second heating controller.

6. The annealing apparatus according to claim 5, characterized in that: The heating wires are distributed between two adjacent rows of grooves; the heating wires are nickel-chromium flat sheet heating wires.

7. The annealing apparatus according to claim 6, characterized in that: The heating platform is mounted on the base via a supporting connecting column, which is a hollow structure. A heating switch is mounted on the base, and the heating switch is electrically connected to a first heating controller or a second heating controller. The hollow structure contains the wiring between the heating switch and the heating controller.

8. The annealing apparatus according to claim 1, characterized in that: The lifting device is an electric telescopic rod, with one end of the electric telescopic rod threadedly connected to the base and the other end welded to the sample stage.

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