An internal and external circulation type automatic water replenishing system for an ultrasonic device

Abstract

This utility model relates to an automatic water replenishment system for ultrasonic equipment with internal and external circulation, which is compatible with both internal and external circulation. The automatic water replenishment system includes: a water tank that provides the ultrasonic equipment with the required water; sensors, including a low-water-level sensor configured to monitor the low water level in the water tank and a high-water-level sensor configured to monitor the high water level in the water tank; and a valve configured to switch between internal and external water circulation. This utility model is compatible with both internal and external circulation, facilitating switching between the two modes while achieving automatic water replenishment to prevent overflow. When the water circulation is internal, this utility model can automatically add water and has a built-in anti-overflow system, reducing manual workload and preventing overflow during water addition, thus meeting the needs of scenarios such as ultrasonic testing equipment for semiconductor wafers.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer inspection equipment technology, and to an automatic water replenishment system for ultrasonic equipment with internal and external circulation, which is compatible with both internal and external circulation. Background Technology

[0002] Ultrasonic defect inspection equipment for semiconductor bonded wafers is used to detect bonding interface defects in bonded wafers or defects between different layers of SOI wafers. It is available in three types: manual, semi-automatic, and fully automatic. Because ultrasonic waves are difficult to conduct in air, water is introduced between the ultrasonic probe and the wafer as a coupling agent to create a water path for ultrasonic wave transmission. Manual equipment requires manually placing the wafer onto the stage in the water tank. After inspection, the wet wafer must be manually removed from the tank and dried. Semi-automatic equipment allows the wafer to be manually placed onto the stage in the drying area. The equipment then sends the stage and wafer into the water tank. After inspection, the stage and wafer are lifted from the tank and dried using an air knife. The dried wafer can then be manually removed. Fully automated equipment refers to equipment where, after placing a wafer cassette containing wafers on the loading platform, the equipment automatically removes the wafers from the cassette, pre-aligns them, and places them onto the loading stage. Then, an ultrasonic probe and a water coupling agent are introduced between the wafer and the platform using different methods for testing. After testing, the wafers are initially dried by an air knife and then completely dried by a rotary drying system before being automatically placed back into the wafer cassette. The water system of fully automated equipment can be divided into external circulation and internal circulation. External circulation means that the plant water is introduced into the equipment for use and then discharged directly into the plant system for treatment before being recycled. Internal circulation means that the plant water is introduced into the equipment for use and circulated within the equipment's water system until the water in the equipment is nearly depleted before being refilled. External circulation is used when the equipment's operating conditions require high cleanliness and the water usage or plant conditions allow for external circulation. Internal circulation is used when the equipment's operating conditions do not require high cleanliness, or when it is necessary to minimize water usage, or when plant conditions do not allow for external circulation. However, there is no mature solution yet to make it compatible with both inner and outer loops.

[0003] When fully automated equipment is in use, it involves drying wafers by blowing and spinning. Additionally, a section of the water system is open and prone to evaporation, so water is gradually consumed during use. For internal circulation equipment, due to size limitations, the water tank volume is not large. Therefore, when the tank is full, the water in the tank can only sustain the equipment for one day under normal operating conditions. Currently, all fully automated ultrasonic testing equipment on the market uses manual water filling systems; there are no automatic filling options. Besides the daily manual water filling required on weekdays, on weekends and holidays, staff need to work overtime every day to add water to maintain equipment operation, which is extremely inconvenient. Furthermore, manual water filling is prone to overfilling, overflowing the tank, or dripping outside the tank, wetting the equipment interior or the floor, requiring additional maintenance. Chinese patent CN204480062U discloses an automatic water tank replacement device, which uses an electric valve, a low water level sensor, a high water level sensor, and a controller to automatically control the water level in the tank, aiming to solve the problem of insufficient water quality replacement caused by traditional float valve control. However, while the patent aims to keep the water tank filled with fresh water, it cannot address the issue of overflow when the sensors fail. This prior art is only suitable for water tank replenishment scenarios with a single circulation mode and does not address the compatibility requirements of internal and external circulation in the water system, thus failing to meet the needs of scenarios such as ultrasonic testing equipment for semiconductor wafers. Utility Model Content

[0004] The purpose of this invention is to address the compatibility issues of external and internal water circulation, and to solve the problem of difficult water replenishment in fully automatic ultrasonic testing equipment for internal water circulation. This invention provides an automatic water replenishment system for ultrasonic equipment with internal and external circulation.

[0005] This utility model provides an automatic internal and external circulation water replenishment system for ultrasonic equipment, comprising: A water tank, which provides the water needed for the ultrasonic equipment; The sensor includes: A low water level sensor, configured to monitor the low water level in the water tank; and A high water level sensor is configured to monitor the high water level in the water tank; and The valve is configured to switch between internal and external water circulation.

[0006] Furthermore, the low water level sensor is located at the low water level of the water tank, and the high water level sensor is located at the high water level of the water tank.

[0007] Furthermore, it also includes: An internal circulation water supply pipeline is configured such that, when the water circuit is in internal circulation mode, water enters the water tank through the internal circulation water supply pipeline. The internal circulation water supply pipeline includes an internal circulation water supply pipeline body and a first inlet and a first outlet respectively located at both ends of the internal circulation water supply pipeline body, with the first outlet leading into the water tank; and The water inlet pipe is configured such that when the water circuit is in external circulation mode, water enters the water tank through the water inlet pipe. When the water circuit is in external circulation mode, water is transported to the water tank through the water inlet pipe after the water in the water tank is used up.

[0008] Furthermore, the system also includes: A water supply module is configured to supply water to the water tank when the water circuit is in internal circulation. The water supply module includes a pump and a water supply area connected to the pump. The pump is connected to the first water inlet.

[0009] Furthermore, the water supply area includes plant water lines or other large-scale water storage systems. The water supply area is connected to the internal circulation water supply pipeline so that water from the water supply area enters the water tank through the internal circulation water supply pipeline.

[0010] Furthermore, the system also includes: An electronic control module is configured to control the water inlet status of the automatic water replenishment system, the electronic control module including a controller.

[0011] Furthermore, the low-water-level sensor, high-water-level sensor, and pump are electrically connected to the controller. When the water circuit is in internal circulation, the controller receives signals from the low-water-level sensor and high-water-level sensor, and then controls the water-filling module to start or stop adding water to the water tank. Specifically, if the low-water-level sensor detects that the water level in the tank is lower than the low-water-level sensor position, the electronic control module will automatically trigger the water-filling module to start adding water. If the high-water-level sensor detects that the water level has reached the high-water-level sensor position, the electronic control module will immediately control the water-filling module to stop adding water, ensuring that the water level is maintained within a reasonable range and avoiding errors from manual operation.

[0012] Furthermore, the system also includes: Water tank outlet pipe; External circulation drainage pipes; and An internal circulating water pipeline is provided, with the water tank outlet pipeline extending from the water tank and connected to both the internal circulating water pipeline and the external circulating drain pipeline via the valve. The other end of the internal circulating water pipeline leads to the water system of the ultrasonic equipment. This is to deliver water from the water tank to the ultrasonic equipment.

[0013] Furthermore, the valve is electrically connected to the controller. When the water circuit needs to switch between internal and external circulation, the controller controls the opening and closing of the valve to direct water discharged from the water tank outlet pipe to either the internal circulation water pipe or the external circulation drain pipe. Specifically, when switching to external circulation, the controller controls the valve to close the internal circulation water pipe and simultaneously open the external circulation drain pipe, allowing water to flow from the water tank outlet pipe to the external circulation drain pipe. When switching to internal circulation, the controller controls the valve to open the internal circulation water pipe and close the external circulation drain pipe, allowing water to flow through the internal circulation water pipe to the working system of the ultrasonic equipment, thus achieving internal water circulation. This prevents water from dripping outside the water tank and wetting the inside of the equipment or the ground during water filling using the various pipes, further avoiding additional maintenance.

[0014] Furthermore, it also includes: A drain pipe is installed inside the water tank. The drain pipe includes a drain pipe body and a second inlet and a second outlet located at both ends of the drain pipe body. The second inlet is located at the high water level of the water tank so that when the high water level sensor fails, the drain pipe will open and water will be discharged through the second outlet. The drain pipe is used to automatically drain overflowing water through the second outlet in the extreme case of high water level sensor failure.

[0015] Furthermore, it also includes: A drain outlet is located at the bottom of the water tank. When maintenance drainage is required, the water in the tank can be completely drained through the drain outlet by gravity. The drain outlet is normally closed; when the water quality in the tank is abnormal or maintenance is required, the drain outlet is opened to drain the water from the tank.

[0016] Furthermore, the bottom plate of the water tank is a convex bottom plate, and the drain outlet is located at the lowest point of the convex bottom plate.

[0017] Furthermore, the base plate is a conical base plate.

[0018] Furthermore, the valve can adjust the flow rate to increase the drainage volume, thereby preventing the water tank from overflowing.

[0019] When the water circuit in this invention is in internal circulation, the automatic water replenishment system has sufficient water to compensate for the water loss in the internal circulation. At the same time, the ultrasonic testing equipment in internal circulation state will have different requirements for water flow due to different process conditions, which need to be adjusted. Therefore, if the water consumption of the ultrasonic testing equipment increases and the flow rate into the water tank increases, the water tank may overflow for a short time. This invention can deal with the problems of sensor failure and water overflow when water consumption increases.

[0020] This utility model has at least the following beneficial effects: This utility model is compatible with both internal and external circulation, making it easy to switch between internal and external water circulation while achieving the purpose of automatic water replenishment to prevent overflow. When the water circulation is internal, this utility model can automatically add water and has a built-in anti-overflow system, reducing manual workload and avoiding the situation of overflowing the water tank when adding water, thus meeting the needs of scenarios such as ultrasonic testing equipment for semiconductor wafers. Attached Figure Description

[0021] To further illustrate the above and other advantages and features of the various embodiments of the present invention, a more specific description of the various embodiments of the present invention will be presented with reference to the accompanying drawings. It is understood that these drawings depict only typical embodiments of the present invention and are therefore not intended to limit its scope. In the drawings, for clarity, the same or corresponding parts will be indicated by the same or similar reference numerals.

[0022] Figure 1 A schematic diagram of an automatic internal and external circulation water replenishment system for ultrasonic equipment is shown in some embodiments of this utility model; Figure label: 1-Water tank, 101-Base plate, 2-Low water level sensor, 3-High water level sensor, 4-Drain pipe, 5-Drain outlet, 6-Electrical control module, 7-Internal circulation water supply pipe, 8-Water filling module, 801-Pump, 802-Water supply area, 9-Water tank outlet pipe, 10-Internal circulation water supply pipe, 11-External circulation drainage pipe, 12-Valve, 13-Inlet pipe. Detailed Implementation

[0023] It should be noted that the components in the accompanying drawings may be shown exaggerated for illustrative purposes and may not be to scale.

[0024] In this utility model, the various embodiments are merely intended to illustrate the solution of this utility model and should not be construed as limiting.

[0025] In this utility model, unless otherwise specified, the quantifiers “one” and “one” do not exclude scenarios involving multiple elements.

[0026] It should also be noted that in the embodiments of this utility model, only a portion of the parts or components may be shown for clarity and simplicity. However, those skilled in the art will understand that, under the teachings of this utility model, the required parts or components can be added according to the specific scenario.

[0027] It should also be noted that within the scope of this utility model, the terms "same", "equal", and "equal to" do not mean that the two values ​​are absolutely equal, but allow for a certain reasonable error. In other words, the terms also cover "substantially the same", "substantially equal", and "substantially equal to".

[0028] It should also be noted that in the description of this utility model, the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not explicitly or implicitly suggest that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] Furthermore, the embodiments of this utility model describe the process steps in a specific order. However, this is only for the convenience of distinguishing each step, and is not a limitation on the order of each step. In different embodiments of this utility model, the order of each step can be adjusted according to the process.

[0030] The following embodiment provides an automatic internal and external circulation water replenishment system for ultrasonic equipment, comprising: Water tank 1, which provides the water required for the ultrasonic equipment; Sensors, including: Low water level sensor 2, configured to monitor the low water level of water tank 1, is located at the low water level of water tank 1; and High water level sensor 3 is configured to monitor the high water level of water tank 1, and the high water level sensor 3 is located at the high water level of water tank 1. Valve 12 is configured to switch between internal water circulation and external water circulation; The internal circulation water supply pipe 7 is configured such that when the water circuit is in internal circulation, water enters the water tank 1 through the internal circulation water supply pipe 7. The internal circulation water supply pipe 7 includes the internal circulation water supply pipe 7 body and a first inlet and a first outlet respectively located at both ends of the internal circulation water supply pipe 7 body. The first outlet leads into the water tank 1. The water inlet pipe 13 is configured such that when the water circuit is in external circulation, water enters the water tank 1 through the water inlet pipe 13. When the water circuit is in external circulation, water is transported to the water tank 1 through the water inlet pipe 13. Water supply module 8 is configured to supply water to water tank 1 when the water circuit is in internal circulation. Water supply module 8 includes pump 801 and water supply area 802 connected to pump 801. Pump 801 is connected to the first water inlet. Water supply area 802 includes plant water circuit or other large water storage system. Water supply area 802 is connected to internal circulation water supply pipeline 7 so that water in water supply area 802 enters water tank 1 through internal circulation water supply pipeline 7. The electronic control module 6 is configured to control the water intake status of the automatic water replenishment system. The electronic control module 6 includes a controller, a low water level sensor 2, a high water level sensor 3, and a pump 801, which are electrically connected to the controller. When the water circuit is in internal circulation, after receiving the signals from the low water level sensor 2 and the high water level sensor 3, the controller controls the water replenishment module 8 to start or stop replenishing water to the water tank 1. Specifically, if the low water level sensor 2 detects that the water level in the water tank 1 is lower than the position of the low water level sensor 2, the electronic control module 6 will automatically trigger the water replenishment module 8 to start replenishing water. If the high water level sensor 3 detects that the water level has reached the position of the high water level sensor 3, the electronic control module 6 will immediately control the water replenishment module 8 to stop replenishing water, ensuring that the water level is maintained within a reasonable range and avoiding errors caused by manual operation. Water tank outlet pipe 9; External circulation drainage pipe 11; An internal circulation water pipe 10 and a water tank outlet pipe 9 extend from the water tank 1 and are connected to the internal circulation water pipe 10 and the external circulation drain pipe 11 via a valve 12. The other end of the internal circulation water pipe 10 leads to the water system of the ultrasonic equipment to deliver water from the water tank 1 to the ultrasonic equipment. The valve 12 is electrically connected to the controller and can adjust the flow rate. When the water system needs to switch between internal and external circulation, the controller controls the opening and closing of the valve 12 to direct the water discharged from the water tank outlet pipe 9 to either the internal circulation water pipe 10 or the external circulation drain pipe 11. Specifically, when switching to external circulation is required, the controller controls the valve 12 to close the internal circulation water pipe 10 and simultaneously open the external circulation drain pipe 11. The external circulation drainage pipe 11 allows water to flow from the water tank outlet pipe 9 to the external circulation drainage pipe 11. When switching to internal circulation is required, the controller controls the valve 12 to open the internal circulation water pipe 10 and close the external circulation drainage pipe 11, allowing water to flow through the internal circulation water pipe 10 to the working system of the ultrasonic equipment, thus achieving internal water circulation. During the process of adding water using each pipe, water drips onto the outside of the water tank 1, wetting the inside of the equipment or the ground, further avoiding additional maintenance. When the water consumption increases, after entering the water tank 1 from the inlet pipe 13, the water level in the water tank 1 will rise rapidly. At this time, the flow rate can be adjusted by the valve 12 to increase the drainage volume accordingly, preventing the water in the water tank 1 from overflowing. Drain pipe 4, located inside water tank 1, includes a drain pipe body and a second inlet and a second outlet located at both ends of the drain pipe body. The second inlet is located at the high water level of water tank 1 so that when the high water level sensor 3 fails, the drain pipe 4 opens to discharge water through the second outlet. In the extreme case of high water level sensor 3 failure, the drain pipe 4 automatically discharges overflowing water through the second outlet. Drain 5 is located at the bottom of water tank 1. When maintenance drainage is required, the water in water tank 1 can be completely drained through drain 5 by gravity. Drain 5 is normally closed. When the water quality in water tank 1 is abnormal or maintenance is required, drain 5 is opened to drain the water in water tank 1. The bottom plate 101 is a conical bottom plate, and drain 5 is located at the lowest point of the conical bottom plate.

[0031] While some embodiments of this invention have been described in this application, those skilled in the art will understand that these embodiments are merely illustrative. Numerous variations, alternatives, and improvements will arise in those skilled in the art under the teachings of this invention without departing from its scope. The appended claims are intended to define the scope of this invention and thereby cover the methods and structures within the scope of the claims themselves and their equivalents.

Claims

1. An automatic water replenishment system with internal and external circulation for ultrasonic equipment, characterized in that, The system includes: A water tank, which provides the water needed for the ultrasonic equipment; The sensor includes: A low water level sensor, configured to monitor the low water level in the water tank; and A high water level sensor is configured to monitor the high water level in the water tank; and The valve is configured to switch between internal and external water circulation.

2. The automatic internal and external circulation water replenishment system for ultrasonic equipment according to claim 1, characterized in that, Also includes: An internal circulation water supply pipeline is configured such that, when the water circuit is in internal circulation mode, water enters the water tank through the internal circulation water supply pipeline. The internal circulation water supply pipeline includes an internal circulation water supply pipeline body and a first inlet and a first outlet respectively located at both ends of the internal circulation water supply pipeline body, with the first outlet leading into the water tank; and The water inlet pipe is configured such that when the water circuit is in external circulation, water enters the water tank through the water inlet pipe.

3. The automatic water replenishment system for ultrasonic equipment with internal and external circulation according to claim 2, characterized in that, The system also includes: A water supply module is configured to supply water to the water tank when the water circuit is in internal circulation. The water supply module includes a pump and a water supply area connected to the pump. The pump is connected to the first water inlet.

4. The automatic internal and external circulation water replenishment system for ultrasonic equipment according to claim 3, characterized in that, The system also includes: An electronic control module is configured to control the water inlet status of the automatic water replenishment system, the electronic control module including a controller.

5. The automatic internal and external circulation water replenishment system for ultrasonic equipment according to claim 4, characterized in that, The low water level sensor, high water level sensor, and pump are electrically connected to the controller. When the water circuit is in internal circulation, the controller receives the signals from the low water level sensor and the high water level sensor and controls the water filling module to start or stop filling the water tank.

6. The automatic water replenishment system for ultrasonic equipment with internal and external circulation according to claim 4, characterized in that, The system also includes: Water tank outlet pipe; External circulation drainage pipes; and An internal circulating water pipeline is provided, with the water tank outlet pipeline extending from the water tank and connected to the internal circulating water pipeline and the external circulating drainage pipeline via the valve. The other end of the internal circulating water pipeline leads to the water system of the ultrasonic equipment.

7. The automatic internal and external circulation water replenishment system for ultrasonic equipment according to claim 6, characterized in that, The valve is electrically connected to the controller. When the water circuit needs to switch between internal and external circulation, the controller controls the opening and closing of the valve so that the water discharged from the water tank outlet pipe flows to the internal circulation water pipe or the external circulation drain pipe.

8. The automatic internal and external circulation water replenishment system for ultrasonic equipment according to claim 1, characterized in that, Also includes: A drain pipe is provided inside the water tank. The drain pipe includes a drain pipe body and a second inlet and a second outlet respectively located at both ends of the drain pipe body. The second inlet is located at the high water level of the water tank so that when the high water level sensor fails, the drain pipe is opened to discharge water from the second outlet.

9. The automatic internal and external circulation water replenishment system for ultrasonic equipment according to claim 1, characterized in that, Also includes: A drain outlet is located at the bottom of the water tank.

10. The automatic water replenishment system for ultrasonic equipment with internal and external circulation according to claim 9, characterized in that, The bottom plate of the water tank is a convex bottom plate, and the drain outlet is located at the lowest point of the convex bottom plate.

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