An adapter and probe card testing apparatus

Abstract

This utility model relates to the field of semiconductor manufacturing technology and provides an adapter, comprising: a main body; an adapter component disposed on the main body for signal transmission and transfer; a first connecting component disposed on the adapter component for connection with a probe card testing device; and a second connecting component disposed on the adapter component for connection with different test benches for signal transmission. By connecting to different test benches through the second connecting component and directly transferring signals from the probe card testing device using the adapter component and the first connecting end, the probe card testing device and the test bench have better connectivity and compatibility, facilitating the testing of different probe cards.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to an adapter and a probe card testing device. Background Technology

[0002] Probe cards are core consumables in the wafer testing process. Their main function is to establish an electrical connection between the chip on the wafer and the probe card testing equipment. During the probe card testing process, the probe card is first placed on the probe station, and the test signals from the probe card testing equipment are transmitted to the chip. The chip's response signals are then transmitted back to the probe card testing equipment, thereby completing the electrical performance and functional testing of the chip.

[0003] In the semiconductor manufacturing process, when testing probe cards, different test stations are used depending on the probe card. After changing the test station, the corresponding connecting wires need to be inserted into the corresponding connectors of the probe card testing equipment. However, when testing special probe cards, it is difficult to connect the corresponding test station to the probe card testing equipment, so it is necessary to change the corresponding probe card testing equipment. The compatibility is poor and it is not convenient for testing probe cards. Summary of the Invention

[0004] In view of the shortcomings of poor adaptability in the existing technology, the purpose of this utility model is to provide an adapter with good adaptability.

[0005] To solve the above problems, this utility model provides the following technical solution:

[0006] An adapter includes: a body;

[0007] An adapter, located on the main body, is used for signal transmission and transfer;

[0008] A first connection component is provided on the adapter and is used to connect to the probe card testing equipment;

[0009] The second connection component, located on the adapter, is used to connect to different test benches for signal transmission.

[0010] The beneficial effects of this utility model are: it connects to different test benches through the second connecting component, and directly transfers the signals of the probe card test equipment using the adapter and the first connecting end, so that the probe card test equipment and the test bench have better connection compatibility and facilitate the testing of different probe cards. Attached Figure Description

[0011] Figure 1 This is a perspective view of the present utility model;

[0012] Figure 2 This is a perspective view of the first connecting component for easy observation of this utility model.

[0013] Figure label:

[0014] 10. Adapter; 110. Main body; 120. Adapter component; 130. First connecting assembly; 140. Second connecting assembly;

[0015] 111. First cover plate; 112. Second cover plate;

[0016] 121. Circuit board. Detailed Implementation

[0017] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0018] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "multiple" means two or more, unless otherwise explicitly specified.

[0019] For ease of description of the first, second, and third directions in the embodiments of this application, the first direction is the left-right direction in the figures, the second direction is the front-back direction in the figures, and the third direction is the up-down direction in the figures. The x-axis arrow direction is referred to as the "right" direction, the y-axis arrow direction as the "up" direction, and the z-axis arrow direction as the "back" direction, but these are not the sole limitations in the actual application of this application.

[0020] like Figures 1-2 As shown, this embodiment provides an adapter 10, which includes a main body 110, an adapter 120, a first connecting component 130, and a second connecting component 140. The adapter 120 is disposed on the main body 110 and is used for signal transmission. The first connecting component 130 is disposed on the adapter 120 and is used for connection with a probe card testing device. The second connecting component 140 is disposed on the adapter 120 and is used for connection with different test benches for signal transmission. By using the second connecting component 140 to connect with different test benches, and by using the adapter 120 and the first connecting end to directly transfer signals from the probe card testing device, the probe card testing device and the test bench have better connection compatibility, facilitating the testing of different probe cards.

[0021] like Figures 1-2As shown, in some embodiments, the first connecting component 130 and the second connecting component 140 are located on both sides of the adapter 120. This arrangement on both sides facilitates the connection of the first connecting component 130 to the probe card testing equipment and the connection of the second connecting component 140 to the test bench; it also prevents signal transmission failure due to connection issues.

[0022] like Figures 1-2 As shown, in another embodiment, the first connecting component 130 and the second connecting component 140 are located on the same side of the circuit board 121. This same-side arrangement facilitates timely observation of the connection status of the first connecting component 130 and the second connecting component 140.

[0023] Preferably, the first connection component 130 is composed of a plurality of horn connectors.

[0024] Preferably, the first connection component 130 is composed of a plurality of crimp connectors.

[0025] Preferably, the first connection component 130 consists of a plurality of horn connectors and a plurality of crimp connectors.

[0026] like Figure 2 As shown, optionally, the first connecting component 130 is connected to the probe card detection device via a connecting cable, and the first connecting component 130 is used for signal transmission to the adapter 120. Using the first connecting component 130 to connect to the probe card detection device via a connecting cable eliminates the need for repeatedly plugging and unplugging the connecting cable, reducing wear on the connection points of the probe card detection device.

[0027] Preferably, the second connection component 140 is composed of a plurality of horn connectors.

[0028] Preferably, the second connection component 140 is composed of a plurality of crimp connectors.

[0029] Preferably, the second connection component 140 consists of a plurality of horn connectors and a plurality of crimp connectors.

[0030] like Figure 1 As shown, optionally, the second connecting component 140 is divided into multiple groups, and the test bench is connected to one group of the second connecting components 140 via connecting cables. This multi-group arrangement allows for direct observation of the correctness of the connections, ensuring the normal operation of the test.

[0031] In some implementations, the number of pins in each group of second connecting components 140 varies, with different numbers of pins corresponding to different test stations. The connector position for the corresponding pins is selected based on the testing requirements on the test station to ensure normal operation of the testing process.

[0032] Optionally, the stitches can be single-row, double-row, triple-row, etc., but no specific choice is made here.

[0033] Preferably, the stitches are arranged in a double row.

[0034] Optional, the number of pins is greater than or equal to one, no specific selection is made here.

[0035] Preferably, the number of pins is 10, 12, 16, or 20.

[0036] In another embodiment, the number of each group of second connection components 140 is different, and different numbers of second connection components 140 correspond to different test stations. Connection with different test stations is achieved according to the change in number.

[0037] Optionally, the number of second connection components 140 in each group is greater than or equal to one; no specific choice is made here.

[0038] Preferably, each group of second connecting components 140 contains 5 or 6 components.

[0039] like Figures 1-2 As shown, optionally, the adapter 120 is a circuit board 121. The circuit board 121 is used to transmit the signal transmitted through the first connection component 130 to the corresponding second connection component 140, and the corresponding second connection component 140 transmits the signal again.

[0040] like Figures 1-2 As shown, optionally, the main body 110 includes a first cover plate 111 and a second cover plate 112, which respectively cover both sides of the adapter 120. By using the first cover plate 111 and the second cover plate 112 to cover both sides of the adapter 120, the adapter 120 can be supported and protected to prevent damage to the adapter 120.

[0041] like Figures 1-2 As shown, optionally, the first cover plate 111 and the second cover plate 112 are provided with through holes, and the first cover plate 111 and the second cover plate 112 are fixed by bolts passing through the through holes. Using bolts for fixing makes the fixation more secure.

[0042] Optionally, the first cover plate 111 and the second cover plate 112 are fixed by adhesive bonding. Using adhesive bonding allows for faster and more convenient installation of the first cover plate 111 and the second cover plate 112 onto the adapter 120.

[0043] This application also provides a probe card testing device, which includes a test bench and an adapter 10; a first connecting component 130 is connected to the connector of the probe card testing device; and a second connecting component 140 is connected to the test bench.

[0044] In summary, this utility model provides an adapter that connects to different test benches via a second connecting component and directly transfers signals from probe card testing equipment using the adapter and the first connecting end, thereby improving the connectivity and compatibility between the probe card testing equipment and the test bench and facilitating the testing of different probe cards.

[0045] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. An adapter, characterized in that, include: main body; An adapter, located on the main body, is used for signal transmission and transfer; A first connection component is provided on the adapter and is used to connect to the probe card testing equipment; The second connection component, located on the adapter, is used to connect to different test benches for signal transmission.

2. The adapter according to claim 1, characterized in that: The first connecting component and the second connecting component are located on both sides of the adapter.

3. The adapter according to claim 2, characterized in that: The first connection component consists of multiple horn connectors and / or multiple crimp connectors. The first connection component is connected to the probe card detection device via a connection line. The first connection component is used to transmit signals to the adapter.

4. The adapter according to claim 2, characterized in that: The second connection component consists of multiple horn connectors and / or multiple crimp connectors. The second connection component is divided into multiple groups, and the test bench is connected to one group of the second connection components via a connecting cable.

5. The adapter according to claim 4, characterized in that: The number of pins in each group of the second connecting components is different, and different numbers of pins correspond to different test stations.

6. The adapter according to claim 4, characterized in that: The number of the second connection components in each group is different, and different numbers of the second connection components correspond to different test benches.

7. The adapter according to claim 1, characterized in that: The adapter is a circuit board.

8. The adapter according to claim 1, characterized in that: The main body includes a first cover plate and a second cover plate, which cover both sides of the adapter respectively.

9. The adapter according to claim 8, characterized in that: The first cover plate and the second cover plate are provided with through holes, and the first cover plate and the second cover plate are fixed by bolts passing through the through holes.

10. A probe card testing device, characterized in that: The probe card testing equipment includes a test bench and an adapter as described in any one of claims 1-9; The first connection component connects to the connector of the probe card testing equipment; The second connection component connects to the test bench.

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