Multi-parallel voltage testing components and chip voltage testing devices

Abstract

This application relates to the field of chip testing technology, and discloses a multi-parallel pressure testing assembly and a chip pressure testing device. The multi-parallel pressure testing assembly includes a base plate, a top plate, a pressure plate, multiple pressure heads, and multiple elastic elements. The base plate is used to support multiple target components. The top plate covers the base plate along a predetermined direction and forms a receiving cavity. The pressure plate is movably disposed between the base plate and the top plate along a predetermined direction. The multiple pressure heads are disposed between the pressure plate and the top plate, and the multiple pressure heads are spaced apart from each other. Each pressure head is used to press against the corresponding target component. The two ends of each elastic element are elastically connected to the pressure plate and the corresponding pressure head, respectively. The beneficial effects of this application are improved versatility and pressure testing efficiency.

Description

Technical Field

[0001] This application relates to the field of chip testing technology, specifically to multi-parallel test load testing components and chip load testing devices. Background Technology

[0002] During aging tests and final tests of some chips, it is necessary to set up corresponding high and low temperature test environments and ensure stable electrical contact between the chip and the test socket. Some known test fixtures can only test single chips of a fixed thickness. When facing the testing of large batches of chips, it is necessary to frequently disassemble and assemble the test fixtures and find test fixtures with corresponding test thicknesses, resulting in poor versatility of test fixtures and low overall testing efficiency. Utility Model Content

[0003] The purpose of this application is to overcome the above-mentioned technical deficiencies and propose a multi-parallel test load testing component and a chip load testing device to solve the technical problems of low testing efficiency and poor versatility of test fixtures in the known technology.

[0004] To achieve the above-mentioned technical objectives, the present application adopts the following technical solution: In a first aspect, this application provides a multi-parallel pressure measuring assembly, including a base plate, a top plate, a pressure plate, multiple pressure heads, and multiple elastic elements. The base plate is used to support multiple target components. The top plate covers the base plate along a predetermined direction, forming a receiving cavity. The pressure plate is movably disposed between the base plate and the top plate along a predetermined direction. The multiple pressure heads are spaced apart from each other, one end of each pressure head is movably connected to the pressure plate, and the other end of each pressure head is used to press against the corresponding target component. The two ends of each elastic element are elastically connected to the pressure plate and the corresponding pressure head, respectively.

[0005] In some embodiments, the pressure plate has a connecting portion, one end of the elastic member is sleeved on the connecting portion, and the other end of the elastic member is sleeved on the pressure head.

[0006] In some embodiments, the connecting portion is a first through hole penetrating the pressure plate in a preset direction, the hole surface of the first through hole is formed with a first limiting portion, the pressure head is provided with a first through hole penetrating in a preset direction, the hole surface of the first through hole is formed with a second limiting portion, one end of the elastic member extends into the first through hole and abuts against the first limiting portion, and the other end of the elastic member extends into the first through hole and abuts against the second limiting portion.

[0007] In some embodiments, the end of the pressure head away from the pressure plate along a preset direction is further formed with a second through hole, the second through hole connecting the first through hole and the outer peripheral surface of the pressure head; the pressure plate is provided with a second through hole, the second through hole being spaced apart from the first through hole; the top plate is provided with a first air inlet hole and a first air outlet hole spaced apart from each other, the first air inlet hole being correspondingly provided with the first through hole, the first air outlet hole being correspondingly provided with the second through hole, and the first air inlet hole, the first through hole, the first through hole, the second through hole, the second through hole and the first air outlet hole being sequentially connected to form an airflow channel.

[0008] In some embodiments, the pressure head and one of the pressure plates form a limiting groove, and the outer peripheral surface of the pressure head and the other of the connecting portions form a limiting flange. The limiting flange extends into the limiting groove, and the thickness of the limiting flange along the preset direction is less than the width of the limiting groove along the preset direction.

[0009] In some embodiments, the pressure plate has a groove formed on its surface facing the base plate, the groove including a groove side surface and a groove bottom surface; the multi-parallel pressure measuring assembly further includes a limiting member, the limiting member connecting the side of the pressure plate near the base plate, the limiting member connecting the edge of the pressure plate near the groove and extending towards the inside of the groove, the groove side surface, the groove bottom surface and the surface of the limiting member away from the base plate together forming the limiting groove; the limiting flange protrudes from the side of the pressure head and extends between the groove bottom surface and the limiting member, the distance between the groove bottom surface and the limiting member along a preset direction is greater than the thickness of the limiting flange along the preset direction.

[0010] In some embodiments, the multi-parallel pressure measuring assembly further includes a driving member, one end of which is located on the side of the top plate away from the bottom plate, and the other end of which passes through the top plate and is connected to the pressure plate. The driving member is used to drive the pressure plate closer to or away from the bottom plate so as to press the pressure head against the elastic member.

[0011] In some embodiments, the multi-parallel pressure measurement assembly further includes a guide member connected to the top plate and extending toward the bottom plate in a preset direction. The pressure plate has a guide hole extending through in the preset direction, and the guide member is movably fitted into the guide hole in the preset direction. The drive member is threadedly connected to the pressure plate.

[0012] Secondly, this application also provides a chip pressure testing device, including the aforementioned multi-parallel pressure testing component and an air source. The air source is used to supply airflow to the multi-parallel pressure testing component, and the airflow is used to regulate the temperature of the target component within the multi-parallel pressure testing component.

[0013] In some embodiments, the chip pressure testing device further includes a base and an airflow distribution component, with a mounting cavity formed between the base and the airflow distribution component. The number of multiple parallel pressure testing components is multiple, and all multiple parallel pressure testing components are disposed in the mounting cavity. The air source is connected to the airflow distribution component, and the airflow distribution component is used to divert the airflow generated by the air source to the corresponding parallel pressure testing component.

[0014] Compared with known technologies, the multi-parallel pressure testing assembly provided in this application, according to this embodiment, drives the pressure plate to move towards the base plate until it abuts the pressure head, which in turn drives multiple pressure heads to move synchronously towards the base plate. This allows for simultaneous clamping of multiple target parts, thereby improving testing efficiency. Furthermore, when facing the clamping requirements of target parts of varying thicknesses, the pressure plate first drives the pressure head to abut the target part, and then continues to drive the pressure head towards the target part. During this process, the position of the pressure head remains unchanged, and the elastic element undergoes corresponding deformation. The additional displacement of the pressure plate is converted into the compression of the elastic element. By controlling the additional displacement of the pressure plate, the compression of the elastic element can be controlled, thereby controlling the combined force exerted by the pressure plate and the elastic element on the pressure head. Simultaneously, the adaptive characteristics of the elastic element allow target parts with a wide thickness range to be positioned between the pressure head and the base plate. Thus, the design of the elastic element can meet the clamping requirements of target parts of different thicknesses and is beneficial for improving the reliable control of the pressure testing force. Since multiple target components tested by a single multi-parallel pressure testing assembly typically belong to the same batch, the thickness difference between these components is minimal. Therefore, by adjusting the stroke of a single pressure plate, the clamping force on multiple target components can be adjusted synchronously, improving the consistency of clamping force adjustment while ensuring simultaneous testing of multiple target components. Furthermore, because the elastic element is fitted onto the pressure head, the assembly integration between the elastic element and the pressure head is improved, and the pressure head also guides the expansion and contraction of the elastic element, ensuring its reliability. Moreover, whether the elastic element is located on the outside or inside of the pressure head, its impact on the airflow is minimal. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural schematic diagram of the multi-parallel pressure measurement component provided in the embodiments of this application.

[0016] Figure 2 This is an exploded structural diagram of the multi-parallel pressure measurement component provided in the embodiments of this application.

[0017] Figure 3 This is a cross-sectional view of the pressure plate, pressure head, and elastic element provided in the embodiments of this application.

[0018] Figure 4 This is a partial exploded structural diagram of the multi-parallel pressure measurement component provided in the embodiments of this application.

[0019] Figure 5 This is a cross-sectional view of the multi-parallel pressure measurement component provided in the embodiments of this application.

[0020] Figure 6 yes Figure 5 A magnified schematic diagram of the structure at point XI.

[0021] Figure 7 This is a three-dimensional structural diagram of the base plate provided in the embodiments of this application.

[0022] Figure 8 This is a three-dimensional structural diagram of the pressure head provided in the embodiment of this application.

[0023] Figure 9 This is a cross-sectional view of the multi-parallel pressure measurement component provided in this embodiment at another location.

[0024] Figure 10 This is a cross-sectional view of the chip stress testing device provided in the embodiments of this application.

[0025] Explanation of reference numerals in the attached figures: 1. Chip pressure testing device; 10. Multi-parallel pressure testing assembly; 11. Base plate; 111. First protrusion; 112. First mounting groove; 113. Third protrusion; 114. Positioning pin; 115. First convex strip; 116. Second convex strip; 117. Connecting groove; 118. Relief groove; 119. Relief hole; 12. Top plate; 121. First air inlet; 122. First exhaust hole; 123. Plate body; 124. Enclosure; 125. First guide hole; 126. Mounting hole; 127. Limiting post; 13. Pressure plate; 131. First through hole; 132. Second through hole; 133. Second protrusion; 134. First limiting part; 135. Limiting groove; 136. Limiting element; 137. Second guide hole; 138. Fourth guide hole; 139. Threaded part; 1391. Threaded groove; 14. Pressure head; 141 142. First through hole; 142. Second through hole; 1421. First hole segment; 1422. Second hole segment; 143. Second limiting part; 144. Limiting flange; 145. Third guide hole; 146. Pressing surface; 15. Elastic element; 151. Spring; 161. Receiving cavity; 162. Air guide gap; 163. Vent cavity; 164. Fastener; 165. Fixing element; 166. Guide element; 1661. Guide rod; 1662. Limiting block; 167. Bearing; 17. Drive element; 171. Operating part; 172. Transmission part; 173. Stroke groove; 20. Air source; 21. Second air intake channel; 22. Second exhaust channel; 30. Airflow distribution element; 31. First air intake channel; 32. First exhaust channel; 50. Base; 60. Mounting cavity; 2. Target element; 201. Contact point; X. Preset direction. Detailed Implementation

[0026] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0027] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. When a component is said to be "set on" another component, it can be directly set on the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used herein in the specification of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "or / and" as used herein includes any and all combinations of one or more of the associated listed items.

[0029] Some embodiments of this application are described in detail. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0030] FT: Final Test, refers to the final test performed on a chip after packaging is completed.

[0031] BI: Burn In testing refers to accelerating chip aging by applying stress conditions such as voltage, current, high and low temperatures to the chip, thereby screening chips in advance.

[0032] CDA: Clean Dry Air.

[0033] In known technologies, FT and BI tests for chips require the establishment of corresponding high and low temperature test environments and the assurance of stable electrical contact between the chip and the test socket. With the increasing variety of chip packages and increasingly stringent energy consumption requirements, some known test fixtures have at least the following drawbacks: 1. Some known test fixtures have poor compatibility with chip thickness, typically within ±0.1 mm. If the chip thickness exceeds this range, reliable electrical contact between the chip and the test socket cannot be guaranteed, or the chip may not be able to fit into the test fixture, necessitating the replacement with a new fixture. 2. Some known test fixtures can only perform pressure testing on a single chip, resulting in low cylinder pressure testing efficiency.

[0034] To address the technical problems of complex structure, poor compatibility, and low heating and cooling efficiency of some known test fixtures, this application provides a multi-parallel test component and a chip test device, which can achieve both improved test compatibility and heating and cooling efficiency under a highly integrated structural design.

[0035] It should be noted that the multi-parallel voltage testing component and chip voltage testing device described in this application are used for testing components such as chips, but not limited to chips. For ease of explanation, this application only uses the application of the multi-parallel voltage testing component and chip voltage testing device to components such as chips as an example for explanation. The principle of applying the multi-parallel voltage testing component to other types of test objects is essentially the same as the principle of applying it to chips, and will not be described in detail here.

[0036] Please see Figures 1 to 2 The multi-parallel pressure measuring assembly 10 of this embodiment includes a base plate 11, a top plate 12, a pressure plate 13, multiple pressure heads 14, and multiple elastic members 15. The base plate 11 is used to support multiple target parts 2. The top plate 12 covers the base plate 11 along a preset direction X and forms a receiving cavity 161. The pressure plate 13 is movably disposed between the base plate 11 and the top plate 12 along the preset direction X. The multiple pressure heads 14 are spaced apart from each other, one end of each pressure head 14 is movably connected to the pressure plate 13, and the other end of each pressure head 14 is used to press against the corresponding target part 2. The two ends of each elastic member 15 are elastically connected to the pressure plate 13 and the corresponding pressure head 14, respectively.

[0037] According to the multi-parallel pressure measuring assembly 10 of this embodiment, by driving the pressure plate 13 to move toward the base plate 11 and to abut against the pressure head 14, multiple pressure heads 14 can be driven to move synchronously toward the base plate 11. This synchronously presses multiple target parts 2, thereby improving the detection efficiency. Meanwhile, when faced with the pressing requirements of target parts 2 of different thicknesses, the pressure plate 13 first drives the pressure head 14 to abut against the target part 2. After that, the pressure plate 13 continues to drive the pressure head 14 to move toward the target part 2. During this process, the position of the pressure head 14 remains unchanged, and the elastic element 15 generates corresponding deformation. The additional displacement of the pressure plate 13 is converted into the compression of the elastic element 15. By controlling the additional displacement of the pressure plate 13, the compression of the elastic element 15 can be controlled, thereby controlling the combined force exerted by the pressure plate 13 and the elastic element 15 on the pressure head 14. At the same time, the adaptive characteristics of the elastic element 15 allow target parts 2 with a wide range of thicknesses to be placed between the pressure head 14 and the base plate 11. Thus, the design of the elastic element 15 can meet the pressing requirements of target parts 2 of different thicknesses and is conducive to improving the reliable control of the pressure measurement force. Since the multiple target parts 2 tested by a single multi-parallel pressure testing component 10 usually belong to the same batch, the thickness difference between the multiple target parts 2 is very small. Therefore, by adjusting the stroke of a single pressure plate 13, the clamping force of the multiple target parts 2 can be adjusted synchronously, which can improve the consistency of clamping force adjustment while ensuring synchronous testing of multiple target parts 2.

[0038] Furthermore, since the elastic element 15 is sleeved on the pressure head 14, the assembly integration between the elastic element 15 and the pressure head 14 can be improved, and the pressure head 14 can also provide guidance for the expansion and contraction of the elastic element 15, ensuring the reliability of the expansion and contraction of the elastic element 15. Moreover, whether the elastic element 15 is located on the outside or inside of the pressure head 14, it has little impact on the flow of the regulating airflow.

[0039] It is understandable that the multi-parallel testing in the multi-parallel testing component 10 refers to performing pressure testing actions on multiple target components 2 in parallel.

[0040] It is understandable that when the thickness of multiple target parts 2 is within a narrow range, a single multi-parallel pressure testing assembly 10 can also simultaneously test different batches of target parts 2 to improve testing efficiency.

[0041] In this embodiment, the pressure plate 13 has a connecting portion, one end of the elastic member 15 is sleeved on the connecting portion, and the other end of the elastic member 15 is sleeved on the pressure head 14. Thus, by having both ends of the elastic member 15 sleeved on the connecting portion and the pressure head 14 respectively, the guiding effect on the elastic deformation of the elastic member 15 can be improved, ensuring that the deformation direction of the elastic member 15 is approximately parallel to the preset direction X, thereby improving the stability of the elastic force applied to the pressure head 14. Furthermore, whether the elastic member 15 is located on the outside or inside the pressure head 14, its impact on regulating airflow is minimal.

[0042] In other embodiments, one end of the elastic member 15 is sleeved with the pressure head 14, and the other end of the elastic member 15 can abut against the base plate 11.

[0043] In this embodiment, see Figure 3 The first through hole 131 has an inwardly protruding first limiting portion 134 formed on its surface. The first through hole 141 has an inwardly protruding second limiting portion 143 formed on its surface. One end of the elastic member 15 extends into the first through hole 131 and abuts against the first limiting portion 134, while the other end of the elastic member 15 extends into the first through hole 141 and abuts against the second limiting portion 143. By installing the elastic member 15 in the first through hole 141 and the first through hole 131, space can be saved, integration can be improved, and no additional guiding members are required. Simultaneously, it also protects the elastic member 15, reducing the possibility of damage from contact with other components, thereby increasing the service life of the elastic member 15.

[0044] In other embodiments, the elastic element 15 may also be sleeved on the outside of the pressure head 14.

[0045] In one embodiment, a first limiting portion 134 is formed at the end of the first through hole 131 opposite to the pressure head 14. A second limiting portion 143 is formed at the end of the first through hole 141 near the second through hole 142. This significantly increases the installation length range of the elastic member 15, thereby expanding the selection range of the elastic member 15.

[0046] In one embodiment, see Figure 3 The elastic element 15 includes a spring 151. The spring 151 has a simple structure, provides relatively stable elastic force, and occupies little space in the first through hole 141 and the first through hole 131, thus having minimal impact on the flow of the regulating airflow and ensuring smooth airflow. In other embodiments, the elastic element 15 can also be constructed as a compression spring, a leaf spring, an elastic column, or other elastic components.

[0047] In this embodiment, see Figure 3 The outer peripheral surface of the pressure head 14 forms a limiting groove 135 with one of the holes in the first through hole 131, and the outer peripheral surface of the pressure head 14 forms a limiting flange 144 with the other hole in the first through hole 131. The limiting flange 144 extends into the limiting groove 135, and the thickness of the limiting flange 144 along the movement direction of the pressure head 14 is less than the width of the limiting groove 135 along the movement direction of the pressure head 14 (i.e., the preset direction X). Thus, the movement of the limiting flange 144 within the limiting groove 135 allows the pressure head 14 to move relative to the pressure plate 13 along the preset direction X. This allows the pressure plate 13 to still move toward the base plate 11 after the pressure head 14 abuts against the target part 2, thereby causing the elastic member 15 to deform and apply force to the pressure head 14.

[0048] In one embodiment, a groove is formed on the surface of the pressure plate 13 facing the base plate 11, the groove including a side surface and a bottom surface. See also Figure 3 and Figure 4 The multi-parallel pressure measuring assembly 10 also includes a limiting member 136. The limiting member 136 is connected to the side of the pressure plate 13 near the base plate 11, and extends towards the inside of the groove. The side surface of the groove, the bottom surface of the groove, and the surface of the limiting member 136 facing away from the base plate 11 together form a limiting groove 135. A limiting flange 144 protrudes from the side of the pressure head 14 and extends between the bottom surface of the groove and the limiting member 136. The distance between the bottom surface of the groove and the limiting member 136 along a preset direction X is greater than the thickness of the limiting flange 144 along the preset direction X. Thus, the cooperation between the limiting member 136 and the limiting flange 144 facilitates assembly and disassembly, and the structural design is simple.

[0049] In other embodiments, the limiting groove 135 may also be provided on the outer peripheral surface of the pressure head 14, and the limiting flange 144 may be provided on the hole surface of the first through hole 131, or the limiting flange 144 may be connected to the side of the pressure plate 13 near the pressure head 14.

[0050] In one embodiment, see Figure 3 and Figure 4 There are two limiting grooves 135. The two limiting grooves 135 are arranged radially opposite each other along the first through hole 131. There are also two limiting flanges 144. The two limiting flanges 144 are arranged radially opposite each other along the first through hole 141. This improves the stability of the pressure head 14 moving relative to the pressure plate 13 in the preset direction X. At the same time, it reduces the overall volume of the limiting flanges 144, saving space.

[0051] In one embodiment, see Figure 4 The multi-parallel pressure testing assembly 10 also includes a fixing member 165. The limiting member 136 is fixedly connected to the pressure plate 13 through the fixing member 165. Thus, during the assembly process of the multi-parallel pressure testing assembly 10, the limiting flange 144 can be placed between the limiting member 136 and the pressure plate 13 first, one end of the elastic member 15 can be inserted into the first through hole 141, and the other end of the elastic member 15 can be inserted into the first through hole 131, so that the limiting member 136 abuts against the pressure plate 13, and then the limiting member 136 and the pressure plate 13 can be fixed by the fixing member 165. This assembly method has high assembly efficiency and reliability.

[0052] In this embodiment, see Figure 5 and Figure 6 The top plate 12 has a first air inlet 121 and a first exhaust 122 spaced apart, both of which are connected to the receiving cavity 161. The pressure plate 13 has a first through hole 131 and a second through hole 132 spaced apart. The first through hole 131 corresponds to the first air inlet 121. The second through hole 132 corresponds to the first exhaust 122. An air guide gap 162 is formed between the pressure plate 13 and the bottom plate 11, which corresponds to the second through hole 132. The pressure head 14 has a first through hole 141 and a second through hole 142. The first through hole 141 extends through the pressure head 14 along its length. The orthographic projection of the first through hole 141 onto the target part 2 is located inside the edge of the target part 2. One end of the second through hole 142 is connected to the first through hole 141, and the other end is connected to the air guide gap 162. The first air inlet 121, the first through hole 131, the first through hole 141, the second through hole 142, the second through hole 132, and the first exhaust hole 122 are sequentially connected to form an airflow channel. The first air inlet 121 is used to introduce and regulate airflow. Figure 5 and Figure 6 The arrows in the diagram indicate the direction of airflow. The airflow is configured to reach the surface of the target component 2 through the first through hole 131 and the first through hole 141 to regulate the temperature of the target component 2, and then be discharged through the second through hole 142, the air guide gap 162, the second through hole 132 and the first exhaust hole 122.

[0053] Thus, the regulated airflow, after passing through the first inlet 121, can directly reach the first through-hole 141 via the first through-hole 131 and directly contact the target component 2, significantly improving heat exchange efficiency. After heat exchange with the target component 2, it can then reach the air guide gap 162 via the second through-hole 142, and then reach the first exhaust port 122 via the second through-hole 132. Both the inlet and exhaust paths of this air path are relatively short, greatly reducing heat loss from the regulated airflow. Furthermore, both the first through-hole 141 in the inlet path and the air guide gap 162 in the exhaust path are in contact with the pressure head 14, allowing some of the heat from the regulated airflow to be conducted to the target component 2 through the pressure head 14, further reducing heat loss. Moreover, the design of the air guide gap 162 improves the overall integration of the multi-parallel pressure testing assembly 10. Therefore, compared to known pressure testing fixtures, the above design significantly improves heating and cooling efficiency and reduces energy consumption.

[0054] In one embodiment, see Figure 5 and Figure 6 The base plate 11 has a first protrusion 111 that protrudes toward the pressure plate 13, and the pressure plate 13 has a second protrusion 133 that protrudes toward the base plate 11. The second protrusion 133 has a second through hole 132. The side of the first protrusion 111 and the side of the pressure head 14 form an air guide gap 162.

[0055] Thus, the design of the first protrusion 111 and the second protrusion 133 facilitates the formation of the air guide gap 162 and occupies space in the receiving cavity 161, thereby reducing the flow space of the regulating airflow within the receiving cavity 161 and reducing heat loss of the regulating airflow. Simultaneously, the second through hole 132 is formed at the second protrusion 133, which helps to reduce the communication path between the air guide gap 162 and the second through hole 132, thereby further reducing heat loss of the regulating airflow.

[0056] Specifically, during the movement of the pressure plate 13, the second protrusion 133 moves close to the first protrusion 111 until it abuts against the first protrusion 111. In this way, the regulating airflow of the air guide gap 162 will not flow into the gap between the first protrusion 111 and the second protrusion 133.

[0057] In one embodiment, see Figure 6 The base plate 11 has a first mounting groove 112 disposed away from the pressure plate 13. The bottom surface of the first mounting groove 112 is used to support the target part 2. One end of the pressure head 14 extends into the first mounting groove 112, and the side surface of the first mounting groove 112 extends to the outer side surface of the first protrusion 111. In this way, the first mounting groove 112 can increase the stroke of the pressure head 14 and reduce the volume change of the receiving cavity 161.

[0058] Specifically, a third protrusion 113 is formed on the side of the bottom plate 11 away from the top plate 12, and a first mounting groove 112 is formed on the side of the third protrusion 113 near the top plate 12.

[0059] Optionally, the cross-sectional area of ​​the first mounting groove 112 gradually increases in the direction close to the pressure plate 13. This facilitates the guidance of the regulating airflow discharged from the second through hole 142 on the bottom surface of the first mounting groove 112 toward the second through hole 132, thereby improving the smoothness of the regulating airflow.

[0060] Optionally, see Figure 3 A clearance hole 119 is provided on the bottom surface of the first mounting groove 112. The clearance hole 119 is used to allow the contact 201 of the target part 2 to be exposed and electrically connected to the test socket.

[0061] In one embodiment, see Figure 5 and Figure 6 The top plate 12 has a first guide hole 125, and the pressure plate 13 has a second guide hole 137. The pressure head 14 has a third guide hole 145. The first guide hole 125, the second guide hole 137, and the third guide hole 145 are arranged facing each other along a preset direction X. The first guide hole 125, the second guide hole 137, and the third guide hole 145 are used to accommodate guide members to guide the pressure head 14 to move relative to the pressure plate 13 along the preset direction X.

[0062] Specifically, multiple first guide holes 125, second guide holes 137, and third guide holes 145 are provided. The first guide hole 125 is arranged around the first air inlet 121, the second guide hole 137 is arranged around the first through hole 131, and the third guide hole 145 is arranged around the first through hole 141.

[0063] In one embodiment, please refer again. Figure 2 The top plate 12 includes a plate body 123 and a surrounding plate 124. The plate body 123 and the bottom plate 11 are spaced apart along a predetermined direction X. The pressure plate 13 is movably disposed between the plate body 123 and the bottom plate 11 along the predetermined direction X. One end of the surrounding plate 124 is connected to the edge of the plate body 123. The other end of the surrounding plate 124 extends to the edge of the bottom plate 11. Thus, the plate body 123, the surrounding plate 124, and the bottom plate 11 together form a receiving cavity 161.

[0064] Optionally, see Figure 2 The multi-parallel pressure measuring assembly 10 also includes two fasteners 164. The two fasteners 164 are located on both sides of the drive component 17. The two fasteners 164 are fixedly connected to the plate 123, the surrounding plate 124 and the base plate 11.

[0065] Optionally, see Figure 2The base plate 11 has protruding positioning pins 114. The positioning pins 114 are positioned and engaged with the top plate 12. Specifically, there are two positioning pins 114. The two positioning pins 114 are located at two opposite corners of the base plate 11.

[0066] Among them, see Figure 6 With the pressure plate 13 abutting against the bottom plate 11, a ventilation cavity 163 is formed between the pressure plate 13 and the top plate 12. The first air inlet 121 is connected to the first through hole 131 through the ventilation cavity 163. The first exhaust hole 122 is connected to the second through hole 132 through the ventilation cavity 163. Since the first air inlet 121 and the first through hole 131 are directly opposite each other along a preset direction X, and the second through hole 132 and the first exhaust hole 122 are directly opposite each other along a preset direction X, under the action of the regulating airflow's own flow rate, after the regulating airflow passes through the ventilation cavity 163, most of the regulating airflow flows into the first through hole 131 or the first exhaust hole 122.

[0067] In this embodiment, see Figure 7 A first protrusion 111 is formed between two adjacent pressure heads 14, and an air guide gap 162 is formed between the pressure head 14 and the adjacent first protrusion 111. There are multiple second through holes 132, and a portion of the orthographic projection of the second through hole 132 extends out of the edge of the first protrusion 111.

[0068] In one embodiment, see Figure 2 The base plate 11 supports four target components 2. Specifically, see... Figure 7The bottom plate 11 has a first protrusion 115 and a second protrusion 116 arranged in a cross shape on the side facing the top plate 12. The first protrusion 115 and the second protrusion 116 are arranged in four arrays on the bottom plate 11 as first mounting grooves 112. The portions of the two ends of the first protrusion 115 corresponding to two adjacent first mounting grooves 112 are respectively formed as a first protrusion 111. The second protrusion 116 has two spaced-apart connecting grooves 117. One connecting groove 117 connects two adjacent first mounting grooves 112. The other connecting groove 117 connects to two other adjacent first mounting grooves 112. The two ends of the second protrusion 116 are respectively formed as two first protrusions 111. The pressure plate 13 has a plurality of second through holes 132a and a plurality of second through holes 132b. The two ends of the first protrusion 115 are respectively connected to the air guide gaps 162 formed on both sides of the first protrusion 115. The two first protrusions 111 formed by the second protrusion 116 correspond to a plurality of second through holes 132b (e.g., two or more). The plurality of second through holes 132b are connected to the air guide gap 162 on one side of the first protrusion 111, and the plurality of second through holes 132b are connected to the air guide gap 162 on the other side of the first protrusion 111.

[0069] The top plate 12 has multiple first exhaust holes 122. Each first exhaust hole 122 corresponds to a second through hole 132b. Thus, the regulating airflow discharged from the second through hole 132a can pass through the venting chamber 163 to the second through hole 132b, and then be discharged from the first exhaust hole 122.

[0070] In other embodiments, a first vent hole 122 corresponding to the second through hole 132a may also be provided on the top plate 12.

[0071] In one embodiment, see Figure 8 The pressure head 14 has a pressure surface 146 formed at one end near the base plate 11, which is used to press against the target component 2. Multiple second through holes 142 are formed, and these holes are staggered and extend to the bottom surface of the pressure head 14. In this way, the regulating airflow can still contact the target component 2 while exiting through the second through holes 142, thus achieving heat exchange. The multiple second through holes 142 ensure both the area of ​​the pressure surface 146 and the contact area between the regulating airflow and the target component 2, while also increasing the airflow velocity and reducing the risk of blockage, thereby ensuring both pressure conduction and heat exchange.

[0072] Specifically, see Figure 8Four second through holes 142 are provided. Three of the second through holes 142 are spaced apart along the length of the cross-section of the pressure head 14, and all three second through holes 142 extend to both sides of the pressure head 14 along the width of the cross-section of the pressure head 14. The third second through hole 142 extends to both sides of the pressure head 14 along the length of the cross-section of the pressure head 14, and connects to both the first through hole 141 and the first three second through holes 142. In this way, the regulating airflow can be discharged from all parts of the outer peripheral surface of the pressure head 14 through the second through holes 142.

[0073] Specifically, see Figure 8 Of the three parallel, spaced-apart second through holes 142, the middle second through hole 142 includes a first section 1421 and a second section 1422. One end of the first section 1421 connects to the first through hole 141. One end of the second section 1422 connects to the first section 1421, and the other end of the second section 1422 extends to the side of the pressure head 14. The cross-sectional area of ​​the second section 1422 is larger than that of the first section 1421. This improves the efficiency of the airflow discharge from the second through hole 142.

[0074] In this embodiment, see Figure 9 The multi-parallel pressure measuring assembly 10 also includes a driving member 17. One end of the driving member 17 is located on the side of the top plate 12 away from the bottom plate 11, and the other end of the driving member 17 passes through the top plate 12 and is connected to the pressure plate 13. The driving member 17 is used to drive the pressure plate 13 to move closer to or away from the bottom plate 11 so as to press the pressure head 14 through the elastic member 15.

[0075] In this embodiment, see Figure 9 The multi-parallel pressure measuring assembly 10 also includes a guide member 166. The guide member 166 is connected to the top plate 12 and extends towards the bottom plate 11 along a preset direction X. The pressure plate 13 has a fourth guide hole 138 extending along the preset direction X, and the guide member 166 is movably fitted into the fourth guide hole 138 along the preset direction X. The driving member 17 is threadedly connected to the pressure plate 13. Thus, during the rotation of the driving member 17 relative to the pressure plate 13, the pressure plate 13 is displaced along the preset direction X under the action of the guide member 166. This driving method features low cost, high driving stroke accuracy, and is suitable for high and low temperature environments.

[0076] Specifically, there are two guide members 166. The two guide members 166 are spaced apart on both sides of the top plate 12.

[0077] Specifically, see Figure 9 The driving component 17 includes an operating part 171 and a transmission part 172. The operating part 171 is located on the side of the top plate 12 opposite to the bottom plate 11. One end of the transmission part 172 is fixedly connected to the operating part 171, and the other end of the transmission part 172 is threadedly connected to the pressure plate 13.

[0078] Optionally, see Figure 9 A threaded portion 139 is formed on the surface of the pressure plate 13 near the top plate 12. The threaded portion 139 forms a threaded groove 1391. One end of the transmission portion 172 extends into the threaded groove 1391 and is threadedly connected to the pressure plate 13. A relief groove 118 is formed on the bottom plate 11, and the threaded portion 139 is received in the relief groove 118. Specifically, the relief groove 118 is formed at the intersection of the first protrusion 115 and the second protrusion 116.

[0079] Optionally, multiple pressure heads 14 are spaced apart circumferentially on the outer side of the transmission section 172. Multiple elastic members 15 are also spaced apart circumferentially on the outer side of the transmission section 172. Thus, during the movement of the pressure plate 13 driven by the drive member 17, the pressure plate 13 can uniformly guide the multiple elastic members 15 to deform, thereby applying a stable clamping force to the multiple pressure heads 14.

[0080] In one embodiment, see Figure 9 The guide member 166 includes a guide rod 1661 and a limiting block 1662. The guide rod 1661 is connected to the top plate 12 and passes through the fourth guide hole 138. The limiting block 1662 is connected to the guide rod 1661 and is located on the side of the pressure plate 13 opposite to the top plate 12. The limiting block 1662 can limit the movement stroke of the pressure plate 13, thereby reducing the possibility of the pressure plate 13 damaging the target part 2 or the base plate 11.

[0081] In one embodiment, see Figure 9 The multi-parallel pressure measuring assembly 10 also includes a bearing 167. A mounting hole 126 is formed on the side of the top plate 12 facing the bottom plate 11. The bearing 167 is disposed in the mounting hole 126. The transmission part 172 passes through the bearing 167 and is threadedly connected to the pressure plate 13. This improves the rotational reliability of the drive component 17.

[0082] In one embodiment, see Figure 9 The operating part 171 is spaced apart from the top plate 12. A travel groove 173 is formed on the surface of the operating part 171 near the top plate 12. The travel groove 173 is arc-shaped, and the center of this arc coincides with the rotation axis of the transmission part 172. The top plate 12 is provided with a limiting post 127. The limiting post 127 extends into the travel groove 173. Thus, when the operating part 171 rotates about the rotation axis, the limiting post 127 and the travel groove 173 cooperate to limit the rotational limit position of the operating part 171. For example, when the limiting post 127 abuts against one arc-shaped end of the travel groove 173, the pressure plate 13 abuts against the top plate 12. When the limiting post 127 abuts against the other arc-shaped end of the travel groove 173, the pressure plate 13 abuts against the limiting block 1662.

[0083] The stroke groove 173 can be constructed as a through groove or a blind groove.

[0084] See Figure 10 This application also provides a chip pressure testing device 1, which includes a gas source 20 and a multi-parallel pressure testing component 10 from any of the aforementioned embodiments. See also Figure 10 The air source 20 is connected to the first air inlet 121. The air source 20 is used to introduce airflow into the multi-parallel pressure measuring component 10 to adjust the temperature of the target component 2.

[0085] The chip voltage testing device 1 according to this embodiment includes the multi-parallel voltage testing component 10 of any of the aforementioned embodiments, and thus has the beneficial effects of the multi-parallel voltage testing component 10 of any of the aforementioned embodiments, which will not be repeated here.

[0086] The gas source 20 can be a heat flow meter, which is small in size and easy to carry, enabling testing of the target component 2 in a laboratory environment. In other embodiments, the gas source 20 can also be a high or low temperature furnace, etc.

[0087] In this embodiment, see Figure 10 The chip pressure testing device 1 also includes an airflow distribution component 30 and a base 50. The airflow distribution component 30 is disposed on the base 50. A mounting cavity 60 is formed between the airflow distribution component 30 and the base 50. The airflow distribution component 30 is located between the top plate 12 and the air source 20, and has a first air inlet channel 31 and a first exhaust channel 32 that are not interconnected. The first air inlet channel 31 connects to the first air inlet hole 121 and the air source 20, and the first exhaust channel 32 connects to the first exhaust hole 122. A multi-parallel pressure testing component 10 is disposed on the base 50 and housed in the mounting cavity 60. Optionally, there can be multiple multi-parallel pressure testing components 10. All multiple multi-parallel pressure testing components 10 are disposed within the mounting cavity 60, so that the airflow is evenly conducted to the multiple multi-parallel pressure testing components 10 by the airflow distribution component 30, thereby further improving the detection efficiency.

[0088] Optionally, the base 50 is provided with conductive adhesive or a flexible electrical connection. The base 50 can be electrically connected to the contact 201 via the conductive adhesive, or connected to the chip via the flexible electrical connection. In this way, a reliable electrical connection can be maintained between the contact 201 and the base 50 under the pressure provided by the multi-parallel pressure measuring assembly 10.

[0089] In this embodiment, see Figure 10 The air source 20 has a second air intake channel 21 and a second exhaust channel 22 that are spaced apart from each other. The second air intake channel 21 is sealed to the first air intake channel 31. The second exhaust channel 22 is sealed to the first exhaust channel 32.

[0090] The specific embodiments described above do not constitute a limitation on the scope of protection of this application. Any other corresponding changes and modifications made based on the technical concept of this application should be included within the scope of protection of the claims of this application.

Claims

1. A multi-parallel pressure measurement component, characterized in that, include: A base plate, which is used to support multiple target components; A top plate, which covers the bottom plate along a predetermined direction and forms an accommodating cavity; A pressure plate, which is movably disposed between the bottom plate and the top plate along a predetermined direction; Multiple pressure heads are spaced apart from each other, one end of each pressure head is movably connected to the pressure plate, and the other end of each pressure head is used to press against the corresponding target part; Multiple elastic elements, each of which is elastically connected at both ends to the pressure plate and the corresponding pressure head.

2. The multi-parallel pressure measurement assembly according to claim 1, characterized in that, The pressure plate has a connecting portion, one end of the elastic element is sleeved on the connecting portion, and the other end of the elastic element is sleeved on the pressure head.

3. The multi-parallel pressure measurement assembly according to claim 2, characterized in that, The connecting part is a first through hole that penetrates the pressure plate in a preset direction. A first limiting part is formed on the hole surface of the first through hole. The pressure head has a first through hole that penetrates in a preset direction. A second limiting part is formed on the hole surface of the first through hole. One end of the elastic member extends into the first through hole and abuts against the first limiting part. The other end of the elastic member extends into the first through hole and abuts against the second limiting part.

4. The multi-parallel pressure measurement assembly according to claim 3, characterized in that, The end of the pressure head that is away from the pressure plate along a preset direction also has a second through hole, and the second through hole connects the first through hole and the outer peripheral surface of the pressure head; The pressure plate has a second through hole, which is spaced apart from the first through hole; The top plate has a first air inlet and a first air outlet spaced apart from each other. The first air inlet is corresponding to the first through hole, and the first air outlet is corresponding to the second through hole. The first air inlet, the first through hole, the first through hole, the second through hole, the second through hole, and the first air outlet are sequentially connected to form an airflow channel.

5. The multi-parallel pressure measurement assembly according to claim 1, characterized in that, The pressure head and one of the pressure plates form a limiting groove, and the outer peripheral surface of the pressure head and the other of the connecting parts form a limiting flange. The limiting flange extends into the limiting groove, and the thickness of the limiting flange along the preset direction is less than the width of the limiting groove along the preset direction.

6. The multi-parallel pressure measurement assembly according to claim 5, characterized in that, The pressure plate has a groove formed on its surface facing the base plate, and the groove includes a side surface and a bottom surface. The multi-parallel pressure measuring assembly also includes a limiting member. The limiting member is connected to the side of the pressure plate near the bottom plate and to the edge of the groove near the bottom plate. It extends toward the inside of the groove. The side surface of the groove, the bottom surface of the groove, and the surface of the limiting member away from the bottom plate together form the limiting groove. The limiting flange protrudes from the side of the pressure head and extends between the bottom surface of the groove and the limiting member. The distance between the bottom surface of the groove and the limiting member along a preset direction is greater than the thickness of the limiting flange along the preset direction.

7. The multi-parallel pressure measurement assembly according to claim 1, characterized in that, The multi-parallel pressure measuring assembly also includes a driving component. One end of the driving component is located on the side of the top plate away from the bottom plate, and the other end of the driving component passes through the top plate and is connected to the pressure plate. The driving component is used to drive the pressure plate closer to or away from the bottom plate so as to press the pressure head through the elastic element.

8. The multi-parallel pressure measurement assembly according to claim 7, characterized in that, The multi-parallel pressure measurement assembly also includes a guide member, which is connected to the top plate and extends toward the bottom plate in a preset direction. The pressure plate has a guide hole that extends through in the preset direction, and the guide member is movably fitted into the guide hole in the preset direction. The drive component is threadedly connected to the pressure plate.

9. A chip voltage testing device, characterized in that, include: The multi-parallel pressure measurement assembly according to any one of claims 1 to 8; An air source is provided to supply airflow to the multi-parallel pressure measurement assembly, and the airflow is used to regulate the temperature of the target component within the multi-parallel pressure measurement assembly.

10. The chip voltage testing device according to claim 9, characterized in that, The chip pressure testing device further includes a base and an airflow distribution component, with a mounting cavity formed between the base and the airflow distribution component. The number of multiple parallel pressure testing components is multiple, and all multiple parallel pressure testing components are disposed in the mounting cavity. The air source is connected to the airflow distribution component, and the airflow distribution component is used to divert the airflow generated by the air source to the corresponding parallel pressure testing component.

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