Wafer seal conductive test apparatus

Abstract

This utility model relates to a conductivity testing device for wafer sealing components. The sealing component includes an annular body, multiple conductive posts disposed on one side of the body, and multiple conductive teeth disposed on the inner edge of the body. The conductivity testing device includes a clamping unit, an alignment unit, and a detection unit. This utility model, on the one hand, is based on the upper and lower seats clamping the sealing component towards each other, so that each conductive post and conductive tooth contacts the first and second conductive bodies to form a conductive circuit. The conductivity of the sealing component is then comprehensively tested by judging the continuity of the conductive circuit, resulting in high accuracy. On the other hand, it has a simple structure, is easy to operate, and has high testing efficiency.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, specifically relating to a conductive testing device for wafer sealing components. Background Technology

[0002] In wafer electrochemical coating (ECD) equipment, a ring-shaped conductive seal is typically used to hold and fix the wafer to the carrier along the edge of the wafer. This ensures the sealing between the wafer and the carrier and allows the wafer to be connected to an external power source to participate in the electrochemical reaction in the electroplating tank. Therefore, the conductivity of the seal is one of the key factors in electroplating quality.

[0003] Currently, existing seals generally include a ring body, multiple conductive posts protruding outward from one side of the ring body and distributed in a ring-like interval, and conductive teeth distributed on the inner edge of the ring body. Before use, the conductivity of the seal needs to be tested. For example, Chinese patent CN219226290U discloses a test wafer and its test system. Before mass production, the conductivity of the metal sealing conductive ring is tested. The test wafer is installed on the wafer fixture of an existing electroplating machine, and a resistance meter is used to measure the resistance between each test area or measurement point and the conductive block of the electroplating machine to determine whether the conductivity of the metal sealing conductive ring is abnormal.

[0004] However, in actual testing, existing technologies require testers to use handheld measuring instruments to test each seal individually, which is complicated and inefficient. It is difficult to conduct rapid testing on a large number of seals. Moreover, when testing a single seal, multiple test areas need to be divided, which can easily lead to omissions and errors in the test results. Utility Model Content

[0005] The technical problem to be solved by this utility model is to provide an improved conductive testing device for wafer seals.

[0006] To solve the above technical problems, the present invention adopts the following technical solution:

[0007] A conductive testing device for a wafer seal includes a seal comprising an annular body, multiple conductive posts disposed on one side of the body, and multiple conductive teeth disposed on the inner edge of the body. The conductive testing device includes a clamping unit, an alignment unit, and a detection unit. The clamping unit includes an upper seat and a lower seat disposed vertically, and a driver for driving the upper seat and the lower seat to move closer or further apart. The upper seat and / or the lower seat are provided with a first conductor and a second conductor corresponding to and matching the conductive posts and conductive teeth. The seal is placed between the upper seat and the lower seat, with the conductive posts and conductive teeth facing the first conductor and the second conductor. The alignment unit is used to drive the conductive posts and conductive teeth to align vertically with the first conductor and the second conductor. When the upper seat and the lower seat move closer together and clamp the seal, the multiple conductive posts and multiple conductive teeth simultaneously contact the first conductor and the second conductor to form a conductive circuit. The detection unit is used to detect the continuity and / or resistance of the conductive circuit.

[0008] Preferably, the lower seat has an annular support surface that matches the main body. The main body is placed on the support surface, and the driver drives the upper seat to move up and down to press or release the main body. This facilitates the placement of the seal, and because it is supported by the support surface, no external clamping device is needed for positioning. The seal can be easily pressed or released by the movement of the upper seat.

[0009] Preferably, the first conductor and the second conductor are located in the inner circle of the support surface and are arranged sequentially from the outside to the inside. The first conductor includes multiple conductive sheets arranged in a circumferential array, and the second conductor includes a conductive disk. When forming a conductive circuit, multiple conductive posts abut against multiple conductive sheets, and multiple conductive teeth abut against the edge of the conductive disk. Here, the conductive sheets and conductive disk are arranged according to the distribution characteristics of the conductive posts and conductive teeth to ensure sufficient contact and avoid omissions.

[0010] Specifically, the vertical center line of the support surface, the array center line of the conductive sheets, and the vertical center line of the conductive disk are all aligned. This allows the alignment unit to precisely align the conductive pillars and conductive teeth with the edges of the conductive sheets and conductive disk when the main body is supported on the support surface.

[0011] Furthermore, each conductive sheet has an undulating wave shape, with each conductive post corresponding to and abutting the highest point of each conductive sheet. The conductive sheets are made of elastic material, such as beryllium copper conductive spring sheets, which ensures contact between the conductive sheet and the conductive post under contact deformation.

[0012] Preferably, the conductive disk is divided into multiple sector-shaped sections, and multiple conductive pillars, multiple conductive teeth, multiple conductive sheets, and multiple sector-shaped sections form multiple conductive loops. The detection unit simultaneously detects the continuity and / or resistance of multiple conductive loops. Here, when an open circuit occurs, it is convenient for testers to quickly determine the location of the problem; at the same time, by measuring the resistance, the lower the resistance, the better the conductivity.

[0013] Preferably, the upper body includes a first segment and a second segment connected to the first segment and capable of floating up and down, wherein the second segment forms a pressing end from the bottom; the actuator includes a drive cylinder connected to the top of the first segment and an airbag disposed between the first and second segments. When pressed down, the drive cylinder drives the first segment and causes the second segment to contact the main body from the pressing end, and the airbag inflates and expands to form a downward pressure that drives the second segment to press against the main body. Here, the downward pressure formed by the expansion of the airbag is precisely controllable, ensuring that the seal is pressed tightly while preventing damage to the seal due to excessive downward pressure.

[0014] Preferably, the upper body further includes an elastic element connecting the first and second parts, which drives the second part to maintain an upward movement. Here, when the airbag is deflated, the elastic element synchronously drives the second part to move smoothly upward to loosen the seal, preventing the seal from losing downward pressure instantly and causing bouncing.

[0015] Specifically, there are multiple elastic elements distributed in a ring at intervals; and / or, each elastic element includes a first spring sheet fixedly connected at one end to the first segment, a second spring sheet fixedly connected at one end to the second segment, and a connecting block connecting the other ends of the first and second spring sheets.

[0016] In addition, the outer diameter of the support surface is smaller than the outer diameter of the body. The alignment unit includes multiple alignment modules that are circumferentially spaced around the support surface, and an alignment power unit that drives the multiple alignment modules to move towards each other and open or close with the vertical center line of the support surface as a reference.

[0017] Due to the implementation of the above technical solution, this utility model has the following advantages compared with the prior art:

[0018] Existing technologies require testers to manually inspect each seal one by one, which is complex and inefficient, making it difficult to conduct rapid testing on large batches of seals. Furthermore, each seal requires multiple test areas, which can lead to omissions and errors in the test results. This application addresses these shortcomings by designing a comprehensive conductive testing device for wafer seals. The device first places the seal between the upper and lower seats, ensuring the conductive posts and teeth face the first and second conductors. Then, an alignment unit drives the conductive posts and teeth to align with the first and second conductors. Next, a driver moves the upper and lower seats closer together to press the aligned seal, causing the conductive posts and teeth to simultaneously contact the first and second conductors, forming a conductive circuit. Finally, a detection unit detects the continuity and / or resistance of the conductive circuit to complete the conductivity performance test of the seal. Therefore, compared with the prior art, this utility model has the advantages of firstly, it is based on the upper and lower seats clamping the sealing component together, so that each conductive post and conductive tooth contacts the first and second conductive bodies and forms a conductive circuit. Then, by judging the continuity of the conductive circuit, a comprehensive test of the conductivity of the sealing component can be achieved, and the test results are highly accurate. Secondly, it has a simple structure, is easy to operate, and has high testing efficiency. Attached Figure Description

[0019] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments:

[0020] Figure 1 This is a schematic front view of the wafer sealing component of this utility model;

[0021] Figure 2 This is a schematic diagram of the structure of the wafer sealing component conductivity testing device of this utility model;

[0022] Figure 3 for Figure 2 Schematic diagram of a local structure in the middle;

[0023] Figure 4 for Figure 3 A structural decomposition diagram;

[0024] Figure 5 for Figure 2 A half-section diagram;

[0025] Figure 6 for Figure 5 Enlarged schematic diagram of the structure at point A in the middle;

[0026] Figure 7 for Figure 2 Another partial structural diagram;

[0027] In the attached diagram: 1. Clamping unit; 10. Upper seat; 101. First split; c0. Annular groove; 102. Second split; a0. Upper ring; a1. Lower ring; d. Clamping end; 103. Elastic element; b1. First spring; b2. Second spring; b3. Connecting block; 11. Lower seat; m. Support surface; c1. Mounting groove; t1. First conductor; t10. Conductive sheet; t2. Second conductor; t20. Conductive disk; q. Sector partition; 12. Driver; 120. Drive cylinder; 121. Airbag;

[0028] 2. Alignment unit; 20. Alignment module; 21. Alignment power unit; 22. Through-beam sensor;

[0029] 3. Detection unit; 30. Connection terminal;

[0030] J, sealing element; J0, body; J1, conductive post; J2, conductive tooth. Detailed Implementation

[0031] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0032] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0034] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0035] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0036] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0037] like Figures 1 to 7 As shown, the wafer sealing component conductivity testing device of this embodiment includes a clamping unit 1, an alignment unit 2, and a detection unit 3.

[0038] Specifically, the sealing element J in this embodiment includes an annular body J0, a plurality of conductive posts J1 disposed on one side of the body J0 and distributed in an annular interval, and a plurality of conductive teeth J2 disposed on the inner edge of the body and distributed in an annular interval.

[0039] In this example, the clamping unit 1 includes an upper seat 10 and a lower seat 11 arranged vertically, and a driver 12 that drives the upper seat 10 and the lower seat 11 to move closer or further apart. The lower seat 11 is provided with a first conductor t1 and a second conductor t2 that correspond to and match the conductive post J1 and the conductive tooth J2. The sealing member J is placed between the upper seat 10 and the lower seat 11, and the conductive post J1 and the conductive tooth J2 face the first conductor t1 and the second conductor t2. The alignment unit 2 is used to drive the conductive post J1 and the conductive tooth J2 to align vertically with the first conductor t1 and the second conductor t2. When the upper seat 10 and the lower seat 11 move closer together and clamp the sealing member, multiple conductive posts J1 and multiple conductive teeth J2 simultaneously contact the first conductor t1 and the second conductor t2 to form a conductive circuit. The detection unit 3 is used to detect the continuity and / or resistance of the conductive circuit.

[0040] In some specific embodiments, the upper body 10 includes a first split 101 and a second split 102 connected to the first split 101 and capable of floating up and down. The second split 102 forms an annular pressing end d from its bottom that matches the main body J0. The driver 12 includes a drive cylinder 120 connected to the top of the first split 101 and an airbag 121 disposed between the first split 101 and the second split 102. When pressed down, the drive cylinder 120 drives the first split 101 and causes the second split 102 to contact the main body J0 from the pressing end d. The airbag 121 then inflates and expands, forming a downward pressure that causes the second split 102 to press against the main body J0. Here, the downward pressure formed by the expansion of the airbag is precisely controllable, ensuring that the seal is pressed tightly while preventing damage to the seal due to excessive downward pressure.

[0041] It should be noted that the first component 101, the second component 102, and the airbag 121 are all annular components. The first component 101 forms an annular groove c0 in the circumference. The second component 102 includes an upper ring a0 inserted into the annular groove c0 and a lower ring a1 fixedly connected to the upper ring a0. The height of the annular groove c0 is greater than the thickness of the part of the upper ring a0 inserted into the annular groove c0. The airbag 121 is disposed in the gap between the upper ring a0 and the top of the annular groove c0 and is inflated and deflated by an external air source. The bottom of the lower ring a1 is bent inward to form an annular pressing end d located below the first component 101.

[0042] For ease of implementation, the upper body 10 also includes an elastic element 103 connecting the first split 101 and the second split 102. The elastic element 103 drives the second split 102 to maintain an upward movement. Here, when the airbag is deflated, the elastic element synchronously drives the second split to move smoothly upward to loosen the seal, preventing the seal from losing downward pressure instantly and causing a bouncing phenomenon.

[0043] In some specific embodiments, there are three elastic elements 103 arranged in a ring with intervals; each elastic element 103 includes a first spring piece b1 fixedly connected at one end to the first split 101, a second spring piece b2 fixedly connected at one end to the second split 102, and a connecting block b3 connecting the other ends of the first spring piece b1 and the second spring piece b2.

[0044] In this example, the lower seat 11 has an annular support surface m that matches the main body J0. The main body J0 is placed on the support surface m, and the driver 12 drives the upper seat 10 to move up and down to press or release the main body J0. This facilitates the placement of the seal, and because it is supported by the support surface, no external clamping device is required for positioning. The seal can be easily pressed or released by the movement of the upper seat.

[0045] In some specific embodiments, the first conductor t1 and the second conductor t2 are located in the inner circle of the support surface m and are arranged sequentially from the outside to the inside. The lower seat 11 is recessed from the top surface inward to form an annular mounting groove c1. The first conductor t1 includes multiple conductive sheets t10 arranged in a circumferential array within the mounting groove c1. The second conductor t2 includes a conductive disk t20. The vertical center line of the support surface m, the array center line of the conductive sheets t10, and the vertical center line of the conductive disk t20 are all aligned. Here, when the body is supported on the support surface, it facilitates the alignment unit to precisely align the conductive posts and conductive teeth with the edges of the conductive sheets and the conductive disk.

[0046] Therefore, when forming a conductive circuit, multiple conductive posts J1 correspond to and abut against multiple conductive sheets t 10, and multiple conductive teeth J2 abut against the edge of the conductive disk t 20. Here, the conductive sheets and conductive disk are arranged according to the distribution characteristics of the conductive posts and conductive teeth to ensure sufficient contact and avoid omissions.

[0047] To further facilitate implementation, each conductive sheet t 10 is wavy with an up-and-down motion, and each conductive post J1 is positioned to contact the highest point of each conductive sheet t 10. The conductive sheets are made of elastic material, such as beryllium copper conductive sheets, to ensure contact between the conductive sheet and the conductive post under contact deformation.

[0048] The conductive disk t 20 is a PCB conductive disk, divided into multiple sector-shaped sections q. Multiple conductive pillars J1, multiple conductive teeth J2, multiple conductive sheets t 10, and multiple sector-shaped sections q form multiple conductive loops. The detection unit 4 simultaneously detects the continuity and / or resistance of multiple conductive loops. Here, when an open circuit occurs, it is convenient for testers to quickly determine the location of the problem; at the same time, by measuring the resistance, the lower the resistance, the better the conductivity.

[0049] In this example, the outer diameter of the support surface m is smaller than the outer diameter of the body J0. Therefore, when the material is placed, the edge of the seal protrudes outward from the support surface m. The alignment unit 2 includes multiple alignment modules 20 that are circumferentially spaced around the support surface m, and an alignment power unit 21 that drives the multiple alignment modules 20 to move towards each other with the vertical center line of the support surface m as a reference.

[0050] Specifically, the alignment power unit 21 employs a linear cylinder to drive the alignment module 20 in radial reciprocating motion along the support surface. Simultaneously, the alignment unit 2 also includes two through-beam sensors 22 to ensure the wafer seal is pressed into place. In other embodiments, the alignment power unit 21 may also employ a vision-based robotic arm.

[0051] In addition, the detection unit 3 includes a processor (a conventional processing terminal), a connection terminal 30 connecting the processor and the conductive circuit, and analyzes the conductivity of the seal based on the resistance value. The detailed detection and analysis process is based on existing technology and will not be described in detail here.

[0052] In summary, after adopting this conductivity testing device, the seal is first placed between the upper and lower seats, with the conductive posts and conductive teeth facing the first and second conductors. Then, the alignment unit drives the conductive posts and conductive teeth to align with the first and second conductors vertically. Next, the driver drives the upper and lower seats to move closer together to press the aligned seal tightly, so that the conductive posts and conductive teeth synchronously contact the first and second conductors to form a conductive circuit. Finally, the detection unit detects the continuity and / or resistance of the conductive circuit to complete the conductivity performance test of the seal. Therefore, compared with the prior art, this utility model has several advantages. First, it is based on the upper and lower seats clamping the sealing element towards each other, so that each conductive post and conductive tooth corresponds to and abuts against the first and second conductive bodies to form a conductive circuit. Then, by judging the continuity of the conductive circuit, a comprehensive test of the conductivity of the sealing element can be achieved, and the test results are highly accurate. Second, it has a simple structure, is easy to operate, and has high testing efficiency. Third, it is easy to place the sealing element, and based on the support surface, no external clamping device is required for positioning. The sealing element can be easily pressed or released by the movement of the upper seat. Fourth, it is designed with conductive plates and conductive discs according to the distribution characteristics of the conductive posts and conductive teeth to ensure full contact and avoid omissions. Fifth, the downward pressure formed by the expansion of the airbag is precise and controllable, which can ensure that the sealing element is not damaged due to excessive downward pressure while being pressed. At the same time, when the airbag is deflated, the elastic element synchronously drives the second part to move smoothly upward to release the sealing element, avoiding the sealing element from bouncing due to the instantaneous loss of downward pressure.

[0053] The present utility model has been described in detail above, with the aim of enabling those skilled in the art to understand its contents and implement it. However, this description should not be construed as limiting the scope of protection of the present utility model. All equivalent changes or modifications made in accordance with the spirit and essence of the present utility model should be included within the scope of protection of the present utility model.

Claims

1. A conductive testing device for a wafer seal, the seal comprising an annular body, a plurality of conductive pillars disposed on one side of the body, and a plurality of conductive teeth disposed on the inner edge of the body, characterized in that, The conductivity testing device includes a clamping unit, an alignment unit, and a detection unit. The clamping unit includes an upper seat and a lower seat arranged vertically, and a driver that drives the upper and lower seats to move closer or further apart. The upper and / or lower seats are provided with a first conductor and a second conductor that correspond to and match the conductive posts and conductive teeth. A sealing element is placed between the upper and lower seats, with the conductive posts and conductive teeth facing the first and second conductors. The alignment unit is used to drive the conductive posts and conductive teeth to align vertically with the first and second conductors. When the upper and lower seats move closer together and clamp the sealing element, multiple conductive posts and multiple conductive teeth simultaneously contact the first and second conductors to form a conductive circuit. The detection unit is used to detect the continuity and / or resistance of the conductive circuit.

2. The wafer sealing component conductivity testing device according to claim 1, characterized in that, The lower seat has an annular support surface that matches the main body. The main body is placed on the support surface, and the driver drives the upper seat to move up and down to press or release the main body.

3. The wafer sealing component conductivity testing device according to claim 2, characterized in that, The first conductor and the second conductor are located in the inner circle of the support surface and are arranged sequentially from the outside to the inside. The first conductor includes a plurality of conductive sheets distributed in a circumferential array, and the second conductor includes a conductive disk. When a conductive circuit is formed, a plurality of conductive posts abut against a plurality of conductive sheets, and a plurality of conductive teeth abut against the edge of the conductive disk.

4. The wafer sealing component conductivity testing device according to claim 3, characterized in that, The vertical center line of the support surface, the array center line of the conductive sheet, and the vertical center line of the conductive disk are all aligned.

5. The wafer sealing component conductivity testing device according to claim 3, characterized in that, Each of the conductive sheets is wavy with an up-and-down motion, and each of the conductive pillars is in contact with the highest point of each conductive sheet.

6. The wafer sealing component conductivity testing device according to claim 3, 4, or 5, characterized in that, The conductive disk is divided into multiple sector-shaped sections, and multiple conductive pillars, multiple conductive teeth, multiple conductive sheets, and multiple sector-shaped sections form multiple conductive loops. The detection unit synchronously detects the continuity and / or resistance of multiple conductive loops.

7. The wafer sealing component conductivity testing device according to claim 2, characterized in that, The upper body includes a first part and a second part connected to the first part and capable of floating up and down, wherein the second part forms a pressing end from the bottom; the driver includes a driving cylinder connected to the top of the first part and an airbag disposed between the first part and the second part. When pressed down, the driving cylinder drives the first part and causes the second part to contact the main body from the pressing end, and the airbag inflates and expands to form a downward pressure that drives the second part to press against the main body.

8. The wafer sealing component conductivity testing device according to claim 7, characterized in that, The upper body also includes an elastic element connected between the first and second parts, the elastic element causing the second part to tend to maintain an upward movement.

9. The wafer sealing component conductivity testing device according to claim 8, characterized in that, The elastic elements are multiple and arranged in a ring-shaped interval; and / or, each elastic element includes a first spring sheet fixedly connected at one end to the first split body, a second spring sheet fixedly connected at one end to the second split body, and a connecting block connecting the other ends of the first spring sheet and the second spring sheet.

10. The wafer sealing component conductivity testing device according to claim 2, characterized in that, The outer diameter of the support surface is smaller than the outer diameter of the body. The alignment unit includes multiple alignment modules circumferentially spaced around the support surface and an alignment power unit that drives the multiple alignment modules to move towards each other with the vertical center line of the support surface as a reference.

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