An impedance-adjustable circulator and microwave generator

Abstract

This utility model relates to the field of electrical component technology, specifically an impedance-adjustable circulator and a microwave generator. The utility model includes a circulator with a tuning pin threaded onto its shell wall, capable of being screwed into the circulator's inner cavity. The tuning pin is positioned at the input port of the circulator, connecting to the microwave source, and its axis is perpendicular to the signal flow direction at the input port. This utility model eliminates the need to modify the traditional software optimization logic for load and microwave source impedance matching. Through optimization of the circulator's hardware structure, the circulator itself can adaptably match the internal resistance of most microwave sources, avoiding the reduced lifespan of the microwave source due to impedance mismatch between the circulator and the microwave source.

Description

Technical Field

[0001] This utility model relates to the field of electrical component technology, specifically an impedance-adjustable circulator and a microwave generator. Background Technology

[0002] A circulator cycles a signal through its various port components in a fixed sequence. In existing technologies, a load is often connected to one port of the circulator to form an isolator in a microwave generator system. However, in actual production, the technologies of companies across the entire industry chain—microwave sources (e.g., solid-state sources, magnetrons), isolators (circulators with loads), microwave generator systems, and downstream application equipment (MPCVD equipment, plasma cleaning machines, plasma etching equipment)—are not interchangeable.

[0003] Due to limitations in industrial technology, even microwave sources of the same model do not have consistent internal resistances. However, conventional circulators have fixed characteristic impedances at the factory. This leads to a mismatch between the internal resistance of the microwave source and the inherent characteristic impedance of the circulator, resulting in reflected energy at the circulator's I-port. Higher reflected energy reduces the actual output power, poses a risk of damaging the microwave source, and shortens its lifespan.

[0004] Existing technologies mostly address impedance mismatch between isolators and microwave sources through software optimization control, essentially solving the impedance matching problem between the load (plasma resonant cavity) and the microwave source output. This method is described in Chinese Patent Publication No. CN120201628A, titled "A Frequency-Modulated Matching Microwave Plasma Generator." However, this software optimization method fails to consider the impedance mismatch between the microwave source and the circulator. Furthermore, the software optimization scheme itself still utilizes power feedback from different ports of the circulator to achieve impedance matching between the load and the microwave source. Clearly, this method is also unsuitable for solving the impedance mismatch problem between the microwave source and the circulator, leaving the impedance mismatch issue unresolved and thus requiring a further solution. Utility Model Content

[0005] To avoid and overcome the technical problems existing in the prior art, this utility model provides an impedance-adjustable circulator and microwave generator. It does not require changing the traditional software optimization logic for matching the impedance of the load and the microwave source. By optimizing the hardware structure of the circulator, the circulator itself can adaptably match the internal resistance of most microwave sources, thus avoiding the reduction in the lifespan of the microwave source due to impedance mismatch between the circulator and the microwave source.

[0006] To achieve the above objectives, this utility model provides the following technical solution: An impedance-adjustable circulator includes a circulator, a tuning pin threaded onto the shell wall of the circulator and screwed into the inner cavity of the circulator, the tuning pin being arranged at an input port on the circulator for connecting a microwave source, and the axis of the tuning pin being perpendicular to the signal flow direction at the input port.

[0007] As a further embodiment of this invention, the tuning pins are configured as at least two pins spaced apart along the signal transmission direction of the input port.

[0008] As a further improvement of this utility model: along the signal transmission direction of the input port, the diameter of adjacent tuning pins increases sequentially from the outside to the inside.

[0009] As a further embodiment of this utility model: a boss is fixed on the circulator at the point where the tuning pin passes through, and the tuning pin passes through the boss and the shell wall of the circulator in sequence to extend into the inner cavity of the circulator.

[0010] As a further improvement of this utility model, the boss and the ring are integrally formed components.

[0011] As a further improvement of this utility model, a locking ring is threaded onto a section of the rod located outside the annulus shell wall on the tuning pin.

[0012] A microwave generator includes the circulator, wherein the input port of the circulator is connected to the output port of the microwave source.

[0013] As a further embodiment of this invention: the microwave source includes a magnetron and a microwave power supply for providing electrical energy to the magnetron to generate microwave energy.

[0014] As a further improvement of this utility model, the microwave source is a solid-state microwave source.

[0015] As a further improvement of this invention: the circulator also has a first output port and a second output port, the first output port being used to output microwave energy, and the second output port being connected to a water load.

[0016] Compared with the prior art, the beneficial effects of this utility model are: 1. By optimizing the hardware structure of the circulator, namely by setting a tuning pin on the shell wall of the circulator input port, the electromagnetic field distribution inside the circulator cavity can be changed by screwing the tuning pin in or out, thereby adjusting the characteristic impedance of the circulator to match the internal resistance of the microwave source, effectively reducing reflected energy, improving system efficiency and the service life of the microwave source.

[0017] 2. By using multiple tuning pins with their diameters increasing along the signal transmission direction, the gradient of the electromagnetic field can be adjusted, further improving the accuracy and adaptability of impedance matching.

[0018] 3. The boss structure enhances the installation stability of the tuning pin. In addition, the locking ring on the tuning pin ensures that the tuning pin is fixed in position after adjustment, preventing loosening due to vibration or temperature changes and ensuring long-term stable operation of the circulator. Attached Figure Description

[0019] Figure 1 This is a top view of the structure of this utility model.

[0020] Figure 2 This is a cross-sectional view of the connection between the adjusting pin and the ring device in this utility model.

[0021] Figure 3 This is a simulation diagram of the standing wave at the input port of a conventional circulator.

[0022] Figure 4 This is a simulation diagram of the standing wave at the input port of the circulator in this application.

[0023] In the diagram: 10, circulator; 20, boss; 30, tuning pin; 31, locking ring. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] For ease of understanding, the specific structure and working method of this utility model are further described below with reference to the accompanying drawings: The specific structure of this utility model is as follows: Figure 1-2 As shown, its main structure includes a circulator 10, on which a tuning pin 30 is threadedly connected. Specifically, the tuning pin 30 is threadedly connected by integrally forming or machining a threaded hole in the shell wall. The tuning pin 30 is located at the input port of the circulator 10 (i.e., the I port of the circulator 10), which is used to connect to a microwave source. The axis of the tuning pin 30 is perpendicular to the signal flow direction of the input port. By screwing the tuning pin 30 in or out, the electromagnetic field distribution inside the circulator 10 can be changed, thereby adjusting the characteristic impedance of the circulator 10 to match the internal resistance of the microwave source.

[0026] Based on the above, such as Figure 1 and Figure 2As shown, the tuning pins 30 are configured as at least two, and are spaced apart along the signal transmission direction of the input port, thus optimizing the tuning effect. Further, as... Figure 2 As shown, the signal transmission direction of the input port is such that the diameter of the adjacent tuning pins 30 increases sequentially from the outside to the inside (i.e., from the input port to the depth of the circulator 10) to achieve gradient adjustment of the electromagnetic field and improve the accuracy of impedance matching.

[0027] In practice, if two tuning pins 30 are used, the larger diameter tuning pin 30 is screwed in or out first to achieve coarse impedance adjustment. When the impedance is adjusted to be close to the internal resistance of the microwave source, the smaller diameter tuning pin 30 is screwed in or out to achieve fine impedance adjustment, which effectively improves the impedance matching accuracy between the circulator 10 and the microwave source.

[0028] To enhance structural stability, such as Figure 1 and Figure 2 As shown, a boss 20 is fixed on the shell wall of the circulator 10. The tuning pin 30 passes through the boss 20 and the shell wall in sequence and enters the inner cavity. The boss 20 increases the engagement length of the thread, making the tightening process smoother and the state of the tuning pin 30 more stable. The boss 20 is made of the same metal material as the shell wall of the circulator 10 and is fixed by welding, bolting or integral molding.

[0029] In addition, such as Figure 2 As shown, a locking ring 31 is threaded onto a section of the rod outside the shell wall of the circulator 10, where the tuning pin 30 is located. After adjustment, the locking ring 31 is tightened to press against the surface of the shell wall of the circulator 10 (or, in the embodiment where a boss 20 is provided, to press against the surface of the boss 20). The locking ring 31 fixes the position of the tuning pin 30, preventing it from loosening due to vibration or temperature changes, and ensuring the long-term stable operation of the circulator 10.

[0030] In actual assembly, whether building a new microwave generator system or replacing a new microwave source in an old microwave generator system, it is only necessary to connect the input port of the circulator 10 to the output port of the microwave source. Based on the internal resistance characteristics of the microwave source at this point, the screw-in depth of the tuning pin 30 is gradually adjusted, observing the reflected power until it is minimized (if multiple tuning pins 30 are provided, they are adjusted sequentially in descending order of diameter). After adjustment, the locking ring 31 is tightened to fix the position of the tuning pin 30. This utility model has a simple structure and is easy to adjust. It can effectively solve the impedance mismatch problem between the microwave source and the circulator 10, reduce the damage of reflected energy to the microwave source, and improve system efficiency and reliability.

[0031] To verify the outstanding characteristics of the circulator 10 of this application compared with those of the conventional circulator 10, simulation results are compared as follows: Figure 3 and Figure 4As shown: Among them, Figure 3 This is a simulation diagram of the standing wave ratio at the input port of a conventional circulator 10. Figure 4 The simulation diagram of the standing wave at the input port of the circulator 10 in this application is shown.

[0032] At the same microwave source and the same output power, taking 2.45GHz as an example: exist Figure 3 The conventional circulator has a high VSWR of up to 1.3 at the input port, low quality factor, high reflected power, and low output efficiency. exist Figure 4 The circulator 10 of this application, after adjusting the tuning pin 10, has an input port VSWR value reduced to 1.02, resulting in a high quality factor, reduced reflected power, and improved output efficiency.

[0033] This application also provides a specific structure for the circulator 10 to form a microwave generator. Specifically, the input port of the circulator 10 is connected to the output port of the microwave source, and the first output port of the circulator 10 ( Figure 1 The second output port (II port) is used to output microwave energy. Figure 1 The water load is connected to the III port.

[0034] In addition, microwave sources include magnetrons and microwave power supplies used to provide electrical power to the magnetrons to generate microwave energy.

[0035] Microwave sources can also be solid-state microwave sources.

[0036] Of course, those skilled in the art will recognize that this invention is not limited to the details of the exemplary embodiments described above, but also includes the same or similar structures that can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0037] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0038] The technologies, shapes, and structures not described in detail in this utility model are all known technologies.

Claims

1. An impedance-adjustable circulator, characterized in that, Includes a circulator (10), on which a tuning pin (30) is threaded to the shell wall of the circulator (10) and can be screwed into the inner cavity of the circulator (10). The tuning pin (30) is arranged at the input port of the circulator (10) for connecting to the microwave source, and the axis of the tuning pin (30) is perpendicular to the signal flow direction at the input port.

2. The impedance-adjustable circulator according to claim 1, characterized in that, The tuning pins (30) are configured to be at least two that are spaced apart along the signal transmission direction of the input port.

3. The impedance-adjustable circulator according to claim 2, characterized in that, Along the signal transmission direction of the input port, the diameter of adjacent tuning pins (30) increases sequentially from the outside to the inside.

4. An impedance-adjustable circulator according to claim 1, 2, or 3, characterized in that, A boss (20) is fixed on the circulator (10) at the point through which the tuning pin (30) passes. The tuning pin (30) passes through the boss (20) and the shell wall of the circulator (10) in sequence, so as to extend into the inner cavity of the circulator (10).

5. The impedance-adjustable circulator according to claim 4, characterized in that, The boss (20) and the ring (10) are integrally formed components.

6. An impedance-adjustable circulator according to claim 1, 2, or 3, characterized in that, A locking ring (31) is threaded onto a section of the rod outside the shell wall of the circulator (10) on the tuning pin (30).

7. A microwave generator, characterized in that, Includes the circulator (10) according to any one of claims 1-6, wherein the input port of the circulator (10) is connected to the output of the microwave source.

8. The microwave generator according to claim 7, characterized in that, The microwave source includes a magnetron and a microwave power supply for providing electrical power to the magnetron to generate microwave energy.

9. The microwave generator according to claim 7, characterized in that, The microwave source is a solid-state microwave source.

10. The microwave generator according to claim 7, characterized in that, The circulator (10) also has a first output port and a second output port, the first output port being used to output microwave energy and the second output port being connected to a water load.

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