Electrical connection structure of electrostatic chucking pipeline

Abstract

This utility model discloses an electrical connection structure for an electrostatic clamp coil, comprising: an output component and an electrical input component. The two ends of the output component are respectively connected to a power supply component and an electrical input component; the output component includes: a coaxially fitted RF output plug and a DC output plug. The electrical input component includes: an electrical input fixing element, and a coaxially arranged RF input socket and a DC input connector. The RF input socket has an RF insertion section at its end near the power supply component, which is coaxially fitted with and electrically connected to the RF output plug; the DC input connector has a DC insertion section at its end near the power supply component, which is coaxially fitted with and electrically connected to the DC output plug. The electrical connection structure of this utility model enables coaxial alignment of the output component, electrical input component, and power supply component, and facilitates rapid alignment during insertion of the output component and electrical input component.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, and specifically to an electrical connection structure for an electrostatic clamping coil pipeline. Background Technology

[0002] In semiconductor manufacturing, electrostatic chucks use high-voltage direct current to generate electrostatic Coulomb forces, achieving wafer adsorption and fixation. By introducing radio frequency (RF) voltage, an RF negative DC bias electric field is generated on the metal disk of the chuck, which can help improve the etching rate and adjust ion bombardment energy. To provide DC and RF current to the chuck, the electrical connection structure of the chuck pipeline is typically connected to the DC power supply and the RF power supply separately. However, this design cannot simultaneously control the on / off state of the DC and RF currents in the electrical connection structure. Integrating the RF and DC power supplies into a single power supply component presents challenges in matching the output of the power supply component with the electrical connection structure and aligning the two components. Therefore, a structural integration is needed to solve the problem of connecting DC and RF currents simultaneously, enabling simultaneous control of DC and RF current on / off and shielding against RF interference signals. Utility Model Content

[0003] The purpose of this invention is to provide an electrical connection structure for an electrostatic clamp coil cable, enabling coaxial alignment of the output component, the electrical input component, and the power supply component. This facilitates simultaneous control of DC and RF current switching on / off, and allows for quick alignment of the output component and the electrical input component during insertion.

[0004] To achieve the above objectives, this utility model provides an electrical connection structure for an electrostatic clamping coil pipeline, comprising: an output component and an electrical input component, wherein one end of the output component is connected to a power supply component and the other end is connected to the electrical input component;

[0005] The output component includes: an RF output plug and a DC output plug, wherein the RF output plug is coaxially sleeved on the outside of the DC output plug;

[0006] The electrical input component includes: an electrical input fixing element, and a coaxially arranged radio frequency (RF) input component and a DC input component; the RF input component includes an RF input socket; the DC input component includes a DC input connector;

[0007] The DC input connector is fixed inside the RF input socket by an electrical input fixing element; the RF input socket has an RF plug section at one end near the power supply component, the RF plug section is coaxially sleeved with the RF output plug and electrically connected to the RF output plug; the DC input connector has a DC plug section at one end near the power supply component, the DC plug section is coaxially sleeved with the DC output plug and electrically connected to the DC output plug.

[0008] Optionally, the electrical input fixing element is sleeved on the DC input connector, and the electrical input fixing element is coaxially arranged with the DC input connector and the RF input socket; the electrical input fixing element includes: an electrical input fixing seat and an electrical input positioning seat arranged sequentially along the direction away from the power supply assembly;

[0009] The electrical input positioning base is provided with a positioning through hole and an auxiliary through hole, which respectively penetrate the electrical input positioning base; the positioning through hole is coaxially arranged with the DC input connector, and the auxiliary through hole is eccentrically arranged with the positioning through hole and connected to each other.

[0010] Optionally, the radio frequency input base is provided with a fixing block protruding from its inner wall surface;

[0011] The electrical transmission positioning seat is located between the fixing block and the electrical transmission fixing seat, and the electrical transmission positioning seat is fixed to the radio frequency transmission seat through the fixing block and the electrical transmission fixing seat;

[0012] The outer surface of the electrical transmission fixing base is connected to the inner wall of the radio frequency transmission base;

[0013] The radio frequency input component further includes a radio frequency transmission sleeve, and the DC input component further includes a wire. The radio frequency transmission sleeve is coaxially disposed outside the wire. The radio frequency transmission sleeve is inserted into the end of the radio frequency input socket away from the power supply component and is limited by the fixing block. The radio frequency input socket is electrically connected to the radio frequency transmission sleeve.

[0014] Optionally, the DC input connector is further provided with a first positioning protrusion at one end away from the power supply component. One end of the first positioning protrusion is connected to the DC plug section through a transition section, and the outer diameter of the first positioning protrusion is larger than the outer diameter of the transition section. The other end of the first positioning protrusion is connected to the wire.

[0015] The power input fixing base includes: a main body of the power input fixing base and an annular limiting section. The annular limiting section is disposed on the end face of the main body of the power input fixing base away from the power supply component. The main body of the power input fixing base has a first through hole extending along the direction of the DC input connector, and the annular limiting section has a second through hole. The first through hole and the second through hole are coaxially arranged and interconnected. The diameter of the first through hole is smaller than the diameter of the second through hole.

[0016] The main body of the electrical input fixing base is sleeved outside the transition section of the DC input connector, and the diameter of the first through hole is adapted to the outer diameter of the transition section; the annular limiting section is sleeved outside the first positioning protrusion, and the diameter of the second through hole is adapted to the outer diameter of the first positioning protrusion.

[0017] Optionally, the positioning through hole of the power transmission positioning seat includes: a first stepped hole, a second stepped hole, and a third stepped hole arranged sequentially along the direction away from the power supply component; the first stepped hole, the second stepped hole, and the third stepped hole are coaxially arranged and their diameters decrease sequentially.

[0018] The diameter of the first stepped hole is adapted to the diameter of the second through hole of the annular limiting section, and the stepped surface of the first stepped hole limits the annular limiting section.

[0019] The diameter of the second stepped hole is adapted to the shape of the first positioning protrusion. The first positioning protrusion is located between the end face of the main body of the electric transmission fixing seat and the step surface of the second stepped hole, and is limited by the inner wall of the annular limiting section and the side wall of the second stepped hole.

[0020] The diameter of the third-step hole is adapted to the diameter of the wire.

[0021] Optionally, the gap between the inner wall of the RF input segment of the RF input socket and the outer wall of the DC input segment of the DC input connector forms a first insertion cavity;

[0022] The end of the RF output plug away from the power supply component is inserted into the first plug cavity, and the inner wall of the RF plug section contacts the outer wall of the RF output plug to form an electrical connection; the end of the DC output plug away from the power supply component is inserted into the DC plug section of the DC input connector to form an electrical connection.

[0023] Optionally, the inner wall of the RF connector section is provided with an annular groove, the inner diameter of which is larger than the inner diameter of the first connector cavity; the groove is provided with a watchband contact finger, which is electrically connected to the outside of the RF output plug.

[0024] Optionally, the DC output plug is fixed in the RF output plug by an output end fixing element; the output end fixing element includes: an output end positioning seat and an output end fixing seat arranged sequentially in the direction away from the power supply component; the output end positioning seat and the output end fixing seat are coaxially sleeved on the outside of the DC output plug.

[0025] Optionally, the RF output plug includes: a first RF plug segment and a second RF plug segment connected to each other, the first RF plug segment being pluggably connected to the power supply component, and the second RF plug segment being pluggably connected to the RF connector segment of the RF input socket; and the diameter of the first RF plug segment is smaller than the diameter of the second RF plug segment.

[0026] The output end positioning seat includes: a first boss and a second boss, wherein the first boss is located in the first RF plug segment and the outer diameter of the first boss is adapted to the inner diameter of the first RF plug segment of the RF output plug; the second boss is located in the second RF plug segment and the outer diameter of the second boss is adapted to the inner diameter of the second RF plug segment.

[0027] The outer surface of the output terminal fixing seat is threaded to the inner wall of the second RF plug segment, and the end face of the output terminal fixing seat near the power component contacts the end face of the output terminal positioning seat away from the power component. The output terminal positioning seat is fixed inside the RF output plug by the output terminal fixing seat.

[0028] Optionally, the output end positioning seat is provided with a fourth, fifth, and sixth stepped hole with progressively larger diameters along the direction away from the power supply component.

[0029] The DC transmission plug includes: a first DC plug segment, a second DC plug segment, and a second positioning protrusion located between the two, wherein the diameter of the second positioning protrusion is larger than the diameter of the first DC plug segment and the diameter of the second positioning protrusion is larger than the diameter of the second DC plug segment; the second positioning protrusion includes: a first positioning portion near the first DC plug segment and a second positioning portion near the second DC plug segment;

[0030] After passing through the fourth stepped hole, the first DC plug segment is located inside the first RF plug segment. The diameter of the fourth stepped hole is adapted to the diameter of the first DC plug segment, and a gap is formed between the outer surface of the first DC plug segment and the inner wall of the first RF plug segment.

[0031] The surface of the output end fixing seat facing the output end positioning seat is provided with a third protrusion. The third protrusion is inserted into the sixth stepped hole, and the outer diameter of the third protrusion is adapted to the diameter of the sixth stepped hole. The third protrusion is sleeved on the second positioning part of the second positioning protrusion. The side wall of the fifth stepped hole is sleeved outside the first positioning part of the second positioning protrusion, and the diameter of the fifth stepped hole is adapted to the diameter of the second positioning protrusion.

[0032] Optionally, the output terminal mounting base is provided with a second insertion cavity; the second insertion cavity has a fixing protrusion on the inner wall of the end near the power supply assembly;

[0033] The second positioning protrusion is fixed between the end face of the fixing protrusion near the power assembly and the stepped surface of the fifth stepped hole;

[0034] The fixing protrusion is sleeved on the outside of the end of the second DC plug segment near the second positioning protrusion, and the rest of the second DC plug segment is located inside the second plug cavity; the DC plug segment of the DC input connector is inserted into the second plug cavity and sleeved on the outside of the second DC plug segment, forming an electrical connection between the DC input connector and the DC output connector.

[0035] Optionally, the radio frequency input component further includes: a radio frequency transmission sleeve connected to the radio frequency input socket; the DC input component further includes: a wire connected to the DC input connector; the radio frequency transmission sleeve and the wire are separated by an isolation layer.

[0036] The radio frequency transmission sleeve and the wire are each connected to an electrostatic clamp at the end furthest from the power supply component.

[0037] Compared with the prior art, the technical solution of this utility model has at least the following beneficial effects:

[0038] In the electrical connection structure described in this utility model, both the power input component and the output component are coaxially designed, facilitating mutual plugging and unplugging and coaxial alignment with the power supply component. Furthermore, a first insertion cavity is provided on the side of the power input component closer to the power source, and a second insertion cavity is provided on the side of the output component farther from the power source. This allows the power input component to be inserted into the second insertion cavity simultaneously with the output component, facilitating rapid alignment during the plugging and connection of the output component and the power input component.

[0039] In the electrical connection structure described in this utility model, the electrical input positioning seat is provided with an auxiliary through hole, which makes it easy for the DC input connector to be inserted into the electrical input positioning seat; by providing a first positioning protrusion on the DC input connector and a positioning through hole on the electrical input positioning seat that is compatible with the structure of the DC input connector, it is ensured that the DC input connector can be locked onto the electrical input positioning seat.

[0040] The electrical connection structure described in this utility model employs a mechanically interlocking connection structure, a threaded rotation-generated locking structure, and a coaxial positioning structure formed by the threaded pair, tightly integrating all components. For example, by setting a fixing block in the RF input socket and designing the electrical input fixing socket and the RF input socket as a detachable connection, the electrical input positioning socket is fixed in the RF input socket through the electrical input fixing socket, achieving coaxial constraint between the electrical input positioning socket and the RF input socket; through the non-uniform diameter design of the RF output plug, the output end positioning socket is snapped into the RF transmission plug, and through the connection between the output end fixing socket and the RF output plug, the output end positioning socket is fixed inside the RF output plug, achieving coaxial constraint of all components in the output assembly. The above-mentioned mechanical connection structure also achieves the purpose of introducing a detachable structure, facilitating the maintenance and replacement of each component and reducing maintenance costs.

[0041] The electrical input and output components described in this invention are both detachable, facilitating maintenance and replacement; and the structures of each component in the electrical input and output components are simple, making them easy to manufacture and reducing the manufacturing cost of the electrical connection structure described in this invention.

[0042] The radio frequency transmission component and the wire described in this utility model are coaxially arranged and isolated by an isolation layer to prevent interference between DC power and radio frequency circuits; the radio frequency input socket and DC input connector of the power input component are isolated by an insulating power input fixing element, and the radio frequency output plug and DC output plug are isolated by an output end fixing element, which also prevents interference between DC power and radio frequency current during coaxial transmission. Attached Figure Description

[0043] Figure 1 This is a schematic diagram of the electrical connection structure of the electrostatic clamping pipeline of this utility model.

[0044] Figure 2 This is a schematic diagram of the transmission of radio frequency current in the electrical connection structure of the electrostatic clamping pipeline of this utility model.

[0045] Figure 3 This is a schematic diagram of the connection between the conductor and the DC input connector in the electrical connection structure of the electrostatic clamping pipeline of this utility model.

[0046] Figure 4 This is a schematic diagram of the assembly of the electrical transfer component in the electrical connection structure of the electrostatic clamping pipeline of this utility model.

[0047] Figure 5 This is a schematic diagram of the radio frequency input socket in the electrical connection structure of the electrostatic clamping pipeline of this utility model.

[0048] Figure 6 This is a schematic diagram showing the connection relationship between the electrical input fixing element and the DC input connector in the electrical connection structure of the electrostatic clamping pipeline of this utility model.

[0049] Figure 7 This is a schematic diagram of the electrical transmission to the positioning seat in the electrical connection structure of the electrostatic clamping pipeline of this utility model.

[0050] Figure 8 This is a schematic diagram of the assembly of the output component in the electrical connection structure of the electrostatic clamping pipeline of this utility model.

[0051] In the diagram: 300 - Electrical input component, 320 - Electrical input mounting base, 321 - Annular limiting section, 330 - Electrical input positioning base, 331 - Positioning through hole, 3311 - First stepped hole, 3312 - Second stepped hole, 3313 - Third stepped hole, 332 - Auxiliary through hole, 400 - Output component, 410 - DC output plug, 411 - Second positioning protrusion, 420 - Output end mounting base, 421 - Third boss, 422 - Second insertion cavity, 423 - Fixing protrusion, 430 - Output end positioning base, 431 - First boss, 432 - Second boss, 434 - Fourth stepped hole, 435 - Fifth stepped hole, 436 - ... Six-step hole, 440-RF output plug, 510-RF transmission sleeve, 512-RF input socket, 5121-fixing block, 5122-first insertion cavity, 5123-groove, 5124-first threaded structure, 513-RF transmission straight tube, 514-RF transmission bent tube, 522-DC input connector, 5221-first positioning protrusion, 523-isolation layer, 524-wire, 600-power supply assembly, 611-DC power supply, 612-DC filter, 613-connecting wire, 621-RF power supply, 622-RF matching device, 700-static clamp, 800-conductive base, 901-fixing component. Detailed Implementation

[0052] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0053] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0054] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0055] The electrical connection structure of the electrostatic chuck pipeline is used to transmit DC and RF current to the electrostatic chuck. In the prior art, the DC power supply for providing DC power and the RF power supply for providing RF current are usually connected to the electrical connection structure separately to provide DC power and RF current to the electrostatic chuck; however, this design makes it inconvenient to simultaneously control the energization / de-energization of the electrical connection structure. Integrating the RF power supply and DC power supply into a single power supply component 600 also presents challenges, such as the difficulty in matching the output of the power supply component 600 with the electrical connection structure and the difficulty in coaxial alignment between the two.

[0056] To resolve the above issues, please refer to [link / reference]. Figures 1 to 8 This utility model provides an electrical connection structure for an electrostatic clamp cable, comprising: an output component 400 and an electrical input component 300. The output component 400 serves as an adapter interface, with one end connected to a power supply component 600 and the other end connected to the electrical input component 300, thereby enabling the adapter between the electrical input component 300 and the power supply component 600. The output component 400 includes: an RF output plug 440 and a DC output plug 410, with the RF output plug 440 coaxially sleeved outside the DC output plug 410. The electrical input component 300 includes: an electrical input fixing element, and coaxially arranged RF input components and DC input components; the RF input component includes an RF input socket 512; the DC input component includes a DC input connector 522.

[0057] Specifically, the DC input connector 522 is fixed within the RF input socket 512 by an electrical input fixing element; the RF input socket 512 has an RF plug section at one end near the power supply assembly 600, which is coaxially fitted with and electrically connected to the RF output plug 440; the DC input connector 522 has a DC plug section at one end near the power supply assembly 600, which is coaxially fitted with and electrically connected to the DC output plug 410. Through the coaxial arrangement of the RF output plug 440 and the DC output plug 410, and the coaxial arrangement of the RF input socket 512 and the DC input connector 522, the output assembly 400 and the electrical input assembly 300 can be coaxially connected.

[0058] Among them, such as Figure 1 As shown, the integrated design of the output terminal of the power supply component 600 allows the integrated output terminal to simultaneously output DC and RF current. The power supply component 600 also includes a DC filter 612 and an RF matching unit 622. The RF matching unit 622 is used to match the impedance of the RF power supply 621 to the plasma above the wafer to improve the RF power feed effect; the output terminal of the RF matching unit 622 is connected to the RF output plug 440, and its input terminal is connected to the RF power supply 621. The DC filter 612 is used to process RF interference signals, and its output terminal is connected to the DC output plug 410 via a connecting line 613, and its input terminal is connected to the DC power supply 611. The connecting line 613 is embedded in the RF matching unit 622, coaxially insulating and fixing the output terminal of the DC filter 612 and the output terminal of the RF matching unit 622 together, so that the output terminal of the RF matching unit 622 can output both RF current and DC current, constituting the integrated output terminal of the power supply component 600. At this time, the output component 400 can be directly connected to the output terminal of the power supply component 600 in an integrated design to achieve simultaneous transmission of radio frequency current and DC power.

[0059] Furthermore, such as Figure 4 and Figure 6 As shown, the electrical input fixing element is made of insulating material (e.g., resin material) and is sleeved on the DC input connector 522. The electrical input fixing element is coaxially arranged with the DC input connector 522 and the RF input socket 512. To facilitate the maintenance of the electrical input assembly 300, the electrical input fixing element is designed as a detachable structure. The electrical input fixing element includes an electrical input fixing seat 320 and an electrical input positioning seat 330 arranged sequentially in the direction away from the power supply assembly 600.

[0060] To facilitate the mounting of the electrical input positioning seat 330 onto the DC input connector 522, such as... Figure 7 As shown, the electrical input positioning base 330 is provided with a positioning through hole 331 and an auxiliary through hole 332, which respectively penetrate the electrical input positioning base 330; the positioning through hole 331 is coaxially arranged with the DC input connector 522, and the auxiliary through hole 332 is eccentrically arranged with the positioning through hole 331 and interconnected with it.

[0061] The diameter of the auxiliary through hole 332 is larger than the diameter of the DC input connector 522; and the positioning through hole 331 matches the shape of the DC input connector 522 so that it can wrap around the outer surface of the DC input connector 522.

[0062] When installing the DC input connector 522, insert the DC input connector 522 into the auxiliary through hole 332, and adjust the position of the DC input positioning seat 330 relative to the DC input connector 522 within the auxiliary through hole 332. After the DC input connector 522 is adjusted into place, press the DC input connector 522 from the auxiliary through hole 332 into the positioning through hole 331, so that the DC transmission connector is locked in the positioning through hole 331.

[0063] Furthermore, to secure the electrical input positioning seat 330, the radio frequency input seat 512 is provided with a fixing block 5121 protruding from its inner wall surface, such as... Figure 4 and Figure 5 As shown, the electrical input positioning seat 330 is located between the fixing block 5121 and the electrical input fixing seat 320, and the electrical input positioning seat 330 is fixed to the radio frequency input seat 512 through the fixing block 5121 and the electrical input fixing seat 320. The outer surface of the electrical input fixing seat 320 is connected to the inner wall of the radio frequency input seat 512.

[0064] In a preferred embodiment, such as Figure 4 and Figure 5 As shown, the inner wall of the radio frequency input base 512 is provided with a first thread structure 5124, and the outer surface of the electrical input fixing base 320 is provided with a second thread structure that matches the first thread structure 5124. The electrical input fixing base 320 is connected to the radio frequency input base 512 by threads.

[0065] like Figure 1 and Figure 4 As shown, the RF input component further includes an RF transmission sleeve 510, and the DC input component further includes a wire 524. The RF transmission sleeve 510 is coaxially disposed outside the wire 524. The RF transmission sleeve 510 is inserted into the end of the RF input socket 512 furthest from the power supply assembly 600 and is limited by the fixing block 5121; the RF input socket 512 is electrically connected to the RF transmission sleeve 510. At this time, the left and right ends of the fixing block 5121 respectively limit the positions of the RF transmission sleeve 510 and the electrical input positioning seat 330, preventing the electrical input positioning seat 330 from being subjected to pressure (i.e., Figure 4 The force exerted from the center to the left is applied to the RF transmission sleeve 510, thereby effectively preventing damage to the RF transmission sleeve 510.

[0066] In a preferred embodiment, the connection between the RF transmission sleeve 510 and the RF input socket 512 is provided with elastic and conductive watch strap fingers to improve the conductivity between the RF transmission sleeve 510 and the RF input socket 512.

[0067] Furthermore, to prevent the DC input connector 522 from detaching from the power input positioning seat 330 and the power input fixing seat 320 during the insertion and removal of the power input component 300 and the output component 400, such as Figure 3 , Figure 4 , Figure 6 As shown, the DC input connector 522 is also provided with a first positioning protrusion 5221 at one end away from the power supply component 600. One end of the first positioning protrusion 5221 is connected to the DC plug section through a transition section. The outer diameter of the first positioning protrusion 5221 is larger than the outer diameter of the transition section, so that the first positioning protrusion 5221 can be locked in the power input positioning seat 330 and the power input fixing seat 320. The other end of the first positioning protrusion 5221 is connected to the wire 524.

[0068] like Figure 4 and Figure 6 As shown, the power input fixing base 320 includes: a main body of the power input fixing base 320 and an annular limiting section 321. The annular limiting section 321 is disposed on the end face of the main body of the power input fixing base 320 away from the power supply assembly 600; the main body of the power input fixing base 320 has a first through hole extending along the direction of the DC input connector 522, and the annular limiting section 321 has a second through hole. The first through hole and the second through hole are coaxially arranged and communicate with each other, and the inner diameter of the first through hole is smaller than the inner diameter of the second through hole.

[0069] like Figure 6 As shown, the main body of the power input mounting base 320 is sleeved outside the transition section of the DC input connector 522, and the diameter of the first through hole is adapted to the outer diameter of the transition section; the annular limiting section 321 is sleeved outside the first positioning protrusion 5221, and the diameter of the second through hole is adapted to the outer diameter of the first positioning protrusion 5221. At this time, the DC input connector 522 is inserted into the positioning through hole 331, and one end of the first positioning protrusion 5221 near the transition section of the DC input connector 522 is fixed by the annular limiting section 321, preventing the first positioning protrusion 5221 from radially (i.e., ...) within the RF input base 512 during the insertion and removal of the power input assembly 300. Figure 4 Displacement in the vertical direction.

[0070] Furthermore, to improve the stability of the first positioning bump 5221 fixed in the radio frequency input seat 512, such as... Figure 6 and Figure 7As shown, the positioning through hole 331 of the power transmission positioning base 330 includes: a first stepped hole 3311, a second stepped hole 3312, and a third stepped hole 3313 arranged sequentially along the direction away from the power supply assembly 600; the first stepped hole 3311, the second stepped hole 3312, and the third stepped hole 3313 are coaxially arranged and their diameters decrease sequentially. The diameter of the first stepped hole 3311 is adapted to the diameter of the second through hole of the annular limiting section 321, and the stepped surface of the first stepped hole 3311 limits the annular limiting section 321. The diameter of the second stepped hole 3312 is adapted to the shape of the first positioning protrusion 5221, and the first positioning protrusion 5221 is disposed between the end face of the main body of the power transmission fixing base 320 and the stepped surface of the second stepped hole 3312, and is limited by the inner wall of the annular limiting section 321 and the side wall of the second stepped hole 3312. The diameter of the third step hole 3313 is compatible with the diameter of the wire 524.

[0071] Please see Figure 4 When installing the electrical input component 300, the DC input connector 522 is inserted from the end of the RF input socket 512 away from the power supply component 600 and extends out from the other end of the RF input socket 512 (i.e., where the plug section is located). Next, the DC input connector 522 is inserted into the auxiliary through hole 332 of the power input positioning seat 330. After the first positioning protrusion 5221 of the DC input connector 522 aligns with the second stepped hole 3312 of the power input positioning seat 330, the DC input connector 522 is pressed into the positioning through hole 331, so that the wire 524 is locked in the third stepped hole 3313, and the end of the DC input connector 522 near the wire 524 is locked in the second stepped hole 3312, ensuring that the DC input connector 522 and the power input positioning seat 330 are coaxially fixed. At this time, the end of the first positioning protrusion 5221 near the DC input connector 522 is located in the first stepped hole 3311. Then, the power input positioning seat 330 and the DC input connector 522 are inserted into the radio frequency input seat 512, so that the end face of the power input positioning seat 330 away from the power source abuts against the fixing block 5121 of the radio frequency input seat 512. At this time, the electrical input positioning seat 330 and the DC input connector 522 are both located on the axis of the radio frequency input seat 512.

[0072] Then, the power input mounting bracket 320 is passed through the DC insertion section of the DC input connector 522, causing the power input mounting bracket 320 to move along the inner wall of the RF input bracket 512 away from the power supply assembly 600 until the annular limiting section 321 of the power input mounting bracket 320 abuts against the end face of the first stepped hole 3311 of the power input positioning bracket 330. At this time, one end of the first positioning protrusion 5221 near the transition section of the DC input connector 522 is located in the second through hole of the annular limiting section 321, and the annular limiting section 321 is located in the first stepped hole 3311, thereby limiting the coaxial arrangement of the power input mounting bracket 320 and the power input positioning bracket 330. Furthermore, the transition section of the DC input connector 522 is located in the first through hole of the power input mounting bracket 320, achieving the coaxial arrangement of the DC input connector 522, the power input positioning bracket 330, the power input mounting bracket 320, and the RF input connector.

[0073] The electrical transmission component 300 is detachable, requiring no adhesive between its components, which facilitates replacement of each component, reduces production costs, and the components are simple in structure and easy to connect, making manufacturing and installation convenient. The matching design of the positioning hole of the electrical transmission positioning seat 330 and the annular limiting segment 321 of the electrical transmission fixing seat 320 facilitates their coaxial placement.

[0074] Furthermore, to facilitate the coaxial plug-in connection between the output component 400 and the electrical input component 300, please refer to [link to relevant documentation]. Figure 4 The gap between the inner wall of the RF input segment of the RF input socket 512 and the outer wall of the DC input segment of the DC input connector 522 forms a first insertion cavity 5122. When the end of the RF output plug 440 away from the power supply component 600 is inserted into the first insertion cavity 5122, the inner wall of the RF input segment contacts the outer wall of the RF output plug 440 and forms an electrical connection; the end of the DC output plug 410 away from the power supply component 600 is inserted into the DC input segment of the DC input connector 522 and forms an electrical connection. By utilizing the matching design of the shape of the first insertion cavity 5122 and the shape of the RF output plug 440, it is convenient for the RF output plug 440 to be inserted along the cavity wall of the first insertion cavity 5122 (i.e., the inner wall of the RF input segment of the RF input socket 512), realizing the rapid alignment and connection of the output component 400 and the electrical input component 300.

[0075] Furthermore, to increase the contact area between the RF input connector 512 and the RF output connector 440, thereby improving the conductivity at their connection point, such as... Figure 4 and Figure 5As shown, the inner wall of the RF connector section is provided with an annular groove 5123, the inner diameter of which is larger than the inner diameter of the first connector cavity 5122; a watchband contact finger is provided in the groove 5123, and the watchband contact finger is electrically connected to the external RF output plug 440. At this time, when the RF output plug 440 is inserted into the first connector cavity 5122, the RF output plug 440 is electrically connected to the RF input socket through the watchband contact finger.

[0076] Furthermore, to facilitate the disassembly and maintenance of the output component 400, the output component 400 is a detachable structure. Please refer to [link to relevant documentation]. Figure 8 The DC output plug 410 is fixed in the RF output plug 440 by an output end fixing element. The output end fixing element is made of an insulating material (e.g., resin material) and includes an output end positioning seat 430 and an output end fixing seat 420 arranged sequentially in a direction away from the power supply assembly 600; the output end positioning seat 430 and the output end fixing seat 420 are coaxially sleeved on the outside of the DC output plug 410.

[0077] At this time, the output terminals of the output component 400, the power input component 300, and the power supply component 600 are all coaxially arranged. Specifically, as follows: Figure 8 As shown, the DC output plug 410 and the RF output plug 440 in the output assembly 400 are coaxially arranged; as Figure 4 As shown, the DC input connector 522 and the RF input socket 512 in the electrical input assembly 300 are coaxially arranged; as Figure 1 and Figure 8 As shown, the output terminal of the DC filter 612 is coaxially insulated and fixed to the output terminal of the RF matching unit 622. Therefore, the output component 400 can be used to connect the output terminals of power supply components 600 of different structures and sizes to the electrical input component 300, improving the applicability of the electrical connection structure described in this invention in different scenarios.

[0078] Furthermore, to prevent the output component 400 from being inserted too deeply into the output terminal of the power supply component 600 and damaging the power supply, please refer to [link to relevant documentation]. Figure 8 The RF output plug 440 includes a first RF plug segment and a second RF plug segment connected to each other. The first RF plug segment is pluggably connected to the power supply assembly 600, and the second RF plug segment is pluggably connected to the RF connector segment of the RF input socket 512. The diameter of the first RF plug segment is smaller than the diameter of the second RF plug segment. In this case, the first RF plug segment is inserted into the output terminal of the power supply assembly 600, while the second RF plug segment, due to its larger diameter, abuts against the surface of the power supply assembly 600, thus protecting the output terminal of the power supply assembly 600.

[0079] The output positioning seat 430 includes a first boss 431 and a second boss 432. The first boss 431 is located in the first RF connector segment, and its outer diameter is adapted to the inner diameter of the first RF connector segment of the RF output connector 440. The second boss 432 is located in the second RF connector segment, and its outer diameter is adapted to the inner diameter of the second RF connector segment. In this configuration, the output positioning seat 430 is engaged within the RF output connector 440.

[0080] To fix the output positioning seat 430 in the RF output plug 440, the outer surface of the output fixing seat 420 is threaded to the inner wall of the second RF plug segment, and the end face of the output fixing seat 420 near the power assembly 600 contacts the end face of the output positioning seat 430 away from the power assembly 600, thereby fixing the output positioning seat 430 inside the RF output plug 440. At this time, the output positioning seat 430 is fixed by the variable diameter end face of the RF output plug 440 (i.e., the connection between the first and second RF plug segments) and the output fixing seat 420, thus limiting the position of the output positioning seat 430.

[0081] For further information, please see [link / reference]. Figure 8 The output end positioning seat 430 has a fourth stepped hole 434, a fifth stepped hole 435, and a sixth stepped hole 436 with progressively increasing diameters along the direction away from the power supply component 600. The DC transmission plug includes a first DC plug segment, a second DC plug segment, and a second positioning protrusion 411 located between them. The diameter of the second positioning protrusion 411 is larger than the diameter of the first DC plug segment, and the diameter of the second positioning protrusion 411 is larger than the diameter of the second DC plug segment. The DC output plug 410 is secured in the output end fixing element by the second positioning protrusion 411, preventing displacement of the DC output plug 410 during the insertion and removal of the output component 400 from the power supply component 600 or from the power transmission component 300.

[0082] The second positioning protrusion 411 includes a first positioning portion near the first DC plug segment and a second positioning portion near the second DC plug segment. The first DC plug segment passes through the fourth stepped hole 434 and is located within the first RF plug segment. The diameter of the fourth stepped hole 434 matches the diameter of the first DC plug segment, and a gap is formed between the outer surface of the first DC plug segment and the inner wall of the first RF plug segment. This gap matches the output terminal of the power supply assembly 600, facilitating quick alignment and connection between the output assembly 400 and the output terminal of the power supply assembly 600.

[0083] Please see Figure 8The output end fixing seat 420 has a third protrusion 421 on its surface facing the output end positioning seat 430, and the third protrusion 421 is located on the axis of the output end fixing seat 420. The third protrusion 421 is inserted into the sixth stepped hole 436, and the outer diameter of the third protrusion 421 is adapted to the diameter of the sixth stepped hole 436. Through the matching connection of the third protrusion 421 of the output end fixing seat 420 and the sixth stepped hole 436 of the output end positioning seat 430, the coaxial positioning of the output end fixing seat 420 and the output end positioning seat 430 is achieved.

[0084] The third protrusion 421 is fitted onto the second positioning portion of the second positioning protrusion 411, and the sidewall of the fifth stepped hole 435 is fitted onto the outside of the first positioning portion of the second positioning protrusion 411. The diameter of the fifth stepped hole 435 is adapted to the diameter of the second positioning protrusion 411. At this time, the second positioning protrusion 411 is radially limited in the DC output plug 410, preventing the DC output plug 410 from displacing axially and radially.

[0085] Please see further. Figure 8 The output terminal mounting base 420 has a second insertion cavity 422 inside; the second insertion cavity 422 has a fixing protrusion 423 on the inner wall of the end near the power supply assembly 600. The second positioning protrusion 411 is fixed between the end face of the fixing protrusion 423 near the power supply assembly 600 and the stepped surface of the fifth stepped hole 435, thereby limiting the second positioning protrusion 411 in the axial direction of the DC output plug 410 and further preventing the second positioning protrusion 411 from displacing.

[0086] The fixing protrusion 423 is sleeved on the outside of one end of the second DC plug segment near the second positioning protrusion 411, and the remaining part of the second DC plug segment is located inside the second insertion cavity 422. The DC insertion segment of the DC input connector 522 is inserted into the second insertion cavity 422 and sleeved on the outside of the second DC plug segment, forming an electrical connection between the DC input connector 522 and the DC output connector 410. The DC output connector 410 is a drum-shaped spring connector at both ends, which enhances the conductive connection between the DC input connector 522 and the DC output connector 410. The second insertion cavity 422 limits the position of the DC input connector 522 inserted into the output assembly 400, facilitating quick alignment and connection of the DC input connector 522 and the DC output connector.

[0087] Please see Figure 8When installing the output component 400, the first DC plug segment of the DC output plug 410 is inserted into the fourth stepped hole 434 of the output end positioning seat 430 until the second positioning protrusion 411 abuts against the stepped surface of the fifth stepped hole 435; at this time, the DC output plug 410 and the output end positioning seat 430 are coaxially arranged.

[0088] Then, the output positioning seat 430 and the DC output plug 410 are inserted together into the second RF plug segment of the RF output plug 440, and the first boss 431 of the output positioning seat 430 is engaged in the first RF plug segment of the RF output plug 440, and the second boss 432 is engaged in the second RF plug segment. At this time, the DC output plug 410, the output positioning seat 430, and the RF output plug 440 are coaxially arranged.

[0089] Next, the output terminal retainer 420 is inserted into the second RF plug segment of the RF output plug 440 and fitted onto the DC output plug 410 until the third step of the output terminal retainer 420 abuts against the step surface of the sixth step hole 436. Simultaneously, the fixing protrusion 423 of the output terminal retainer 420 abuts against the second positioning portion of the second positioning protrusion 411. At this point, through the tight connection between the output terminal retainer 420 and the RF output plug 440, the output terminal positioning seat 430 is secured within the RF output plug 440, and the DC output plug 410 is fixed within the output terminal retaining element.

[0090] The output component 400 is detachable, requiring no adhesive between its components, which facilitates the replacement of each component, reduces production costs, and the components are simple in structure and easy to connect, making it convenient for manufacturing and installation.

[0091] In this embodiment, please refer to Figure 1 , Figure 4 and Figure 8 When the second RF connector segment of the RF output plug 440 is inserted into the first connector cavity 5122, the second RF connector segment contacts the RF connector segment of the RF input socket 512, forming an RF transmission channel between the electrical input component 300 and the output component 400. Simultaneously, the DC connector segment of the DC input connector 522 is inserted into the second connector cavity 422, making contact with the second DC connector segment of the DC output plug 410, forming a DC transmission channel between the electrical input component 300 and the output component 400. Through the structural design of the electrical input component 300 and the output component 400, while ensuring coaxial connection between the electrical input component 300 and the output component 400, a quick plug-and-play connection between the electrical input component 300 and the output component 400 is achieved.

[0092] In one specific embodiment, such as Figure 1 As shown, the RF transmission sleeve 510 and the wire 524 are separated by an isolation layer 523 to prevent short circuits during RF current and DC transmission. The ends of the RF transmission sleeve 510 and the wire 524 furthest from the power supply assembly 600 are connected to the electrostatic clamp 700. The DC current generated by the power supply assembly 600 is transmitted sequentially through the DC output plug, the DC input connector, and the wire 524 to the electrostatic clamp 700. The RF current generated by the power supply assembly 600 is transmitted sequentially through the RF output plug, the RF input connector, and the RF transmission sleeve 510 to the electrostatic clamp 700.

[0093] In the preferred embodiment, please refer to Figure 2 The electrostatic clamp 700 and the radio frequency transmission sleeve 510 transmit radio frequency current through a conductive base 800. The conductive base 800 can be fixedly connected to the radio frequency transmission sleeve 510 through a connector to prevent the radio frequency transmission sleeve 510 from damaging the electrostatic clamp 700 during the fixing process.

[0094] In one embodiment, for convenient maintenance of the radio frequency transmission sleeve 510, see [reference needed]. Figure 2 and Figure 8 The RF transmission sleeve 510 further includes: an RF transmission bend 514 and an RF transmission straight tube 513 connecting the first RF transmission base 511 and the second RF transmission base 512. The RF transmission bend 514 and the RF transmission straight tube 513 are typically made of copper, and the connections between the RF transmission bend 514 and the RF transmission straight tube 513, as well as between the RF transmission straight tubes 513, are plug-in connections, facilitating the replacement or maintenance of the RF transmission sleeve. In practical use, the number of RF transmission bends 514 and the number of RF transmission straight tubes 513 can be determined as needed. In this embodiment, one RF transmission straight tube 513 and one RF transmission bend 514 are selected, forming an L-shaped structure for the RF transmission sleeve. See also... Figure 2 One RF transmission straight tube 513 is plugged into and detached from the second RF transmission socket 512; see [link / reference] Figure 2 and Figure 4 One radio frequency transmission bend 514 is connected to the conductive base 800.

[0095] In a preferred embodiment, a watchband finger is also provided between the surfaces where two adjacent components (e.g., adjacent RF transmission bends 514 and RF transmission straight tubes 513) in the RF transmission sleeve 510 are connected to improve the conductivity at the connection point of the two adjacent components in the RF transmission sleeve 510.

[0096] In another embodiment, the radio frequency transmission sleeve 510 is fixed in a corresponding position by a support assembly made of insulating material, providing support and insulation for the radio frequency transmission sleeve 510; please refer to Figure 4 The electrical input component 300 is fixed by a support component (such as the fixing component 901 in this embodiment), so that the radio frequency input base 512 is fixed on the lower electrode device (i.e., the device to which the electrostatic chuck 700 belongs).

[0097] Please see Figure 1 , Figure 2 , Figure 4 and Figure 8 During the process of the power supply assembly 600 providing DC power and RF current to the electrostatic clamp 700, the DC power is generated by the DC power supply 611, processed by the DC power filter 612, and then transmitted sequentially through the connecting wire 613, the DC output plug 410, and the DC input connector 522 to the wire 524, and then to the electrostatic clamp 700. Simultaneously, the RF current is generated by the RF power supply 621, processed by the RF matching unit 622, and then transmitted through the RF output plug 440 to the RF input socket 512, and then through the RF transmission sleeve 510 to the electrostatic clamp 700, thus completing the simultaneous transmission of RF current and DC power to the electrostatic clamp 700.

[0098] In summary, the electrical connection structure described in this utility model features a coaxial design for both the electrical input component and the output component, facilitating their interlocking and alignment. Furthermore, a first insertion cavity is provided on the side of the electrical input component closer to the power source, and a second insertion cavity is provided on the side of the output component farther from the power source. This allows the electrical input component to be inserted into the second insertion cavity simultaneously with the output component, enabling rapid alignment and connection between the two components.

[0099] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. An electrical connection structure for an electrostatic clamped coil pipeline, characterized in that, include: An output component and an electrical input component, wherein one end of the output component is connected to the power supply component and the other end is connected to the electrical input component; The output component includes: an RF output plug and a DC output plug, wherein the RF output plug is coaxially sleeved on the outside of the DC output plug; The electrical input component includes: an electrical input fixing element, and a coaxially arranged radio frequency (RF) input component and a DC input component; the RF input component includes an RF input socket; the DC input component includes a DC input connector; The DC input connector is fixed inside the RF input socket by an electrical input fixing element; the RF input socket has an RF plug section at one end near the power supply component, the RF plug section is coaxially sleeved with the RF output plug and electrically connected to the RF output plug; the DC input connector has a DC plug section at one end near the power supply component, the DC plug section is coaxially sleeved with the DC output plug and electrically connected to the DC output plug.

2. The electrical connection structure of the electrostatic clamped coil pipeline according to claim 1, characterized in that, The electrical input fixing element is sleeved on the DC input connector, and the electrical input fixing element is coaxially arranged with the DC input connector and the RF input socket; the electrical input fixing element includes: an electrical input fixing seat and an electrical input positioning seat arranged sequentially along the direction away from the power supply assembly; The electrical input positioning base is provided with a positioning through hole and an auxiliary through hole, which respectively penetrate the electrical input positioning base; the positioning through hole is coaxially arranged with the DC input connector, and the auxiliary through hole is eccentrically arranged with the positioning through hole and connected to each other.

3. The electrical connection structure of the electrostatic clamped coil pipeline according to claim 2, characterized in that, The radio frequency input base is provided with a fixing block protruding from its inner wall surface; The electrical transmission positioning seat is located between the fixing block and the electrical transmission fixing seat, and the electrical transmission positioning seat is fixed to the radio frequency transmission seat through the fixing block and the electrical transmission fixing seat; The outer surface of the electrical transmission fixing base is connected to the inner wall of the radio frequency transmission base; The radio frequency input component further includes a radio frequency transmission sleeve, and the DC input component further includes a wire. The radio frequency transmission sleeve is coaxially disposed outside the wire. The radio frequency transmission sleeve is inserted into the end of the radio frequency input socket away from the power supply component and is limited by the fixing block. The radio frequency input socket is electrically connected to the radio frequency transmission sleeve.

4. The electrical connection structure of the electrostatic clamped coil pipeline according to claim 2, characterized in that, The DC input connector is further provided with a first positioning protrusion at one end away from the power supply component. One end of the first positioning protrusion is connected to the DC plug section through a transition section, and the outer diameter of the first positioning protrusion is larger than the outer diameter of the transition section. The other end of the first positioning protrusion is connected to the wire. The power input fixing base includes: a main body of the power input fixing base and an annular limiting section. The annular limiting section is disposed on the end face of the main body of the power input fixing base away from the power supply component. The main body of the power input fixing base has a first through hole extending along the direction of the DC input connector, and the annular limiting section has a second through hole. The first through hole and the second through hole are coaxially arranged and interconnected. The diameter of the first through hole is smaller than the diameter of the second through hole. The main body of the electrical input fixing base is sleeved outside the transition section of the DC input connector, and the diameter of the first through hole is adapted to the outer diameter of the transition section; the annular limiting section is sleeved outside the first positioning protrusion, and the diameter of the second through hole is adapted to the outer diameter of the first positioning protrusion.

5. The electrical connection structure of the electrostatic clamped coil pipeline according to claim 3, characterized in that, The positioning through hole of the power transmission positioning seat includes: a first stepped hole, a second stepped hole, and a third stepped hole arranged sequentially along the direction away from the power supply component; the first stepped hole, the second stepped hole, and the third stepped hole are coaxially arranged and their diameters decrease sequentially; The diameter of the first stepped hole is adapted to the diameter of the second through hole of the annular limiting section, and the stepped surface of the first stepped hole limits the annular limiting section. The diameter of the second stepped hole is adapted to the shape of the first positioning protrusion. The first positioning protrusion is located between the end face of the main body of the electric transmission fixing seat and the step surface of the second stepped hole, and is limited by the inner wall of the annular limiting section and the side wall of the second stepped hole. The diameter of the third-step hole is adapted to the diameter of the wire.

6. The electrical connection structure of the electrostatic clamped coil pipeline according to claim 1, characterized in that, The gap between the inner wall of the RF input segment of the RF input socket and the outer wall of the DC input segment of the DC input connector forms a first insertion cavity. The end of the RF output plug away from the power supply component is inserted into the first plug cavity, and the inner wall of the RF plug section contacts the outer wall of the RF output plug to form an electrical connection; the end of the DC output plug away from the power supply component is inserted into the DC plug section of the DC input connector to form an electrical connection.

7. The electrical connection structure of the electrostatic clamped coil pipeline according to claim 1, characterized in that, The inner wall of the RF connector section is provided with an annular groove, the inner diameter of which is larger than the inner diameter of the first connector cavity; the groove is provided with a watch strap contact finger, which is electrically connected to the outside of the RF output plug.

8. The electrical connection structure of the electrostatic clamped coil pipeline according to claim 1, characterized in that, The DC output plug is fixed in the RF output plug by an output end fixing element; The output terminal fixing element includes: an output terminal positioning seat and an output terminal fixing seat arranged sequentially in the direction away from the power supply component; the output terminal positioning seat and the output terminal fixing seat are coaxially sleeved on the outside of the DC output plug.

9. The electrical connection structure of the electrostatic clamped coil pipeline according to claim 8, characterized in that, The RF output plug includes: a first RF plug segment and a second RF plug segment connected to each other, the first RF plug segment being pluggable to the power supply component, and the second RF plug segment being pluggable to the RF connector segment of the RF input socket; and the diameter of the first RF plug segment is smaller than the diameter of the second RF plug segment. The output end positioning seat includes: a first boss and a second boss, wherein the first boss is located in the first RF plug segment and the outer diameter of the first boss is adapted to the inner diameter of the first RF plug segment of the RF output plug; the second boss is located in the second RF plug segment and the outer diameter of the second boss is adapted to the inner diameter of the second RF plug segment. The outer surface of the output terminal fixing seat is threaded to the inner wall of the second RF plug segment, and the end face of the output terminal fixing seat near the power component contacts the end face of the output terminal positioning seat away from the power component. The output terminal positioning seat is fixed inside the RF output plug by the output terminal fixing seat.

10. The electrical connection structure of the electrostatic clamped coil pipeline according to claim 9, characterized in that, The output end positioning seat has a fourth, fifth, and sixth stepped hole with progressively larger diameters arranged in the direction away from the power supply component. The DC transmission plug includes: a first DC plug segment, a second DC plug segment, and a second positioning protrusion located between the two, wherein the diameter of the second positioning protrusion is larger than the diameter of the first DC plug segment and the diameter of the second positioning protrusion is larger than the diameter of the second DC plug segment; the second positioning protrusion includes: a first positioning portion near the first DC plug segment and a second positioning portion near the second DC plug segment; After passing through the fourth stepped hole, the first DC plug segment is located inside the first RF plug segment. The diameter of the fourth stepped hole is adapted to the diameter of the first DC plug segment, and a gap is formed between the outer surface of the first DC plug segment and the inner wall of the first RF plug segment. The surface of the output end fixing seat facing the output end positioning seat is provided with a third protrusion. The third protrusion is inserted into the sixth stepped hole, and the outer diameter of the third protrusion is adapted to the diameter of the sixth stepped hole. The third protrusion is sleeved on the second positioning part of the second positioning protrusion. The side wall of the fifth stepped hole is sleeved outside the first positioning part of the second positioning protrusion, and the diameter of the fifth stepped hole is adapted to the diameter of the second positioning protrusion.

11. The electrical connection structure of the electrostatic clamped coil pipeline according to claim 10, characterized in that, The output terminal mounting base has a second insertion cavity inside; the second insertion cavity has a fixing protrusion on the inner wall of the end near the power supply assembly; The second positioning protrusion is fixed between the end face of the fixing protrusion near the power assembly and the stepped surface of the fifth stepped hole; The fixing protrusion is sleeved on the outside of the end of the second DC plug segment near the second positioning protrusion, and the rest of the second DC plug segment is located inside the second plug cavity; the DC plug segment of the DC input connector is inserted into the second plug cavity and sleeved on the outside of the second DC plug segment, forming an electrical connection between the DC input connector and the DC output connector.

12. The electrical connection structure of the electrostatic clamped pipeline according to any one of claims 1 to 11, characterized in that, The radio frequency input component further includes: a radio frequency transmission sleeve connected to the radio frequency input socket; the DC input component further includes: a wire connected to the DC input connector; the radio frequency transmission sleeve and the wire are separated by an isolation layer. The radio frequency transmission sleeve and the wire are each connected to an electrostatic clamp at the end furthest from the power supply component.

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