Electrode rod and machining device

Abstract

This application relates to the fields of semiconductor and photovoltaic technology, and more particularly to an electrode rod and processing equipment to ensure the connection stability between the electrode of a boat structure and the power supply. The electrode rod includes a connecting rod, a conductive block, and an elastic element. One end of the connecting rod has a mounting portion, and the other end has a connecting portion. The mounting portion is used to fix the connecting rod, and the connecting portion has a first guide portion. The conductive block is movably electrically connected to the connecting portion along a first direction, and the conductive block has a second guide portion that movably engages with the first guide portion along the first direction. The elastic element is disposed between the connecting rod and the conductive block, and provides a spring force to the conductive block away from the connecting portion. By making the conductive block movable along the first direction and utilizing the elastic element to provide a spring force to the conductive block away from the connecting portion, the conductive block can maintain a stable connection with the electrode of the boat structure by moving along the first direction, thereby improving the connection stability between the boat structure and the power supply.

Description

Technical Field

[0001] This application relates to the fields of semiconductor and photovoltaic technology, and in particular to an electrode rod and processing equipment. Background Technology

[0002] In the production of silicon solar cells, processes such as PECVD, LPCVD, and ALD are widely used to deposit various thin films. These processes typically place the silicon wafer in a vacuum environment and set up a thermal field outside the vacuum chamber to provide the heat required for the process. This external thermal field is located a considerable distance from the silicon wafer, and because the wafer is in a vacuum environment, the heating efficiency of the thermal field is low, resulting in significant energy loss and impacting the production efficiency of the silicon wafers.

[0003] To improve the heating efficiency of silicon wafers, related technologies employ a boat structure electrically connected to a heating power source, allowing the boat's blades to act as heating resistors for direct heating of the silicon wafer. However, this requires the boat structure to be connected to multiple electrode rods simultaneously, which in turn connect it to different power sources. In other words, the boat structure must be electrically connected not only to the radio frequency power source but also to the heating power source, resulting in poor stability of the electrical connection between the boat structure and the power source. Utility Model Content

[0004] In view of this, this application provides an electrode rod and processing equipment to ensure the stability of the connection between the blade and the power supply.

[0005] In a first aspect, this application provides an electrode rod, which includes a connecting rod, a conductive block, and an elastic element. One end of the connecting rod is provided with a mounting portion, and the other end of the connecting rod is provided with a connecting portion. The mounting portion is used to fix the connecting rod, and the connecting portion is provided with a first guide portion. The conductive block is movably electrically connected to the connecting portion along a first direction, and the conductive block is provided with a second guide portion. The second guide portion is movably engaged with the first guide portion along the first direction, which is perpendicular to the extension direction of the connecting rod. The elastic element is disposed between the connecting rod and the conductive block, and the elastic element is used to provide elastic force to the conductive block away from the connecting portion.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the conductive block is provided with a receiving groove with the opening facing the connecting part, at least a portion of the connecting part is disposed in the receiving groove, and the first guide part is disposed on the side wall of the receiving groove.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, one of the first guide portion and the second guide portion is a guide groove, and the other of the first guide portion and the second guide portion is a guide protrusion, with the guide protrusion disposed within the guide groove.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, multiple first guide parts and second guide parts are provided, with one-to-one correspondence between the first guide parts and the second guide parts, and each second guide part guiding and cooperating with the corresponding first guide part; wherein a portion of the first guide parts and another portion of the first guide parts are arranged at intervals along a second direction, and the second direction is perpendicular to the first direction and the extension direction of the connecting rod.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the electrode rod further includes a limiting rod extending along the first direction, one end of the limiting rod being connected to the conductive block, and the other end of the limiting rod being a limiting portion, which is used to limit the movement range of the conductive block in the first direction.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the connecting part is provided with a through hole, and the limiting rod is movably inserted into the through hole along a first direction, the limiting part being used to limit and cooperate with one end of the through hole facing away from the conductive block; and / or, an elastic element is sleeved on the limiting rod, and the two ends of the elastic element abut against the connecting part and the conductive block respectively.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the conductive block has a conductive surface facing away from the connecting portion, and the conductive surface is planar.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the electrode rod further includes an electrical connector, which is a flexible component. One end of the electrical connector is electrically connected to the connecting portion, and the other end of the electrical connector is electrically connected to the conductive block.

[0013] Secondly, this application provides a processing apparatus, which includes an apparatus body, an electrode rod mentioned in any of the first aspects, and a boat structure. The apparatus body has a process chamber, the electrode rod is disposed in the process chamber, and the mounting part is electrically connected to a power source so that the electrode rod is electrically connected to the power source. The power source includes at least one of a heating power source and a radio frequency power source. The boat structure includes a plurality of electrodes, at least one of which abuts against a conductive block along a first direction.

[0014] In conjunction with the second aspect, in some implementations of the first aspect, the mounting part is electrically connected to the heating power supply, at least one electrode is a heating electrode, and the heating electrode abuts against the conductive block along the first direction; a radio frequency rod is provided in the process chamber, one end of the radio frequency rod is electrically connected to the radio frequency power supply; at least one electrode is a radio frequency electrode, the radio frequency electrode has a plug hole, the plug hole is for the other end of the radio frequency rod to be inserted, so that the radio frequency electrode is electrically connected to the radio frequency power supply.

[0015] The electrode rod of this application, by providing a mounting part at one end of the connecting rod, can be installed and fixed using the mounting part. By electrically connecting the conductive block to the connecting part provided at the other end of the connecting rod, when the boat structure is electrically connected to the electrode rod, the conductive block can be brought into contact with the electrode of the boat structure along a first direction, thereby achieving an electrical connection between the boat structure and the power source. By making the conductive block movable along the first direction and providing an elastic element between the connecting part and the conductive block, the elastic element provides a spring force to the conductive block away from the connecting part, allowing the conductive block to maintain a stable connection with the electrode of the boat structure by moving along the first direction, thus improving the connection stability between the boat structure and the power source. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further understand this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The image shown is a perspective view of an electrode rod provided in an embodiment of this application.

[0018] Figure 2 The image shown is an exploded view of an electrode rod provided in an embodiment of this application.

[0019] Figure 3 The image shown is a sectional view of a perspective view of an electrode rod provided in an embodiment of this application (electrical connectors are omitted).

[0020] Figure 4 The image shown is a cross-sectional view of the rear view of an electrode rod provided in an embodiment of this application (electrical connectors are omitted).

[0021] Figure 5 The image shown is a perspective view of the connection portion and conductive block of the electrode rod provided in an embodiment of this application.

[0022] Figure 6 The image shown is a perspective view of the connection portion of the electrode rod provided in an embodiment of this application.

[0023] Figure 7 The image shown is a perspective view of an electrode rod provided in another embodiment of this application.

[0024] Figure 8 The image shown is an exploded view of an electrode rod provided in another embodiment of this application.

[0025] Figure 9 The image shown is a perspective view of the electrode and electrode rod connected according to an embodiment of this application.

[0026] Figure 10 The image shown is a side view of the boat structure provided in an embodiment of this application when it is connected to the electrode rod and the radio frequency rod.

[0027] Figure 11 The image shown is a perspective view of the boat structure provided in an embodiment of this application when connected with the electrode rod and the radio frequency rod.

[0028] Figure 12 The image shown is a rear view of the boat structure provided in an embodiment of this application when connected to the electrode rod and the radio frequency rod.

[0029] Figure 13 The image shown is a side view of the boat structure connected to the electrode rod and the radio frequency rod according to another embodiment of this application.

[0030] Figure 14 The image shown is a perspective view of the boat structure provided in an embodiment of this application when connected with the electrode rod and the radio frequency rod.

[0031] Figure label: 100. Boat structure; 10. Electrode rod; 101. Positive electrode rod; 102. Negative electrode rod; 1. Connecting rod; 11. Mounting part; 12. Connecting part; 121. Through hole; 13. First guide part; 14. First conductive hole; 2. Conductive block; 21. Second guide section; 22. Receiving groove; 23. Conductive surface; 24. Threaded hole; 25. Second conductive hole; 3. Elastic components; 4. Limiting rod; 41. Limiting part; 5. Electrical connector; 51. First fixing hole; 52. Second fixing hole; 20. Heating electrode; 200. Contact surface; 201. Positive heating electrode; 202. Negative heating electrode; 30. Radio frequency electrode; 300. Connecting hole; 301. Anode radio frequency electrode; 302. Cathode radio frequency electrode; 40. RF rod; 401. Anode RF rod; 402. Cathode RF rod; 50. Boat page; 501. First boat page; 502. Second boat page. Detailed Implementation

[0032] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0033] In related technologies, the boat structure is connected to the heating power supply and the radio frequency power supply via electrode rods, and the electrode rods are connected to the electrodes of the boat structure via a plug-in connection. It is understandable that when the number of electrode rods connected to the boat structure is small, alignment and plug-in connection between the electrode rods and the boat structure electrodes are convenient, and the electrode rods connected to the boat structure electrodes have low rigidity, making them prone to deformation to maintain electrical connection with the boat structure electrodes. However, when the number of electrode rods connected to the boat structure electrodes is large, simultaneous alignment between multiple electrode rods and multiple boat structure electrodes becomes difficult, leading to inconvenient connection between the boat structure electrodes and electrode rods. Furthermore, the overall rigidity of the multiple electrode rods connected to the boat structure electrodes is high, making it difficult for the electrode rods to maintain electrical connection with the boat structure electrodes through deformation.

[0034] Specifically, when the boat structure's electrodes are electrically connected to the RF power supply only through electrode rods, the number of electrode rods connected to the boat structure is small, facilitating the connection between the boat structure's electrodes and electrode rods, and the connection stability between the boat structure's electrodes and electrode rods is good. However, when the boat structure is electrically connected to both the RF power supply and the heating power supply through electrode rods, the number of electrode rods connected to the boat structure is large, leading to inconvenient connection between the boat structure and electrode rods, and poor connection stability between the boat structure and the power supply (including at least one of the RF power supply and the heating power supply).

[0035] Figure 1 The image shown is a perspective view of an electrode rod provided in an embodiment of this application. Figure 2 The image shown is an exploded view of an electrode rod provided in an embodiment of this application. Figure 3 The image shown is a sectional view of a perspective view of an electrode rod provided in an embodiment of this application (electrical connectors are omitted). Figure 4 The image shown is a cross-sectional view of the rear view of an electrode rod provided in an embodiment of this application (electrical connectors are omitted). Figure 5 The image shown is a perspective view of the connection portion and conductive block of the electrode rod provided in an embodiment of this application. Figure 6 The image shown is a perspective view of the connection portion of the electrode rod provided in an embodiment of this application. Figure 7 The image shown is a perspective view of an electrode rod provided in another embodiment of this application. Figure 8 The image shown is an exploded view of an electrode rod provided in another embodiment of this application. Figure 10 The image shown is a side view of the boat structure provided in an embodiment of this application when it is connected to the electrode rod and the radio frequency rod.

[0036] like Figures 1 to 9As shown, the electrode rod 10 includes a connecting rod 1, a conductive block 2, and an elastic element 3. One end of the connecting rod 1 has a mounting portion 11, and the other end has a connecting portion 12. The mounting portion 11 is used to fix the connecting rod 1. The conductive block 2 is movably electrically connected to the connecting portion 12 along a first direction. The connecting portion 12 has a first guide portion 13, and the conductive block 2 has a second guide portion 21. The second guide portion 21 is movably engaged with the first guide portion 13 along the first direction, which is perpendicular to the extension direction of the connecting rod 1. The elastic element 3 is disposed between the connecting portion 12 and the conductive block 2, and the elastic element 3 provides a spring force to the conductive block 2 away from the connecting portion 12.

[0037] In this embodiment, the electrode rod 10 is mounted and fixed by providing a mounting part 11 at one end of the connecting rod 1. By electrically connecting the conductive block 2 to the connecting part 12 at the other end of the connecting rod 1, when the boat structure 100 is electrically connected to the electrode rod 10, the conductive block 2 can contact the electrode of the boat structure 100 along the first direction, thereby achieving an electrical connection between the boat structure 100 and the power source. By making the conductive block 2 movable along the first direction and providing an elastic member 3 between the connecting part 12 and the conductive block 2, the elastic member 3 provides a spring force to the conductive block 2 away from the connecting part 12, allowing the conductive block 2 to remain stably connected to the electrode of the boat structure 100 by moving along the first direction, thus improving the connection stability between the boat structure 100 and the power source.

[0038] Furthermore, by providing a first guide portion 13 in the connecting portion 12 and a second guide portion 21 in the conductive block 2, the second guide portion 21 and the first guide portion 13 can guide the movement of the conductive block 2 relative to the connecting rod 1 in the first direction, thereby preventing the conductive block from deflecting during its movement and improving the reliability of the electrode rod 10.

[0039] The electrode rod 10 can be used in processing equipment with a process chamber. The electrode rod 10 is disposed within the process chamber, and the mounting portion 11 of the connecting rod 1 is fixedly installed to the tail end of the process chamber. The conductive block 2 of the electrode rod 10 is used for contact connection with the electrodes of the boat structure 100. One end of the connecting rod 1 with the mounting portion 11 has a conductive portion for electrical connection to a power source. The power source can be a heating power source. When the boat structure 100 is electrically connected to the heating power source via the electrode rod 10, the heating power source heats the boat structure 100, thereby heating the product on the boat structure 100 to a preset temperature before further processing (e.g., depositing a thin film). The preset temperature is the temperature required for the product to reach during processing. Alternatively, the power source can be a radio frequency (RF) power source. When the boat structure 100 is electrically connected to the RF power source via the electrode rod 10, the RF power source provides RF voltage to the boat structure 100 to generate plasma within the process chamber, thereby processing the product placed on the boat structure 100.

[0040] In some embodiments, such as Figures 1 to 3 , Figure 5 , Figures 7 to 9 As shown, the conductive block 2 has a conductive surface 23 facing away from the connecting part 12, and the conductive surface 23 is a plane.

[0041] When the electrode of the boat structure 100 is electrically connected to the electrode rod 10, the electrode of the boat structure 100 contacts the conductive surface 23 of the conductive block 2, thereby realizing the electrical connection between the electrode of the boat structure 100 and the electrode rod 10.

[0042] By making the conductive surface 23 of the conductive block 2 a plane, the connection area between the electrode of the boat structure 100 and the electrode rod 10 can be increased, thereby improving the connection reliability between the electrode of the boat structure 100 and the electrode rod 10. In addition, making the conductive surface 23 a plane also facilitates the processing and manufacturing of the conductive block 2, and thus facilitates the processing and manufacturing of the electrode rod 10.

[0043] In other embodiments, the conductive surface 23 may also be an arc-shaped surface.

[0044] For example, such as Figure 9 As shown, the electrode of the boat structure 100 includes a contact surface 200, and a conductive surface 23 contacts the contact surface 200 to realize the electrical connection between the electrode and the electrode rod 10.

[0045] To make the technical solution of this application easier to understand, the following describes the technical solution of this application further, taking the extension direction of the connecting rod 1 as being consistent with the front-back direction and the first direction as being consistent with the up-down direction.

[0046] For example, such as Figures 1 to 9As shown, the rear end of the connecting rod 1 is provided with a mounting part 11, and the front end of the connecting rod 1 is provided with a connecting part 12. The conductive block 2 is disposed at the front end of the connecting rod 1 and located on the upper side of the connecting rod 1. The conductive block 2 is movably connected to the connecting part 12 in the vertical direction. The elastic member 3 is used to provide an upward elastic force to the conductive block 2. When the electrode rod 10 is connected to the electrode of the boat structure 100, the electrode of the boat structure 100 abuts against the conductive block 2 with its head facing downward. When there is a positional deviation between the electrode of the boat structure 100 and the electrode rod 10 in the vertical direction, the conductive block 2 moves in the vertical direction to compensate for the positional deviation, so as to ensure the connection stability between the electrode of the boat structure 100 and the electrode rod 10.

[0047] In some embodiments, such as Figures 1 to 5 , Figure 7 and Figure 8 As shown, the conductive block 2 is provided with a receiving groove 22 with the groove opening facing the connecting part 12. At least a part of the connecting part 12 is disposed in the receiving groove 22, and the first guide part 13 is disposed on the side wall of the receiving groove 22.

[0048] Wherein, at least a portion of the connecting portion 12 is disposed within the receiving groove 22, including: the entire connecting portion 12 is disposed within the receiving groove 22; or, a portion of the connecting portion 12 is disposed within the receiving groove 22, and another portion of the connecting portion 12 is disposed outside the receiving groove 22.

[0049] For example, such as Figures 1 to 5 , Figure 7 and Figure 8 As shown, the conductive block has a downward-facing receiving groove 22, and the upper part of the connecting part 12 is disposed in the receiving groove 22.

[0050] By providing a receiving groove 22 to the conductive block 2 and placing at least a portion of the connecting part 12 within the receiving groove 22, the compactness of the layout of the conductive block 2 and the connecting rod 1 can be improved, the overall volume and space occupied by the electrode rod 10 can be reduced, and the layout and installation of the electrode rod 10 can be facilitated.

[0051] Of course, in other embodiments, a receiving groove 22 with a slot facing the conductive block 2 may be provided on the connecting part 12, and at least a portion of the conductive block 2 may be disposed in the receiving groove 22.

[0052] In some embodiments, one of the first guide portion 13 and the second guide portion 21 is a guide groove, and the other of the first guide portion 13 and the second guide portion 21 is a guide protrusion, which is disposed in the guide groove.

[0053] For example, the first guide part 13 is a guide groove, and the second guide part 21 is a guide protrusion. Both the guide groove and the guide protrusion extend in the vertical direction. When the conductive block 2 moves in the vertical direction relative to the connecting rod 1, the conductive block and the guide groove are used for guidance and cooperation.

[0054] By designing the first guide portion 13 and the second guide portion 21 as a guide protrusion and a guide groove, the structure of the first guide portion 13 and the second guide portion 21 is simple, which facilitates the processing and manufacturing of the connecting rod 1 and the conductive block 2 and helps to reduce the cost of the electrode rod 10.

[0055] Of course, the first guide portion 13 can also be configured as a guide protrusion, and the second guide portion 21 can be configured as a guide groove. It should be noted that the first guide portion 13 and the second guide portion 21 can also be configured as other structures, and this application does not make specific limitations on this. For example, the first guide portion 13 can be configured as a guide rod, and the second guide portion 21 can be configured as a guide hole, with the guide rod inserted into the guide hole.

[0056] In some embodiments, such as Figures 1 to 3 , Figure 5 , Figure 7 and Figure 8 As shown, multiple first guide portions 13 and second guide portions 21 are provided. The first guide portion 13 and the second guide portion 21 correspond one-to-one, and each second guide portion 21 is guided and cooperated with the corresponding first guide portion 13.

[0057] For example, two first guide portions 13 and two second guide portions 21 are provided, and the two second guide portions 21 are respectively guided and cooperated with the two first guide portions 13.

[0058] By setting multiple first guide parts 13 and multiple second guide parts 21, the guiding function between the conductive block 2 and the connecting rod 1 can be improved, thereby further improving the reliability of the electrode rod 10.

[0059] In some embodiments, a portion of the first guide portion 13 and another portion of the first guide portion 13 are arranged at intervals along a second direction, which is perpendicular to the first direction and the extension direction of the connecting rod 1.

[0060] For example, two first guide portions 13 are arranged at intervals along the second direction, and two second guide portions 21 are arranged at intervals along the second direction. The second guide portions 21 located on the same side guide and cooperate with the first guide portions 13.

[0061] By arranging one part of the first guide portion 13 and another part of the first guide portion 13 at intervals along the second direction, when the first guide portion 13 is guided and engaged with the corresponding second guide portion 21, the conductive block 2 can be limited in the second direction, preventing the conductive block from deviating in the second direction during movement, and further improving the reliability of the electrode rod 10.

[0062] To make the technical solution of this application easier to understand, the technical solution of this application will be further described below with the second direction being consistent with the left and right directions as an example.

[0063] For example, the receiving groove 22 has a left groove wall and a right groove wall opposite each other in the left-right direction. Both the left groove wall and the right groove wall are provided with a first guide portion 13, and the connecting portion 12 is provided with a second guide portion 21 on both the left and right sides. The first guide portion 13 located on the left side guides and cooperates with the second guide portion 21 located on the left side, and the first guide portion 13 located on the right side guides and cooperates with the second guide portion 21 located on the right side.

[0064] In some embodiments, such as Figures 1 to 5 , Figure 7 and Figure 8 As shown, the electrode rod 10 also includes a limiting rod 4 extending along the first direction. One end of the limiting rod 4 is connected to the conductive block 2, and the other end of the limiting rod 4 is provided with a limiting part 41, which is used to limit the engagement with the connecting part 12.

[0065] For example, the upper end of the limiting rod 4 is connected to the conductive block 2, and the lower end of the limiting rod 4 is provided with a limiting part 41. During the vertical movement of the conductive rod, the limiting rod 4 moves with the conductive rod in the vertical direction, and when the limiting part 41 is in a limiting engagement with the connecting part 12, the conductive block 2 can no longer move upward.

[0066] For example, the conductive block 2 is provided with a threaded hole 24, and the upper end of the limiting rod 4 is provided with an external thread. The external thread is threadedly connected to the threaded hole 24 to realize the connection between the conductive block 2 and the limiting rod 4.

[0067] By setting the limiting rod 4, the conductive block 2 can be prevented from separating from the connecting rod 1, thereby improving the reliability of the electrode rod 10.

[0068] In some embodiments, such as Figure 3 and Figure 4 As shown, the connecting part 12 is provided with a through hole 121, and the limiting rod 4 is movably inserted into the through hole 121 along the first direction. The limiting part 41 is used to limit and cooperate with one end of the through hole 121 facing away from the conductive block 2.

[0069] For example, the limiting part 41 is provided on the lower side of the through hole 121, and the upper end of the limiting part 41 is used to limit and cooperate with the lower end of the through hole 121.

[0070] For example, the limiting rod 4 is a screw rod, which includes a rod body and a bolt head. The bolt head forms a limiting part 41, and the screw rod is threadedly connected to the conductive block 2.

[0071] In some embodiments, the elastic element 3 is sleeved on the limiting rod 4, and the two ends of the elastic element 3 abut against the connecting part 12 and the conductive block 2, respectively.

[0072] For example, the elastic element 3 is a helical spring. The elastic element 3 is sleeved on the outside of the limiting rod 4. The upper end of the elastic element 3 abuts against the conductive block 2, and the lower end of the elastic element 3 abuts against the connecting part 12.

[0073] By sleeved on the outside of the limiting rod 4, the limiting rod 4 can limit the elastic element 3 along the extension direction of the connecting rod 1 and the second direction, thereby facilitating the assembly of the elastic element 3, improving the assembly efficiency of the electrode rod 10, and reducing the cost of the electrode rod 10.

[0074] In some embodiments, such as Figure 1 , Figure 2 and Figure 5 As shown, the electrode rod 10 also includes an electrical connector 5, which is a flexible component. One end of the electrical connector 5 is electrically connected to the connecting part 12, and the other end of the electrical connector 5 is electrically connected to the conductive block 2.

[0075] For example, the electrical connector 5 is a bendable steel wire rope. By bending and stretching the steel wire rope, one end of the electrical connector 5 is electrically connected to the conductive block 2 during the movement of the conductive block 2, and the other end of the electrical connector 5 is electrically connected to the connecting part 12. Of course, the electrical connector 5 can also be in other forms, such as a bendable copper busbar, a flexible wire, etc.

[0076] By setting up the electrical connector 5, the electrical connection between the conductive block 2 and the connecting rod 1 can be realized, which can improve the reliability of the electrical connection between the conductive block 2 and the connecting rod 1, and further improve the reliability of the electrode rod 10.

[0077] For example, such as Figure 2 , Figure 5 and Figure 6 As shown, the connecting part 12 is provided with a first conductive hole 14, the conductive block 2 is provided with a second conductive hole 25, and the two ends of the electrical connector 5 are respectively provided with a first fixing hole 51 and a second fixing hole 52. The first conductive hole 14 corresponds to the first fixing hole 51 and is connected by a fastener, and the second conductive hole 25 corresponds to the first fixing hole 51 and is connected by a fastener. The fastener can be a bolt, screw, etc.

[0078] In other embodiments, the electrical connector 5 may be welded to the conductive block 2 and to the connecting portion 12.

[0079] In some embodiments, the number of electrical connectors 5 is multiple, and the multiple electrical connectors 5 are arranged at intervals.

[0080] For example, there are four electrical connectors 5, with two electrical connectors 5 installed on the left and right sides of the connecting rod 1 respectively.

[0081] By setting multiple electrical connectors 5, not only can the reliability of the electrical connection between the conductive block 2 and the connecting rod 1 be improved, but also a larger current can be allowed between the conductive block 2 and the connecting rod 1, which is beneficial to improving the safety of the electrode rod 10.

[0082] In other embodiments, such as Figure 8 and Figure 9 As shown, the electrical connector 5 can also be omitted. In this case, the electrical connection between the conductive block 2 and the connecting rod 1 can be achieved by using the limiting rod 4, or by using the guiding contact between the first guide part 13 and the second guide part 21 to achieve the electrical connection between the conductive block 2 and the connecting rod 1.

[0083] Preferably, the connecting rod 1 is a split structure, for example, as shown in the figure. Figure 2 and Figure 8 As shown, the connecting rod 1 has a separate rod body and a connecting part 12. The connecting part 12 can be interference-fitted with the rod body, and the connecting part 12 can also be connected to the rod body by fasteners.

[0084] Of course, in other embodiments, the connecting rod 1 can also be a one-piece structure, that is, the connecting rod 1 is integrally machined.

[0085] Figure 10 The image shown is a side view of the boat structure provided in an embodiment of this application when it is connected to the electrode rod and the radio frequency rod. Figure 11 The image shown is a perspective view of the boat structure provided in an embodiment of this application when connected with the electrode rod and the radio frequency rod. Figure 12 The image shown is a rear view of the boat structure provided in an embodiment of this application when connected to the electrode rod and the radio frequency rod. Figure 13 The image shown is a side view of the boat structure connected to the electrode rod and the radio frequency rod according to another embodiment of this application. Figure 14 The image shown is a perspective view of the boat structure provided in an embodiment of this application when connected with the electrode rod and the radio frequency rod.

[0086] like Figures 9 to 14 As shown, the processing equipment of this application includes a main body and an electrode rod 10 as described in any of the above embodiments. The main body has a process chamber, and the electrode rod 10 is disposed within the process chamber. The mounting part 11 is electrically connected to a power source, thereby connecting the electrode rod 10 to the power source, which includes at least one of a heating power source and a radio frequency power source. The boat structure 100 includes a plurality of electrodes, at least one of which abuts against the conductive block 2 along a first direction. It should be understood that the description of the embodiments of the electrode rod 10 corresponds to the description of the embodiments of the processing equipment; therefore, any parts not described in detail can be referred to the preceding embodiments of the electrode rod 10.

[0087] The processing equipment provided in this embodiment makes the conductive block 2 of the electrode rod 10 movable along the first direction, and provides an elastic member 3 between the connecting part 12 and the conductive block 2. The elastic member 3 provides an elastic force to the conductive block 2 away from the connecting part 12, so that the conductive block 2 can be moved along the first direction to maintain a stable connection with the electrode of the boat structure 100, thereby improving the connection stability between the boat structure 100 and the power supply.

[0088] For example, the processing equipment can be any equipment capable of coating an object.

[0089] For example, the processing equipment may include a vapor deposition apparatus. For instance, the processing equipment may include a physical vapor deposition (PVD) apparatus. For example, the processing equipment may include a magnetron sputtering PVD apparatus. Specifically, the processing equipment is used to deposit a coating onto a workpiece. The workpiece to be coated may include components or raw materials used to form photovoltaic modules. For example, the workpiece to be coated may be a silicon wafer, a cell, a crystal wafer, etc. The processing equipment can also be used to prepare perovskite layers, electron transport layers, hole transport layers, encapsulation layers, and transparent electrodes for perovskite photovoltaic cells. The processing equipment can also be used to prepare tandem cells.

[0090] In some embodiments, such as Figures 10 to 14 As shown, the mounting part 11 is electrically connected to a heating power supply, and at least one electrode is a heating electrode 20, which abuts against the conductive block 2 along a first direction. A radio frequency (RF) rod 40 is provided within the process chamber, with one end of the RF rod 40 electrically connected to an RF power supply. At least one electrode is an RF electrode 30, which has a insertion hole 300 for inserting the other end of the RF rod 40, thereby electrically connecting the RF electrode 30 to the RF power supply.

[0091] For example, the processing equipment includes a boat structure 100, which includes six electrodes: four heating electrodes 20 and two radio frequency (RF) electrodes 30. There are four electrode rods 10 and two RF rods 40. Each electrode rod 10 corresponds one-to-one with a heating electrode 20, and each electrode rod 10 is electrically connected to its corresponding heating electrode 20, so that the boat structure 100 is electrically connected to a heating power source. Similarly, each RF rod 40 corresponds one-to-one with a radio frequency (RF) electrode 30, so that the boat structure 100 is electrically connected to an RF power source.

[0092] The RF electrode 30 and the RF rod 40 are connected by a plug-in method, which allows the RF electrode 30 and the RF rod 40 to adopt the structure in related technologies without the need to redesign the RF electrode 30 and the RF rod 40, which helps to reduce the design and manufacturing costs of process equipment.

[0093] For example, such as Figure 11 , Figure 12 and Figure 14As shown, the boat structure 100 includes multiple boat blades 50, some of which are first boat blades 501, and others are second boat blades 502. The first boat blades 501 and second boat blades 502 are arranged alternately in a left-right direction, and are insulated from each other. The multiple first boat blades 501 form a first boat assembly, and the multiple second boat blades 502 form a second boat assembly.

[0094] Two electrode rods 10 are positive electrode rods 101, and the other two electrode rods 10 are negative electrode rods 102; two heating electrodes 20 are positive heating electrodes 201, and the other two heating electrodes 20 are negative heating electrodes 202; two radio frequency electrodes 30 are anode radio frequency electrode 301 and cathode radio frequency electrode 302, respectively; and two radio frequency rods 40 are anode radio frequency rod 401 and cathode radio frequency rod 402, respectively. The positive electrode rods 101 correspond one-to-one with the positive heating electrodes 201, and the negative electrode rods 102 correspond one-to-one with the negative heating electrodes 202. The first boat assembly includes one positive heating electrode 201, one negative heating electrode 202, and a radio frequency anode; the second boat assembly includes one positive heating electrode 201, one negative heating electrode 202, and a radio frequency cathode.

[0095] When the boat structure 100 is processed, the positive heating electrode 201, negative heating electrode 202 and anode radio frequency electrode 301 of the first boat assembly are electrically connected to the corresponding positive electrode rod 101, negative electrode rod 102 and anode radio frequency rod 401, respectively. The second boat assembly realizes the electrical connection between the first boat page 501 and the second boat page 502 and the heating power supply, as well as the electrical connection between the first boat page 501 and the second boat page 502 and the radio frequency power supply, by electrically connecting the positive heating electrode 201, negative heating electrode 202 and cathode radio frequency electrode 302 to the corresponding positive electrode rod 101, negative electrode rod 102 and cathode radio frequency rod 402, respectively.

[0096] It should be noted that when the first and second boats 501 and 502 are electrically connected to the heating power supply, they are disconnected from the radio frequency (RF) power supply. In this case, the heating power supply is used to heat the products on the first and second boats 501 and 502. Conversely, when the first and second boats 501 and 502 are electrically connected to the RF power supply, they are disconnected from the heating power supply. In this case, the RF power supply is used to process the products placed on the boat 50. Specifically, the on / off connection between the electrode rod 10 and the heating power supply can be controlled by the switching assembly, thus controlling the on / off connection between the first and second boats 501 and 502 and the heating power supply. Similarly, the on / off connection between the RF rod 40 and the RF power supply can be controlled by the switching assembly, thus controlling the on / off connection between the first and second boats 501 and 502 and the RF power supply.

[0097] For example, the contact surface 200 of the positive heating electrode 201 is a positive contact surface, and the contact surface 200 of the negative heating electrode 202 is a negative contact surface. The conductive surface 23 of the positive electrode rod 101 is a positive conductive surface, and the conductive surface 23 of the negative electrode rod 102 is a negative conductive surface. The positive heating electrode 201 has a downward-facing positive contact surface, and the negative heating electrode 202 has a downward-facing negative contact surface. Both the positive and negative conductive surfaces are arranged facing upwards. The downward-facing positive contact surface of the positive heating electrode 201 abuts against the corresponding positive conductive surface of the positive electrode rod 101, and the downward-facing negative contact surface of the negative heating electrode 202 abuts against the corresponding negative conductive surface of the negative electrode rod 102.

[0098] For example, the boat structure 100 also includes an electrical control assembly (not shown) and a ventilation assembly. The electrical control assembly can be used to control and monitor signals, power, current, voltage, airflow, etc., during the coating process. The ventilation assembly can be used to introduce process gases into the process chamber during the coating process.

[0099] The electrode rod 10 and processing equipment of this application embodiment include a connecting rod 1 and a conductive block 2. The conductive block 2 is movably connected to the connecting portion 12 of the connecting rod 1 in a first direction. An elastic element 3 is provided between the conductive block 2 and the connecting portion 12. The elastic element 3 provides a spring force to the conductive block 2 away from the connecting portion 12. When the electrode rod 10 is electrically connected to the corresponding electrode, the conductive block 2 can move in the first direction to maintain a continuous, stable, and good contact with the boat structure 100, thereby improving the connection stability between the boat structure 100 and the power supply. In addition, when wear occurs at the connection between the conductive block 2 and the electrode, the phenomenon of poor contact between the conductive block 2 and the electrode of the boat structure 100 due to wear can be avoided.

[0100] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications or equivalent substitutions made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An electrode rod, characterized in that, include: A connecting rod has a mounting part at one end and a connecting part at the other end. The mounting part is used to fix the connecting rod, and the connecting part has a first guide part. A conductive block is movably electrically connected to the connecting part along a first direction. The conductive block is provided with a second guide part, which is movably engaged with the first guide part along the first direction. The first direction is perpendicular to the extension direction of the connecting rod. An elastic element is disposed between the connecting portion and the conductive block, the elastic element being used to provide an elastic force to the conductive block away from the connecting portion.

2. The electrode rod according to claim 1, characterized in that, The conductive block has a receiving groove with its opening facing the connecting part, at least a portion of the connecting part is disposed in the receiving groove, and the first guide part is disposed on the side wall of the receiving groove.

3. The electrode rod according to claim 1, characterized in that, One of the first guide portion and the second guide portion is a guide groove, and the other of the first guide portion and the second guide portion is a guide protrusion, wherein the guide protrusion is disposed in the guide groove.

4. The electrode rod according to claim 1, characterized in that, Multiple first guide portions and multiple second guide portions are provided, with one-to-one correspondence between the first guide portion and the second guide portion, and each second guide portion is guided and cooperated with the corresponding first guide portion; One portion of the first guide portion and another portion of the first guide portion are arranged at intervals along a second direction, which is perpendicular to the first direction and the extension direction of the connecting rod.

5. The electrode rod according to any one of claims 1-4, characterized in that, The electrode rod also includes a limiting rod extending along the first direction. One end of the limiting rod is connected to the conductive block, and the other end of the limiting rod is provided with a limiting part, which is used to limit the engagement with the connecting part.

6. The electrode rod according to claim 5, characterized in that, The elastic element is disposed outside the limiting rod, and its two ends abut against the connecting part and the conductive block, respectively.

7. The electrode rod according to any one of claims 1-4, characterized in that, The conductive block has a conductive surface facing away from the connection portion, and the conductive surface is a plane.

8. The electrode rod according to any one of claims 1-4, characterized in that, It also includes an electrical connector, which is a flexible component. One end of the electrical connector is electrically connected to the connecting part, and the other end of the electrical connector is electrically connected to the conductive block.

9. A processing equipment, characterized in that, include: The main body of the equipment has a process chamber; The electrode rod according to any one of claims 1-8, wherein the electrode rod is disposed in the process chamber, and the mounting part is electrically connected to a power source so that the electrode rod is electrically connected to the power source, wherein the power source includes at least one of a heating power source and a radio frequency power source; The boat structure includes multiple electrodes, at least one of which abuts against the conductive block along the first direction.

10. The processing equipment according to claim 9, characterized in that, The mounting part is electrically connected to the heating power supply, and at least one of the electrodes is a heating electrode, which abuts against the conductive block along the first direction; The process chamber is equipped with an RF rod, one end of which is electrically connected to the RF power supply; at least one of the electrodes is an RF electrode, which has a plug hole for inserting the other end of the RF rod to electrically connect the RF electrode to the RF power supply.

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