Direct-drive rotary film expansion device

Abstract

This application provides a direct-drive rotary film expansion device, comprising: a base; a support ring disposed on the base; a first rotating plate fixedly connected to the support ring and rotatable; a second rotating plate located above the first rotating plate and rotatable, the second rotating plate having a first ball groove extending along a first preset direction, the first ball groove containing balls; a lifting plate located above the second rotating plate, the lifting plate having a second ball groove extending along a second preset direction for accommodating balls, at least one of the first ball groove and the second ball groove having a height difference in groove depth along its extension direction; a lifting rod located between the first rotating plate and the lifting plate and connected to the first rotating plate and the lifting plate; and a pressing plate located above the lifting plate for pressing down the wafer ring of the wafer to be expanded. The film expansion device provided by this application has a simple and compact structure, which can reduce the number of structural components of the film expansion device and improve the film expansion efficiency.

Description

Technical Field

[0001] This utility model relates to the field of wafer processing equipment technology, specifically to a direct-drive rotary expansion device. Background Technology

[0002] In the wafer manufacturing process, the wafer is attached to a blue film, which is then encapsulated on a wafer ring. The wafer can be diced into multiple chips. When retrieving the chips, the wafer needs to undergo film expansion. Existing film expansion devices typically use a motor-driven synchronous belt pulley to drive the expansion device's rotation and lifting during rotation calibration and lifting. Lifting is often achieved using a ball screw. The synchronous belt and ball screw are usually located outside the structures requiring rotation and lifting. This configuration results in a large space requirement for the synchronous belt and ball screw, and necessitates multiple structures such as multiple driven pulleys. This not only makes the expansion device's structure numerous and complex but also results in a large overall space requirement, hindering space utilization. Utility Model Content

[0003] To overcome the shortcomings of the prior art, this utility model provides a direct-drive rotary film expansion device with a simple and compact structure, which can reduce the number of structural components of the film expansion device and improve the film expansion efficiency.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0005] This utility model discloses a direct-drive rotary film expanding device, comprising:

[0006] Base;

[0007] A support ring is disposed on the base;

[0008] A first rotating plate is fixedly connected to the support ring, and the first rotating plate is rotatable;

[0009] The second rotating plate is located above the first rotating plate. The second rotating plate is rotatable. The second rotating plate is provided with a first ball groove extending along a first preset direction. A ball is provided in the first ball groove.

[0010] A lifting plate is located above the second rotating plate. The lifting plate is provided with a second ball groove that accommodates balls and extends along a second preset direction. The depth of at least one of the first ball groove and the second ball groove along its extension direction has a height difference.

[0011] The lifting rod is located between the first rotating plate and the lifting plate and is connected to the first rotating plate and the lifting plate. When the second rotating plate rotates, it drives the ball to roll between the first ball groove and the second ball groove. The rolling of the ball drives the second rotating plate and the lifting plate to move away from or closer to each other.

[0012] A pressure plate, located above the lifting plate, is used to press down the wafer ring of the wafer to be expanded.

[0013] The above technical solution involves setting balls in the first ball groove. When the second rotating plate rotates, it drives the balls to roll between the first and second ball grooves. Since the depth of the first and / or second ball grooves has a height difference, the height of the balls changes continuously as they roll, which can drive the lifting plate and the second rotating plate to move closer or further apart, thus enabling the lifting plate to rise and fall. The above-mentioned drive lifting structure is simple, does not require a synchronous pulley, reduces the number of structural components in the film expansion device, and makes the film expansion device simple, more compact, and occupies less space. It also reduces the time required to drive the synchronous pulley and achieves high film expansion efficiency.

[0014] Furthermore, the depth of the first ball groove and / or the second ball groove continuously decreases or increases along their extension direction. The ball is fitted inside the first ball groove, and the continuous decrease or increase in groove depth enables the ball to drive the lifting plate to move up and down when rolling.

[0015] Furthermore, the first predetermined extension direction of the first ball groove includes: a first axial direction extending axially along the side of the second rotating plate near the lifting plate to the side away from the lifting plate, and a second direction extending around the circumference of the support ring.

[0016] The second preset extension direction of the second ball groove includes: a second axial direction extending axially from the side of the lifting plate close to the second rotating plate to the side away from the second rotating plate, and a second direction extending around the circumference of the support ring.

[0017] The first and second ball grooves extend axially in the direction of the ball's up-and-down movement, while the second direction is the direction of the ball's forward movement. Thus, as the ball rolls forward, it also moves up and down, thereby driving the lifting plate to move up and down.

[0018] Furthermore, the groove depth at the starting point of the first and / or second ball groove extending along the second direction is greater than or less than the groove depth at the ending point, and the maximum distance between the second rotating plate and the lifting plate is less than or equal to the groove depth difference between the starting and ending points of the first and / or second ball grooves extending along the second direction. The groove depth of the first and / or second ball grooves in the axially extending direction allows the lifting plate to move closer to or further away from the second rotating plate during ball movement, thereby achieving lifting.

[0019] Furthermore, when the second rotating plate rotates at an angle of 30° to 60°, the lifting height of the lifting plate is 0 to 12 mm.

[0020] Furthermore, the lifting rod includes a guide column and a linear bearing connected to and fixed to the first rotating plate. One end of the guide column is fixedly connected to the lifting plate, and the other end is connected to the linear bearing. The rolling balls drive the lifting plate to move. Due to the limiting effect of the linear bearing, the lifting plate moves axially along the guide column, causing the lifting plate to rise and fall.

[0021] Furthermore, the wafer expansion device includes a first arc-shaped motor that drives the first rotating plate to rotate and a second arc-shaped motor that drives the second rotating plate to rotate. The first arc-shaped motor is mounted on the base, and the second arc-shaped motor is mounted on the first rotating plate. By using the first arc-shaped motor to drive the first rotating plate to rotate and the second arc-shaped motor to drive the second rotating plate to rotate, the lifting plate is raised and lowered. When the expansion device is driven by motors to rotate and raise and lower, there is no need for a synchronous pulley, reducing the number of structural components in the expansion device. The resulting expansion device is simpler, more compact, and occupies less space. Compared to the existing technology where motors drive synchronous pulleys for lifting and rotation, this device has fewer lifting and rotation structural components and a simpler structure.

[0022] Furthermore, the base is provided with a first groove, a first arc-shaped motor is disposed in the first groove, and a first rotating plate is disposed on and connected to the first arc-shaped motor. The first arc-shaped motor is connected to the first rotating plate, eliminating the need for a timing pulley, thus driving the first rotating plate to rotate. Compared to the existing method of driving via a motor and timing pulley, the rotating structure of this application is simpler, and the rotating components and the components driving the rotation occupy less space, resulting in higher space utilization and higher film expansion efficiency.

[0023] Furthermore, the first rotating plate is provided with a second groove, and the second arc-shaped motor is disposed in the second groove. The second rotating plate is disposed on the second arc-shaped motor and connected to the second arc-shaped motor. Since the second arc-shaped motor is connected to the second rotating plate, it can drive the second rotating plate to rotate without the need for a timing pulley. Then, the lifting plate is driven to rise and fall by ball bearings. Compared with the existing method of driving via a motor and timing pulley, the lifting structure of this application is simpler, and the lifting components and the components driving the lifting occupy less space, resulting in higher space utilization and higher film expansion efficiency.

[0024] Furthermore, an arc-shaped guide rail is connected to the outer periphery of the first rotating plate, and a roller is provided on the outer periphery of the arc-shaped guide rail. The roller is fixed to the base and rolls along the outer edge of the arc-shaped guide rail. The first rotating plate is connected to the support ring and is in a suspended state. During rotation, the floating can cause instability. The arc-shaped guide rail and roller can improve the stability of the rotation of the first rotating plate, thereby improving the overall stability of the film expansion device.

[0025] Furthermore, the base is provided with a connecting post, and the roller is fixed on the connecting post.

[0026] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:

[0027] 1. This application sets balls in the first ball groove. When the second rotating plate rotates, it drives the balls to roll between the first ball groove and the second ball groove. Since the depth of the first ball groove and / or the second ball groove has a height difference, the height of the balls changes continuously when the balls roll. This can drive the lifting plate and the second rotating plate to move closer or further apart, so that the lifting plate can be raised or lowered. There is no need to set a synchronous pulley, which reduces the structural components of the film expansion device. The film expansion device is simple, the structure of driving rotation and lifting is more compact, occupies less space, reduces the time of driving the synchronous pulley, and has high film expansion efficiency.

[0028] 2. This application sets a first arc-shaped motor to drive the first rotating plate to rotate, and a second arc-shaped motor to drive the second rotating plate to rotate, thereby causing the lifting plate to rise and fall. Compared with the prior art, which uses a motor to drive a synchronous pulley to drive the lifting and rotation, this reduces the number of structural components for lifting and rotation, and the structure of this device is simpler.

[0029] To make the above and other objects, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 This is a schematic diagram of the overall structure of a direct-drive rotary film expanding device provided by this utility model;

[0032] Figure 2 This is a schematic diagram of the base structure of a direct-drive rotary film expanding device provided by this utility model;

[0033] Figure 3 This is a schematic diagram of the first rotating structure of a direct-drive rotary film expanding device provided by this utility model;

[0034] Figure 4 This is a schematic diagram of the second rotating structure of a direct-drive rotary film expanding device provided by this utility model;

[0035] Figure 5 This is a schematic diagram of the lifting structure of a direct-drive rotary film expanding device provided by this utility model;

[0036] Figure 6 This is a cross-sectional view of a direct-drive rotary film expanding device provided by this utility model;

[0037] Figure 7 This is a perspective view of the second rotating plate and the lifting plate of a direct-drive rotary film expanding device provided by this utility model;

[0038] Figure 8 This is a top view of the second rotating plate of a direct-drive rotary film expanding device provided by this utility model;

[0039] Figure 9 This is a bottom view of the lifting plate of a direct-drive rotary film expanding device provided by this utility model.

[0040] The reference numerals in the above figures are as follows: 1. Base; 2. Support ring; 3. First rotating plate; 4. First arc motor; 5. Second rotating plate; 6. Lifting plate; 7. Second arc motor; 8. Guide column; 9. Linear bearing; 10. First ball groove; 11. Ball; 12. Second ball groove; 13. Arc guide rail; 14. Roller; 15. Connecting column; 16. Pressure plate; 17. First groove; 18. Second groove. Detailed Implementation

[0041] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. In addition, the accompanying drawings of the present invention are only simple schematic illustrations and are not depictions based on actual dimensions, as stated in advance.

[0042] In this utility model, it should be noted that the terms "upper," "lower," "inner," "outer," "forward," "backward," "between," "nearer," and "farthest" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. It should also be noted that, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0043] It should be understood that while terms such as "first," "second," and "third" may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term "or" as used herein should, as appropriate, include any combination of one or more of the related listed items.

[0044] Reference Figures 1 to 7 This application provides a direct-drive rotary film expanding device, including: a base 1, a support ring 2 disposed above the center of the base 1, a first rotating plate 3 disposed on the base 1, a second rotating plate 5 disposed on the first rotating plate 3, a lifting plate 6 disposed on the second rotating plate 5, a film pressing plate 16 disposed on the lifting plate 6, and a lifting rod connected to the first rotating plate 3 and the lifting plate 6.

[0045] The support ring 2 and the first rotating plate 3 are fixedly connected. The first rotating plate 3 is rotatable. The second rotating plate 5 is provided with a first ball groove 10 extending in a preset direction. A ball 11 is provided in the first ball groove 10. The second rotating plate 5 is rotatable. The lifting plate 6 is provided with a second ball groove 12 extending in a preset direction to accommodate the ball 11. At least one of the first ball groove 10 and the second ball groove 12 has a height difference in groove depth along its extension direction. When the second rotating plate 5 rotates, it drives the ball 11 to roll between the first ball groove 10 and the second ball groove 12. The rolling of the ball 11 drives the second rotating plate 5 and the lifting plate 6 to move away from or closer to each other.

[0046] Specifically, in the prior art, the method of driving the film expansion device to rotate and lift is to drive the synchronous pulley with a motor. The synchronous pulley drives the rotating and lifting components to rotate and lift. The structure that requires rotation and lifting is complex and numerous, and occupies a lot of space. In contrast, this application uses the rolling of balls to drive the lifting plate to rise and fall along the lifting rod. The structure of driving the lifting is simple, and there is no need to set up a synchronous pulley. This reduces the number of structural components of the film expansion device. The film expansion device is simple, the structure is more compact, occupies less space, reduces the time of driving the synchronous pulley, and the film expansion efficiency is high.

[0047] In order to drive the lifting plate 6 to rise and fall, such as Figure 8 and Figure 9 As shown, the second rotating plate 5 is provided with a first ball groove 10 extending in a preset direction, and a ball 11 is provided in the first ball groove 10. The lifting plate 6 is provided with a second ball groove 12 extending in a preset direction and corresponding to the position of the first ball groove 10, so that the ball 11 can roll between the first ball groove 10 and the second ball groove 12.

[0048] Specifically, such as Figures 4-9As shown, the preset extension directions of the first ball groove 10 include: a first direction extending axially along the side of the second rotating plate 5 near the lifting plate 6 towards the side away from the lifting plate 6, and a second direction extending around the support ring 2. The preset extension directions of the second ball groove 12 include: a direction extending axially along the side of the lifting plate 6 near the second rotating plate 5 towards the side away from the second rotating plate 5, and a second direction extending around the support ring 2.

[0049] In this design, the depth of the first ball groove 10 and / or the second ball groove 12 extending along their axial direction continuously decreases or increases around the support ring 2, and the depth of the first ball groove 10 or the second ball groove 12 extending along their axial direction is less than or equal to the thickness of the second rotating plate 5 or the lifting plate 6. This allows the ball 11 to roll between the first ball groove 10 and the second ball groove 12 while simultaneously moving in the first axial direction and / or the second axial direction and in the second direction. The groove depth extending in the first axial direction and / or the second axial direction allows the ball 11 to move up and down along the first ball groove 10 and the second ball groove 12, thereby causing the lifting plate 6 to move up and down. The groove length extending in the second direction allows the ball 11 to rotate around the support ring 2 along the first ball groove 10 and the second ball groove 12, thereby causing the lifting plate 6 to have a tendency to move. Specifically, the lifting rod includes a guide post 8 and a linear bearing 9 connected to and fixed on the first rotating plate 3. One end of the guide post 8 is fixedly connected to the lifting plate 6, and the other end is connected to the linear bearing, thus limiting the movement of the lifting plate 6. This allows the lifting plate 6 to move only along the axial direction of the guide post 8, thereby moving it upwards or downwards, thus achieving wafer fixation and film expansion. There are various ways to fix the guide post 8 to the lifting plate 6, such as by bolts.

[0050] Wherein, the groove depth at the starting point of the first ball groove 10 and / or the second ball groove 12 extending along the second direction is greater than the groove depth at the ending point or the groove depth at the starting point is less than the groove depth at the ending point, and the maximum distance between the second rotating plate 5 and the lifting plate 6 is less than or equal to the groove depth difference between the starting point and the ending point of the first ball groove 10 and / or the second ball groove 12 extending along the second direction.

[0051] Due to limitations in the size of the wafer expansion apparatus and the power required to drive the first rotating plate 2 and the second rotating plate 5, in some embodiments, when the second rotating plate 5 rotates at an angle of 30° to 60°, the lifting height of the lifting plate 6 is 0 to 12 mm. Preferably, when the second rotating plate 5 rotates at an angle of 45°, the lifting height of the lifting plate 6 is 12 mm.

[0052] In some embodiments, the wafer expansion apparatus is further provided with a limiting device, which is used to limit the stroke of the ball 11 and prevent the ball 11 from dislodging from the first ball groove 10 or the second ball groove 12.

[0053] In some embodiments, at least one first ball groove 10 is provided on the second rotating plate 5, and when two or more first ball grooves 10 are provided, the two or more first ball grooves 10 extend in the same direction.

[0054] like Figure 1 As shown, a pressure plate 16 is provided above the lifting plate 6. The pressure plate 16 includes a first pressure plate and a second pressure plate that are set separately. When the lifting plate 6 is raised and lowered, the pressure plate 16 is raised and lowered at the same time. When film expansion is required, the lifting plate 6 moves downward until the pressure plate 16 presses the wafer ring of the wafer to be expanded, so that the wafer abuts against the support ring 2, thereby realizing film expansion.

[0055] Reference Figures 1 to 7 The wafer expansion device includes a first arc motor 4 that drives the first rotating plate 3 to rotate and a second arc motor 7 that drives the second rotating plate 5 to rotate. The first arc motor 4 is mounted on the base 1 and the second arc motor 7 is mounted on the first rotating plate 3.

[0056] Reference Figure 2 In one possible embodiment, the base 1 is provided with a first groove 17, the first arc motor 4 is disposed in the first groove 17, and the first rotating plate 3 is disposed on the first arc motor 4 and connected to the first arc motor 4, so that it is directly driven to rotate by the first arc motor 4. When the first rotating plate 3 rotates, it drives the support ring 2 and the lifting plate 6 and the pressure plate 16 above the first rotating plate 3 to rotate.

[0057] Specifically, such as Figures 3-5 As shown, the support ring 2 is located at the center of the first rotating plate 3 and is connected to the first rotating plate 3, as follows. Figure 3 and Figure 4 As shown, in one possible embodiment, the first rotating plate 3 is provided with a second groove 18, the second arc-shaped motor 7 is disposed in the second groove 18, and the second rotating plate 5 is disposed on and connected to the second arc-shaped motor 7. Figure 5 As shown, the second rotating plate 5 is connected to the lifting plate 6 above it. The lifting plate 6 is connected to the first rotating plate 3 through a lifting rod. Thus, when the first rotating plate 3 rotates, the support ring 2 and the second rotating plate 5, the lifting plate 6 and the pressure plate 16 above the first rotating plate 3 rotate simultaneously to calibrate the wafer position.

[0058] like Figure 1 , Figure 3 , Figure 4 and Figure 5 As shown, in some embodiments, the first rotating plate 3 and the support ring 2 are suspended. In order to improve the stability of the first rotating plate 3 when rotating, an arc guide rail 13 is connected to the outer periphery of the first rotating plate 3. A roller 14 is provided on the outer periphery of the arc guide rail 13. The roller 14 rolls along the outer edge of the arc guide rail 13, thereby achieving stable fixation of the rotation of the first rotating plate 3.

[0059] In some embodiments, the roller 14 is fixed on the base 1. In other embodiments, the base 1 is provided with a connecting post 15, and the roller 14 is fixed on the connecting post 15.

[0060] In some embodiments, the base 1 is provided with four connecting posts 15, which are separately arranged at the corners of the base 1. Each connecting post 15 is fixed with a roller 14 to improve the stability of the rotating structure during rotation.

[0061] The working principle of the direct-drive rotary expansion device in this application is as follows: After the wafer moves to the expansion position, the vision system detects the wafer position deviation. The first arc motor 4 drives the first rotating plate 3 to rotate. When the first rotating plate 3 rotates, it drives the support ring 2, the second rotating plate 5, the lifting plate 6, and the pressure plate 16 to rotate together to the preset position to calibrate the wafer. After that, the second arc motor 7 drives the second rotating plate 5 to rotate. When the second rotating plate 5 rotates, the ball 11 rolls between the first ball groove 10 and the second ball groove 12. When rolling, the ball 11 rolls simultaneously along the direction of extension of the first ball groove 10 and the second ball groove 12. The groove depth extending in the second direction causes the ball bearing 11 to move up and down along the first ball bearing groove 10 and the second ball bearing groove 12, thereby driving the lifting plate 6 to move up and down. The groove length extending in the second direction causes the ball bearing 11 to rotate around the support ring 2 along the first ball bearing groove 10 and the second ball bearing groove 12, causing the lifting plate 6 to have a tendency to move. Since one end of the guide post 8 is fixedly connected to the lifting plate 6, it forms a limit on the lifting plate 6, and the lifting plate 6 can only move along the axial direction of the guide post 8, thereby driving the lifting plate 6 to move up or down until the pressure plate 16 fixes the wafer ring. At the same time, the wafer abuts against the support ring 2, thereby realizing the lifting of the wafer and realizing wafer fixation and film expansion.

[0062] It should be noted that the order of rotation and lifting in this application is not unique. The wafer position can be calibrated by rotation before lifting and expanding the film, or the film can be expanded by lifting and expanding the film first and then calibrating the wafer position by rotation.

[0063] This utility model uses specific embodiments to illustrate the principle and implementation of the utility model. The above description of the embodiments is only for the purpose of helping to understand the method and core idea of ​​the utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​the utility model. Therefore, the content of this specification should not be construed as a limitation of the utility model.

Claims

1. A rotary expander in a direct drive form, characterized by, include: Base; A support ring is disposed on the base; A first rotating plate is fixedly connected to the support ring, and the first rotating plate is rotatable; The second rotating plate is located above the first rotating plate. The second rotating plate is rotatable. The second rotating plate is provided with a first ball groove extending along a first preset direction. A ball is provided in the first ball groove. A lifting plate is located above the second rotating plate. The lifting plate is provided with a second ball groove that accommodates balls and extends along a second preset direction. The depth of at least one of the first ball groove and the second ball groove along its extension direction has a height difference. The lifting rod is located between the first rotating plate and the lifting plate and is connected to the first rotating plate and the lifting plate. When the second rotating plate rotates, it drives the ball to roll between the first ball groove and the second ball groove. The rolling of the ball drives the second rotating plate and the lifting plate to move away from or closer to each other. A pressure plate, located above the lifting plate, is used to press down the wafer ring of the wafer to be expanded.

2. A rotary expander in direct drive form according to claim 1, characterized in that The depth of the first ball groove and / or the second ball groove continuously decreases or increases along its extension direction.

3. A rotary expander in direct drive form according to claim 1, characterized in that The first preset extension direction of the first ball groove includes: a first axial direction extending axially from the side of the second rotating plate close to the lifting plate to the side away from the lifting plate, and a second direction extending around the circumference of the support ring. The second preset extension direction of the second ball groove includes: a second axial direction extending axially from the side of the lifting plate close to the second rotating plate to the side away from the second rotating plate, and a second direction extending around the circumference of the support ring.

4. A rotary expander in direct drive form according to claim 3, characterized in that The groove depth at the starting point of the first ball groove and / or the second ball groove extending along the second direction is greater than the groove depth at the ending point, or the groove depth at the starting point is less than the groove depth at the ending point. The maximum distance between the second rotating plate and the lifting plate is less than or equal to the groove depth difference between the starting point and the ending point of the first ball groove and / or the second ball groove extending along the second direction.

5. A rotary expander in direct drive form according to claim 1, characterized in that The lifting rod includes a guide column and a linear bearing connected to the guide column and fixed on the first rotating plate. One end of the guide column is fixedly connected to the lifting plate, and the other end is connected to the linear bearing.

6. A rotary expander in direct drive form according to claim 1, characterized in that The direct-drive rotary film expanding device includes a first arc motor that drives a first rotating plate to rotate and a second arc motor that drives a second rotating plate to rotate. The first arc motor is mounted on the base, and the second arc motor is mounted on the first rotating plate.

7. A rotary expander in direct drive form according to claim 6, characterized in that The base is provided with a first groove, the first arc-shaped motor is disposed in the first groove, and the first rotating plate is disposed on the first arc-shaped motor and connected to the first arc-shaped motor.

8. A rotary expander in direct drive form according to claim 6, characterized in that The first rotating plate is provided with a second groove, the second arc-shaped motor is disposed in the second groove, and the second rotating plate is disposed on the second arc-shaped motor and connected to the second arc-shaped motor.

9. A rotary expander in direct drive form according to claim 1, characterized in that The first rotating plate is connected to an arc-shaped guide rail on its outer periphery. A roller is provided on the outer periphery of the arc-shaped guide rail. The roller is fixed on the base and rolls along the outer edge of the arc-shaped guide rail.

10. A direct-drive rotary film expander according to claim 9, characterized in that, The base is provided with a connecting column, and the roller is fixed on the connecting column.

Images