Semiconductor device air-blast cleaning device

Abstract

This utility model discloses a semiconductor device air-blowing cleaning device, relating to the technical field of semiconductor device cleaning. This utility model aims to solve the problems of low efficiency, inconsistent airflow, and incomplete cleaning caused by handheld air guns. This utility model includes a circular mounting platform with a mounting section for mounting the device body at its center. The mounting platform has at least two air ducts, arranged at equal angles around the mounting section. Each air duct has an air outlet facing the mounting section and is connected to an air source.

Description

Technical Field

[0001] This utility model relates to the technical field of semiconductor device cleaning, and specifically to a semiconductor device air jet cleaning device. Background Technology

[0002] The cleaning process in semiconductor manufacturing is a core step in ensuring high chip yield and reliability. As process nodes continue to shrink (such as 3nm, 2nm), even nanoscale contaminants can cause open circuits, leakage, or failure in devices.

[0003] Currently, the main methods for cleaning semiconductor devices include washing, drying, and air blowing. However, the air blowing process mainly relies on operators holding an air gun to blow away the semiconductor devices, which is not only inefficient but also results in inconsistent airflow and incomplete cleaning. Utility Model Content

[0004] To address the aforementioned problems—namely, the low efficiency and inconsistent airflow of handheld air guns, which often result in incomplete cleaning—this invention proposes a semiconductor device air-jet cleaning device. The device includes a circular mounting platform with a mounting section at its center for mounting the device body. The platform is equipped with at least two air ducts, arranged at equal angles around the mounting section. Each air duct has an air outlet facing the mounting section and is connected to an air source.

[0005] A further feature of this invention is that the air vent is positioned above the device body and is inclined toward the device body.

[0006] A further feature of this invention is that an arc-shaped pressurization chamber is provided inside the mounting platform, the air duct is connected to the pressurization chamber, and a nozzle connection port is connected to the bottom of the pressurization chamber for connection with the air source.

[0007] A further feature of this invention is that the air duct has three sections.

[0008] The beneficial effects of this utility model are as follows:

[0009] 1. By using three air vents on three air ducts arranged at equal angles around the mounting part, it is possible to achieve uniform airflow onto the device body, thus eliminating the need for manual airflow while holding the device body. This avoids the problem of the operator's fingers blocking the device body and preventing airflow from reaching it. At the same time, the airflow from the three vents can improve airflow efficiency, making the airflow more uniform and consistent, and cleaning the surface of the device body more thoroughly.

[0010] 2. By setting up a pressurization chamber, the air pressure of the blown air can be increased, allowing the surface of the device to be cleaned more thoroughly. Attached Figure Description

[0011] Figure 1 A schematic diagram of the present invention is shown.

[0012] Figure 2 It shows Figure 1 A cross-sectional view along the AA direction.

[0013] Reference numerals: 1. Mounting platform; 11. Mounting section; 12. Pressurization chamber; 2. Component body; 3. Air duct; 31. Air outlet; 4. Adjusting shim. Detailed Implementation

[0014] Preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0015] refer to Figure 1 This utility model proposes a semiconductor device air jet cleaning device, including a circular mounting platform 1, a mounting part 11 is provided at the center of the mounting platform 1, a mounting hole is provided on the mounting part 11, and an internal thread adapted to the device body 2 is provided in the mounting hole. The device body 2 is threadedly connected in the mounting hole, thereby realizing the fixing function of the device body 2.

[0016] The mounting platform 1 is equipped with three integrated air ducts 3. The air ducts 3 are rectangular and hollow, and are arranged at equal angles with the mounting part 11 as the center. An air outlet 31 is opened on the side of the air duct 3 facing the device body 2. An air source is connected to the bottom of the air duct 3, which can blow air into the air duct 3 and then blow it onto the device body 2 through the air outlet 31. The three air ducts 3 blow air onto the device body 2 at the same time, so that three air forces blow onto the device body 2 at the same time, thereby achieving comprehensive air blowing of the device body 2.

[0017] Air vent 31 is positioned above the device body 2 and is tilted towards the device body 2. That is, the end of air vent 31 that is closer to the device body 2 is lower than the end of air vent 31 that is away from the device body 2. In this way, the air force blown out by air vent 31 can directly act on the device body 2 to achieve the function of blowing and washing the device body 2.

[0018] refer to Figure 2The mounting platform 1 has an arc-shaped pressurization chamber 12 inside. The pressurization chamber 12 is coaxially arranged with the mounting platform 1. The bottom ends of the three air ducts 3 are all connected to the pressurization chamber 12. The bottom of the pressurization chamber 12 is threaded with a nozzle connection port, which is connected to the pressurization chamber 12. The nozzle connection port is used to connect the pipe, and the other end of the pipe is used to connect the air source. This allows the air source to be connected to the nozzle connection port through the pipe, so that the air source can blow air directly into the pressurization chamber 12. After passing through the pressurization chamber 12, the air will flow to the air duct 3. Since the opening of the air duct 3 is smaller than that of the pressurization chamber 12, the wind speed will increase, and the air pressure flowing to the air duct 3 will increase, further achieving the purpose of pressurization.

[0019] The air inside the duct 3 is blown towards the device body 2 through the air outlet 31. Since the opening of the air outlet 31 is smaller than the opening of the duct 3, the air is further pressurized after passing through the air outlet 31 to increase the air speed. Finally, the air blown out of the air outlet 31 and acting on the device body 2 has been pressurized twice, thus providing a better cleaning effect on the device body 2.

[0020] It should be noted that when the device body 2 is installed on the mounting part 11, if the installation is insufficient to meet the requirement of direct airflow from the air outlet 31, an adjustment shim 4 can be fitted onto the bottom of the device body 2. The installation height of the device body 2 can be adjusted by fitting adjustment shims 4 of different thicknesses.

[0021] In summary, this invention, by using three air outlets 31 on three air ducts 3 arranged at equal angles around the mounting part 11, can achieve the purpose of uniformly blowing air onto the device body 2, thus eliminating the step of manually holding the device body 2 to blow air, and avoiding the problem of the operator's fingers blocking the device body 2 and preventing the air from being blown out. At the same time, the blowing of air from the three air outlets 31 can improve the blowing efficiency, making the blown air force more uniform and consistent, and cleaning the surface of the device body 2 more thoroughly. By setting up a pressure chamber 12, the air pressure of the blown air can be increased, further enabling the device surface to be cleaned more thoroughly.

[0022] Although the present invention has been described with reference to preferred embodiments, various modifications can be made to it and components can be replaced with equivalents without departing from the scope of the present invention. In particular, the technical features mentioned in the various embodiments can be combined in any manner as long as there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0023] In the description of this utility model, terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," which indicate direction or positional relationships, are based on the direction or positional relationships shown in the accompanying drawings. These are used merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0024] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0025] The term "comprising" or any other similar term is intended to cover non-exclusive inclusion, such that a process, article, or apparatus / device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to those processes, articles, or apparatus / devices.

[0026] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. A semiconductor device air jet cleaning device, characterized in that: It includes a circular mounting platform (1), and a mounting part (11) for mounting the device body (2) is provided at the center of the mounting platform (1). There are not less than two air ducts (3) on the mounting platform (1). The multiple air ducts (3) are arranged at equal angles with the mounting part (11) as the center. The air ducts (3) have air outlets (31) facing the mounting part (11). The air ducts (3) are connected to the air source.

2. The semiconductor device air jet cleaning device according to claim 1, characterized in that: The air vent (31) is located above the device body (2), and the air vent (31) is inclined toward the device body (2).

3. The semiconductor device air jet cleaning device according to claim 1, characterized in that: The mounting platform (1) has an arc-shaped pressure chamber (12) inside. The air duct (3) is connected to the pressure chamber (12). The bottom of the pressure chamber (12) is connected to a nozzle connection port for connecting to the air source.

4. The semiconductor device air jet cleaning device according to claim 1, characterized in that: The air duct (3) is provided with three ducts.

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