A single-axis dustproof linear motion platform

Abstract

This utility model discloses a single-axis dustproof linear motion platform, comprising two vertical plates fixedly connected by two support bars. A drive motor is mounted on the left side of the left vertical plate, and the output shaft of the drive motor passes through the left vertical plate and is fixedly connected to a threaded rod. The right end of the threaded rod is rotatably connected to one of the vertical plates, and a threaded seat is threaded onto the threaded rod. A sliding assembly includes a U-shaped connecting seat, the inner bottom of which is fixedly connected to the lower end of the threaded seat. A guide assembly guides the movement of the U-shaped connecting seat. During use, the platform utilizes two telescopic covers for effective dust protection. Furthermore, each telescopic cover can be individually connected to the sliding seat and both sides of the platform, facilitating subsequent maintenance operations.

Description

Technical Field

[0001] This utility model relates to the field of linear guide rail technology, and in particular to a single-axis dustproof linear motion platform. Background Technology

[0002] In the semiconductor manufacturing industry, high-precision linear motion platforms are core components of many critical pieces of equipment (such as wafer transfer devices and lithography machine positioning systems), and their operational accuracy and stability directly affect the yield and production efficiency of semiconductor products. However, the semiconductor production environment has extremely stringent cleanliness requirements; even the intrusion of tiny dust particles can lead to quality problems such as short circuits and degraded device performance. Existing single-axis linear motion platforms have significant shortcomings in dust prevention. Some platforms adopt an open structure and lack effective dust prevention measures, which exposes precision transmission components such as guide rails and lead screws inside the platform directly to the environment. These components are prone to dust accumulation, leading to motion jamming, accelerated wear, and shortened equipment lifespan. Although some platforms are equipped with dust protection devices, they are usually one-piece designs, such as integrated dust covers. This structure is extremely inconvenient to install and disassemble. When it is necessary to inspect or maintain the internal components of the platform, the entire dust cover must be removed. This is not only cumbersome and time-consuming, but also increases the risk of damage to the dust cover. Therefore, it is necessary to consider how to solve the above problems. Utility Model Content

[0003] The purpose of this utility model is to address the shortcomings of existing technologies by proposing a single-axis dustproof linear motion platform. When in use, this motion platform utilizes two telescopic covers to achieve a good dustproof effect. In addition, each telescopic cover can be individually connected to the sliding seat and the two sides of the platform, facilitating subsequent maintenance operations.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: A single-axis dustproof linear motion platform includes two vertical plates fixedly connected by two support bars. A drive motor is mounted on the left side of the left vertical plate, and the output shaft of the drive motor passes through the left vertical plate and is fixedly connected to a threaded rod. The right end of the threaded rod is rotatably connected to one of the vertical plates, and a threaded seat is threaded onto the threaded rod. A sliding assembly includes a U-shaped connecting seat, the inner bottom of which is fixedly connected to the lower end of the threaded seat. A guide assembly guides the movement of the U-shaped connecting seat.

[0005] Preferably, the guide assembly includes guide seats symmetrically fixedly connected to the inner walls of the left and right sides of the U-shaped connecting seat, and guide seats are fixedly connected to the opposite sides of the two support bars to cooperate with the guide bars.

[0006] Preferably, the assembly further includes a dustproof component, which includes a U-shaped mounting frame symmetrically fixedly connected to the left and right sides of the U-shaped connecting seat. Telescopic covers are fixedly connected to the opposite sides of the two vertical plates, and U-shaped connecting frames are fixedly connected to the opposite sides of the two telescopic covers. Each U-shaped mounting frame is located inside the U-shaped connecting frame and is slidably connected.

[0007] Preferably, it further includes two connecting components. Each connecting component includes a rotating shaft rotatably connected to the upper end of the U-shaped connecting frame. A support plate is fixedly connected to the upper end of the rotating shaft. A rectangular strip is fixedly connected to the upper end of the support plate. A rectangular plate is passed through the upper end of the rectangular strip. The rectangular plate is slidably connected to the rectangular strip. The lower end of the rectangular plate is rotatably connected to the upper end of the support plate via a spring. A connecting plate is fixedly connected to the right side of the rectangular plate. A limit rod is fixedly connected to the lower end of the connecting plate on the side away from the rectangular plate.

[0008] Preferably, the upper ends of both of the U-shaped mounting frames are provided with first limiting holes.

[0009] Preferably, a second limiting hole is provided at the upper end of each of the two vertical plates.

[0010] Compared with the prior art, the advantages of this utility model are as follows: 1. The drive motor starts and moves the U-shaped connecting seat. The ingenious design ensures smooth linear motion transmission. Initially, the limit rod is inserted into the first limit hole to ensure a stable connection between the telescopic cover and the U-shaped connecting seat, guaranteeing the overall stability and reliable operation of the platform.

[0011] 2. During maintenance, operators can operate the connecting plate, rotating shaft and other components according to specific steps to insert the limit rod into the second limit hole, preventing the telescopic cover from springing back, providing a larger operating space, greatly improving the convenience and efficiency of maintenance, and reducing the difficulty of maintenance.

[0012] 3. After maintenance, simply reverse the steps to restore each component to its initial state, quickly restoring the platform to its normal dustproof and linear motion functions, reducing downtime, ensuring continuous and efficient equipment operation, and improving production efficiency and user experience. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of a single-axis dustproof linear motion platform proposed in this utility model; Figure 2 for Figure 1 Enlarged view of point A; Figure 3 for Figure 1 A cross-sectional view in the left and right directions; Figure 4 for Figure 1A true-to-life image; Figure 5 This is a plan view of one of the limiting mechanisms.

[0014] In the diagram: 1 Vertical plate, 2 Drive motor, 3 U-shaped connecting seat, 4 U-shaped mounting frame, 5 Second limiting hole, 6 Telescopic cover, 7 U-shaped connecting frame, 8 Support plate, 9 Spring, 10 Rectangular plate, 11 Rectangular strip, 12 Connecting plate, 13 Limiting rod, 14 First limiting hole, 15 Rotating shaft, 16 Threaded seat, 17 Threaded rod, 18 Support strip, 19 Guide seat, 20 Guide strip. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0016] Reference Figures 1-5 A single-axis dustproof linear motion platform includes two vertical plates 1, which are fixedly connected by two support bars 18. The vertical plates 1 are made of high-strength aluminum alloy with a thickness of 15mm, featuring light weight and high strength, effectively reducing the overall weight of the platform while ensuring structural stability. The support bars 18 are made of 45# steel with a cross-sectional dimension of 30mm×30mm. Their length is determined according to the distance between the two vertical plates 1, generally 800mm-1500mm. They are firmly connected to the vertical plates 1 by welding, ensuring the rigidity and stability of the entire frame. A drive motor 2 is installed on the left side of the left vertical plate 1. The drive motor 2 is a servo motor with changeable rotation direction, model Panasonic MHMD082P1U, with a rated power of 750W and a rated speed of 3000r / min, capable of precisely controlling the rotation direction according to the control signal. Changing the rotation direction and speed, the output shaft of the drive motor 2 passes through the left vertical plate 1 and is fixedly connected to a threaded rod 17. The right end of the threaded rod 17 is rotatably connected to one side of the vertical plate 1. A threaded seat 16 is threadedly connected to the threaded rod 17. The threaded rod 17 is made of high-precision ball screw with a nominal diameter of 20mm and a lead of 5mm. It has the characteristics of high transmission efficiency, low friction, and good precision retention, which can ensure the smooth and accurate movement of the threaded seat 16 on the threaded rod 17. The threaded seat 16 is made of high-strength alloy steel and has undergone precision machining and heat treatment.

[0017] It also includes a sliding component, which includes a loop-shaped connecting seat 3. The inner bottom of the loop-shaped connecting seat 3 is fixedly connected to the lower end of the threaded seat 16. The loop-shaped connecting seat 3 is made of high-quality carbon steel with a thickness of 10mm and the surface is galvanized, giving it good strength and corrosion resistance.

[0018] The system also includes a guide assembly for guiding the movement of the U-shaped connecting seat 3. The guide assembly includes guide seats 19 symmetrically fixed to the inner walls of the left and right sides of the U-shaped connecting seat 3. Guide seats 19 are fixedly connected to the opposite sides of the two support bars 18 to cooperate with guide bars 20. The guide seats 19 adopt a seat structure with T-slots, and the guide bars 20 adopt T-shaped bars. The T-slots are designed according to the specifications of the guide bars 20, with a width of 12mm and a depth of 8mm. The guide bars 20 are made of 45# steel and have been quenched to have good wear resistance. The dimensions of the guide bars 20 are 800mm×12mm×10mm, which precisely matches the T-slots of the guide seats 19 with a tolerance controlled within ±0.02mm, ensuring that the U-shaped connecting seat 3 will not deviate during movement and improving the stability and accuracy of the movement.

[0019] The system also includes a dustproof component, which includes a U-shaped mounting frame 4 symmetrically fixedly connected to the left and right sides of the U-shaped connecting seat 3. Telescopic covers 6 are fixedly connected to the opposite sides of the two vertical plates 1. The telescopic covers 6 are accordion covers made of high-strength plastic, which has good flexibility and dustproof performance. A U-shaped connecting frame 7 is fixedly connected to the opposite sides of the two telescopic covers 6. Each U-shaped mounting frame 4 is located inside the U-shaped connecting frame 7 and is slidably connected.

[0020] The system also includes two connecting components. Each component includes a rotating shaft 15 rotatably connected to the upper end of the loop-shaped connecting frame 7. This rotatable connection is achieved through a bearing connection, specifically a deep groove ball bearing. This bearing can withstand a certain radial load, ensuring the flexible rotation of the rotating shaft 15. A support plate 8 is fixedly connected to the upper end of the rotating shaft 15. A rectangular bar 11 is fixedly connected to the upper end of the support plate 8. A rectangular plate 10 is threaded through the upper end of the rectangular bar 11, and the rectangular plate 10 is slidably connected to the rectangular bar 11. The lower end of the rectangular plate 10 is rotatably connected to the upper end of the support plate 8 via a spring 9. A connecting plate 12 is fixedly connected to the right side of the rectangular plate 10. A limit rod 13 is fixedly connected to the lower end of the connecting plate 12 on the side away from the rectangular plate 10. The upper ends of the two loop-shaped mounting frames 4... Each of the two vertical plates 1 is provided with a first limiting hole 14, and the upper end of each of the two vertical plates 1 is provided with a second limiting hole 5. In the initial state, the two limiting rods 13 are inserted into the two first limiting holes 14, which ensures that the opposite ends of the two telescopic covers 6 are connected to the U-shaped connecting seat 3. When maintenance is required, simply move the two connecting plates 12 upwards so that the limiting rods 13 move upwards away from the corresponding first limiting holes 14. After rotating the shaft 15 to 180°, pull the two U-shaped connecting frames 7 to be closest to the corresponding vertical plate 1. Then release the connecting plates 12. Under the elastic action of the spring 9, the limiting rods 13 are inserted into the corresponding second limiting holes 5. At this time, the telescopic covers 6 are difficult to rebound under their own elastic action, ensuring a large operating space for users to perform maintenance.

[0021] In this utility model, the start of the drive motor 2 can drive the loop-shaped connecting seat 3 to move. In the initial state, the two limiting rods 13 are inserted into the first limiting holes 14 at the upper end of the two loop-shaped mounting frames 4, which ensures that the opposite ends of the two telescopic covers 6 are stably connected to the loop-shaped connecting seat 3. When maintenance is required, the operator moves the two connecting plates 12 upwards. The connecting plates 12 move the limiting rod 13 upwards, away from the corresponding first limiting hole 14. Then, the rotating shaft 15 is rotated 180°, and the two loop-shaped connecting frames 7 are pulled to the position closest to the corresponding vertical plate 1. After that, the connecting plates 12 are released, and under the elastic action of the spring 9, the limiting rod 13 is inserted into the second limiting hole 5 at the upper end of the corresponding vertical plate 1. At this time, the telescopic cover 6 is difficult to rebound under its own elastic action, providing the user with a large operating space for maintenance work. After maintenance is completed, the components can be restored to their initial state by reversing the operating steps, so that the platform can restore its normal dustproof and linear motion functions.

[0022] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A single-axis dustproof linear motion platform, characterized in that, include: Two vertical plates (1) are fixedly connected by two support bars (18). A drive motor (2) is installed on the left side of the left vertical plate (1). The output shaft of the drive motor (2) passes through the left vertical plate (1) and is fixedly connected to a threaded rod (17). The right end of the threaded rod (17) is rotatably connected to one side vertical plate (1). A threaded seat (16) is threadedly connected to the threaded rod (17). The sliding assembly includes a spiral connector (3), the inner bottom of which is fixedly connected to the lower end of a threaded seat (16); A guide component is provided for guiding the movement of the loop connector (3).

2. The single-axis dustproof linear motion platform according to claim 1, characterized in that, The guide assembly includes guide seats (19) symmetrically fixedly connected to the inner walls of the left and right sides of the U-shaped connecting seat (3), and guide seats (19) are fixedly connected to the opposite sides of the two support bars (18) to cooperate with the guide bars (20).

3. The single-axis dustproof linear motion platform according to claim 1, characterized in that, It also includes a dustproof component, which includes a U-shaped mounting frame (4) symmetrically fixedly connected to the left and right sides of the U-shaped connecting seat (3), a telescopic cover (6) fixedly connected to the opposite sides of the two vertical plates (1), and a U-shaped connecting frame (7) fixedly connected to the opposite sides of the two telescopic covers (6). Each U-shaped mounting frame (4) is located inside the U-shaped connecting frame (7) and is slidably connected.

4. A single-axis dustproof linear motion platform according to claim 3, characterized in that, It also includes two connecting components, the connecting components including a rotating shaft (15) rotatably connected to the upper end of the U-shaped connecting frame (7), a support plate (8) fixedly connected to the upper end of the rotating shaft (15), a rectangular strip (11) fixedly connected to the upper end of the support plate (8), a rectangular plate (10) passing through the upper end of the rectangular strip (11), the rectangular plate (10) and the rectangular strip (11) being slidably connected, the lower end of the rectangular plate (10) being rotatably connected to the upper end of the support plate (8) by a spring (9), a connecting plate (12) fixedly connected to the right side of the rectangular plate (10), and a limit plug (13) fixedly connected to the lower end of the side of the connecting plate (12) away from the rectangular plate (10).

5. A single-axis dustproof linear motion platform according to claim 4, characterized in that, The upper ends of both of the aforementioned spiral mounting frames (4) are provided with first limiting holes (14).

6. A single-axis dustproof linear motion platform according to claim 5, characterized in that, The upper ends of both vertical plates (1) are provided with second limiting holes (5).

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