A new film rewinder

Abstract

This invention provides a novel wafer flipper, comprising a base, a first pusher arm and a second pusher arm movable in opposite directions on the top of the base, a guide block between the first pusher arm and the second pusher arm, and a plurality of wafer guide slots distributed along the height of the guide block; a first guide rail and a second guide rail extending in the same direction are provided on the base, and the first pusher arm and the second pusher arm are independently slidably connected to the first guide rail and the second guide rail, respectively. This invention, by setting the first pusher arm and the second pusher arm movable in opposite directions on the top of the base, and setting the crystal boat limiting block and the wafer basket limiting block respectively adapted to the outer contour of the crystal boat and the outer contour of the wafer basket, obtains a novel, integrated wafer flipper, which can be applied to wafer flipping operations from the wafer basket to the crystal boat, and also to wafer flipping operations from the crystal boat to the wafer basket, reducing the purchase cost of the wafer flipper, making the working environment cleaner, eliminating the need to search for a wafer flipper suitable for the current operation, and improving work efficiency.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon wafer production technology, and in particular to a novel wafer flipper. Background Technology

[0002] In the silicon wafer production process, it is often necessary to place the openings of two silicon wafer carriers opposite each other and pour the silicon wafer from one carrier into the other. In order to keep both carriers stable during the pouring process, the two carriers should be limited. However, the size of the carriers used for different silicon wafers is different, and the silicon wafer pusher required by different carriers is also different due to their different structures. Therefore, it is often necessary to purchase multiple sizes and models of wafer pourers. This not only increases costs, but also makes them messy to stack and difficult to change quickly and accurately, thus reducing work efficiency. Utility Model Content

[0003] The purpose of this invention is to provide a novel film rewinder that addresses the shortcomings of the aforementioned background technology.

[0004] The technical solution of this utility model is: a novel film rewinder, which includes a base, a first push arm and a second push arm that can move in opposite directions on the top of the base, a guide block between the first push arm and the second push arm, and a number of sets of film guide slots distributed along the height of the guide block.

[0005] Furthermore, the base is provided with a first guide rail and a second guide rail extending in the same direction, and the first push arm and the second push arm are independently slidably connected to the first guide rail and the second guide rail, respectively.

[0006] Furthermore, the base includes a first base platform and a second base platform connected by a first support leg. The second base platform has a second support leg on the side away from the first support leg. The first guide rail and the second guide rail are respectively independently disposed on the first base platform and the second base platform.

[0007] Furthermore, the first push arm is distributed in two groups in a direction perpendicular to its own movement direction, and the ends of the two groups of first push arms are respectively provided with push plate inclined surfaces, which are inclined toward the opposite sides of the two groups of first push arms.

[0008] Furthermore, the two sets of first push arms are connected by a first connecting frame. The bottom end of the first connecting frame is connected to the first guide rail, and the side end is connected to the first operating handle. The first operating handle can drive the first push arm to slide along the first guide rail.

[0009] The second push arm is connected to the second guide rail via a second connecting frame; the side end of the second connecting frame is connected to a second operating handle, which can be driven by the second operating handle to slide along the second guide rail.

[0010] Furthermore, a crystal boat limiting block and a wafer basket limiting block are respectively provided on both sides of the guide block, and the crystal boat limiting block and the wafer basket limiting block are detachably connected.

[0011] Furthermore, the crystal boat limiting blocks are distributed in two groups in a direction perpendicular to the moving direction of the first push arm, and the opposing sides of the two groups of crystal boat limiting blocks are respectively provided with first guide grooves; from the first push arm to the guide block, the width of the first guide groove gradually decreases.

[0012] Furthermore, the base is provided with a second guide groove, which is located below the first guide groove and has the same configuration as the first guide groove.

[0013] Furthermore, the guide blocks are distributed in two groups in a direction perpendicular to the moving direction of the first push arm. The two groups of guide blocks each include a fixing part, a first quick-release part, and a second quick-release part. The guide plate slot is located on the second quick-release part. The first quick-release part is located between the fixing part and the second quick-release part, which can connect the two.

[0014] Furthermore, the fixing part is provided with a T-shaped guide groove, the openings of the T-shaped guide grooves on the two sets of fixing parts are opposite to each other, and the first quick-release part is provided with a T-shaped block that is slidably connected to the T-shaped guide groove.

[0015] The beneficial effects of this utility model are as follows: By setting a first push arm and a second push arm that can move in opposite directions on the top of the base, and setting a crystal boat limiting block and a wafer basket limiting block adapted to the outer contour of the crystal boat and the outer contour of the wafer basket respectively, a new type of integrated wafer flipper is obtained. It can be used for wafer flipping operations from the wafer basket to the crystal boat, and also for wafer flipping operations from the crystal boat to the wafer basket, reducing the purchase cost of the wafer flipper, making the working environment tidy, eliminating the need to search for the type of wafer flipper suitable for the current operation, and improving work efficiency; and by configuring the crystal boat limiting block, wafer basket limiting block, guide block and wafer guide slot into a quick-installation and disassembly configuration, it can be replaced in time according to different sizes of silicon wafers and silicon wafer carriers, improving the applicability of this wafer flipper. Attached Figure Description

[0016] Figure 1 This is a front view structural diagram of an embodiment of the present utility model;

[0017] Figure 2 This is a top view of an embodiment of the present utility model;

[0018] Figure 3 This is a side view of an embodiment of the present utility model;

[0019] Figure 4 This is a structural diagram of a crystal boat in the existing technology.

[0020] In the picture:

[0021] 1. Base; 1.1. First base platform; 1.2. Second base platform; 1.3. First support leg; 1.4. Second support leg; 1.5. Second guide groove;

[0022] 2. First guide rail;

[0023] 3. Second guide rail;

[0024] 4. First push arm; 4.1. Push plate inclined surface;

[0025] 5. Second push arm;

[0026] 6. Guide block; 6.1. Guide plate slot; 6.2. Fixing part; 6.3. First quick release part; 6.4. Second quick release part; 6.5. T-shaped guide groove; 6.6. T-shaped block;

[0027] 7. Crystal boat limiting block; 7.1. First guide groove;

[0028] 8. Basket limit block;

[0029] 9. First connecting frame;

[0030] 10. First operating handle;

[0031] 11. Second connecting frame;

[0032] 12. Second operating handle;

[0033] 13. Crystal boat; 13.1. End plate; 13.2. Connecting rod; , Reinforcing rib. Detailed Implementation

[0034] The technical solutions of the embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0035] In the description of the embodiments of this utility model, it should be understood that the terms "top," "bottom," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, it should be noted that unless otherwise expressly specified and limited, the terms "set" and "connected" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a direct connection or an indirect connection through an intermediate medium; it can refer to the internal communication of two elements. Those skilled in the art can understand the specific meaning of the above terms in this utility model through specific circumstances.

[0036] Reference Appendix Figure 1-4This embodiment provides a novel wafer flipper, comprising a base 1, a first guide rail 2, a second guide rail 3, a first push arm 4, a second push arm 5, a guide block 6, a wafer boat limiting block 7, and a wafer basket limiting block 8. The first guide rail 2 and the second guide rail 3 are disposed on the base 1 and extend in the same direction. The first push arm 4 and the second push arm 5 are located at the top of the base 1 and are independently slidably connected to the first guide rail 2 and the second guide rail 3, respectively, and can slide independently along the first guide rail 2 and the second guide rail 3 to move closer to or away from each other. The guide block 6 is located at the top of the base 1 and is disposed between the first push arm 4 and the second push arm 5. Several sets of wafer guide slots 6.1 are distributed along the height of the guide block 6. The wafer boat limiting block 7 is located between the first push arm 4 and the guide block 6 and is used to limit the wafer boat 13. The wafer basket limiting block 8 is located between the second push arm 5 and the guide block 6 and is used to limit the wafer basket.

[0037] Taking the pouring of silicon wafers from the wafer basket into the wafer boat 13 as an example, during operation, the wafer boat 13 is placed on the wafer boat limiting block 7, and the wafer basket is placed on the wafer basket limiting block 8, so that the opening of the wafer boat 13 is aligned with the opening of the wafer basket. The second push arm 5 is pushed along the second guide rail 3, so that the second push arm 5 extends from the bottom of the basket into the wafer basket, pushing the silicon wafer in the wafer basket into the wafer guide slot 6.1 and the wafer boat 13. The operation of pouring silicon wafers from the wafer boat 13 into the wafer basket is the reverse of the above process, except that the first push arm 4 is pushed. The specific process will not be described in detail.

[0038] In this technical solution, by setting a first pusher 4 and a second pusher 5 that can move in opposite directions on the top of the base 1, and setting a crystal boat limiting block 7 and a wafer basket limiting block 8 that are respectively adapted to the outer contour of the crystal boat 13 and the outer contour of the wafer basket, a new type of integrated wafer rewinder is obtained. It can be used for wafer rewinding operations from the wafer basket to the crystal boat 13, and also for wafer rewinding operations from the crystal boat 13 to the wafer basket. This reduces the purchase cost of the wafer rewinder, makes the working environment tidy, eliminates the need to search for a wafer rewinder of the type suitable for the current operation, and improves work efficiency.

[0039] In the above technical solution, the guide slot 6.1 on the guide block 6 is designed to improve the stability of silicon wafers entering and exiting the crystal boat 13. The structure of the crystal boat 13 is different from that of the wafer basket. The crystal boat 13 is generally composed only of end plates 13.1 at the top and bottom ends and three connecting rods 13.2 between the end plates 13.1. There is a certain distance between the three connecting rods 13.2 to ensure the stability of the crystal boat 13 structure. Among them, the two connecting rods 13.2 near the boat opening of the crystal boat 13 have silicon wafer receiving slots on their facing surfaces. However, since the cross-sectional size of the connecting rods 13.2 is small, the size of the silicon wafer receiving slots is also relatively small. Therefore, the silicon wafers will be tilted when entering and exiting the crystal boat 13. The guide slot 6.1 can support and guide the silicon wafers outside the crystal boat 13, in conjunction with the silicon wafer receiving slots on the connecting rods 13.2, thereby improving the stability of the silicon wafers and the smoothness of the wafer flipping operation.

[0040] Based on the structure of the crystal boat 13, this embodiment optimizes the design of the first push arm 4: the first push arm 4 is distributed in two sets in a direction perpendicular to its own moving direction, and the ends of the two sets of first push arms 4 are respectively provided with push plate inclined surfaces 4.1. The push plate inclined surfaces 4.1 are inclined towards the opposite side of the two sets of first push arms 4. When the wafer is being turned, the two sets of first push arms 4 are respectively inserted into the gap between adjacent connecting rods 13.2, and the two sets of push plate inclined surfaces 4.1 respectively abut against the two sides of the silicon wafer to push the silicon wafer and improve the stability of the silicon wafer during the pushing process.

[0041] The traditional structure of the wafer basket is that the basket opening and the basket bottom are connected. When the wafer is being flipped, the basket opening faces the crystal boat 13. Since the side wall of the wafer basket has a long wafer groove, it can ensure the smoothness of the silicon wafer entering and leaving the wafer basket. Therefore, only one second push arm 5 needs to be set. When flipping the wafer, the second push arm 5 is extended from the bottom of the basket to push the silicon wafer.

[0042] The first guide rail 2 and the second guide rail 3 mentioned above can be mounted on the same surface of the base, as long as the distance between them meets the requirement that the first push arm 4 and the second push arm 5 can slide relative to each other without obstructing each other. Of course, it can also be mounted as shown in the attached figure. Figure 1 As shown, the base 1 is configured to include a first base 1.1, a second base 1.2, a first support leg 1.3, and a second support leg 1.4. The first base 1.1 is located above the second base 1.2, and its bottom end is connected to the second base 1.2 via the first support leg 1.3. The second support leg 1.4 is located at the bottom end of the second base 1.2. The first guide rail 2 is installed at the bottom of the first base 1.1, and the second guide rail 3 is installed at the bottom of the second base 1.2. The first support leg 1.3 is used to ensure sufficient clearance between the first base 1.1 and the second base 1.2, and the second support leg 1.4 is used to ensure sufficient clearance between the second base 1.2 and the table surface for film rewinding, so as to meet the installation and sliding requirements of the first push arm 4 and the second push arm 5, respectively.

[0043] In implementation, the connection method between the first push arm 4 and the first guide rail 2, and the connection method between the second push arm 5 and the second guide rail 3, can be selected according to actual needs. This embodiment only provides some feasible solutions as examples. Please refer to the appendix. Figure 2 Two sets of first push arms 4 are connected by a first connecting frame 9. The bottom end of the first connecting frame 9 is slidably connected to the first guide rail 2, and the side end of the first connecting frame 9 is connected to the first operating handle 10. The push arm 5 is slidably connected to the second guide rail 3 by a second connecting frame 11. The side end of the second connecting frame 11 is connected to the second operating handle 12. The push arm 5 is slidably connected to the second guide rail 3 by the second operating handle 12.

[0044] For ease of operation, the first operating handle 10 and the second operating handle 12 should partially extend beyond the base for easy gripping and pushing. To ensure the silicon wafer is fully ejected (whether from the wafer basket to the wafer boat 13 or vice versa), the first guide rail 2 and the second guide rail 3 should be sufficiently long, and the top and bottom lengths of the first connecting frame 9 and the second connecting frame 11 should be optimized. Specifically, refer to the attached... Figure 1 Both the first connecting frame 9 and the second connecting frame 11 are C-shaped, but the top length of the first connecting frame 9 is less than the bottom length, and the top length of the second connecting frame 11 is less than the bottom length. This ensures that the first push arm 4 at the top of the first connecting frame 9 and the second push arm 5 at the top of the second connecting frame 11 have a large travel distance, so as to fully push the silicon wafer out of the crystal boat 13 or the wafer basket.

[0045] To further enhance the applicability of this device, the aforementioned boat limiting block 7 and wafer basket limiting block 8 are detachably connected to the base 1. For example, the boat limiting block 7 and wafer basket limiting block 8 can be fixed to the base 1 with bolts. When the size of the wafer basket or boat 13 changes due to the size of the silicon wafer it carries, the corresponding size of the boat limiting block 7 and wafer basket limiting block 8 can be replaced on the base to achieve stable positioning of the boat 13 and wafer basket after the size change. Compared to the prior art, which requires purchasing multiple sizes of wafer flippers for different sizes of wafer baskets and boats 13, this technical solution only requires multiple sizes of boat limiting blocks 7 and wafer basket limiting blocks 8. Their size is smaller than that of wafer flippers, making them easier to store, easier to find, and lower in cost.

[0046] Reference Appendix Figure 3 Two sets of crystal boat limiting blocks 7 are distributed in a direction perpendicular to the moving direction of the first push arm 4. Each set of crystal boat limiting blocks 7 has a first guide groove 7.1 on its opposing side. The width of the first guide groove 7.1 gradually decreases from the first push arm 4 towards the guide block 6. Generally, reinforcing ribs 13.3 are provided on the outer side of the end plate 13.1 of the crystal boat 13. The reinforcing ribs 13.3 extend from the bottom of the boat to the opening. The first guide groove 7.1 provided in this embodiment can guide and limit the reinforcing ribs 13.3, enabling workers to quickly and accurately align the opening of the boat with the tray.

[0047] In use, first, lower the crystal boat 13 vertically so that the reinforcing rib 13.3 falls into the first guide groove 7.1. Then, push the crystal boat 13 toward the guide block 6 so that the gradually narrowing sidewall of the first guide groove 7.1 corrects the direction of the reinforcing rib 13.3. When the crystal boat 13 touches the sidewall of the guide block 6, the direction of the reinforcing rib 13.3 is completely corrected and the crystal boat 13 can no longer be pushed. At this time, the silicon wafer can be pushed out of the crystal boat 13 using the first push arm 4.

[0048] In addition to using the first guide groove 7.1 to guide and limit the reinforcing ribs 13.3 on the crystal boat 13, the crystal boat limiting block 7 also has the function of raising the crystal boat 13, so that the silicon wafer support groove in the crystal boat 13 corresponds to the guide wafer support groove 6.1 on the guide block 6, so as to improve the support stability and smooth movement of the silicon wafer.

[0049] If the radial dimension of the guide rib is large, a second guide groove 1.5 can be provided on the first base 1.1. The second guide groove 1.5 is located below the first guide groove 7.1 and has the same configuration as the first guide groove 7.1. The second guide groove 1.5 is used to avoid the guide rib along the height direction of the base 1, and is used to cooperate with the first guide groove 7.1 to guide and limit the guide rib along the transverse direction of the base 1.

[0050] To improve the support and guiding effect on the silicon wafer, the guide blocks 6 in this embodiment are distributed in two sets in a direction perpendicular to the moving direction of the first push arm 4. Furthermore, since the carriers used for silicon wafers of different sizes have wafer slots with different spacing, the two sets of guide blocks 6 in this embodiment are configured as follows: each includes a fixing part 6.2, a first quick-release part 6.3, and a second quick-release part 6.4. The wafer guide slot 6.1 is located on the second quick-release part 6.4; the first quick-release part 6.3 is located between the fixing part 6.2 and the second quick-release part 6.4, which can connect the two.

[0051] For silicon wafers of different sizes, different combinations of first quick-release parts 6.3 and second quick-release parts 6.4 are pre-configured. When it is necessary to replace the wafer guide tray 6.1 according to the wafer size, simply remove the entire first quick-release part 6.3 and second quick-release part 6.4 from the fixing part 6.2 and replace it with the corresponding model. When the wafer guide tray 6.1 is worn or damaged, simply remove the second quick-release part 6.4 from the first quick-release part 6.3 and replace it with a new second quick-release part 6.4.

[0052] In some specific implementation cases, the fixing part 6.2 is provided with a T-shaped guide groove 6.5, the openings of the T-shaped guide grooves 6.5 on the two sets of fixing parts 6.2 are opposite to each other, and the first quick-release part 6.3 is provided with a T-shaped block 6.6 that is slidably connected to the T-shaped guide groove 6.5. By sliding the T-shaped block 6.6 in the vertical direction, it can be inserted into or removed from the T-shaped guide groove 6.5. Typically, to avoid structural damage to the silicon wafer, structures such as the guide block 6 are made of polyurethane. When the dimensions are appropriately configured so that the polyurethane structures can abut against each other, there is a large frictional force between the polyurethane structures. Therefore, when the T-shaped block 6.6 on the first quick-release part 6.3 is inserted into or removed from the T-shaped guide groove 6.5, a large force needs to be applied manually. Thus, during the wafer flipping process, especially the pushing action of other structures on the silicon wafer, is horizontal, that is, perpendicular to the sliding direction of the T-shaped block 6.6. Therefore, even without additional limiting measures for the T-shaped block 6.6, it will not easily deviate. Based on the above and the inventor's actual verification, the above structure in this wafer flipper can meet the connection stability of the first quick-release part 6.3 and the fixed part 6.2, while the second quick-release part 6.4 can be fixed to the first quick-release part 6.3 by means of bolt connection or other methods to facilitate quick replacement.

[0053] Compared with the prior art, the beneficial effects of this utility model include at least the following: by setting a first push arm 4 and a second push arm 5 that can move in opposite directions on the top of the base 1, and setting a crystal boat limiting block 7 and a wafer basket limiting block 8 that are respectively adapted to the outer contour of the crystal boat 13 and the outer contour of the wafer basket, a new type of integrated wafer flipper is obtained. It can be used for wafer flipping operations from the wafer basket to the crystal boat 13, and also for wafer flipping operations from the crystal boat 13 to the wafer basket, reducing the purchase cost of the wafer flipper, making the working environment tidy, eliminating the need to search for a wafer flipper suitable for the current operation, and improving work efficiency; and by configuring the crystal boat limiting block 7, the wafer basket limiting block 8, the guide block 6, and the wafer guide slot 6.1 into a configuration that can be quickly installed and removed, it can be replaced in a timely manner according to different sizes of silicon wafers and silicon wafer carriers, improving the applicability of this wafer flipper.

[0054] The above are preferred embodiments of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A novel film rewinder, characterized in that, Includes a base, the top of which is provided with a first push arm and a second push arm that can move towards each other, a guide block is provided between the first push arm and the second push arm, and a number of guide plate slots are distributed along the height of the guide block.

2. The novel film rewinder according to claim 1, characterized in that, The base is provided with a first guide rail and a second guide rail extending in the same direction, and the first push arm and the second push arm are independently slidably connected to the first guide rail and the second guide rail, respectively.

3. The novel film rewinder according to claim 2, characterized in that, The base includes a first base platform and a second base platform connected by a first support leg. The second base platform has a second support leg on the side away from the first support leg. The first guide rail and the second guide rail are independently disposed on the first base platform and the second base platform, respectively.

4. The novel film rewinder according to claim 2 or 3, characterized in that, The first push arm is distributed in two groups in a direction perpendicular to its own movement direction. The ends of the two groups of first push arms are respectively provided with push plate inclined surfaces, and the push plate inclined surfaces are inclined toward the opposite side of the two groups of first push arms.

5. The novel film rewinder according to claim 4, characterized in that, The two sets of first push arms are connected by a first connecting frame. The bottom end of the first connecting frame is connected to the first guide rail, and the side end is connected to the first operating handle. The first operating handle can drive the first push arm to slide along the first guide rail. The second push arm is connected to the second guide rail via a second connecting frame; the side end of the second connecting frame is connected to a second operating handle, which can be driven by the second operating handle to slide along the second guide rail.

6. The novel film rewinder according to any one of claims 1-3 and 5, characterized in that, The guide block is provided with a crystal boat limiting block and a wafer basket limiting block on both sides, and the crystal boat limiting block and the wafer basket limiting block are detachably connected.

7. The novel film rewinder according to claim 6, characterized in that, The crystal boat limiting blocks are distributed in two groups in a direction perpendicular to the moving direction of the first push arm. The opposing sides of the two groups of crystal boat limiting blocks are respectively provided with first guide grooves. The width of the first guide grooves gradually decreases from the first push arm to the guide blocks.

8. The novel film rewinder according to claim 7, characterized in that, The base is provided with a second guide groove, which is located below the first guide groove and has the same configuration as the first guide groove.

9. The novel film rewinder according to any one of claims 1-3, 5, and 7-8, characterized in that, The guide blocks are distributed in two groups in a direction perpendicular to the moving direction of the first push arm. The two groups of guide blocks each include a fixing part, a first quick-release part and a second quick-release part. The guide plate slot is located on the second quick-release part. The first quick-release part is located between the fixing part and the second quick-release part, and the two can be connected.

10. The novel film rewinder according to claim 9, characterized in that, The fixing part is provided with a T-shaped guide groove, and the openings of the T-shaped guide grooves on the two sets of fixing parts are opposite to each other. The first quick-release part is provided with a T-shaped block that is slidably connected to the T-shaped guide groove.

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