A dust filter and a fine silica powder inert treatment system

Abstract

This utility model discloses a dust removal filter and a fine silicon powder inert treatment system, relating to the field of process dust removal technology in industrial production. It includes a filter bag disposed inside a housing, a simple harmonic mechanism disposed on the housing for tensioning or relaxing the filter bag, a blower air manifold disposed on the side wall of the housing, and a nozzle disposed at the bottom of the housing and connected to the blower air manifold, with the nozzle facing the dust removal port. The fine silicon powder inert treatment system includes a crystal pulling furnace, a dust removal filter, a centralized dust collector, a buffer tank for temporarily storing and isolating dust, and a centralized harmless treatment device for flammable dust, connected in sequence. It removes residual flammable dust inside the filter bag through two methods, reducing the risk of the filter bag burning through.

Description

Technical Field

[0001] This utility model relates to the field of process dust removal technology in industrial production of monocrystalline silicon, polycrystalline silicon, and heavily doped silicon monocrystalline silicon, specifically to a dust removal filter and a micro-fine silicon powder inert treatment system. Background Technology

[0002] In semiconductor manufacturing, especially during the crystal pulling process of monocrystalline silicon, polycrystalline silicon, and heavily doped silicon monocrystalline silicon, inert gases are often used as a protective atmosphere to protect the process environment and equipment. These gases must be purified by filters before being reused, resulting in the collection of a large amount of fine dust generated during the process. This dust, mainly composed of silicon powder and other materials, is extremely flammable and explosive, posing a significant safety hazard to production. Existing dust collector filter bags experience a gradual increase in resistance, severely impacting crystal rod quality and downstream equipment power consumption. This leads to decreased crystal formation rate, reduced primary crystal yield, lower primary crystal output, increased oxygen content, low efficiency during manual cleaning, and susceptibility to misoperation causing incomplete oxidation of dust within the filter, resulting in filter bag burn-through. Consequently, the safety and sustainability of production cannot be guaranteed, seriously affecting production operations.

[0003] Therefore, it is necessary to develop and design dust filters and inert treatment systems for fine silicon powder, and to set up self-cleaning systems for dust collectors. This can not only reduce the resistance of dust collectors, improve the quality of crystal rods, and reduce power consumption, but also improve dust conveying efficiency. This is a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0004] To address the aforementioned issues, this invention provides a dust collector filter and a fine silicon powder inert treatment system, incorporating a self-cleaning system for the dust collector. This not only reduces the resistance of the dust collector, improves the quality of the crystal rods, and lowers power consumption, but also enhances dust conveying efficiency.

[0005] To achieve the above objectives, this utility model provides the following solution:

[0006] A dust collector filter includes a housing, a cleaning port, a first air outlet, and an air inlet respectively disposed on the housing, a filter bag disposed inside the housing, a simple harmonic mechanism disposed on the housing for tensioning or relaxing the filter bag, a jet air manifold disposed on the side wall of the housing, a nozzle disposed at the bottom of the housing and communicating with the jet air manifold, and a control system for controlling the opening and closing of the cleaning port, the air inlet, and the first air outlet. The nozzle is disposed facing the cleaning port, and the end of the jet air manifold communicating with the housing is disposed at the end of the filter bag away from the air inlet.

[0007] Preferably, the simple harmonic mechanism includes a bracket disposed on the inner wall of the housing, a fixed hanger disposed on the bracket, a movable hanger disposed below the fixed hanger for fixing one end of the filter bag, a spring disposed between the fixed hanger and the movable hanger, and a first cylinder disposed on the top of the housing with its output end connected to the movable hanger.

[0008] Preferably, the fixed hanger is further provided with a guide mechanism, one end of which is connected to the movable hanger, and the other end of which is slidably connected to the fixed hanger.

[0009] Preferably, the first air outlet is connected to the blowing air bag, the blowing air bag is provided with a second air outlet, and the air inlet is located near the bottom of the housing, while the first air outlet and the second air outlet are located near the top of the housing.

[0010] Preferably, there are four nozzles, which are evenly distributed on the side wall of the bottom of the housing away from the dust removal port.

[0011] This utility model also discloses a micro-fine silicon powder inert treatment system, which uses the dust removal filter described above. The system is characterized by comprising, in sequence, a crystal pulling furnace, the dust removal filter, a centralized dust collector, a buffer tank for temporarily storing and isolating dust, and a centralized harmless treatment device for flammable dust. The first air outlet is connected to a first vacuum pump, the crystal pulling furnace air outlet is connected to a second vacuum pump through a first cartridge filter, and the centralized dust collector air outlet is connected to a third vacuum pump through a second cartridge filter.

[0012] Preferably, the centralized dust collector includes a cylindrical body, a stainless steel filter cartridge disposed inside the cylindrical body, and a conical ash hopper disposed below the cylindrical body;

[0013] The conical ash hopper includes a second cylinder disposed on the outer wall of the conical ash hopper, a first connecting rod and a second connecting rod connected to the output end of the second cylinder, a first ratchet mechanism and a second ratchet mechanism respectively connected to the first connecting rod and the second connecting rod, and an ash hopper spiral shaft passing through the middle of the first ratchet mechanism and the second ratchet mechanism. The first ratchet mechanism and the second ratchet mechanism are used to ensure that the ash hopper spiral shaft rotates in one direction.

[0014] Preferably, a sweeping rod is sleeved on the ash hopper spiral shaft, and the end of the sweeping rod is provided with a sweeping brush that fits into the inside of the conical ash hopper.

[0015] Preferably, a backflush air bag is provided on the outer wall of the cylinder, and the backflush air bag is in communication with the interior of the cylinder.

[0016] The present invention achieves the following technical advantages over the prior art:

[0017] Inert protective gas, carrying dust from the volatilization of heated silicon material, enters the housing through the air inlet. The gas is then filtered through a filter bag, and the filtered gas exits through the first air outlet. After filtration, the control system closes both the air inlet and the first air outlet, initiating the filter bag cleaning process. To prevent increased resistance in the filter bags, a simple harmonic mechanism first instantly tightens the filter bags from a relaxed state, vibrating to remove dust. Then, inert gas from the blower is injected into the housing through a connection to the top of the upper housing to blow off any remaining dust, completing the filter bag cleaning. These two methods remove residual flammable dust from the inside of the filter bags, reducing the risk of burn-through. When ash discharge is required, the control system opens the cleaning port, which is directly opposite the nozzles. With the combined action of the nozzles, the dust is blown out through the cleaning port to the next stage of equipment. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Appendix Figure 1 This is a schematic diagram of the overall structure of the micro-fine silicon powder inert treatment system disclosed in this utility model;

[0020] Appendix Figure 2 This is a schematic diagram of the main view structure of the dust filter disclosed in this utility model;

[0021] Appendix Figure 3 This is a schematic cross-sectional view of the dust filter disclosed in this utility model.

[0022] Appendix Figure 4 This is a schematic diagram of the main view structure of the centralized dust collector disclosed in this utility model.

[0023] Appendix Figure 5 This is a schematic diagram of the internal structure of the conical ash hopper disclosed in this utility model.

[0024] Appendix Figure 6 This is a schematic diagram of the main view structure of the buffer tank disclosed in this utility model;

[0025] Appendix Figure 7 This is a schematic diagram of the main view structure of the flammable dust harmless treatment device disclosed in this utility model.

[0026] Appendix Figure 8 This is a rear view structural schematic diagram of the flammable dust harmless treatment device disclosed in this utility model.

[0027] Appendix Figure 9 This is a schematic cross-sectional view of the flammable dust harmless treatment device disclosed in this utility model.

[0028] Appendix Figure 10 This is a top view structural schematic diagram of the flammable dust harmless treatment device disclosed in this utility model.

[0029] Appendix Figure 11 This is a top view structural schematic diagram of the chain plate scraper conveyor disclosed in this utility model;

[0030] Appendix Figure 12 This is a schematic diagram of the main view structure of the chain plate scraper conveyor disclosed in this utility model.

[0031] Appendix Figure 13 This is a schematic diagram of the main view structure of the louvered ash removal mechanism disclosed in this utility model;

[0032] Appendix Figure 14 This is a top view structural schematic diagram of the louvered ash discharge mechanism disclosed in this utility model;

[0033] Appendix Figure 15 This is a schematic diagram of the main view structure of the spiral humidifier disclosed in this utility model;

[0034] Appendix Figure 16 This is a schematic diagram of the spiral stirring main shaft structure of the spiral humidifier disclosed in this utility model.

[0035] The components are as follows: 1. Upper shell; 2. Lower shell; 3. Dust removal port; 4. First pneumatic ball valve; 5. First pulse ball valve; 6. Pulse jet air tank; 7. First manual ball valve; 8. Nozzle; 9. Second air outlet; 10. Air inlet; 11. Tube plate; 12. Support; 13. Fixed hanger; 14. Guide mechanism; 15. Movable hanger; 16. Spring; 17. Filter bag; 18. First cylinder; 19. Third pneumatic ball valve; 20. Fourth manual ball valve; 21. Ninth pneumatic ball valve; 22. Connecting pipeline; 23. Centralized dust collection platform; 24. Centralized dust collection ash discharge flange; 25. Conical hopper air inlet; 26. Conical ash hopper; 27. Cylinder; 28. Backflush air tank; 29. ​​Second pulse ball valve; 30. Fifth pneumatic ball valve; 31. 31. Second manual ball valve; 32. Backflush pipe; 33. Dust collector outlet; 34. Upper end cap; 35. Stainless steel filter cartridge; 36. Mounting plate; 37. Spiral shaft fixing seat; 38. Sweeping rod; 39. First connecting rod; 40. Second cylinder; 41. Cylinder mounting cylinder; 42. Cylinder cylinder mounting seat; 43. First ratchet mechanism; 44. Conical hopper rib plate; 45. Dust hopper spiral shaft; 46. Third manual ball valve; 47. Vent pipe; 48. Pressure sensor; 49. Sixth pneumatic ball valve; 50. Isobaric connecting pipe; 51. Seventh pneumatic ball valve; 52. Upper cylinder of buffer tank; 53. First solenoid valve; 54. Micro-positive pressure pipe; 55. Buffer tank discharge port; 56. Lower cone of buffer tank; 57. Gas replacement pipe; 58. Buffer tank feed. 59. Rotary star discharge valve; 60. Corrugated hose; 61. Housing of flammable dust harmless treatment device; 62. Exhaust duct; 63. Touch screen; 64. Feed inlet; 65. Air damper; 66. Servo motor reducer; 67. Spiral humidifier discharge port; 68. Small filter; 69. Fan; 70. Spiral humidifier housing; 71. Fan connecting hose; 72. Small filter air inlet pipe; 73. Booster pump; 74. External water supply pipe; 75. Drain hose; 76. Second solenoid valve; 77. Right angle pipe joint; 78. Water distribution hose; 79. Manifold; 80. First motor reducer; 81. First temperature sensor; 82. Universal coupling; 83. Second motor reducer; 84. Plum blossom coupling; 85. 86. Second temperature sensor; 87. Sprocket driven shaft; 88. Sprocket; 99. Drive chain; 90. Scraper; 91. Sprocket drive shaft; 92. Upper bottom plate of chain scraper; 93. Lower bottom plate of chain scraper; 94. Dust crushing mechanism mounting base; 95. Torsion spring; 96. Dust crushing plate; 97. Hopper ring edge; 98. Weighing hopper; 99. Cylinder actuator; 100. Pneumatic vibrator; 101. Louver mechanism housing; 102. Square-round reducing pipe; 103. Upper mounting plate of weighing sensor; 104. Small round pipe for weighing discharge; 105. Large round pipe for weighing discharge; 106. Lower mounting plate of weighing sensor; 107. Weighing sensor; 108. Louvered ash discharge reversing blade; 109. Louvered ash discharge rotating rod;110. Long connecting rod for louvered ash discharge; 111. Short connecting rod for louvered ash discharge; 112. Mounting base for the motor and reducer of the spiral humidifier; 113. Discharge port side bearing seat; 114. Discharge port side flange; 115. Spiral mixing main shaft; 116. Clamp; 117. First spray nozzle; 118. Second spray nozzle; 119. Third spray nozzle; 120. Fourth spray nozzle; 121. Spiral humidifier inlet; 122. Shaft 123. Inlet-side bearing housing; 124. Inlet-side flange; 125. Bearing retaining ring; 126. Plug seal ring; 127. Wool gasket; 128. Inlet-side sealing gasket cover plate; 129. Round nut; 130. Double-row angular contact ball bearing; 131. Plug seal ring cover plate; 132. Discharge-side sealing ring cover plate; 133. Reverse-rotating ribbon; 134. Ribbon support rod; 135. Positive-rotating ribbon. 136. Second pneumatic ball valve; 137. Kf pipe connector; 138. Buffer tank top plate; 139. Eighth pneumatic ball valve; 140. Oxidation chamber; 141. Dust humidification chamber; 142. Electrical cabinet compartment; 143. Oxidation chamber top cover; 144. Oxidation chamber bottom plate; 145. Oxidation chamber discharge port; 146. Fireproof cloth; 147. Dust humidification chamber bottom plate; 148. Gas recovery pipeline; A. Dust filter; B. Dust removal pipeline; C. Fourth pneumatic ball valve; D. Centralized dust collector; E. Buffer tank; F. Centralized harmless treatment device for flammable dust; G. Tenth pneumatic ball valve; H. Dust collection pipeline; J1. First cartridge filter; J2. Second cartridge filter; K1. First vacuum pump; K2. Second vacuum pump; K3. Third vacuum pump; L. Crystal pulling furnace; M. Chain plate scraper conveyor; N. Louvered dust discharge mechanism; P. Spiral humidifier. Detailed Implementation

[0036] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0037] The purpose of this invention is to provide a dust filter and a fine silicon powder inert treatment system, which includes a dust collector self-cleaning system. This not only reduces the resistance of the dust collector, improves the quality of the crystal rod, and reduces power consumption, but also improves the dust conveying efficiency.

[0038] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0039] refer to Figures 2-3The dust filter disclosed in this embodiment of the present invention includes at least a housing, which includes an upper housing 1 and a lower housing 2. The lower housing 2 is provided with a dust removal port 3 and an air inlet 10. The upper housing 1 is provided with a first air outlet. A filter bag 17 is provided inside the housing for filtering the gas supplied to the housing from the crystal pulling furnace L. The upper housing 1 is also provided with a simple harmonic mechanism for tensioning and relaxing the filter bag 17. A blowing air manifold 6 is provided on the side wall of the upper housing 1. The lower housing 2 is located near the bottom. The device is equipped with a nozzle 8 positioned directly opposite the dust removal port 3 to blow dust out of the dust removal port 3. The end of the blow-through air bag 6 that communicates with the upper housing 1 is located at the end of the filter bag 17 away from the air inlet 10. That is, the blowing end of the blow-through air bag 6 is located at the top of the upper housing. The direction of the gas entering the blow-through air bag 6 is opposite to that entering the air inlet 10, thereby achieving back-blowing of the filter bag 17 and improving the dust removal effect of the filter bag 17. The device also includes a control system for controlling the opening and closing of the dust removal port 3, the air inlet 10 and the first air outlet.

[0040] In this embodiment, inert protective gas, carrying dust volatilized from heated silicon material, enters the housing through the air inlet 10. The inert protective gas is filtered through the filter bag 17, and the filtered gas is discharged through the first air outlet. After the filtration is completed, the air inlet 10 and the first air outlet are closed by the control system, and the dust cleaning operation of the filter bag 17 begins. To prevent the resistance of the filter bag 17 from increasing, the filter bag 17 is first tightened instantly from a relaxed state by a simple harmonic mechanism, and the dust attached to the filter bag 17 is cleaned by vibration. Then, the inert gas in the blowing air bag 6 is blown into the housing through the communication port with the top of the upper housing 1 to blow off the remaining dust attached to the filter bag 17, thus completing the dust cleaning operation of the filter bag 17. The residual flammable dust inside the filter bag 17 is removed by two methods, reducing the risk of the filter bag 17 burning through. When ash discharge is required, since the nozzle 8 is set directly opposite the dust cleaning port 3, the control system opens the dust cleaning port 3, and the dust is blown out from the dust cleaning port 3 to the next stage of equipment under the synergistic action of the nozzle 8.

[0041] It should be noted that the inert gas in the blowing air tank 6 can also be injected into the housing through the nozzle 8, and the gas pressure ejected from the nozzle 8 is guaranteed to be high enough so that even though it is a forward blowing, it can still blow off the dust attached to the filter bag 17.

[0042] refer to Figures 1-3In one embodiment, the harmonic mechanism includes a bracket 12 disposed on the inner wall of the housing. A perforated plate 11 is disposed at the bottom of the bracket 12 for fixing and supporting the bottom of the filter bag 17 and supporting the bracket 12. A fixed hanger 13 is disposed at the top of the bracket 12. A movable hanger 15 is disposed below the fixed hanger 13 for fixing the upper end of the filter bag 17. A spring 16 is disposed between the movable hanger 15 and the fixed hanger 13. A first cylinder 18 is disposed at the top of the upper housing 1. The outer shell of the first cylinder 18 is fixedly connected to the upper housing 1. The output end of the first cylinder 18 is fixedly connected to the movable hanger 15. By setting the harmonic mechanism to drive the movable hanger 15 to drive the filter bag 17 to resonate, it can not only help remove the dust accumulated on the surface of the filter bag 17, but also improve the filtration effect. When dust removal is required, the first cylinder 18 drives the movable hanger 15 to move instantaneously, tightening the filter bag 17. Under the action of inertial force, the dust attached to the filter bag 17 will fall off, improving the dust removal effect.

[0043] It should be noted that the first cylinder 18 is configured in three groups, thereby driving the three groups of movable hangers 15 to move. Each group of movable hangers 15 is provided with eight springs 16 between it and the fixed hanger 13.

[0044] refer to Figure 3 In one embodiment, the fixed hanger 13 is also provided with a guide mechanism 14. One end of the guide mechanism 14 is connected to the movable hanger 15, and the other end of the guide mechanism 14 is slidably connected to the fixed hanger 13. By setting the guide mechanism 14, the movable hanger 15 can be more stable during the simple harmonic motion of up and down, and the movable hanger 15 can be prevented from getting stuck. The guide mechanism 14 can be a guide rod, one end of which is connected to the movable hanger 15, and the other end passes through the fixed hanger 13.

[0045] refer to Figures 2-3 In one embodiment, the first air outlet is connected to the blowing air bag 6, the blowing air bag 6 is provided with a second air outlet 9, and the air inlet 10 is located near the bottom of the lower housing 2. The first air outlet and the second air outlet 9 are located near the top of the upper housing 1. That is, during normal filtration, the first air outlet and the second air outlet 9 are connected, and the filtered gas is discharged through the second air outlet 9. When purging is performed, the first air outlet serves as the air inlet, allowing the gas in the blowing air bag 6 to be blown in from the top of the upper housing 1 to complete the cleaning of the filter bag 17.

[0046] It should be noted that the second air outlet 9 is connected to the outside air, the blowing air bag 6 is connected to the first air outlet through the first pneumatic ball valve 4 and the first pulse ball valve 5, and the blowing air bag 6 is connected to the nozzle 8 through the first manual ball valve 7 and the second pneumatic ball valve 136.

[0047] refer to Figure 1 and Figure 2As a preferred method, four nozzles 8 are set and evenly distributed on the side wall of the bottom of the lower housing 2 away from the dust removal port 3. Specifically, the top view of the lower housing 2 is a circular cross-section. The dust removal port 3 is set on one side of the circular cross-section. The cross-section of the dust removal port 3 is divided equally, and the dividing line passes through the center of the circular cross-section. At this time, the axis perpendicular to the dividing line divides the circular cross-section into equal semicircles. The four nozzles 8 are evenly distributed on the semicircles away from the dust removal port 3, and the nozzles 8 are set directly facing the dust removal port 3. The nozzles 8 being set directly facing the dust removal port 3 will generate a clear directional airflow, which directly pushes the material towards the dust removal port 3. The even distribution of the four nozzles 8 can form an airflow field covering the entire semicircle, ensuring that the dust is effectively pushed.

[0048] It should be noted that the dust removal port 3 is connected to the fourth pneumatic ball valve C in sequence through the fourth manual ball valve 20, the ninth pneumatic ball valve 21, and the connecting pipe 22.

[0049] refer to Figure 1 This utility model also discloses a micro-silicon powder inert treatment system, which uses the dust filter described above. The system includes a crystal pulling furnace L, a dust filter A, a centralized dust collector D, a buffer tank E for temporary storage and isolation of dust, and a centralized harmless treatment device F for flammable dust, all connected in sequence. The crystal pulling furnace L is connected to the dust filter A via a third pneumatic ball valve 19. The dust filter A is connected to the centralized dust collector D via a fourth pneumatic ball valve C installed on the dust removal management system B. The second air outlet 9 is connected to the first vacuum pump K1 and discharges through the gas recovery pipeline 148. The crystal pulling furnace outlet of the crystal pulling furnace L is connected to the first cartridge filter J1. The second vacuum pump K2 is connected and discharged through the gas recovery pipeline 148. The dust collector outlet 33 of the centralized dust collector D is connected to the third vacuum pump K3 through the tenth pneumatic ball valve G and the second cartridge filter J2 set on the dust collection pipeline H. The dust removal filter A and the centralized dust collector D can achieve secondary filtration of dust. The buffer tank E can achieve temporary storage and isolation of dust. The centralized harmless treatment device F for flammable dust can achieve oxidation and humidification of dust. This achieves efficient collection, safe temporary storage and harmless treatment of dust, which meets the high standards of environmental protection and safety requirements of modern industry.

[0050] It should be noted that the crystal pulling furnace L and the dust filter A can be connected in parallel in multiple sets, and connected to the centralized dust collector D to improve work efficiency.

[0051] refer to Figure 4 and Figure 5As one implementation method, the centralized dust collector D includes a cylindrical body 27, with an upper end cap 34 disposed on top of the cylindrical body 27. The upper end cap 34, the cylindrical body 27, and the conical dust hopper 26 are fixed together by screws to form a sealed cavity. The upper end cap 34 is provided with a dust collector outlet 33 and a back-blowing pipe 32 communicating with the cylindrical body 27. A stainless steel filter cartridge 35 for secondary dust filtration is disposed inside the cylindrical body 27. The stainless steel filter cartridge 35 is installed inside the cylindrical body 27 by a mounting plate 36 disposed inside the cylindrical body 27. The conical dust hopper 26 includes a second cylinder 40 disposed on the outer wall of the conical dust hopper 26. The second cylinder 40 is fixed on the outer wall of the conical dust hopper 26 by a cylinder mounting cylinder 41 and a cylinder mounting seat 42. The output end of the second cylinder 40... The conical ash hopper 26 is connected by a first connecting rod 39 and a second connecting rod. A spiral shaft fixing seat 37 is installed inside the conical ash hopper 26. The spiral shaft fixing seat 37 is mounted on the inner wall of the conical ash hopper 26 via a conical hopper rib plate 44. An ash hopper spiral shaft 45 is located in the middle of the conical ash hopper 26. The ash hopper spiral shaft 45 is rotatably connected to the spiral shaft fixing seat 37. A first ratchet mechanism 43 and a second ratchet mechanism are fitted onto the outer wall of the ash hopper spiral shaft 45. The first ratchet mechanism 43 and the second ratchet mechanism are installed opposite each other on the ash hopper spiral shaft 45 to convert the linear motion of the second cylinder 40 into the rotational motion of the ash hopper spiral shaft 45. By setting up the conical ash hopper 26 and installing the ash hopper spiral shaft 45 inside the conical ash hopper 26, the dust conveying efficiency can be guaranteed.

[0052] It should be noted that the centralized dust collector D is supported by the centralized dust collection platform 23. In this embodiment, the rotation of the ash hopper spiral shaft 45 is achieved by two ratchet mechanisms, which is existing technology and will not be described again. The side wall of the conical ash hopper 26 is provided with a conical hopper air inlet 25 that communicates with the dust removal port 3. The conical hopper air inlet 25 is located near the top of the conical ash hopper 26. The discharge port of the conical ash hopper 26 is provided with a centralized dust collection and ash discharge port flange 24.

[0053] refer to Figure 4 and Figure 5 As one implementation method, a dust sweeping rod 38 is sleeved on the ash hopper spiral shaft 45, and the end of the dust sweeping rod 38 is provided with a dust sweeping brush that fits into the inside of the conical ash hopper 26, which can prevent dust from adhering to the inner wall of the conical ash hopper 26.

[0054] refer to Figure 4 and Figure 5 As one implementation method, a backflush air manifold 28 is provided on the outer wall of the cylinder 27. The air outlet of the backflush air manifold 28 is connected to the upper end cap 34 through the second pulse ball valve 29, the fifth pneumatic ball valve 30, the second manual ball valve 31 and the backflush pipe 32 in sequence, and then communicates with the cylinder 27. The stainless steel filter cartridge 35 inside the cylinder 27 is backflush cleaned by the gas transported in the backflush air manifold 28.

[0055] refer to Figure 6 As one implementation method, the buffer tank E includes an upper cylinder 52, a top plate 138, a lower cone 56, a feed inlet 58, and a discharge outlet 55, which together constitute the tank body. The top plate 138 is equipped with a vent pipe 47, an isobaric connection pipe 50, a Kf pipe connector 137, and the feed inlet 58. Near the bottom of the buffer tank E, a micro-positive pressure pipe 54 and a gas replacement pipe 57 are provided. A third manual valve is installed on the vent pipe 47, the isobaric connection pipe 50, the micro-positive pressure pipe 54, and the gas replacement pipe 57. The ball valve 46, venting line 47, micro-positive pressure line 54, and gas replacement line 57 are all equipped with first solenoid valves 53. A sixth pneumatic ball valve 49 is installed at the feed inlet 58 of the buffer tank, connecting to the centralized dust collector D's centralized dust discharge flange 24 for controlling ash discharge from the ash hopper. The venting line 47 is controlled by the first solenoid valve 53 via a third manual ball valve 46 for venting and exhausting air. The third manual ball valve 46 is used for emergency maintenance. The Kf pipe connector 137 is used to install a pressure sensor 48. The equal pressure connection line 50 is connected to... The installation of a third manual ball valve 46 and a seventh pneumatic ball valve 51 connects the centralized dust collector D, ensuring equal pressure between the buffer tank E and the centralized dust collector D, facilitating ash discharge. The third manual ball valve 46 is used for emergency maintenance. The upper cylinder 52 of the buffer tank is welded to the bottom of the top plate 138 of the buffer tank. The lower cone 56 of the buffer tank is welded to the bottom of the upper cylinder 52. Gas replacement pipes 57 and micro-positive pressure pipes 54 are installed on the opposite sides of the lower cone 56 to form a cyclone intake airflow. A buffer tank discharge port 55 is welded below the lower cone 56, connecting to the eighth pneumatic ball valve. The ball valve 139 is used to control the discharge of the buffer tank E. The gas replacement pipeline 57 is controlled by the installation of the third manual ball valve 46 and the first solenoid valve 53. The first solenoid valve 53 controls the air intake of the gas replacement pipeline 57. The third manual ball valve 46 is used for emergency maintenance. The micro positive pressure pipeline 54 is controlled by the installation of the third manual ball valve 46 and the first solenoid valve 53. The first solenoid valve 53 controls the air intake of the pipeline. The third manual ball valve 46 is used for emergency maintenance. The buffer tank E is used to isolate the centralized dust collector D and the centralized harmless treatment device for flammable dust F to prevent explosion caused by the deflagration of treated dust.

[0056] refer to Figures 7-12As an implementation method, the centralized harmless treatment device F for flammable dust includes a rotary valve 59, a chain scraper conveyor M, a louvered ash discharge mechanism N, a spiral humidifier P, and a housing 61 for the flammable dust harmless treatment device. The housing 61 consists of an upper oxidation chamber 140, a lower dust humidification chamber 141, and an electrical cabinet compartment 142. The oxidation chamber 140 is a sealed structure with inspection doors on both longitudinal sides. The top cover 143 of the oxidation chamber is removable, and there is a bottom plate 144 of the oxidation chamber with an oxidation chamber discharge port 145. The sides are covered with a skin. A first temperature sensor 81 and a second temperature sensor 85 are installed on the oxidation chamber 140 at both longitudinal ends to measure the temperature of the material on the chain scraper conveyor M. The top cover 143 of the oxidation chamber is equipped with... The feed inlet 64 is equipped with a corrugated hose 60, which is connected to the eighth pneumatic ball valve 139. A star-shaped discharge valve 59 is connected below the feed inlet 64 for uniform material distribution. The chain plate scraper conveyor M is installed longitudinally inside the oxidation chamber 140 and on the bottom plate 144 of the oxidation chamber. The dust humidification chamber 141 is located below the oxidation chamber 140 and is used to install the spiral humidifier P, the louvered ash discharge mechanism N, the small filter 68, and the booster water pump 73. The side wall has an inspection door or skin, and the bottom has a dust humidification chamber bottom plate 147 for supporting the installed equipment. Between the dust humidification chamber 141 and the electrical cabinet 142, there is a spiral humidifier discharge port 67 for the spiral humidifier P to discharge material. The electrical cabinet 142 is used to install electrical control equipment and the human-machine interaction equipment touch screen 63.

[0057] refer to Figures 10-12As one implementation method, the chain scraper conveyor M includes a chain scraper conveyor beam 90, a sprocket driven shaft 86, a sprocket drive shaft 91, a sprocket 87, a transmission chain 88, a scraper 89, an upper bottom plate 92, a lower bottom plate 93, a first motor reducer 80, a second motor reducer 83, a universal coupling 82, and a perforated coupling 84. The chain scraper conveyor beam 90, the upper bottom plate 92, and the lower bottom plate 93 form the equipment frame, used to install and fix the sprocket drive shaft 91 and the sprocket driven shaft 86. The scraper 89 is installed between the two transmission chains 88. 91 and sprocket driven shaft 86 are respectively installed at both ends between the two chain scraper conveyor M beams 90. Two sprockets 87 are installed at both ends of each shaft. The sprockets 87 mesh with the drive chain 88, which transmits the torque of the sprocket drive shaft 91 to the sprocket driven shaft 86, thereby driving the scraper 89 to move along the drive chain 88. The first motor reducer 80 and the second motor reducer 83 are fixedly installed on the outside of the oxidation chamber 140, and are connected to drive the upper and lower sprocket drive shafts 91 via universal coupling 82 and plum blossom coupling 84 respectively. The side of the sprocket driven shaft 86 of the chain scraper M is the discharge port 145 of the oxidation chamber. The chain scraper conveyor M discharges material and also includes a dust-crushing plate 96. The dust-crushing plate 96 includes a plate body and a rotating shaft. The plate body has a comb-like structure and is fixedly connected to the rotating shaft. The conveying end of the lower bottom plate 93 of the chain scraper conveyor M is fixedly connected to a dust-crushing mechanism mounting seat 94. The two ends of the rotating shaft are respectively rotatably mounted on the dust-crushing mechanism mounting seat 94. One end of the torsion spring 95 is fixedly mounted on the dust-crushing mechanism mounting seat 94, and the other end is fixedly connected to the plate body. After the dust in the buffer tank E enters the oxidation chamber 140 through the star-shaped discharge valve 59, it falls into the upper bottom plate 92 of the chain scraper conveyor M. When the scraper 89 moves to the upper bottom plate 92 of the chain scraper conveyor M along with the transmission chain 88... At the end, the dust falls to the beginning of the lower bottom plate 93 of the chain scraper conveyor M, and continues to move to the end of the lower bottom plate 93 of the chain scraper conveyor M under the action of the scraper 89. When the dust moves to the end of the lower bottom plate 93 of the chain scraper conveyor M under the action of the scraper 89, the dust collected by the scraper 89 comes into contact with the dust breaking plate. At this time, the dust breaking plate will hinder the dust from moving forward due to the elastic force of the torsion spring 95. Under the squeezing action of the dust breaking plate and the scraper 89, the flaky dust is broken. The broken dust enters the discharge port. When the scraper 89 moves to the next station, the dust breaking plate returns to its original state under the action of the torsion spring 95, completing one process of conveying.

[0058] refer to Figures 13-14As one implementation method, the louvered ash discharge mechanism N is installed inside the dust humidification chamber 141, including a hopper ring 97, a weighing hopper 98, a cylinder actuator 99, a pneumatic vibrator 100, a louvered mechanism housing 101, a square-to-round diameter reducing pipe 102, a weighing sensor upper mounting plate 103, a weighing discharge small round pipe 104, a weighing discharge large round pipe 105, a weighing sensor lower mounting plate 106, a weighing sensor 107, louvered ash discharge reversing blades 108, a louvered ash discharge rotating rod 109, a louvered ash discharge long connecting rod 110, and a louvered ash discharge short connecting rod. Rod 111, weighing hopper 98, used for temporary material storage, with a hopper rim 97 at the top for connecting to the upper equipment, and two louvered ash discharge reversing blades 108 at the bottom. The louvered ash discharge reversing blades 108 can reverse to block and open the discharge port of the weighing hopper 98, controlling the discharge of material after weighing. Louvered mechanism housing 101 is used to install and fix the louvered ash discharge reversing blades 108, connected to the weighing hopper 98 at the top and to the square-round reducing pipe 102 at the bottom. Weighing sensor mounting plate 103 is connected to the square-round reducing pipe 102. The lower part is connected to three evenly distributed load cells 107 for supporting and fixing the upper equipment. The load cell mounting plate 106 is connected to the base of the load cell 107 for mounting and fixing the load cell 107. The large weighing discharge pipe 105 is welded to the center position to receive and discharge the material from the small weighing discharge pipe 104 above. The small weighing discharge pipe 104 is inserted into the center of the large weighing discharge pipe 105 but does not contact it to prevent interference with the accuracy of the load cell 107. The hopper ring edge 97 is connected to the oxide layer by a flexible fireproof cloth 146. The discharge port 145 is connected to the weighing sensor 107 by using a flexible fireproof cloth 146. The cylinder actuator 99 is connected to the louvered ash discharge long connecting rod 110 and the arc-shaped lever set on the louvered ash discharge reversing blade 108 in sequence through the louvered ash discharge short connecting rod 111. This converts the linear motion of the cylinder actuator 99 into rotational motion, realizing the opening and closing of the louvered ash discharge reversing blade 108. The pneumatic vibrator 100 is installed on the side of the outer shell of the louver mechanism housing 101 to assist in vibration and material discharge when the louvered ash discharge reversing blade 108 is opened.

[0059] refer to Figures 15-16As one implementation method, the spiral humidifier P is located inside the dust humidification chamber 141 and below the louvered ash discharge mechanism N, and is installed on the bottom plate 147 of the dust humidification chamber. The louvered ash discharge mechanism N is connected to the spiral humidifier inlet 121 through the discharge hole provided on the mounting plate 103 of the weighing sensor. The spiral humidifier P includes a servo motor reducer 66, a spiral humidifier discharge port 67, a spiral humidifier housing 70, a spiral humidifier motor reducer mounting base 112, a discharge port side bearing seat 113, a discharge port side flange 114, a spiral stirring main shaft 115, a clamp 116, a first water spray nozzle 117, a second water spray nozzle 118, a third water spray nozzle 119, a fourth water spray nozzle 120, and a spiral humidifier inlet. 121. Bearing cover; 122. Inlet-side bearing housing; 123. Inlet-side flange; 124. Bearing retaining ring; 125. Plug seal ring; 126. Wool gasket; 127. Inlet-side sealing gasket cover plate; 128. Round nut; 129. Double-row angular contact ball bearing; 130. Plug seal ring cover plate; 131. Discharge-side sealing ring cover plate; 132. Reverse spiral ribbon; 133. Spiral ribbon support rod; 134. And forward spiral ribbon; 135. Spiral humidifier housing 70, with spiral humidifier inlet 121 and spiral humidifier discharge port 67 on both sides for feeding and discharging materials. Discharge-side flange 114 and inlet-side flange 124 are welded to both ends of spiral humidifier housing 70. Discharge-side bearing housing 113 and inlet-side bearing... The seats 123 are respectively connected and fixed to it. The spiral stirring main shaft 115 is composed of a counter-rotating spiral ribbon 133, a spiral ribbon support rod 134, and a forward-rotating spiral ribbon 135. Double-row angular contact ball bearings 130 are installed on both sides of the shaft head. The spiral stirring main shaft 115 is positioned by the cooperation of the discharge port side bearing seat 113 and the feed port side bearing seat 123 on both sides of the spiral humidifier housing 70 with the double-row angular contact ball bearings 130. The plug seal ring 126 is installed in the feed port side bearing seat 123 and fixed by the plug seal ring cover plate 131. The wool sealing gasket 127 is installed between the feed port side sealing gasket cover plate 128 and the plug seal ring cover plate 131 for sealing. The bearing retainer ring 125 and the round nut 129 are used to lock the double-row angular contact ball bearings. 130 is mounted on the spiral mixing main shaft 115. Bearing cover 122 is fixed to the inlet-side bearing seat 123 with universal screws to lock the double-row angular contact ball bearing 130 on the inlet 121 side of the spiral humidifier. A plug seal ring 126 is fixed to the discharge port 67 side of the spiral humidifier via a discharge port-side seal ring cover plate 132. A wool sealing gasket 127 on the discharge port 67 side of the spiral humidifier is fixed to the discharge port-side flange 114 via the discharge port-side seal ring cover plate 132. One side of the spiral humidifier motor reducer mounting base 112 is fixed to the discharge port-side bearing seat 113 with screws, while the other side is fixed to the servo motor reducer 66. The spiral mixing main shaft 115 is connected to and driven by the shaft hole of the fixed servo motor reducer 66.The first spray nozzle 117, the second spray nozzle 118, the third spray nozzle 119, and the fourth spray nozzle 120 are fixed to the spiral humidifier housing 70 by clamps 116, and are used to add water to the spiral humidifier housing 70. A booster pump 73 is installed inside the dust humidification chamber 141. An external water supply pipe 74 is connected to the booster pump 73. A drain hose 75 is connected to a manifold 79, through which water is distributed to four separate water hoses 78. These four hoses connect to four second solenoid valves 76 and four right-angle pipe joints 77, and finally connect to the first spray nozzle 117, the second spray nozzle 118, the third spray nozzle 119, and the fourth spray nozzle 120 respectively, supplying water to the spiral humidifier P.

[0060] refer to Figure 8 As one implementation method, a small filter 68 is installed inside the dust oxidation chamber 140 and connected to the oxidation chamber 140 through the small filter air inlet pipe 72. It is connected to the exhaust pipe 62 through the fan 69 and the fan connecting hose 71. It is used to replace and filter the air in the oxidation chamber 140 before exhausting it. The damper 65 is installed inside the dust humidification chamber 141 and connected to the oxidation chamber 140. It is used to control the air intake of the oxidation chamber 140, thereby controlling the oxidation rate of flammable dust.

[0061] This utility model also discloses a method for inert treatment of fine silicon powder, which utilizes the aforementioned fine silicon powder inert treatment system and includes the following steps:

[0062] The inert protective gas inside the crystal pulling furnace L enters the dust removal filter A through a pipeline for filtration.

[0063] During the crystal pulling process, the filter bag 17 is vibrated and cleaned, or after the crystal pulling process, the filter bag 17 is vibrated and cleaned by back-blowing.

[0064] After the dust removal is completed, the dust is transported to the centralized dust collector D for centralized collection and secondary filtration;

[0065] After secondary filtration, the dust enters the buffer tank E for temporary storage and isolation.

[0066] When oxidation is required, the dust is transported from the buffer tank E to the centralized harmless treatment device F for flammable dust, where it is oxidized and humidified.

[0067] Finally, the dust is discharged from the centralized harmless treatment device F for flammable dust.

[0068] The working principle of this embodiment is as follows:

[0069] The inert protective gas inside the crystal pulling furnace L carries the dust volatilized from the heated silicon material. It passes through a pipeline, the third pneumatic ball valve 19, and the dust filter A to remove impurities. The gas is then discharged to the gas recovery pipeline 148 via the first vacuum pump K1. At this time, the fourth manual ball valve 20 connected to the dust removal port 3 is normally open for emergency maintenance, while the ninth pneumatic ball valve 21 is closed. The first pneumatic ball valve 4 and the second pneumatic ball valve 136 on the two pipelines connected to the blowing air manifold 6 are also closed to prevent external gas from affecting the system pressure of the entire crystal pulling process. This process is the filtration operation of the dust filter A. During the filtration operation, the dust filter A, according to its programmed settings, activates one of the three first cylinders 18 to repeatedly push the movable hanger 15, causing the spring 16 to stretch. The filter bag 17 is in a relaxed state. When the first cylinder 18 quickly retracts, the movable hanger 15, driven by the spring 16, quickly retracts and tightens the filter bag 17. This process is the filtration operation of the filter bag 17. 7. Shaking and cleaning: When shaking and cleaning filter bag 17, the filtration operation of dust filter A is not affected; that is, filtration can be performed during this process. When dust filter A discharges ash, self-cleaning must be completed first. That is, the ninth pneumatic ball valve 21 is closed, the fourth manual ball valve 20 is normally open for emergency maintenance, and the third pneumatic ball valve 19 is closed to disconnect from the crystal pulling furnace L. The crystal pulling furnace L is connected to the pipeline of the first cartridge dust collector J1 and the second vacuum pump K2. The internal air of the crystal pulling furnace L is cleaned. The dust filter A first performs a vibration cleaning operation on the filter bag 17. After the set time is completed, the first pneumatic ball valve 4 of the jet air tank 6 is opened. Using the inert gas in the jet air tank 6, the filter bag 17 is back-blown through the first pulse ball valve 5 to prevent too much flammable dust from remaining on the filter bag 17 and causing the filter bag 17 to burn through. This process is the self-cleaning of the dust filter A before ash conveying. It removes the residual flammable dust inside the filter bag 17 in two ways and reduces the risk of the filter bag 17 burning through.

[0070] Then, the ninth pneumatic ball valve 21 opens and connects to the pipeline. The tenth pneumatic ball valve G and the fourth pneumatic ball valve C on the inlet and outlet sides of the centralized dust collector D are both opened, connecting the dust collection pipeline H, the second cartridge filter J2, and the third vacuum pump K3, and connecting to the gas recovery pipeline 148. A negative pressure is formed at the rear end. The second cartridge filter J2 is a secondary filter, filtering finer dust particles. The filter material of the centralized dust collector D is metal, with slightly lower filtration accuracy, so it needs to be filtered by the second cartridge filter J2 before the gas is discharged. When the third pneumatic ball valve 19 is closed, the second pneumatic ball valve 136 connected to the jet air bag 6 of the dust filter A is opened, and the inert gas in the jet air bag 6 is introduced. Through the purging nozzle 8, the flammable dust in the lower housing 2 is pneumatically conveyed. This process is a centralized ash removal operation. When the centralized ash removal operation is completed, the ninth pneumatic ball valve 21 and the second pneumatic ball valve 136 are closed, and the third pneumatic ball valve 19 is opened to continue the filtration operation. Other dust filters A complete the ash removal operation through the connection pipeline.

[0071] After the centralized dust collector D has been in operation for the set time, the fourth pneumatic ball valve C and the tenth pneumatic ball valve G on the inlet and outlet are closed, the third vacuum pump K3 stops, the fifth pneumatic ball valve 30 on the backflush air tank 28 is opened, the second manual ball valve 31 is normally open for emergency maintenance, and the second pulse ball valve 29 is opened. According to the program settings, the inert gas in the backflush air tank 28 is used to backflush the stainless steel filter cartridge 35 to clean the flammable dust attached to the outside of the stainless steel filter cartridge 35 and increase the air permeability of the stainless steel filter cartridge 35. This process is the self-cleaning of the centralized dust collector D. After the centralized dust collector D has completed self-cleaning, the material is discharged, and the fourth pneumatic ball valve C at the inlet and the tenth pneumatic ball valve G at the outlet of the centralized dust collector are opened to continue the centralized ash discharge operation.

[0072] During oxidation, the sixth pneumatic ball valve 49 and the eighth pneumatic ball valve 139, respectively located at the feed inlet 58 and discharge outlet 55 of the buffer tank E, are closed. The first solenoid valve 53 on the gas replacement pipeline 57 is opened to introduce inert gas. The first solenoid valve 53 on the vent pipeline 47 is opened to discharge the gas inside the cavity of the buffer tank E through the vent pipeline 47 under the drive of the cyclone airflow, replacing it with inert gas to prevent dust explosion during discharge. After the gas replacement is completed, the first solenoid valve 53 on the vent pipeline 47 is closed, and the seventh pneumatic ball valve 51 on the equal pressure connection pipeline 50 is opened to connect the cylinder of the centralized dust collector D, making the two devices equal pressure to facilitate discharge. When the pressure sensor 48 reports equal pressure, the sixth pneumatic ball valve 49 is opened to prepare for ash discharge. The second cylinder 40 of the centralized dust collector D is started, driving the ash hopper spiral shaft 45. The dust falls into the buffer tank E under the action of gravity and spiral compression.

[0073] When the ash discharge time is up, stop the second cylinder 40, close the sixth pneumatic ball valve 49 and the seventh pneumatic ball valve 51, open the first solenoid valve 53 of the micro positive pressure pipeline 54, and open the eighth pneumatic ball valve 139. The flammable dust is discharged along the pipeline under the action of gravity to the star-shaped unloading valve 59. Through its uniform distribution, the dust falls onto the upper bottom plate 92 of the chain scraper conveyor M. The scraper 89 pushes the flammable dust towards the sprocket drive shaft 91. In this process, the dust slowly completes oxidation with the limited oxygen in the oxidation chamber 140. After reaching the end of the upper bottom plate 92 of the chain scraper conveyor M, it falls onto the lower bottom plate 93 of the chain scraper conveyor M, completing the dust overturning and making it more fully oxidized.

[0074] During the oxidation process, the fan 69 connected to the small filter 68 adjusts its speed in real time through the calculation of the two first temperature sensors 81 and the second temperature sensor 85 set on the side wall of the oxidation chamber 140 by the PLC system, thereby controlling the oxidation process. Finally, the oxidized dust is pushed into the discharge port 145 of the oxidation chamber by the scraper 89. The discharge port is equipped with a dust crushing device to crush the dust that clumps during the oxidation process. The dust falls into the weighing hopper 98 in the louvered dust discharge mechanism N. After the weighing sensor 107 feedbacks that the set weight has been reached, the cylinder actuator 99 drives the louvered dust discharge reverse blades 108 to open, and the pneumatic vibrator 100 works to assist in the discharge. The oxidized dust falls into the spiral humidifier P.

[0075] Under the program settings, the spiral humidifier P drives the spiral mixing shaft 115, and through the coordinated action of the first water spray nozzle 117, the second water spray nozzle 118, the third water spray nozzle 119 and the fourth water spray nozzle 120, the dust is humidified and passivated again before being discharged.

[0076] It should be noted that, for those skilled in the art, it is obvious that this utility model is not limited to the details of the above exemplary embodiments, and that this utility model can be implemented in other specific forms without departing from the spirit or essential characteristics of this utility model. Therefore, the embodiments should be considered as exemplary and non-limiting in all respects, and the scope of this utility model is defined by the appended claims rather than the foregoing description. Therefore, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within the utility model. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A dust filter, characterized by The dust cleaning device comprises a shell, a dust cleaning port, a first air outlet, an air inlet, a filter bag, a harmonic mechanism, a blowing gas bag, a nozzle, and a control system.

2. The dust filter according to claim 1, characterized in that The harmonic mechanism comprises a support, a fixed hanger, a movable hanger, a spring, and a first cylinder.

3. The dust filter according to claim 2, characterized in that The fixed hanger is further provided with a guide mechanism.

4. The dust filter according to claim 1, characterized in that The first air outlet is in communication with the blowing gas bag.

5. The dust filter according to claim 1, characterized in that The nozzle is provided with four nozzles.

6. A fine silicon powder inertization system using the dust filter as claimed in any one of claims 1 to 5, characterized in that, The dust cleaning device comprises a crystal pulling furnace, a dust filter, a dust collector, a buffer tank, and a combustible dust harmless treatment device.

7. The fine silicon powder inert treatment system according to claim 6, wherein The dust collector comprises a cylinder, a stainless steel filter, and a conical ash bucket. The conical ash bucket comprises a second cylinder, a first connecting rod, a second connecting rod, a first ratchet mechanism, a second ratchet mechanism, and an ash bucket screw shaft.

8. The fine silicon powder inert treatment system according to claim 7, wherein The ash bucket screw shaft is provided with a sweeping rod.

9. The fine silicon powder inert treatment system according to claim 7, wherein The cylinder is provided with a back-blowing gas bag.

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