A nitrogen delivery and filtration system

Abstract

This utility model relates to a nitrogen delivery and filtration system, including an inlet pipe and an outlet pipe, with at least two delivery pipes connected in parallel between the inlet and outlet pipes. Each delivery pipe is equipped with a valve and a filter device sequentially along the gas flow direction. Each filter device consists of a first filter device and a second filter device sequentially along the gas flow direction. The first filter device includes a cylindrical filter element composed of a first metal mesh layer and a porous polytetrafluoroethylene (PTFE) filter layer. The second filter device includes a conical filter element composed of a second metal mesh layer and a silica gel moisture-absorbing layer. The first filter device effectively intercepts micron-sized particles and impurities such as dust and rust. The second filter device effectively intercepts moisture, oil mist, and residual particles. The nitrogen gas, after double filtration, is then delivered to the next processing stage. This nitrogen delivery and filtration system can filter nitrogen gas, giving it high purity.

Description

Technical Field

[0001] This utility model relates to a nitrogen gas delivery and filtration system, belonging to the technical field of electronic-grade wet electronic chemical production equipment. Background Technology

[0002] In the production, storage, transportation, and use of wet electronic chemicals (such as high-purity sulfuric acid, hydrofluoric acid, ammonia, developer, and cleaning agents), nitrogen is widely used in several key processes due to its inertness, dryness, availability, and high purity. It is primarily used to isolate oxygen and moisture, prevent oxidation / decomposition, maintain cleanliness, provide a protective atmosphere, and serve as a power source. However, in actual production, nitrogen needs to be transported to various process stages via long-distance pipelines. The metal shavings, welding slag, or particulate matter that can detach from the inner walls of pipelines during long-distance transport can degrade the quality of the nitrogen.

[0003] To address the aforementioned technical issues and enable nitrogen to possess high purity, this invention proposes a nitrogen delivery and filtration system for nitrogen delivery and filtration. Utility Model Content

[0004] In view of the shortcomings of the prior art, the technical problem to be solved by this utility model is to provide a nitrogen delivery and filtration system.

[0005] To solve the above-mentioned technical problems, the technical solution of this utility model is: a nitrogen gas delivery and filtration system, including an inlet pipe and an outlet pipe, wherein at least two delivery pipes are connected in parallel between the inlet pipe and the outlet pipe, and a switch valve and a filter device are sequentially arranged on the delivery pipes along the gas flow direction. The filtration device consists of a first filtration device and a second filtration device in sequence along the gas flow direction; The first filtration device includes a cylindrical filter element, which is composed of a first metal filter mesh layer and a porous polytetrafluoroethylene filter layer. The second filtration device includes a conical filter element, which is composed of a second metal mesh layer and a silica gel moisture-absorbing layer.

[0006] Preferably, the air intake pipe is connected to an air intake collection chamber, which is then connected to the air intake end of the delivery pipe.

[0007] Preferably, the outlet end of the conveying pipe is connected to an outlet gas collection chamber, which is then connected to an outlet pipe.

[0008] Preferably, both the first metal filter layer and the porous polytetrafluoroethylene filter layer are cylindrical, and the porous polytetrafluoroethylene filter layer is located on the outer periphery of the first metal filter layer.

[0009] Preferably, both the second metal filter layer and the silicone moisture-absorbing layer are conical, and the second metal filter layer is located on the outer periphery of the silicone moisture-absorbing layer.

[0010] Preferably, the axis of the first filter device and the conveying pipe are at a certain angle.

[0011] Preferably, the angle between the axis of the first filter device and the delivery pipe on the outlet side is an acute angle.

[0012] Preferably, the axis of the conical filter element is coaxial with the delivery pipe; the tip of the conical filter element faces the air inlet side.

[0013] Preferably, the pore size of the porous polytetrafluoroethylene filter layer is less than 0.2 μm, and the fine pore size of the silica gel moisture-absorbing layer is 1 to 10 nm.

[0014] Compared with existing technologies, this invention has the following advantages: The first filter device of the nitrogen delivery and filtration system can effectively intercept micron-sized particles and impurities such as dust and rust. The second filter device can effectively intercept moisture, oil mist, and residual particles. The nitrogen gas, after double filtration, is then delivered to the next stage of the process. This nitrogen delivery and filtration system can filter nitrogen gas, giving it high purity.

[0015] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model.

[0017] Figure 2 This is a partial cross-sectional view of the first filtering device in an embodiment of the present invention.

[0018] Figure 3 This is a partial cross-sectional view of the second filtering device in an embodiment of the present invention.

[0019] Figure 4 This is a simplified illustration of the application of an embodiment of the present utility model.

[0020] In the diagram: Inlet pipe-1, outlet pipe-2, delivery pipe-3, switch valve-4, first filter device-5, second filter device-6, first metal filter layer-7, porous polytetrafluoroethylene filter layer-8, second metal filter layer-9, silica gel moisture-absorbing layer-10, inlet gas collection chamber-11, outlet gas collection chamber-12, T1 pipe-T1, T2 pipe-T2, nitrogen delivery and filtration system-13. Detailed Implementation

[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0022] It should be noted that the following detailed descriptions are exemplary and intended to provide further explanation of this application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0023] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0024] like Figures 1-4 As shown, this embodiment provides a nitrogen delivery and filtration system, including an inlet pipe 1 and an outlet pipe 2. Two delivery pipes 3 are connected in parallel between the inlet pipe and the outlet pipe. The parallel design enables the filter element to be replaced without stopping. The conveying pipeline is equipped with switch valves 4 and filter devices in sequence along the gas flow direction; The filtration device consists of a first filtration device 5 and a second filtration device 6 in sequence along the gas flow direction; The first filtration device includes a cylindrical filter element, which is composed of a first metal filter layer 7 and a porous polytetrafluoroethylene filter layer 8. The second filtration device includes a conical filter element, which is composed of a second metal filter layer 9 and a silica gel moisture-absorbing layer 10.

[0025] In this embodiment of the present invention, the air intake pipe is connected to an air intake and collection chamber 11, and the air intake and collection chamber is then connected to the air intake end of the delivery pipe.

[0026] In this embodiment of the present invention, the air outlet end of the conveying pipe is connected to an air outlet collecting chamber 12, and the air outlet collecting chamber is then connected to the air outlet pipe.

[0027] In this embodiment of the invention, both the first metal filter layer and the porous polytetrafluoroethylene filter layer are cylindrical, and the porous polytetrafluoroethylene filter layer is located on the outer periphery of the first metal filter layer.

[0028] In this embodiment of the invention, both the second metal filter layer and the silicone moisture-absorbing layer are conical, and the second metal filter layer is located on the outer periphery of the silicone moisture-absorbing layer.

[0029] In this embodiment of the invention, the axis of the first filter device and the conveying pipe are at a certain angle.

[0030] In this embodiment of the invention, the angle between the axis of the first filter device and the delivery pipe on the outlet side is an acute angle.

[0031] In this embodiment of the invention, the axis of the conical filter element is coaxial with the conveying pipe; the tip of the conical filter element faces the air inlet side.

[0032] In this embodiment of the invention, the porous polytetrafluoroethylene filter layer has a pore size of less than 0.2 μm, and the silica gel moisture-absorbing layer has the property of absorbing moisture, with a fine pore size of 1 to 10 nm.

[0033] The first filter in this nitrogen delivery and filtration system effectively intercepts micron-sized particles, dust, rust, and other impurities. The second filter effectively intercepts moisture, oil mist, and residual particles. The nitrogen, after undergoing this double filtration, is then delivered to the next stage of the process. This nitrogen delivery and filtration system effectively filters nitrogen, ensuring it possesses high purity.

[0034] An application of a nitrogen delivery and filtration system is disclosed, which is used between the T1 pipeline at the nitrogen supply end and the T2 pipeline for each process. The T1 pipeline is made of 304L or 316 stainless steel, and the T2 pipeline is made of BA grade stainless steel. The inlet pipe is connected to the T1 pipeline, and the outlet pipe is connected to the T2 pipeline.

[0035] Nitrogen gas is supplied from the gas supply end via pipe T1, which connects to pipe T2 for each process stage. Pipe T1 is made of 304L or 316 stainless steel, while pipe T2 is made of BA grade stainless steel. A nitrogen delivery and filtration system 13 is installed at the connection point of pipes T1 and T2. Nitrogen gas entering through pipe T1 enters the inlet pipe, passes through the inlet collection chamber, and then flows through two delivery pipes before entering the first filtration device. This device effectively intercepts micron-sized particles, dust, rust, and other impurities. The angled design of the first filtration device effectively concentrates particles at the end of the filter screen, reducing the frequency of filter replacement and extending its service life. The gas passing through the first filtration device then passes through a second filtration device, which effectively intercepts moisture, oil mist, and remaining particles. The nitrogen gas, after double filtration, is then delivered to the next process stage through the outlet collection chamber.

[0036] Other companies in the industry resort to increasing costs by using BA-grade stainless steel pipes for both T1 and T2 pipelines to address the issue of "metal shavings, welding slag, or particulate matter detaching from the pipe wall, which degrades nitrogen quality." This not only increases production costs but also yields limited results. In contrast, the nitrogen delivery and filtration system described in this application is installed at the connection between the T1 and T2 pipelines. Therefore, the outdoor T1 pipeline section can use only 304L or 316 stainless steel, significantly reducing production costs. The nitrogen delivered through this system possesses high purity.

[0037] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of this utility model without departing from its technical solution shall still fall within the protection scope of this utility model.

Claims

1. A nitrogen delivery filtration system characterized by: It includes an air inlet pipe and an air outlet pipe, and at least two conveying pipes are connected in parallel between the air inlet pipe and the air outlet pipe. Each of the conveying pipes is equipped with a switch valve and a filter device in sequence along the gas flow direction. The filtration device consists of a first filtration device and a second filtration device in sequence along the gas flow direction; The first filtration device includes a cylindrical filter element, which is composed of a first metal filter mesh layer and a porous polytetrafluoroethylene filter layer. The second filtration device includes a conical filter element, which is composed of a second metal mesh layer and a silica gel moisture-absorbing layer.

2. The nitrogen delivery filtration system of claim 1, wherein: The air intake pipe is connected to an air intake collection chamber, which is then connected to the air intake end of the delivery pipe.

3. The nitrogen delivery filtration system of claim 1, wherein: The outlet end of the conveying pipe is connected to an outlet gas collection chamber, which is then connected to an outlet pipe.

4. The nitrogen delivery filtration system of claim 1, wherein: Both the first metal filter layer and the porous polytetrafluoroethylene filter layer are cylindrical, and the porous polytetrafluoroethylene filter layer is located on the outer periphery of the first metal filter layer.

5. The nitrogen delivery filtration system of claim 1, wherein: Both the second metal filter layer and the silicone moisture-absorbing layer are conical, and the second metal filter layer is located on the outer periphery of the silicone moisture-absorbing layer.

6. The nitrogen delivery filtration system of claim 1, wherein: The axis of the first filter device and the conveying pipe are at a certain angle.

7. The nitrogen delivery filtration system of claim 6, wherein: The angle between the axis of the first filter device and the delivery pipe on the outlet side is an acute angle.

8. The nitrogen delivery filtration system of claim 1, wherein: The axis of the conical filter element is coaxial with the delivery pipe; the tip of the conical filter element faces the air inlet side.

9. The nitrogen delivery filtration system of claim 1, wherein: The porous polytetrafluoroethylene filter layer has a pore size of less than 0.2 μm, and the silica gel moisture-absorbing layer has a fine pore size of 1–10 nm.

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