A high-precision electronic mixing special gas mixing device

Abstract

This utility model discloses a high-precision electronic mixing device for special gases, specifically relating to the field of gas mixing technology. It includes a mixing device housing, an electrical control cabinet mounted on top of the housing, a tri-color light mounted on top of the control cabinet, a mixing panel inside the housing, and a mixing tank inside the housing. The mixing tank is made of 316 stainless steel with an inner surface polished to 0.2µm. A detection panel and an analyzer are located inside the housing, with the analyzer mounted above the detection panel. A sample cylinder is also installed inside the housing, along with a flame detector. This utility model, through the inclusion of a check valve, filter, dual precision controller, independent vacuum and pressure relief systems, analyzer, and electrical control cabinet, offers multiple functions, including high mixing accuracy, large gas production, low cost, high-purity nitrogen purging, monitoring and alarm functions, and explosion-proof design.

Description

Technical Field

[0001] This utility model relates to the field of gas mixing technology, and more specifically, to a high-precision electronic mixing special gas mixing device. Background Technology

[0002] Electronic mixed special gases are special gas mixtures used in the electronics industry to manufacture key components such as semiconductors, displays, and solar cells. Their composition, purity, and ratio directly affect product performance and yield. Electronic mixed special gases are usually made by mixing two or more high-purity gases in a specific ratio. Currently, with continuous technological breakthroughs and expanding production scale in the semiconductor, display panel, and photovoltaic cell industries, the demand for electronic mixed special gases is rising sharply.

[0003] In practical use, purchasing mixed gases from gas manufacturers has problems such as long distances, long time, high costs, large quantities, and low precision. It is also not convenient to independently and accurately adjust the flow rates of different gases, which can easily lead to gas ratio deviations during the mixing process, resulting in mixed gases that do not meet the usage standards. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, the present invention provides a high-precision electronic mixing special gas mixing device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A high-precision electronic mixing special gas mixing device includes a mixing device housing, an electrical control cabinet mounted on the top of the mixing device housing, a tri-color light mounted on the top of the electrical control cabinet, a mixing panel installed inside the mixing device housing, a mixing tank installed inside the mixing device housing, the mixing tank being made of 316 stainless steel with its inner surface polished to 0.2µm, a detection panel and an analyzer installed inside the mixing device housing, the analyzer being mounted above the detection panel, a sample cylinder installed inside the mixing device housing, a flame detector installed inside the mixing device housing, a check valve and a filter installed at the inlet end of the N and H pipes on the left side panel inside the mixing device housing, and equipped with a dual precision controller and an independent vacuum and pressure relief system, with the inner surface of the pipes being cleaned and passivated, and the valves being oil-free and degreased, a stainless steel electrolytic grinding mixing device installed inside the mixing device housing, and a 6-blade stirrer installed inside, and a cabinet door installed on the mixing device housing.

[0007] By adopting the above technical solution, the incoming gas can be detected in real time, and N2 and H2 gases can be fully mixed through stirring.

[0008] As a further description of the above technical solution: an explosion-proof glass window is installed on one side of the cabinet door, an exhaust filter is installed on the front side of the cabinet door, the analyzer is equipped with a high-purity nitrogen purging and vacuum system, and a sampling pipeline is installed inside, the outer shell of the electrical control cabinet 2 is made of 2.5mm carbon steel and is equipped with an anti-corrosion coating, the electrical control cabinet is equipped with circuit breakers, programmable logic controllers (PLCs) and their functional modules, solenoid valves, switching power supplies, buttons, touch screens and other electrical components, and is equipped with Z-PURGE nitrogen sealing function, the inside of the mixing device housing is equipped with smoke detectors, temperature detectors and flame detectors, the smoke detectors, temperature detectors and flame detectors are all connected to the electrical control cabinet signal, the mixing device housing is equipped with multiple pipes inside, the top of the mixing device housing is equipped with an exhaust flange, the exhaust flange is connected to the exhaust pipe, a mass flow controller is installed on the pipe, and the bottom of the mixing device housing is provided with multiple positioning mounting holes.

[0009] By adopting the above technical solution, it is possible to monitor and adjust the gas flow rate in real time to meet the requirements of high-precision mixing.

[0010] The technical effects and advantages of this utility model are as follows:

[0011] 1. By setting up a check valve, filter, dual precision controller and independent vacuum and pressure relief system, compared with the existing technology, the left panel integrates a dual precision controller to adjust the flow of N2 and H2 respectively to achieve preliminary mixing. The pipeline size is optimized by the Venturi effect, and the N2 flow rate is used to drive the H2 to mix fully to avoid gas blockage. The stainless steel electrolytic grinding mixing device is equipped with a 6-blade stirrer to further enhance the mixing uniformity.

[0012] 2. By setting up an analyzer and electrical control cabinet, it has multiple functions compared with existing technologies. It can not only achieve fully automatic gas production without manual intervention, but also has functions such as nitrogen purging, vacuum exhaust, high mixing accuracy, large gas production, low cost, safety and stability. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0014] Figure 2 This is a schematic diagram of the internal structure of the mixing device housing of this utility model.

[0015] Figure 3 This is a schematic diagram of the right side of the housing of the mixing device of this utility model.

[0016] The attached figures are labeled as follows: 1. Mixing device housing; 2. Electrical control cabinet; 3. Flame detector; 4. Mass flow controller; 5. Mixing panel; 6. Mixing tank; 7. Sample cylinder; 8. Detection panel; 9. Analyzer; 10. Exhaust flange; 11. Three-color light; 12. Explosion-proof glass window; 13. Exhaust filter; 14. Cabinet door. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] The embodiments disclosed in this application are as follows: Figure 1-3 The high-precision electronic mixing special gas mixing device shown includes a mixing device housing 1, an electrical control cabinet 2 mounted on the top of the mixing device housing 1, a tri-color light 11 mounted on the top of the electrical control cabinet 2, a mixing panel 5 installed inside the mixing device housing 1, a mixing tank 6 installed inside the mixing device housing 1, the mixing tank 6 being made of 316 stainless steel with its inner surface polished to 0.2µm, a detection panel 8 and an analyzer 9 installed inside the mixing device housing 1, the analyzer 9 being mounted above the detection panel 8, a sample cylinder 7 installed inside the mixing device housing 1, a cabinet door 14 installed inside the mixing device housing 1, a flame detector 3 installed inside the mixing device housing 1, and check valves and filters installed at the inlet ends of the N2 and H2 pipelines on the left side panel inside the mixing device housing 1, and equipped with dual precision controllers and independent vacuuming and depressurization systems, and the pipelines... The inner surface is cleaned and passivated, and the valves are oil-free and degreased to ensure equipment safety and gas cleanliness. The mixing device housing 1 is equipped with a stainless steel electrolytic grinding mixing device with a 6-blade agitator. Check valves and filters prevent gas backflow and reduce particles. The flow rate of different gases is controlled by dual precision controllers to achieve initial gas mixing. Then, in conjunction with the stainless steel electrolytic grinding mixing device, the 6-blade agitator mechanically mixes N2 and H2 gases. Through calculation, the appropriate size of the N2 and H2 pipelines can be selected to achieve the Venturi effect, generating N2 driving the H2 mixing effect, reducing gas blockage, and thus ensuring the mixing effect. The mass flow controller 4 can monitor and adjust the gas flow rate in real time to meet the requirements of high-precision mixing.

[0019] Reference Figure 2As shown, an explosion-proof glass window 12 is installed on one side of the cabinet door 14, and an exhaust filter 13 is installed on the front side of the cabinet door 14. The analyzer 9 is equipped with a high-purity nitrogen purging and vacuum system, and a sampling pipeline is installed. The outer shell of the electrical control cabinet 2 is made of 2.5mm carbon steel and is equipped with an anti-corrosion coating. The electrical control cabinet 2 is equipped with circuit breakers, programmable logic controllers (PLCs) and their functional modules, solenoid valves, switching power supplies, buttons, touch screens and other electrical components, and is equipped with Z-PURGE nitrogen sealing function to prevent explosion caused by electrical sparks. Smoke detectors, temperature detectors and flame detectors are installed inside the mixing device housing 1. The smoke detectors, temperature detectors and flame detectors are all connected to the electrical control cabinet 2 for signal transmission. 1. Multiple pipes are installed inside. An exhaust flange 10 is installed on the top of the mixing device housing 1, which is connected to the exhaust pipe. A mass flow controller 4 is installed on the pipe. Multiple positioning and mounting holes are opened at the bottom of the mixing device housing 1. The device can be moved to a fixed position by a forklift, and expansion bolts are driven into the mounting holes to fix the device, thereby improving the stability of the device. The electrical control cabinet 2 is responsible for controlling the action of the solenoid valve, monitoring the changes of each monitoring point in real time, and making corresponding linkage processing. It can also receive signals from smoke detectors, temperature detectors, and flame detectors, and is linked with the fire ventilation system. Once an abnormality is detected, the top exhaust flange 10 can be activated to link with the room ventilation system, so as to achieve continuous air exchange inside the device.

[0020] Working principle of this utility model: This utility model designs a high-precision electronic mixing and special gas mixing device, the specific structure of which is shown in the attached instruction manual. Figure 1-3 As shown, in this technical solution, through the cooperation of various structures, when H2 and N2 need to be mixed, the N2 and H2 gases are transported to the mixing tank 6 through the N2 and H2 pipeline inlets on the left side of the panel. Check valves and filters prevent backflow and particulate contamination. Dual precision controllers control the flow of different gases to achieve initial mixing. The initially mixed gases then enter a stainless steel electrolytic grinding mixing device, where a 6-blade agitator mechanically stirs and forces the gas to mix, ensuring thorough mixing of N2 and H2 gases. Simultaneously, the N2 and H2 pipelines are selected through calculation. The appropriate size is used to achieve the Venturi effect, generating N2 to drive the mixing effect of H2, avoiding gas blockage and failure to achieve the mixing effect. The mass flow controller 4 is responsible for precisely controlling the flow rate of N2 and H2 to ensure that they are mixed according to the preset ratio. It can monitor and adjust the gas flow rate in real time to meet the needs of high-precision mixing. With the use of an independent vacuum and pressure relief system, it can provide pressure relief protection and equipment maintenance during the mixing process. The mixed gas enters the analyzer 9 through the sampling tube on the right side of the panel. The analyzer 9 can detect and analyze the mixed gas to determine whether the mixing ratio is correct.

[0021] The electrical control cabinet 2 coordinates various components through the PLC. During normal operation, it operates according to the predetermined action sequence, monitors the changes of each monitoring point in real time and makes corresponding linkages, pressure, and weight. It receives signals from the flame detector, smoke sensor, and temperature sensor, can trigger the exhaust system or the tri-color light 11, and control the switching and flow regulation of the mass flow controller 4. At the same time, it uses the Z-PURGE nitrogen sealing function to prevent electric sparks from causing an explosion.

[0022] By utilizing multiple positioning and mounting holes at the bottom of the mixing device housing 1, the device can be moved to a fixed location by a forklift, and expansion bolts can be driven into the mounting holes to secure the equipment, thereby improving the working stability and ease of movement of the equipment.

[0023] In the accompanying drawings of the embodiments disclosed in this utility model, only the structures involved in the embodiments of this utility model are shown. Other structures can be referred to with ordinary design. In the absence of conflict, the same embodiment and different embodiments of this utility model can be combined with each other.

[0024] All contents not described in detail in the specification are existing technologies known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited; conventional equipment can be used. Electrical control components not mentioned in this technical solution are existing technologies and are therefore not shown in the figures and will not be described here.

[0025] In conclusion, the above are merely preferred embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A high-precision electronic mixing special gas mixing device, comprising a mixing device shell (1), characterized in that: An electrical control cabinet (2) is installed on the top of the mixing device housing (1). A three-color lamp (11) is installed on the top of the electrical control cabinet (2). A mixing panel (5) is installed inside the mixing device housing (1). A mixing tank (6) is installed inside the mixing device housing (1). The mixing tank (6) is made of stainless steel 316 and its inner surface is polished to 0.2um. A detection panel (8) and an analyzer (9) are installed inside the mixing device housing (1). The analyzer (9) is installed above the detection panel (8). A sample cylinder (7) is installed inside the mixing device housing (1). A flame detector (3) is installed inside the mixing device housing (1). A cabinet door (14) is installed on the mixing device housing (1).

2. The high-precision electronic mixing specialty gas mixing device according to claim 1, characterized in that: The mixing device housing (1) is equipped with a check valve and filter at the inlet end of the N2 and H2 pipes on the left side of the inner plate. It is also equipped with a dual precision controller and an independent vacuum and pressure relief system. The inner surface of the pipes is cleaned and passivated. The valves are oil-free and degreased. The mixing device housing (1) is equipped with a stainless steel electrolytic grinding mixing device and a 6-blade stirrer.

3. The high-precision electronic mixing specialty gas mixing device according to claim 1, characterized in that: An explosion-proof glass window (12) is installed on one side of the cabinet door (14), and an exhaust filter (13) is installed on the front side of the cabinet door (14).

4. The high-precision electronic mixing special gas mixing device according to claim 1, characterized in that: The analyzer (9) is equipped with a high-purity nitrogen purging and vacuum system and is also equipped with a sampling pipeline.

5. The high precision electronic mixing specialty gas blending device of claim 1, wherein: The outer shell of the electrical control cabinet (2) is made of 2.5mm carbon steel and is equipped with an anti-corrosion coating. The electrical control cabinet (2) is equipped with a circuit breaker, a programmable logic controller (PLC) and its functional modules, a solenoid valve, a switching power supply, buttons, a touch screen, and is equipped with Z-PURGE nitrogen sealing function.

6. The high precision electronic mixing specialty gas blending device of claim 1, wherein: The mixing device housing (1) is equipped with a smoke detector, a temperature detector and a flame detector, all of which are connected to the electrical control cabinet (2) via signal.

7. The high precision electronic mixing specialty gas blending device of claim 1, wherein: The mixing device housing (1) has multiple pipes installed inside. The top of the mixing device housing (1) is equipped with an exhaust flange (10), which is connected to the exhaust pipe. A mass flow controller (4) is installed on the pipe. The bottom of the mixing device housing (1) has multiple positioning and mounting holes.

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