A low-temperature reactor for CVD coating equipment

Abstract

This utility model discloses a cryogenic reactor for CVD coating equipment, relating to the field of vacuum coating equipment technology; it includes a cryogenic reactor tank, a cryogenic reactor upper conical cover, a cryogenic reaction chamber, an aluminum particle crucible assembly, a feed chamber assembly, a preheating coil for introducing reaction gas, a reaction chamber resistance wire, and a preheating coil resistance wire; the feed chamber assembly includes a feed pipeline, a feed chamber, and a feed chamber top cover; the preheating coil is located inside the cryogenic reactor tank and below the cryogenic reaction chamber; the gas outlet of the preheating coil extends into the cryogenic reaction chamber, and the gas inlet of the preheating coil extends out of the cryogenic reactor tank and is connected to a mass flow controller; the reaction chamber resistance wire is located outside the cryogenic reaction chamber; the preheating coil resistance wire is located outside the preheating coil; this utility model solves the problems of poor internal temperature uniformity and low reaction efficiency in cryogenic reactors.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, specifically a low-temperature reactor for CVD coating equipment. Background Technology

[0002] To meet increasingly demanding operating conditions, high-end gas turbines operate at ever-increasing temperatures, subjecting their blades to prolonged exposure to high-temperature oxidation and thermal corrosion environments. This necessitates higher performance requirements for materials. Aluminizing the blade surface is a common practice to improve its resistance to high-temperature oxidation and corrosion. Common aluminizing methods include embedding, vapor-phase aluminizing, and chemical vapor deposition (CVD aluminizing). CVD aluminizing is widely used due to its advantages, such as short processing time, controllable process, and ability to coat complex surfaces.

[0003] Chemical vapor deposition aluminizing processes require the conversion of high-purity aluminum particles into gaseous aluminides (AlCl₂) in a low-temperature reactor. x The gaseous aluminides are then fed into an aluminizing furnace via a hydrogen / argon mixture to react with the nickel matrix, forming an intermetallic phase. For the formation of the gaseous aluminides, this process requires raising the temperature of the cryogenic reactor to 200-500°C to facilitate the reaction. Furthermore, process gases such as hydrogen, argon, and hydrogen chloride need to be introduced into the cryogenic reactor.

[0004] Existing cryogenic reactors use single-zone temperature control, which cannot guarantee temperature uniformity. When aluminum particles are added to the cryogenic reactor, only the surface layer participates in the reaction, resulting in low efficiency, and most of the hydrogen chloride gas does not participate in the chemical reaction. Some cryogenic reactors use independent powder feeders, which is costly. In addition, due to the high weight of aluminum particles, powder jamming may occur when using gas transportation. Utility Model Content

[0005] This invention overcomes the shortcomings of the prior art by proposing a low-temperature reactor for CVD coating equipment, which solves the problems of poor internal temperature uniformity and low reaction efficiency in low-temperature reactors.

[0006] To achieve the above objectives, this utility model is implemented through the following technical solution: A cryogenic reactor for CVD coating equipment includes a cryogenic reactor tank, a cryogenic reactor upper conical cover, a cryogenic reaction chamber, and an aluminum particle crucible assembly. The cryogenic reactor upper conical cover is connected to the top of the cryogenic reactor tank, the cryogenic reaction chamber is connected to the cryogenic reactor tank, and the aluminum particle crucible assembly is disposed inside the cryogenic reaction chamber. It also includes a feed chamber assembly, a preheating coil for introducing reaction gas, a reaction chamber resistance wire, and a preheating coil resistance wire. The feed chamber assembly includes a feed pipe, a feed chamber, and a feed chamber top cover. The feed pipe is inserted into and connected to the cryogenic reactor upper conical cover, connected to the bottom of the feed chamber, and connected to the top of the feed chamber top cover. The preheating coil is located inside the cryogenic reactor tank and below the cryogenic reaction chamber. One side of the preheating coil extends from the cryogenic reaction chamber through its outlet end, and the other side extends out of the cryogenic reactor tank through its inlet end and is connected to a mass flow controller. The reaction chamber resistance wire is disposed outside the cryogenic reaction chamber, and the preheating coil resistance wire is disposed outside the preheating coil.

[0007] Furthermore, the feed hopper and the feed hopper top cover are connected by hinge bolts, welded blocks, hinge bolts, and hinge assemblies; the hinge bolt welded blocks are welded to the feed hopper, and each feed hopper assembly is provided with multiple hinge bolt welded blocks, which are evenly distributed along the feed hopper; the hinge bolts are fixed to the hinge bolt welded blocks by bolts and nuts; the hinge assemblies are connected to the feed hopper and the feed hopper top cover by bolts respectively.

[0008] Furthermore, the bottom of the feed hopper is connected to a KF connector, which is connected to one side of the KF ball valve via a KF clamp and a KF bracket sealing ring; the other side of the KF ball valve is connected to the feed pipeline via a KF connector.

[0009] Furthermore, an eyepiece tube is connected to the conical surface of the upper conical cover of the cryogenic reactor. The eyepiece tube is inserted into and welded to the upper conical cover of the cryogenic reactor, and high-purity quartz glass eyepieces are installed at both ends of the eyepiece tube.

[0010] Furthermore, an alumina fastener is welded to the outside of the cryogenic reactor tank. The alumina fastener has a threaded hole for screwing into an alumina insulating component. The alumina insulating component is a hollow structure with an external resistance wire connector passing through it. The external resistance wire connector extends into the inside of the cryogenic reactor tank and has threads on one side. The resistance wire of the reaction chamber and the resistance wire of the preheating coil are respectively threaded to the corresponding external resistance wire connector.

[0011] Furthermore, graphite rigid felt is laid as an insulation layer on the inner wall and bottom of the cryogenic reactor tank.

[0012] Furthermore, the aluminum particle crucible assembly includes an annular plate and an open flat cylindrical body. The annular plate is welded to the upper edge of the flat cylindrical body, and the side wall of the flat cylindrical body is evenly provided with several circular vent holes for the passage of process gas. The lower surface of the annular plate of the aluminum particle crucible assembly is in contact with the upper surface of the aluminum particle crucible assembly fixing block inside the low-temperature reaction chamber.

[0013] Furthermore, a reactor partition is placed above the aluminum particle crucible assembly. The reactor partition is a flat, round cylindrical structure with an open top. Several vent holes are evenly distributed at the bottom of the reactor partition. The outer ring of the reactor partition is provided with a circular boss, and the bottom of the circular boss is engaged with the aluminum particle crucible assembly.

[0014] Furthermore, a flange is provided at the upper end of the cryogenic reaction chamber, through which the cryogenic reaction chamber connects the upper conical cover of the cryogenic reactor to the cryogenic reactor tank; a sealing groove is opened on the upper end face of the flange of the cryogenic reaction chamber to place an O-ring.

[0015] The beneficial effects of this utility model compared to the prior art are as follows: 1. The cryogenic reactor requires the introduction of process gases such as hydrogen chloride, hydrogen, and argon. If the flow rate of the process gas is too high, it will not reach the reaction temperature when passing through the aluminum particles, reducing the reaction efficiency. To address this, this invention adds a preheating coil and provides a separate heating resistance wire for the preheating coil; dual resistance wires are used to heat the cryogenic reactor, and graphite rigid felt is used as insulation material to ensure uniform temperature inside the reactor.

[0016] 2. This utility model uses a bottom-inlet structure, where process gas enters from the bottom of the aluminum particles and flows out from the top into the furnace body, increasing the number of aluminum particles participating in the reaction and improving the reaction efficiency.

[0017] 3. The conical cover assembly of the cryogenic reactor is equipped with a viewing eyepiece and a feed hopper. The remaining amount of aluminum particles can be observed through the viewing eyepiece, and aluminum particles can be added to the cryogenic reactor through the feed hopper, eliminating the need for a powder feeder and reducing technical costs.

[0018] 4. Using a mass flow controller, the gas flow rate can be precisely controlled, the reaction rate can be controlled, and the uniformity of the mixed gas entering the cryogenic reactor can be maintained. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the cryogenic reactor described in an embodiment of the present invention; Figure 2 for Figure 1 A magnified view of a section at point A in the middle; Figure 3 Schematic diagram of aluminum particle crucible assembly; Figure 4 This is a schematic diagram of the reactor partition structure; Figure 5 for Figure 1 Enlarged view of point B in the middle; The following components are marked in the diagram: 1. KF25 connector; 2. Upper conical cover of the cryogenic reactor; 3. Cryogenic reaction chamber; 4. Cryogenic reactor tank; 5. Insulation layer; 6. Resistance wire of the reaction chamber; 7. Resistance wire of the preheating coil; 8. Preheating coil; 9. Aluminum granule crucible assembly; 10. Reactor partition; 11. O-ring seal; 12. External connector of the resistance wire; 13. Alumina insulation component; 14. Alumina fixing component; 15. Eyepiece tube; 16. High-purity quartz glass eyepiece; 17. Feed pipeline; 18. KF bracket sealing ring; 19. KF ball valve; 20. KF clamp; 21. Feed hopper; 22. Feed hopper top cover; 23. Hinge bolt fixing welding block; 24. Hinge bolt; 25. Hinge assembly. Detailed Implementation

[0020] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, this utility model will be further described in detail with reference to the embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it. The technical solution of this utility model will be described in detail below with reference to the embodiments and accompanying drawings, but the scope of protection is not limited thereto.

[0021] See Figures 1 to 5 This embodiment proposes a low-temperature reactor for CVD coating equipment, including a low-temperature reactor tank 4, a low-temperature reactor upper conical cover 2, a low-temperature reaction chamber 3, a feed chamber assembly, an aluminum particle crucible assembly 9, and a preheating coil 8. The cryogenic reaction chamber 3 is located on the inner side of the cryogenic reactor tank 4. The bottom of the upper conical cover 2 of the cryogenic reactor is provided with a flange. The upper conical cover 2 of the cryogenic reactor is connected to the cryogenic reaction chamber 3 and the cryogenic reactor tank 4 through the flange. The connection method is bolt connection. The top of the upper conical cover 2 of the cryogenic reactor is welded with a KF25 connector 1 for connecting the gas pipeline.

[0022] The upper conical cover 2 of the cryogenic reactor has two through holes on its conical surface, which are respectively connected to the eyepiece tube 15 and the feed hopper assembly; the feed hopper assembly includes a feed pipe 17, a feed hopper 21, a feed hopper top cover 22, a hinge bolt fixing welding block 23, a hinge bolt 24, and a hinge assembly 25; the feed pipe 17 is inserted into and welded to the upper conical cover 2 of the cryogenic reactor; as shown Figure 2As shown, the hinge bolt fixing welding block 23 is welded to the feed bin 21. Each feed bin assembly is provided with three hinge bolt fixing welding blocks 23, which are evenly distributed along the feed bin 21. The hinge bolt 24 is fixed to the hinge bolt fixing welding block 23 by bolt nuts. The hinge assembly 25 is connected to the feed bin 21 and the feed bin top cover 22 by bolts. The bottom of the feed bin 21 is connected to a KF connector, which is connected to one side of the KF ball valve 19 through KF clamp 20 and KF bracket sealing ring 18. The other side of the KF ball valve 19 is connected to the feed pipeline 17 through the KF connector.

[0023] The eyepiece tube 15 is inserted into and welded to the upper conical cover 2 of the cryogenic reactor, and high-purity quartz glass eyepieces 16 are installed at both ends of the eyepiece tube 15.

[0024] Furthermore, a flange is also provided at the upper end of the low-temperature reaction chamber 3, and the low-temperature reaction chamber 3 is connected to the upper conical cover 2 of the low-temperature reactor and the low-temperature reactor tank 4 through its flange; a sealing groove is opened on the upper end face of the flange of the low-temperature reaction chamber 3 for placing the O-ring seal 11; an aluminum particle crucible assembly fixing block is welded inside the low-temperature reaction chamber 3 for fixing the aluminum particle crucible assembly 9.

[0025] The aluminum particle crucible assembly 9 includes an annular plate and an open flat cylindrical body. The annular plate is welded to the upper edge of the flat cylindrical body. The side wall of the flat cylindrical body is evenly provided with several circular vent holes for the passage of process gas. Two handles are welded to the upper surface of the annular plate for placing and removing the aluminum particle crucible assembly 9 into the low-temperature reaction chamber 3. The lower surface of the annular plate of the aluminum particle crucible assembly 9 is in contact with the upper surface of the aluminum particle crucible assembly fixing block inside the low-temperature reaction chamber 3.

[0026] A reactor partition 10 is placed above the aluminum particle crucible assembly 9. The reactor partition 10 is a flat, round cylindrical structure with an open top. Several ventilation holes are evenly distributed at the bottom of the reactor partition 10. Both the aluminum particle crucible assembly 9 and the reactor partition 10 are used to hold aluminum particles. The outer ring of the reactor partition 10 is provided with a circular boss. The bottom of the circular boss contacts the aluminum particle crucible assembly 9 for fixation. The bottom of the reactor partition 10 is provided with a circular protrusion. During installation, the circular protrusion is aligned with the center of the aluminum particle crucible assembly 9 for positioning.

[0027] There are two sets of preheating coils 8, both located inside the cryogenic reactor tank 4 and below the cryogenic reaction chamber 3. The preheating coils 8 are spiral-shaped to increase the gas path and ensure the gas preheating effect. One side of the preheating coil 8 extends into the cryogenic reaction chamber 3 from the gas outlet end, and the other side of the preheating coil 8 extends out of the cryogenic reactor tank 4 and is connected to the mass flow controller to achieve controllable gas flow.

[0028] The cryogenic reactor is equipped with two sets of heating resistance wires: the reaction chamber resistance wire 6 and the preheating coil resistance wire 7. The reaction chamber resistance wire 6 is located outside the cryogenic reaction chamber 3 to heat the cryogenic reaction chamber 3; the preheating coil resistance wire 7 is located outside the preheating coil 8 to heat the preheating coil 8. Both sets of resistance wires have independent temperature control systems to ensure that the temperature meets the process requirements.

[0029] To improve the insulation effect, graphite rigid felt is laid as an insulation layer 5 on the inner wall and bottom of the low-temperature reactor tank 4, as described in the specific implementation method. Figure 1 As shown, the insulation layer 5 is divided into three parts: the upper, middle, and lower sidewalls and the bottom. The bottom insulation layer 5 is circular and is in contact with the ground and the low-temperature reactor tank 4. The bottom insulation layer 5 prevents heat loss from the bottom of the tank. The upper, middle, and lower insulation layers 5 are each made of three fan-shaped insulation felts spliced ​​together, with the splicing gaps arranged in a cross pattern to ensure the insulation effect.

[0030] Figure 5 The diagram shows the connection method of the resistance wire. The connection method of the resistance wire 6 in the reaction chamber and the resistance wire 7 in the preheating coil is the same. Specifically, the cryogenic reactor tank 4 has a circular through hole at the same position as the insulation layer for the alumina insulation component 13 to pass through. An alumina fixing component 14 is welded to the outside of the cryogenic reactor tank 4. The alumina fixing component 14 has a threaded hole for screwing into the alumina insulation component 13. One end of the alumina insulation component 13 is threaded. The alumina insulation component 13 has a hollow structure for passing through the resistance wire external connector 12. The alumina insulation component 13 has an internal thread, and the resistance wire external connector 12 has an external thread for connecting to the alumina insulation component 13. The resistance wire external connector 12 has a square boss on the outside side of the cryogenic reactor for connecting to the power supply and facilitating rotation installation. The resistance wire external connector 12 has a thread on the inside side, and the resistance wire and the resistance wire external connector 12 have threads on one side. The resistance wire external connector 12 and the resistance wire are connected by a specially made internally threaded nut of the same material.

[0031] The above description is a further detailed explanation of the present invention in conjunction with specific preferred embodiments. It should not be considered that the specific embodiments of the present invention are limited to this. For those skilled in the art, several simple deductions or substitutions can be made without departing from the present invention, and all such deductions or substitutions should be considered to fall within the scope of patent protection determined by the submitted claims.

Claims

1. A low temperature reactor for CVD coating equipment, comprising a low temperature reactor tank (4), a low temperature reactor upper cone cover (2), a low temperature reactor chamber (3), and an aluminum particle crucible assembly (9); the low temperature reactor upper cone cover (2) is connected to the top of the low temperature reactor tank (4), the low temperature reactor chamber (3) is connected in the low temperature reactor tank (4), and the aluminum particle crucible assembly (9) is arranged in the low temperature reactor chamber (3); characterized in that, It also includes a feed hopper assembly, a preheating coil (8) for introducing reaction gas, a reaction chamber resistance wire (6), and a preheating coil resistance wire (7); the feed hopper assembly includes a feed pipe (17), a feed hopper (21), and a feed hopper top cover (22); the feed pipe (17) is inserted into and connected to the upper conical cover (2) of the cryogenic reactor, the feed pipe (17) is connected to the bottom of the feed hopper (21), and the top of the feed hopper (21) is connected to the feed hopper top cover (22); the preheating coil (8) is located inside the cryogenic reactor tank (4) and below the cryogenic reaction chamber (3); the gas outlet side of the preheating coil (8) extends into the cryogenic reaction chamber (3), and the gas inlet side of the preheating coil (8) extends out of the cryogenic reactor tank (4) and is connected to the mass flow controller; the reaction chamber resistance wire (6) is set outside the cryogenic reaction chamber (3); the preheating coil resistance wire (7) is set outside the preheating coil (8).

2. A low temperature reactor for CVD coating equipment according to claim 1, characterized in that The feed hopper (21) and the feed hopper top cover (22) are connected by a hinge bolt fixed welding block (23), a hinge bolt (24) and a hinge assembly (25); the hinge bolt fixed welding block (23) is welded to the feed hopper (21), and each feed hopper assembly is provided with multiple hinge bolt fixed welding blocks (23), which are evenly distributed along the feed hopper (21); the hinge bolt (24) is fixed to the hinge bolt fixed welding block (23) by bolt nuts; the hinge assembly (25) is connected to the feed hopper (21) and the feed hopper top cover (22) by bolts respectively.

3. A low temperature reactor for CVD coating equipment according to claim 1, characterized in that, The bottom of the feed hopper (21) is connected to a KF connector, which is connected to one side of the KF ball valve (19) via a KF clamp (20) and a KF bracket sealing ring (18); the other side of the KF ball valve (19) is connected to the feed pipeline (17) via a KF connector.

4. The low temperature reactor for CVD coating apparatus according to claim 1, wherein A visual eyepiece tube (15) is connected to the conical surface of the upper conical cover (2) of the low-temperature reactor. The visual eyepiece tube (15) is inserted into and welded to the upper conical cover (2) of the low-temperature reactor. High-purity quartz glass visual eyepieces (16) are installed at both ends of the visual eyepiece tube (15).

5. The low temperature reactor for CVD coating apparatus according to claim 1, wherein The cryogenic reactor tank (4) is welded with an alumina fastener (14), which has a threaded hole for screwing in an alumina insulating component (13). The alumina insulating component (13) is hollow and has a resistance wire connector (12) passing through it. The resistance wire connector (12) extends into the cryogenic reactor tank (4) and has a thread on one side. The reaction chamber resistance wire (6) and the preheating coil resistance wire (7) are respectively threaded to the corresponding resistance wire connector (12).

6. A low temperature reactor for CVD coating equipment according to claim 1, characterized in that, Graphite hard felt is laid as an insulation layer on the inner wall and bottom of the low-temperature reactor tank (4).

7. The low temperature reactor for CVD coating apparatus according to claim 1, wherein The aluminum particle crucible assembly (9) includes an annular plate and an open flat cylindrical body. The annular plate is welded to the upper edge of the flat cylindrical body. The side wall of the flat cylindrical body is evenly provided with several circular air holes for the passage of process gas. The lower surface of the annular plate of the aluminum particle crucible assembly (9) is in contact with the upper surface of the aluminum particle crucible assembly fixing block inside the low temperature reaction chamber (3).

8. A low temperature reactor for CVD coating equipment according to claim 7, characterized in that An aluminum particle crucible assembly (9) is placed above a reactor partition layer (10), the reactor partition layer (10) is a flat circular cylindrical structure with an open top, the bottom of the reactor partition layer (10) is uniformly provided with a plurality of air holes, and the outer ring of the reactor partition layer (10) is provided with a circular ring boss, and the bottom of the circular ring boss is connected with the aluminum particle crucible assembly (9).

9. The low temperature reactor for CVD coating apparatus according to claim 1, wherein, A flange is arranged at the upper end of the low-temperature reaction bin (3), and the low-temperature reaction bin (3) is connected with the low-temperature reactor upper cone cover (2) and the low-temperature reactor tank body (4) through the flange; a sealing groove is formed in the upper end surface of the flange of the low-temperature reaction bin (3), and an O-shaped sealing ring (11) is arranged in the sealing groove.

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