A liquid reaction device in a non-vacuum coating gun
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-08
- Publication Date
- 2026-08-14
AI Technical Summary
现有的结构不仅结构复杂、体积大,而且这种药液在雾化、加热高温后再送出进行等离子反应,高温对等离子化学反应影响很大、降低镀膜效果,而且一般这种都是较长的连续时间工作,且加热腔难以保证药液全部汽化,等离子枪头中喷射出去的等离子流中仍含有一些雾滴状态的药液,这部分药液直接喷洒在工件表面影响成膜质量等离子先与药液接触反应;因此这个行业急需进行更好的技术改进出现,以解决现有技术的缺陷
本实用新型中被电离后的等离子气体在通气压力下进入至药液反应喷涂枪中,通电电离产生的高温会经过药液反应喷涂枪中降温结构进行降温,降温后的等离子气体在药液反应喷涂枪端部通过通气压差将药液带出雾化,形成新的物质且粘附在待镀膜基体表面。本实用新型结构体积小,降温后进行等离子气体与药液充分雾化反应,避免高温反应对镀膜质量的影响,同时配合多处通药通道设计,充分电离的等离子气体最后能更好的与药液发生雾化化学反应后进行镀膜,改变了行业弊端,促进整个非真空镀膜领域推广使用。
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Figure CN224629142U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of coating technology, specifically relating to a chemical reaction device in a non-vacuum coating gun. Background Technology
[0002] Plasma-enhanced chemical vapor deposition (PECVD) utilizes plasma generated from a gas in a plasma generator under the influence of a high-frequency alternating current. This plasma is then introduced into a reaction chamber, where reactants undergo cross-linking or polymerization under the influence of the plasma. The resulting plasma is then deposited onto the material surface under the action of a post-reaction plasma gas stream, yielding a solid thin film. PECVD offers advantages such as low deposition temperature, minimal impact on the substrate's structure and physical properties, high deposition rate, and strong film adhesion. It can prepare various metal, inorganic, and organic films and is widely used in mold manufacturing, semiconductor manufacturing, solar cells, and coating technology.
[0003] Plasma-enhanced chemical vapor deposition (PECVD) technology is most commonly used in coating equipment. Existing coating equipment typically operates in a vacuum environment. However, ion plating, developed from vacuum evaporation and sputtering coating, is a new coating technology that introduces various gas discharge methods into the vapor deposition field. The entire vapor deposition process takes place within plasma. Ion plating significantly increases the particle energy of the film layer, resulting in films with superior performance and expanding the application areas of "thin films." It is a rapidly developing and popular new technology. Currently available coating systems are primarily based on vacuum chambers to achieve the coating purpose. This method involves long coating times, high consumption of gases and chemicals, and difficulty in controlling production costs. A few use atmospheric pressure plasma plating, but the coating effect is poor, with low uniformity. The coating process uses high power and cannot be monitored in real time, leading to wasted costs due to temperature and flow rate fluctuations.
[0004] Therefore, atmospheric pressure plasma coating has emerged in recent years. However, existing technologies require the chemical solution to be injected first, atomized into droplets, then vaporized by absorbing heat in a heating mechanism, and finally ionized into plasma by a plasma gun mechanism. The plasma is then ejected from the plasma gun mechanism and undergoes a chemical reaction, forming new substances that adhere to the surface of the substrate to be coated. Existing structures are not only complex and bulky, but the high temperature after atomization and heating of the chemical solution before the plasma reaction significantly impacts the plasma chemical reaction, reducing the coating effect. Furthermore, this process typically involves long, continuous operation, and the heating chamber cannot guarantee complete vaporization of the chemical solution. The plasma stream ejected from the plasma gun head still contains some droplets of chemical solution, which directly sprays onto the workpiece surface, affecting the film quality as the plasma reacts with the chemical solution first. Therefore, the industry urgently needs better technological improvements to overcome the shortcomings of existing technologies. Summary of the Invention
[0005] The purpose of this invention is to solve the problems mentioned in the background art and to provide a liquid reaction device for a non-vacuum coating gun.
[0006] To achieve the above objectives, the technical solution of this utility model is as follows: a liquid reaction device in a non-vacuum coating gun, comprising a liquid reaction spray gun, the liquid reaction spray gun being connected to an ion generating device for use, and the ionized plasma gas entering the liquid reaction spray gun under ventilation pressure; The chemical reaction spray gun includes a spray gun body, a flow divider assembly, a spray gun head assembly, and a rear positioning assembly. The flow divider assembly is positioned and installed in the spray gun body through the spray gun head assembly and the rear positioning assembly. The flow divider assembly, spray gun head assembly, and rear positioning assembly form a channel for plasma gas to pass through. A circulating cooling chamber is formed between the flow divider assembly and the spray gun body. A chemical channel communicating with the end of the flow divider assembly is formed between the spray gun body and the spray gun head assembly. The flow divider assembly and the spray gun head assembly are connected to form a mixing channel. The chemical solution enters the mixing channel through the chemical solution channel and reacts chemically with the incoming plasma gas to form a new substance that adheres to the surface of the substrate to be coated.
[0007] In the above-mentioned liquid reaction device of a non-vacuum coating gun, the flow divider core assembly includes a main flow divider core, a tail flow divider core, and multiple auxiliary flow divider cores. The multiple auxiliary flow divider cores are axially stacked between the main flow divider core and the tail flow divider core. The main flow divider core is positioned and installed by the spray gun head assembly, and the tail flow divider core is positioned and connected by a rear positioning assembly. The rear positioning assembly also positions the docking of the ion gun head assembly. The main flow divider core, the multiple auxiliary flow divider cores, and the spray gun body form the circulating cooling chamber. The spray gun body is respectively provided with a cooling inlet connection port and a cooling outlet connection port.
[0008] In the above-mentioned liquid reaction device of a non-vacuum coating gun, the spray gun body is provided with a front mounting cavity and a rear mounting cavity, and a step is formed at the connection between the front mounting cavity and the rear mounting cavity. The spray gun head assembly and the main flow divider core are installed in the front mounting cavity, and the flow divider tail core, multiple flow divider auxiliary cores, and the rear positioning assembly are installed in the rear mounting cavity. A core sleeve is positioned and installed in the rear mounting cavity, and multiple flow divider auxiliary cores are installed in the core sleeve.
[0009] In the above-mentioned liquid reaction device of a non-vacuum coating gun, the multiple split-type sub-cores and core sleeves are respectively provided with corresponding and interconnected rear cooling grooves and core holes. A rear cooling chamber is formed between the core sleeve and the rear mounting cavity, and the cooling inlet is connected to the rear cooling chamber. The split-type main core and the front mounting cavity are respectively provided with corresponding and interconnected front cooling grooves and front through holes. Multiple circulation connection holes connected to the front through holes are provided on the step, and the cooling outlet is connected to the front cooling groove. The rear cooling chamber, core holes, rear cooling groove, circulation connection holes, front through holes, and front cooling groove are interconnected to form the circulating cooling chamber. Sealing gaskets and heat insulation gaskets are respectively provided between adjacent split-type sub-cores, and between split-type sub-cores and split-type main cores and split-type tail cores. Sealing gaskets are provided between the split-type tail core and the rear positioning assembly, and between the rear positioning assembly and the spray gun body. Sealing gaskets are provided between the end of the split-type main core and the spray gun body, thereby enabling the formed circulating cooling chamber to circulate in a sealed manner.
[0010] In the above-mentioned liquid reaction device of a non-vacuum coating gun, the spray gun head assembly includes a nozzle and a spray cap. The spray cap is fixedly connected to the spray gun body and fixes the nozzle in the front mounting cavity. Multiple liquid channels are provided between the nozzle, the spray cap, and the main flow core.
[0011] In the above-mentioned liquid reaction device of a non-vacuum coating gun, there are liquid passage gaps between the nozzle, the spray cap, and the main flow core. The main body of the spray gun is provided with multiple inlet holes corresponding to the liquid channels. The nozzle is provided with multiple flow holes corresponding to the inlet holes. The spray cap and the main flow core are provided with flow grooves corresponding to the flow holes. The flow holes, flow grooves, and flow gaps are connected to form the liquid channels.
[0012] In the above-mentioned liquid reaction device of a non-vacuum coating gun, the rear positioning component includes a rear positioning sleeve, a rear inner connecting positioning sleeve, and a rear outer connecting positioning sleeve. The rear positioning sleeve is sealed to the spray gun body and simultaneously positions the diverter tail core. The rear outer connecting positioning sleeve is fixedly connected to the spray gun body and simultaneously presses and positions the rear positioning sleeve and the rear inner connecting positioning sleeve. The rear inner connecting positioning sleeve and the rear outer connecting positioning sleeve position the docking of the ion gun head assembly. The ion gun body assembly forms a positioning connection with the spray gun body and the rear positioning component through the ion gun head assembly.
[0013] In the above-mentioned liquid reaction device of a non-vacuum coating gun, the spray gun body is provided with a positioning hole, the spray head is provided with a positioning groove, a positioning bolt is connected in the positioning hole, and the end of the positioning bolt is correspondingly engaged in the positioning groove.
[0014] In the above-mentioned liquid reaction device of a non-vacuum coating gun, sealing gaskets are respectively provided between the nozzle, the main flow core, and the spray cap.
[0015] By adopting the above-described technical solution, this utility model has the following beneficial effects: In this invention, the ionized plasma gas enters the chemical reaction spray gun under pressure. The high temperature generated by ionization is cooled by a cooling structure within the spray gun. The cooled plasma gas then atomizes the chemical solution at the tip of the spray gun through a pressure difference, forming a new substance that adheres to the surface of the substrate to be coated. This invention features a compact structure and allows for thorough atomization and reaction of the plasma gas and chemical solution after cooling, avoiding the negative impact of high-temperature reactions on coating quality. Furthermore, the design with multiple chemical channels ensures that the fully ionized plasma gas can better react with the chemical solution for coating, overcoming industry shortcomings and promoting its widespread use in the non-vacuum coating field. Attached Figure Description
[0016] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 , Figure 3 This is a three-dimensional cross-sectional structural diagram of the present invention; Figure 4 This is a three-dimensional structural diagram of the spray gun body in the liquid reaction spray gun of this utility model. Detailed Implementation
[0017] The present invention will be further described in conjunction with the accompanying drawings.
[0018] Please see Figures 1 to 4 This utility model provides a liquid reaction device in a non-vacuum coating gun, including a liquid reaction spray gun 2. The liquid reaction spray gun 2 is connected to an ion generator and is used in conjunction with the ionized plasma gas entering the liquid reaction spray gun 2 under ventilation pressure. The chemical reaction spray gun 2 includes a spray gun body 2-1, a flow divider core assembly 2-2, a spray gun head assembly 2-3, and a rear positioning assembly 2-4. The front and rear ends of the flow divider core assembly 2-2 are positioned and installed in the spray gun body 2-1 through the spray gun head assembly 2-3 and the rear positioning assembly 2-4. The flow divider core assembly 2-2, the spray gun head assembly 2-3, and the rear positioning assembly 2-4 form a channel for plasma gas to pass through. A circulating cooling chamber 21 is formed between the flow divider core assembly 2-2 and the spray gun body 2-1. A chemical channel 23 is formed between the spray gun body 2-1 and the spray gun head assembly 2-3, which communicates with the end of the flow divider core assembly 2-2. The flow divider core assembly 2-2 and the spray gun head assembly 2-3 are connected to form a mixing channel 232. The chemical solution enters the mixing channel 232 through the chemical solution channel 23 and reacts chemically with the incoming plasma gas to form a new substance that adheres to the surface of the substrate to be coated.
[0019] Furthermore, the diversion core assembly 2-2 includes a main diversion core 24, a tail diversion core 25, and multiple secondary diversion cores 26. The multiple secondary diversion cores 26 are axially stacked between the main diversion core 24 and the tail diversion core 25. The main diversion core 24 is positioned and installed by the spray gun head assembly 2-3, and the tail diversion core 25 is positioned and connected by the rear positioning assembly 2-4. The rear positioning assembly 2-4 also positions the docking of the ion gun head assembly 1-1. The main diversion core 24, the multiple secondary diversion cores 26, and the spray gun body 2-1 form the circulating cooling chamber 21. The spray gun body 2-1 is respectively provided with a cooling inlet connection port 211 and a cooling outlet connection port 222.
[0020] Furthermore, the spray gun body 2-1 is provided with a front mounting cavity 223 and a rear mounting cavity 224. A step 225 is formed at the connection between the front mounting cavity 223 and the rear mounting cavity 224. The spray gun head assembly 2-3 and the main flow divider core 24 are installed in the front mounting cavity 223. The flow divider tail core 25, multiple flow divider auxiliary cores 26, and the rear positioning assembly 2-4 are installed in the rear mounting cavity 224. A core sleeve 27 is positioned and installed in the rear mounting cavity 224. Multiple flow divider auxiliary cores 26 are installed in the core sleeve 27.
[0021] Furthermore, the plurality of branch cores 26 and core sleeves 27 are respectively provided with corresponding and communicating rear cooling grooves 26-1 and core holes 26-2. A rear cooling chamber 21-1 is formed between the core sleeve 27 and the rear mounting cavity 224, and the cooling inlet connection port 211 communicates with the rear cooling chamber 21-1. The branch main core 24 and the front mounting cavity 223 are respectively provided with corresponding and communicating front cooling grooves 24-1 and front through holes 24-2. A plurality of circulation connection holes 226 communicating with the front through holes 24-2 are provided on the step 225, and the cooling outlet connection port 222 communicates with the front cooling grooves 24-1. The rear cooling chamber 21-1 and the core are respectively provided with corresponding and communicating rear cooling grooves 26-1 and core holes 26-2. The circulating cooling chamber 21 is formed by the interconnection of hole 26-2, rear cooling groove 26-1, circulation connection hole 226, front through hole 24-2, and front cooling groove 24-1. Sealing gaskets 666 and heat insulation pads 888 are respectively provided between adjacent flow splitting sub-cores 26, and between flow splitting sub-cores 26 and flow splitting main cores 24 and flow splitting tail cores 25. Sealing gaskets 666 are provided between flow splitting tail cores 25 and rear positioning components 2-4, and between rear positioning components 2-4 and spray gun body 2-1. Sealing gaskets 666 are provided between the end of flow splitting main core 24 and spray gun body 2-1, thereby enabling the formed circulating cooling chamber 21 to perform sealed circulation.
[0022] Furthermore, the spray gun head assembly 2-3 includes a nozzle 32 and a spray cap 33. The spray cap 33 is fixedly connected to the spray gun body 2-1 and fixes the nozzle 32 in the front mounting cavity 223. Multiple liquid channels 23 are provided between the nozzle 32, the spray cap 33, and the main flow divider core 24. The nozzle 32, the spray cap 33, and the main flow divider core 24 are respectively provided with a liquid passage gap 333. The spray gun body 2-1 is provided with multiple inlet holes 334 corresponding to and communicating with the liquid channels 23. The nozzle 32 is provided with multiple through holes 335 corresponding to the inlet holes 334. The spray cap 33 and the main flow divider core 24 are respectively provided with through grooves 336 corresponding to the through holes 335. The through holes 335, through grooves 336, and through gaps 333 are connected to form the liquid channels 23.
[0023] Furthermore, the rear positioning component 2-4 includes a rear positioning sleeve 42, a rear inner connecting positioning sleeve 43, and a rear outer connecting positioning sleeve 44. The rear positioning sleeve 42 is sealed to the spray gun body 2-1 and simultaneously positions the diverter tail core 25. The rear outer connecting positioning sleeve 44 is fixedly connected to the spray gun body 2-1 and simultaneously presses and positions the rear positioning sleeve 42 and the rear inner connecting positioning sleeve 43. The rear inner connecting positioning sleeve 43 and the rear outer connecting positioning sleeve 44 position the docking of the ion gun head assembly 1-1. The ion gun body assembly 1-2 forms a positioning connection with the spray gun body 2-1 and the rear positioning component 2-4 through the ion gun head assembly 1-1.
[0024] Furthermore, to improve the ease of installation, the spray gun body 2-1 is provided with a positioning hole 215, the nozzle 32 is provided with a positioning groove 321, a positioning bolt 216 is connected in the positioning hole 215, and the end of the positioning bolt 216 is correspondingly engaged in the positioning groove 321.
[0025] Furthermore, in order to improve the sealing of the connection, sealing gaskets 234 are respectively provided between the nozzle 32 and the main flow core 24 and the spray cap 33.
[0026] In use, the ion generator introduces the ionized plasma gas into the chemical reaction spray gun 2 under ventilation pressure. The high-temperature plasma gas enters the chemical reaction spray gun 2, and the circulating cooling chamber 21 in the chemical reaction spray gun 2 forms a circulation with the external water supply device through the cooling inlet 211 and cooling outlet 222, thereby cooling the high-temperature plasma gas in the chemical reaction spray gun 2. The cooled plasma gas is then atomized at the end of the chemical reaction spray gun through the ventilation pressure difference from the inlet hole 334 and the chemical channel 23, forming a new substance that adheres to the surface of the substrate to be coated. The two-way chemical supply design between the nozzle 32, the spray cap 33, and the main flow core 24 ensures a sufficient reaction.
[0027] The above provides a detailed description of the liquid reaction device in a non-vacuum coating gun provided by the present invention. Specific examples have been used to illustrate the principle and implementation of the present invention. The description of the above embodiments is only for the purpose of helping to understand the technical solution disclosed in the present invention. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of the present invention. Therefore, the content of this specification should not be construed as a limitation of the present invention.
Claims
1. A chemical reaction device for a non-vacuum coating gun, characterized in that: The liquid reaction spray gun (2) is connected to the ion generator. The ionized plasma gas enters the liquid reaction spray gun (2) under the ventilation pressure. The chemical reaction spray gun (2) includes a spray gun body (2-1), a flow divider assembly (2-2), a spray gun head assembly (2-3), and a rear positioning assembly (2-4). The flow divider assembly (2-2) is positioned and installed in the spray gun body (2-1) through the spray gun head assembly (2-3) and the rear positioning assembly (2-4). The flow divider assembly (2-2), the spray gun head assembly (2-3), and the rear positioning assembly (2-4) form a channel for plasma gas to pass through. The flow divider assembly (2-2) and the spray gun head assembly (2-3) are connected. A circulating cooling chamber (21) is formed between the gun body (2-1); a liquid channel (23) communicating with the end of the flow divider core assembly (2-2) is formed between the spray gun body (2-1) and the spray gun head assembly (2-3); a mixing channel (232) is formed between the flow divider core assembly (2-2) and the spray gun head assembly (2-3); the liquid enters the mixing channel (232) through the liquid channel (23) and reacts chemically with the incoming plasma gas to form a new substance that adheres to the surface of the substrate to be coated.
2. The liquid chemical reaction device in a non-vacuum coating gun according to claim 1, characterized in that: The diversion core assembly (2-2) includes a main diversion core (24), a tail diversion core (25), and multiple secondary diversion cores (26). The multiple secondary diversion cores (26) are axially stacked between the main diversion core (24) and the tail diversion core (25). The main diversion core (24) is positioned and installed by the spray gun head assembly (2-3). The tail diversion core (25) is positioned and connected by the rear positioning assembly (2-4). The rear positioning assembly (2-4) also positions the docking of the ion gun head assembly (1-1). The main diversion core (24), the multiple secondary diversion cores (26), and the spray gun body (2-1) form the circulating cooling chamber (21). The spray gun body (2-1) is provided with a cooling inlet connection (211) and a cooling outlet connection (222).
3. The liquid medicine reaction device in the non-vacuum coating gun according to claim 2, characterized in that: The spray gun body (2-1) is provided with a front mounting cavity (223) and a rear mounting cavity (224). A step (225) is formed at the connection between the front mounting cavity (223) and the rear mounting cavity (224). The spray gun head assembly (2-3) and the main splitting core (24) are installed in the front mounting cavity (223). The splitting tail core (25), multiple splitting auxiliary cores (26), and the rear positioning assembly (2-4) are installed in the rear mounting cavity (224). A core sleeve (27) is positioned and installed in the rear mounting cavity (224). Multiple splitting auxiliary cores (26) are installed in the core sleeve (27).
4. The liquid medicine reaction device in the non-vacuum coating gun according to claim 3, characterized in that: The multiple branch cores (26) and core sleeves (27) are respectively provided with corresponding and communicating rear cooling grooves (26-1) and core holes (26-2). The core sleeve (27) and the rear mounting cavity (224) form a rear cooling cavity (21-1), and the cooling inlet connection (211) communicates with the rear cooling cavity (21-1). The branch main core (24) and the front mounting cavity (223) are respectively provided with corresponding and communicating front cooling grooves (24-1) and front through holes (24-2). The step (225) is provided with multiple circulation connection holes (226) communicating with the front through holes (24-2), and the cooling outlet connection (222) communicates with the front cooling grooves (24-1). The rear cooling cavity (21-1) and the core hole (26-2) are respectively provided with corresponding and communicating rear cooling grooves (26-1) and core holes (26-2). 2) The rear cooling tank (26-1), circulation connection hole (226), front through hole (24-2), and front cooling tank (24-1) are connected to form the circulating cooling chamber (21). A sealing gasket (666) and a heat insulation pad (888) are respectively provided between adjacent flow splitting sub-cores (26), and between flow splitting sub-cores (26) and flow splitting main cores (24) and flow splitting tail cores (25). A sealing gasket (666) is provided between flow splitting tail cores (25) and rear positioning components (2-4), and between rear positioning components (2-4) and spray gun body (2-1). A sealing gasket (666) is provided between the end of flow splitting main core (24) and spray gun body (2-1), so that the formed circulating cooling chamber (21) can be sealed and circulated.
5. The liquid chemical reaction device in a non-vacuum coating gun according to claim 2 or 3, characterized in that: The spray gun head assembly (2-3) includes a nozzle (32) and a spray cap (33). The spray cap (33) is fixedly connected to the spray gun body (2-1) and the nozzle (32) is fixed in the front mounting cavity (223). Multiple liquid channels (23) are provided between the nozzle (32), the spray cap (33), and the diversion core (24).
6. The liquid chemical reaction device in a non-vacuum coating gun according to claim 5, characterized in that: The nozzle (32) and the spray cap (33) and the main core (24) of the diverter are respectively provided with a drug passage gap (333). The spray gun body (2-1) is provided with a plurality of drug inlet holes (334) corresponding to and communicating with the drug channel (23). The nozzle (32) is provided with a plurality of drug passage holes (335) corresponding to the drug inlet holes (334). The spray cap (33) and the main core (24) of the diverter are respectively provided with drug passage grooves (336) corresponding to the drug passage holes (335). The drug passage holes (335), drug passage grooves (336) and drug passage gaps (333) are connected to form the drug channel (23).
7. The liquid medicine reaction device in a non-vacuum coating gun according to claim 1 or 2, characterized in that: The rear positioning assembly (2-4) includes a rear positioning sleeve (42), a rear inner connecting positioning sleeve (43), and a rear outer connecting positioning sleeve (44). The rear positioning sleeve (42) is sealed to the spray gun body (2-1) and positions the diverter tail core (25). The rear outer connecting positioning sleeve (44) is fixedly connected to the spray gun body (2-1) and presses and positions the rear positioning sleeve (42) and the rear inner connecting positioning sleeve (43). The rear inner connecting positioning sleeve (43) and the rear outer connecting positioning sleeve (44) position the docking of the ion gun head assembly (1-1). The ion gun body assembly (1-2) forms a positioning connection with the spray gun body (2-1) and the rear positioning assembly (2-4) through the ion gun head assembly (1-1).
8. The chemical reaction device in a non-vacuum coating gun according to claim 6, characterized in that: The spray gun body (2-1) is provided with a positioning hole (215), and the nozzle (32) is provided with a positioning groove (321). A positioning bolt (216) is connected in the positioning hole (215), and the end of the positioning bolt (216) is correspondingly engaged in the positioning groove (321).