Spray structure

Abstract

This application relates to a spray structure, comprising: an outer pipe body, a water distribution plate, and a connecting pipe connected in sequence; a nozzle installed on the end face of the water distribution plate away from the outer pipe body, the nozzle communicating with the inner cavity of the water distribution plate and having an outwardly inclined spray surface; an inner pipe body, a movable plate, and a nozzle connected in sequence and internally communicating to form a first water flow channel, the inner pipe body being disposed within the outer pipe body and forming a second water flow channel between the two, the movable plate being disposed in at least one of the outer pipe body and the water distribution plate, and the nozzle being at least partially disposed in the connecting pipe; the inner pipe body is elastic, the movable plate being located on the path of water flowing through the second water flow channel to the inner cavity, and the inner pipe body being elastically deformable when the water flows through and impacts the movable plate, causing the nozzle to move in the connecting pipe and change the spray angle of the outward spray.

Description

Technical Field

[0001] This application relates to the technical field of waste gas treatment devices, specifically a spray structure. Background Technology

[0002] Silane is a flammable, explosive, and potentially environmentally hazardous inorganic compound widely used in thin-film deposition processes in industries such as semiconductors and photovoltaics. During production, unreacted silane forms "silane tail gas," which, if directly emitted, can cause safety accidents (such as spontaneous combustion or explosion upon contact with air) and pollute the environment. Therefore, unreacted silane is passed through a silane combustion tower for harmless treatment; its core function is to convert the silane tail gas into a safe and environmentally friendly substance.

[0003] In the operation of a silane combustion tower, the spray structure is one of the core auxiliary components, and its function revolves around three core objectives: safe temperature control, pollutant capture, and equipment protection. However, traditional spray structures struggle to simultaneously address the treatment needs of both the combustion tower's inner wall and the core reaction zone. They either primarily focus on atomization and cooling of the core reaction zone, leading to aging and corrosion of the combustion tower wall due to high temperatures and the adhesion of corrosive products, or the spray range is too dispersed, leaving the core reaction zone insufficiently treated. Furthermore, the fixed spray angle of traditional spray structures easily causes spray coverage failure under different operating conditions, making them unsuitable for efficient and uniform spraying under various conditions. Utility Model Content

[0004] Therefore, it is necessary to provide a spray structure that can improve upon the aforementioned problems.

[0005] A spray structure, comprising:

[0006] The outer pipe body, water distribution plate, and connecting pipe are connected in sequence;

[0007] A nozzle is installed on the end face of the water distribution plate away from the outer pipe body. The nozzle is connected to the inner cavity of the water distribution plate and has an outwardly inclined spray surface.

[0008] An inner pipe body, a movable disc, and a nozzle are sequentially connected and internally interconnected to form a first water flow channel. The inner pipe body is located within the outer pipe body, and a second water flow channel is formed between the two. The movable disc is located in at least one of the outer pipe body and the water distribution disc. The nozzle is at least partially located in the connecting pipe.

[0009] The inner tube is elastic, and the movable disc is located on the path of water flowing through the second water flow channel to the inner cavity. When the water flows through and impacts the movable disc, the inner tube can elastically deform, causing the nozzle to move in the connecting pipe and change the spray angle of the outward spray.

[0010] The aforementioned spray structure allows water to flow both into the inner pipe and the channel between the inner and outer pipes during spraying. This means the water can flow into both a first and a second water flow channel. Water from the first channel exits through the spray nozzle, while water from the second channel flows to the nozzle and exits through its spray surface. The water sprayed from the nozzle acts on the core reaction zone of the silane combustion tower. The nozzle's spray surface is angled outwards, ensuring precise targeting of the inner wall of the silane combustion tower, thus achieving the goal of treating both the inner wall and the core reaction zone. Furthermore, the water flowing into the second water flow channel impacts the movable disc before reaching the nozzle. The inner tube of the movable disc deforms according to the impact pressure and / or direction of the water flow. This deformation causes the nozzle connected to the movable disc to move slightly in the connecting pipe, thereby changing the spray angle of the nozzle's spray outlet. This allows for fine-tuning of the spray angle, adapting to the spraying needs under various working conditions and ensuring efficient and uniform spraying effects under multiple conditions.

[0011] In one embodiment, the outer contour shape of the nozzle is spherical.

[0012] In one embodiment, the spray structure further includes a rotating shaft connecting the connecting pipe and the nozzle, the nozzle being rotatable relative to the connecting pipe about the axis of the rotating shaft;

[0013] The axial direction of the rotating shaft is perpendicular to the extension direction of the connecting pipe.

[0014] In one embodiment, the connecting pipe includes a main body and an inner ring. The main body is connected to the water distribution plate, the inner ring is disposed in the main body, and the nozzle is movably disposed in the inner ring.

[0015] In one embodiment, the inner pipe, the outer pipe, the water distribution plate, the movable plate, and the connecting pipe are all coaxially arranged.

[0016] In one embodiment, there are multiple nozzles arranged around the connecting pipe.

[0017] In one embodiment, a portion of the nozzle is disposed within the connecting pipe, and a portion extends outside the connecting pipe.

[0018] In one embodiment, the spray structure further includes a water supply pipe, and the outer pipe body, the water distribution plate, the connecting pipe, the nozzle, the inner pipe body, the movable plate and the spray head form a set of spray components;

[0019] The spray assembly is connected to the water supply pipe through the inner pipe and the outer pipe.

[0020] In one embodiment, there are multiple sets of spraying components, and all sets of spraying components are installed on the water supply pipe.

[0021] In one embodiment, the spray structure further includes a flange connected to one end of the water supply pipe, and the flange is provided with a fixing position for fixing the spray structure to the outside. Attached Figure Description

[0022] Figure 1 This is a structural diagram of a spray structure provided in one embodiment of this application;

[0023] Figure 2 for Figure 1 A structural diagram of the spray assembly shown in the diagram;

[0024] Figure 3 for Figure 2 The diagram shows a partial structure of the spray assembly.

[0025] Explanation of reference numerals in the attached figures:

[0026] 1000, Spray structure; 100, Spray assembly; 10, Outer pipe; 20, Water distribution plate; 21, First end face; 22, Second end face; 30, Connecting pipe; 31, Main body; 32, Internal ring; 40, Nozzle; 41, Spray surface; 50, Inner pipe; 60, Movable disc; 70, Spray head; 71, Spray outlet; 80, Rotating shaft; 200, Water supply pipe; 300, Flange. Detailed Implementation

[0027] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0028] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0030] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0031] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0032] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0033] See Figures 1-3 One embodiment of this application provides a spray structure 1000, including an outer pipe body 10, a water distribution plate 20, and a connecting pipe 30, which are connected in sequence. Specifically, the water distribution plate 20 has a first end face 21 and a second end face 22 that are disposed opposite to each other. The outer pipe body 10 is connected to the first end face 21, and the connecting pipe 30 is connected to the second end face 22.

[0034] The spray structure 1000 also includes an inner tube 50, a movable disc 60, and a nozzle 70 connected in sequence. Specifically, the movable disc 60 has a third end face and a fourth end face that are opposite to each other. The inner tube 50 is connected to the third end face, and the nozzle 70 is connected to the fourth end face. Furthermore, the internal channels of the inner tube 50, the movable disc 60, and the nozzle 70 are interconnected and together form a first water flow channel. The inner tube 50 is disposed in the outer tube 10, and a second water flow channel is formed between the two. The movable disc 60 is disposed in at least one of the outer tube 10 and the water distribution disc 20, and the nozzle 70 is at least partially disposed in the connecting pipe 30.

[0035] The spray structure 1000 also includes a nozzle 40, which is mounted on the second end face 22 of the water distribution plate 20. The nozzle 40 communicates with the inner cavity of the water distribution plate 20 and has an outwardly inclined spray surface 41. It should be noted that the outwardly inclined spray surface 41 of the nozzle 40 means that the spray is inclined away from the connecting pipe 30. Water can flow through the second water flow channel into the inner cavity of the water distribution plate 20, enter the nozzle 40 from the inner cavity, and be sprayed out from the spray surface 41 of the nozzle 40.

[0036] The inner tube 50 is elastic, and the movable disc 60 is located on the path of water flowing into the inner cavity through the second water flow channel. When the water flows through and impacts the movable disc 60, the inner tube 50 can elastically deform, causing the nozzle 70 to move in the connecting pipe 30 and change the spray angle of the nozzle 70 spraying outward. The water can also be sprayed out through the nozzle 70 through the first water flow channel.

[0037] The spray structure 1000 provided in this embodiment allows water to flow into both the inner pipe 50 and the channel between the inner pipe 50 and the outer pipe 10 during spraying. Specifically, the water can flow into both a first and a second water flow channel. Water in the first channel is ejected from the spray nozzle 71 of the nozzle 70, while water in the second channel flows to the nozzle 40 and is ejected from its spray surface 41. The water ejected from the nozzle 70 acts on the core reaction zone of the silane combustion tower. The spray surface 41 of the nozzle 40 is angled outwards, ensuring precise spraying of water onto the inner wall of the silane combustion tower, thus achieving a balance between the treatment needs of the inner wall and the core reaction zone of the combustion tower. Furthermore, the water flowing into the second water flow channel impacts the movable disc 60 before flowing into the nozzle 40. The inner tube 50 of the movable disc 60 will adapt and deform according to the impact pressure and / or direction of the water flow. The deformation of the inner tube 50 will cause the nozzle 70 connected to the movable disc 60 to move slightly in the connecting pipe 30, thereby changing the spray angle of the spray nozzle 71 spraying outward, realizing the fine adjustment of the spray angle, thus adapting to the spray requirements under various working conditions, and ensuring efficient and uniform spraying effect under multiple working conditions.

[0038] It should be noted that the water mist sprayed through nozzle 40 is directed towards the inner wall of the silane combustion tower. This design allows the water mist to form a uniform liquid film on the tower wall. On one hand, this effectively reduces the tower wall temperature, preventing the high temperatures generated during silane combustion from causing aging or strength reduction in the tower material. On the other hand, the liquid film prevents silicon-containing corrosive products that may be generated during combustion from directly adhering to the wall surface, reducing the risk of corrosion. Simultaneously, it washes away any existing residues, discharging them with the waste liquid, thus protecting the tower and aiding in cleaning. More water is concentrated and atomized through nozzle 70, forming a combined primary and secondary spraying system that addresses the treatment needs of both the inner wall of the combustion tower and the core reaction zone.

[0039] It should be noted that the water pressure varies depending on the silane combustion conditions. For example, when the silane intake volume and concentration increase, the heat released by the combustion reaction increases sharply, requiring an increase in spray water pressure—by increasing the water mist density and coverage to enhance the cooling effect and simultaneously improve the capture efficiency of silicon-containing products (SiO). In this case, the water pressure is actively regulated. Furthermore, the high-temperature gas flow from silane combustion creates an airflow field, and changes in combustion intensity lead to changes in airflow velocity and direction. In this situation, the water pressure will experience slight passive fluctuations.

[0040] In some embodiments, the connecting pipe 30 includes a main body 31 and an inner ring 32. The main body 31 is connected to the second end face 22, and the inner ring 32 is disposed in the main body 31. The nozzle 70 is movably disposed in the inner ring 32. The inner ring 32 plays a certain role in limiting the position of the nozzle 70, that is, the inner ring 32 does not restrict the fine adjustment of the position of the nozzle 70, but it does restrict the large-scale shaking of the nozzle 70, thus ensuring the stability of the spray.

[0041] Optionally, some of the nozzles 70 are located in the main body 31, while others extend outside the main body 31, so as to ensure the installation effect of the nozzles 70 while ensuring the spraying effect of the water in the nozzles 70 spraying to the outside.

[0042] Continue reading Figure 3 The spray structure 1000 also includes a rotating shaft 80, which connects the inner ring 32 and the nozzle 70. The axis of the rotating shaft 80 is perpendicular to the extension direction of the connecting pipe 30, and the nozzle 70 can rotate relative to the inner ring 32 about the axis of the rotating shaft 80. That is, when the movable disc 60 is deformed by the impact of water flow on the inner pipe 50, the nozzle 70 can rotate relative to the inner ring 32 about the axis to finely adjust the spray angle.

[0043] Specifically, the outer contour of the nozzle 70 is spherical. The outer surface of the spherical nozzle 70 is a continuous curved surface without obvious sharp edges or fixed directional constraints. When the movable disc 60 is driven to move by the water flow pressure fluctuation, the spherical nozzle 70 can rotate flexibly and smoothly around the axis without any adjustment jamming due to structural limitations.

[0044] In some embodiments, the inner pipe 50, outer pipe 10, water distribution plate 20, movable plate 60, and connecting pipe 30 are all coaxially arranged. This ensures the stability of water flow and reduces pressure loss caused by water flow impact.

[0045] In some embodiments, see further reference. Figure 2 There are multiple nozzles 40 arranged around the connecting pipe 30. Specifically, the multiple nozzles 40 are distributed in a rectangular array with the connecting pipe 30 as the center. The multiple nozzles 40 work together to ensure the spraying effect on the inner wall of the silane combustion tower.

[0046] In some embodiments, see further reference. Figure 1 The spray structure 1000 also includes a water supply pipe 200, an outer pipe body 10, a water distribution plate 20, a connecting pipe 30, a nozzle 40, an inner pipe body 50, a movable plate 60, and a spray head 70 to form a spray assembly 100; the spray assembly 100 is connected to the water supply pipe 200 through the inner pipe body 50 and the outer pipe body 10. In this way, the water supply pipe 200 delivers spray water to the spray assembly 100. Water in the second water flow channel enters the water distribution plate 20, and then sprays outward through multiple circumferential nozzles 40 arranged in a ring array with the connecting pipe 30 as the center. The water mist sprays onto the hot inner wall surface of the silane combustion tower, forming a liquid film that provides cooling, corrosion prevention, and cleaning. The water flow in the second water flow channel also impacts the movable plate 60. The change in the impact force on the movable plate 60 causes the nozzle 70 to move around the rotating shaft 80 within the inner ring 32, achieving adaptive adjustment of the spray angle. The water inside the inner pipe 50 finally enters the nozzle 70 and is sprayed out from the nozzle 70 to provide concentrated atomized spraying to the core reaction zone. Thus, the fine adjustment of the spray angle when the water flow pressure fluctuates due to changes in the silane combustion conditions can balance the spray coverage effect under different conditions, forming a primary and secondary spray system that meets the treatment needs of the inner wall of the combustion tower and the core reaction zone.

[0047] Furthermore, there are multiple sets of spray assembly 100, all of which are installed on the water supply pipe 200. The combined effect of the multiple sets of spray assembly 100 further ensures the spraying effect.

[0048] It is conceivable that in other embodiments, the spray structure 1000 may also be provided with only one set of spray components 100, which is not limited here.

[0049] Continue reading Figure 1 The spray structure 1000 also includes a flange 300, which is connected to one end of the water supply pipe 200. The flange 300 is provided with a fixing position for fixing the spray structure 1000 to the outside. In this way, the spray structure 1000 can be installed inside the silane combustion tower through the fixing position to ensure the connection and fixation effect of the spray structure 1000.

[0050] The spray structure 1000 provided in this application has the following beneficial effects:

[0051] 1. The nozzle 40 is tilted and sprays water onto the combustion tower wall to form a liquid film, which effectively reduces the tower wall temperature and avoids tower aging and strength reduction caused by high temperature. It can also block the adhesion of silicon-containing corrosive products with the help of the liquid film, and at the same time wash away residual substances, so as to protect the tower and assist in cleaning. The spherical nozzle 70 sprays concentrated atomized water onto the core reaction area of ​​the combustion tower to ensure that the core reaction area is fully treated. This design takes into account the different needs of the tower wall and the core reaction area, and improves the overall treatment effect.

[0052] 2. The inner tube 50 and outer tube 10 achieve precise water flow diversion, allowing water flowing to the tower wall and the core reaction zone to have their own channels, resulting in highly targeted spraying. The cooperation between the built-in ring 32 and the rotating shaft 80 allows the spherical nozzle 70 to move. In addition, the movable disc 60 can drive the nozzle 70 to adaptively adjust the spray angle due to changes in the impact force of the water flow. This automatic fine adjustment can cope with the fluctuations in water flow pressure caused by changes in silane combustion conditions, effectively balancing the spray coverage effect under different conditions, ensuring efficient and uniform spraying under various conditions, and enhancing the practicality and stability of the device.

[0053] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0054] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A spray structure, characterized in that, include: The outer pipe body (10), the water distribution plate (20), and the connecting pipe (30) are connected in sequence; A nozzle (40) is installed on the end face of the water distribution plate (20) away from the outer pipe body (10). The nozzle (40) is connected to the inner cavity of the water distribution plate (20) and has an outwardly inclined spray surface (41). An inner pipe (50), a movable disc (60), and a nozzle (70) are connected in sequence and internally communicate with each other to form a first water flow channel. The inner pipe (50) is located in the outer pipe (10) and a second water flow channel is formed between the two. The movable disc (60) is located in at least one of the outer pipe (10) and the water distribution disc (20). The nozzle (70) is located in at least part of the connecting pipe (30). The inner tube (50) is elastic, and the movable disc (60) is located on the path of water flowing through the second water flow channel to the inner cavity. When the water flows through and impacts the movable disc (60), the inner tube (50) can elastically deform, so that the nozzle (70) moves in the connecting pipe (30) and changes the spray angle of the outward spray.

2. The spray structure according to claim 1, characterized in that, The nozzle (70) has a spherical outer contour.

3. The spray structure according to claim 1, characterized in that, The spray structure also includes a rotating shaft (80) that connects the connecting pipe (30) and the nozzle (70). The nozzle (70) is rotatable relative to the connecting pipe (30) about the axis of the rotating shaft (80). The axial direction of the rotating shaft (80) is perpendicular to the extension direction of the connecting pipe (30).

4. The spray structure according to any one of claims 1-3, characterized in that, The connecting pipe (30) includes a main body (31) and an inner ring (32). The main body (31) is connected to the water distribution plate (20). The inner ring (32) is disposed in the main body (31). The nozzle (70) is movably disposed in the inner ring (32).

5. The spray structure according to claim 1, characterized in that, The inner pipe (50), the outer pipe (10), the water distribution plate (20), the movable plate (60), and the connecting pipe (30) are all coaxially arranged.

6. The spray structure according to claim 1, characterized in that, There are multiple nozzles (40), and multiple nozzles (40) are arranged around the connecting pipe (30).

7. The spray structure according to claim 1, characterized in that, Part of the nozzle (70) is located in the connecting pipe (30), and part of it extends out of the connecting pipe (30).

8. The spray structure according to claim 1, characterized in that, The spray structure also includes a water supply pipe (200), and the outer pipe body (10), the water distribution plate (20), the connecting pipe (30), the nozzle (40), the inner pipe body (50), the movable plate (60) and the spray head (70) form a spray assembly (100); The spray assembly (100) is connected to the water supply pipe (200) through the inner pipe (50) and the outer pipe (10).

9. The spray structure according to claim 8, characterized in that, There are multiple sets of the spray assembly (100), and all sets of the spray assembly (100) are installed on the water supply pipe (200).

10. The spray structure according to claim 8, characterized in that, The spray structure also includes a flange (300), which is connected to one end of the water supply pipe (200), and the flange (300) is provided with a fixing position for fixing the spray structure to the outside.

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